<SEC-DOCUMENT>0000720500-17-000017.txt : 20170209
<SEC-HEADER>0000720500-17-000017.hdr.sgml : 20170209
<ACCEPTANCE-DATETIME>20170209160904
ACCESSION NUMBER:		0000720500-17-000017
CONFORMED SUBMISSION TYPE:	10-Q
PUBLIC DOCUMENT COUNT:		59
CONFORMED PERIOD OF REPORT:	20161231
FILED AS OF DATE:		20170209
DATE AS OF CHANGE:		20170209

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		10-Q
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		17587648

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-Q
<SEQUENCE>1
<FILENAME>asys123116-10q.htm
<DESCRIPTION>10-Q
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2017 Workiva -->
		<title>Document</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<div><a name="sB8BEABABCFE357428C28204DB23C622C"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:center;font-size:14pt;"><font style="font-family:inherit;font-size:14pt;font-weight:bold;">UNITED STATES</font></div><div style="line-height:120%;text-align:center;font-size:14pt;"><font style="font-family:inherit;font-size:14pt;font-weight:bold;">SECURITIES AND EXCHANGE COMMISSION</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Washington, D.C. 20549</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">____________________</font></div><div style="line-height:120%;padding-top:12px;text-align:center;font-size:18pt;"><font style="font-family:inherit;font-size:18pt;font-weight:bold;">FORM 10-Q</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Mark One)</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:12%;"></td><td style="width:88%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">[X]</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;For the quarterly period ended: </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">&#32;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">OR</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:12%;"></td><td style="width:88%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">[&#160;&#160;]</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the transition period from ________________ to ________________</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Commission File Number: </font><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">0-11412</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:18pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="1"></td></tr><tr><td style="width:100%;"></td></tr><tr><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:18pt;"><font style="font-family:inherit;font-size:18pt;font-weight:bold;">AMTECH SYSTEMS, INC.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Exact name of registrant as specified in its charter)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:63%;"></td><td style="width:37%;"></td></tr><tr><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Arizona</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">86-0411215</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(State or other jurisdiction of</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(I.R.S. Employer</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">incorporation or organization)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identification No.)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">131 South Clark Drive, Tempe, Arizona</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">85281</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Address of principal executive offices)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Zip Code)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Registrant&#8217;s telephone number, including area code: </font><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">480-967-5146</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by a check mark whether the registrant (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days. [X] Yes [&#160;&#160; ] No</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by check mark whether the registrant has submitted electronically and posted on its corporate Web site, if any, every Interactive Data File required to be submitted and posted pursuant to Rule 405 of Regulation S-T (&#167;232.405 of this chapter) during the preceding 12 months (or for such shorter period that the registrant was required to submit and post such files). [&#160;X&#160; ] Yes [&#160; &#160;] No</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, or a smaller reporting company. See the definitions of &#8220;large accelerated filer,&#8221; &#8220;accelerated filer&#8221; and &#8220;smaller reporting company&#8221; in Rule 12b-2 of the Exchange Act. (Check one):</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:59%;"></td><td style="width:41%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Large accelerated filer [&#160;&#160; ]</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accelerated filer [X]</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-accelerated filer [  ] (Do not check if a smaller reporting company)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Smaller Reporting Company [&#160;&#160; ]</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Indicate by check mark whether the registrant is a shell company (as defined in Rule 12b-2 of the Exchange Act). Yes [&#160;&#160; ] No [X]</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Shares of Common Stock outstanding as of January 30, 2017: 13,179,535</font></div><div><br></div><hr style="page-break-after:always"><div><a name="sE3453EABE8275CAFAA28AEEE5A8C89EE"></a></div><div><br></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">TABLE OF CONTENTS</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:90%;"></td><td style="width:10%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Page</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sB0EF7253294D53A9ADB2797A3269E953"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART I. FINANCIAL INFORMATION</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sC665F0CEDBFD517B94682E116FDA8365"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 1. Condensed Consolidated Financial Statements</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sF7BBD40A39165559B6EBE9A8B1A47179"><font style="font-family:inherit;font-size:10pt;">Condensed Consolidated Balance Sheets <br>December 31, 2016 (Unaudited) and September 30, 2016</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sF7BBD40A39165559B6EBE9A8B1A47179">3</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s4C9666DCD3AB51B0985E7EDDA983C404"><font style="font-family:inherit;font-size:10pt;">Condensed Consolidated Statements of Operations (Unaudited) <br>Three Months Ended December 31, 2016 and 2015</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s4C9666DCD3AB51B0985E7EDDA983C404">4</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sCFF25BD9A4C3586888516F52E18BC507"><font style="font-family:inherit;font-size:10pt;">Condensed Consolidated Statements of Comprehensive Loss (Unaudited) <br>Three Months Ended December 31, 2016 and 2015</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sCFF25BD9A4C3586888516F52E18BC507">5</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD867069B0BEC578CBD3CEFC6ABA9D9DD"><font style="font-family:inherit;font-size:10pt;">Condensed Consolidated Statements of Cash Flows (Unaudited) Three Months Ended December 31, 2016 and 2015</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD867069B0BEC578CBD3CEFC6ABA9D9DD">6</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD46D69559B9D5CEB8720E247DC41BBEC"><font style="font-family:inherit;font-size:10pt;">Notes to Condensed Consolidated Financial Statements (Unaudited)</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD46D69559B9D5CEB8720E247DC41BBEC">7</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sF125A46EF991527F85F40324FE20145C"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 2. Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s054CA3634CAD505F8B069439E6BEAD4E"><font style="font-family:inherit;font-size:10pt;">Cautionary Statement Regarding Forward-Looking Statements</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s054CA3634CAD505F8B069439E6BEAD4E">22</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s65BEE675AF8754D5ABFEB7BF7E297E4A"><font style="font-family:inherit;font-size:10pt;">Overview</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s65BEE675AF8754D5ABFEB7BF7E297E4A">23</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s0EA1F29D0C4B51A38F6094F4B6A7B05C"><font style="font-family:inherit;font-size:10pt;">Results of Operations</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s0EA1F29D0C4B51A38F6094F4B6A7B05C">23</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s571CF6C98FBD5E25942A4936ACD232D1"><font style="font-family:inherit;font-size:10pt;">Liquidity and Capital Resources</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s571CF6C98FBD5E25942A4936ACD232D1">26</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s553E57AD1AB058E895763E1C4474E841"><font style="font-family:inherit;font-size:10pt;">Off-Balance Sheet Arrangements</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s553E57AD1AB058E895763E1C4474E841">28</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s2AF115A1FA6E56EFA5D2539C50529D26"><font style="font-family:inherit;font-size:10pt;">Contractual Obligations</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s2AF115A1FA6E56EFA5D2539C50529D26">28</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s470C625E38415E58AA64442A84F25D46"><font style="font-family:inherit;font-size:10pt;">Critical Accounting Policies</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s470C625E38415E58AA64442A84F25D46">28</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s8E375087408D5740A0B8FCB3FAEB3A58"><font style="font-family:inherit;font-size:10pt;">Impact of Recently Issued Accounting Pronouncements</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s8E375087408D5740A0B8FCB3FAEB3A58">28</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sD826AC2192BF57FC81A3365D0F17C9B7"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 3. Quantitative and Qualitative Disclosures About Market Risk</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sD826AC2192BF57FC81A3365D0F17C9B7">29</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#s17A1AE1E8D0D591694F0B17BCD5899ED"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 4. Controls and Procedures</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s17A1AE1E8D0D591694F0B17BCD5899ED">30</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sD1DACA929C6D55229E0D01EB2CABA6CA"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART II. OTHER INFORMATION</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s01925B3FE4BC5CDC9DC90323AADB962F"><font style="font-family:inherit;font-size:10pt;">Item 1. Legal Proceedings</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s01925B3FE4BC5CDC9DC90323AADB962F">31</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s485F69F08D705BA1A04F357B49E86086"><font style="font-family:inherit;font-size:10pt;">Item 1A. Risk Factors</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s485F69F08D705BA1A04F357B49E86086">31</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s458656EBB39C55978C50AB44351C3606"><font style="font-family:inherit;font-size:10pt;">Item 2. Unregistered Sales of Equity Securities and Use of Proceeds</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s458656EBB39C55978C50AB44351C3606">31</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s3ADA4718D4355E33888D96FB1ACC598B"><font style="font-family:inherit;font-size:10pt;">Item 3. Defaults Upon Senior Securities</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s3ADA4718D4355E33888D96FB1ACC598B">31</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s157E59442A785D6EAA1D612CA0837E3C"><font style="font-family:inherit;font-size:10pt;">Item 4. Mine Safety Disclosures</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s157E59442A785D6EAA1D612CA0837E3C">31</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s8430F3117BFA5C048A6F06B700BD77F1"><font style="font-family:inherit;font-size:10pt;">Item 5. Other Information</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s8430F3117BFA5C048A6F06B700BD77F1">32</a></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s4C2D0F86B42D5721B525BCB158D9ACA7"><font style="font-family:inherit;font-size:10pt;">Item 6. Exhibits</font></a></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#s4C2D0F86B42D5721B525BCB158D9ACA7">33</a></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;font-weight:bold;" href="#sA5C1FFC6B06159A6913036F358D8FD5B"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">SIGNATURES</font></a></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sA5C1FFC6B06159A6913036F358D8FD5B">34</a></div></td></tr></table></div></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></div><hr style="page-break-after:always"><div><a name="sB0EF7253294D53A9ADB2797A3269E953"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;padding-bottom:8px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART I. FINANCIAL INFORMATION</font></div><div><a name="sC665F0CEDBFD517B94682E116FDA8365"></a></div><table cellpadding="0" cellspacing="0" style="padding-bottom:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Financial Statements</font></div></td></tr></table><div><a name="sF7BBD40A39165559B6EBE9A8B1A47179"></a></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Condensed Consolidated Balance Sheets</font></div><div style="line-height:120%;text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except share data)</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.80506822612085%;border-collapse:collapse;text-align:left;"><tr><td colspan="9"></td></tr><tr><td style="width:70%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">December&#160;31, <br>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September&#160;30, <br>2016</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Assets</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(Unaudited)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Current Assets</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Cash and cash equivalents</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">23,638</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">27,655</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Restricted cash</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">3,250</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">893</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Accounts receivable</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Trade (less allowance for doubtful accounts of $1,787 and $3,730 at December 31, 2016, and September 30, 2016, respectively)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">23,146</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">17,642</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Unbilled and other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">7,094</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">8,634</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Inventories</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">20,853</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">23,223</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Refundable income taxes</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">260</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">3,804</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">4,617</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Total current assets</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:top;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">81,785</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:top;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">82,924</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Property, Plant and Equipment - Net</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">15,290</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">15,960</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Deferred Income Taxes - Long Term</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Other Assets - Long Term</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">1,049</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">1,095</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Investments</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">2,890</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">3,032</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Intangible Assets - Net</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">3,915</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">4,100</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Goodwill</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">10,789</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">11,119</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total Assets</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">115,918</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">118,430</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Liabilities and Stockholders' Equity</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Current Liabilities</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Accounts payable</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">14,986</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">15,397</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Current maturities of long-term debt</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">1,010</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">1,134</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Accrued compensation and related taxes</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">6,232</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">5,710</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Accrued warranty expense</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">879</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">795</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">3,812</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">4,709</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Customer deposits</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">6,920</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">7,055</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Other accrued liabilities</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">1,577</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">2,164</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Income taxes payable</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">960</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">1,100</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:top;background-color:#cceeff;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Total current liabilities</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">36,376</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">38,064</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Long-term Debt</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">9,105</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">9,097</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Income Taxes Payable - Long Term</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">6,050</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">5,930</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:36px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total Liabilities</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">51,531</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">53,091</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Commitments and Contingencies</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Stockholders' Equity</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Preferred stock; 100,000,000 shares authorized; none issued</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Common stock; $0.01 par value; 100,000,000 shares authorized; <br>shares issued and outstanding: 13,179,535 and 13,179,355 at December 31, 2016, and September 30, 2016, respectively</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">132</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">132</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Additional paid-in capital</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">111,952</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">111,631</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Accumulated other comprehensive loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(9,721</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(8,876</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Retained deficit</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(35,883</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(35,830</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Total stockholders' equity</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">66,480</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">67,057</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Noncontrolling interest</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(2,093</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(1,718</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Total equity</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">64,387</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">65,339</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total Liabilities and Stockholders' Equity</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">115,918</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">118,430</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></div><hr style="page-break-after:always"><div><a name="s4C9666DCD3AB51B0985E7EDDA983C404"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Statements of Operations</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Unaudited)</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands, except per share data)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:73%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Revenues, net of returns and allowances</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,135</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">22,074</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Cost of sales</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,692</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">16,119</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross profit </font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,443</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,955</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Selling, general and administrative</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,996</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,596</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,288</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating loss</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,929</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Loss from equity method investment</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(143</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Interest expense and other income, net</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">81</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(202</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Loss before income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(242</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,148</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income tax provision</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">90</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">300</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Net loss</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(332</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,448</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Add: net loss attributable to noncontrolling interest</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">279</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">433</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(53</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,015</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Loss Per Share:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average shares outstanding</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average shares outstanding</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4</font></div></div><hr style="page-break-after:always"><div><a name="sCFF25BD9A4C3586888516F52E18BC507"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Statements of Comprehensive Loss</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Unaudited)</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:73%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(332</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,448</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Foreign currency translation adjustment</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(941</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(535</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Comprehensive loss</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,273</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,983</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Comprehensive loss attributable to noncontrolling interest</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">375</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">433</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Comprehensive loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(898</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,550</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5</font></div></div><hr style="page-break-after:always"><div><a name="sD867069B0BEC578CBD3CEFC6ABA9D9DD"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Condensed Consolidated Statements of Cash Flows</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(Unaudited)</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(in thousands)</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:71%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Operating Activities</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Net loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(332</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(4,448</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Adjustments to reconcile net loss to net </font></div><div style="text-align:left;padding-left:48px;text-indent:-24px;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">cash provided by (used in) operating activities:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Depreciation and amortization</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">654</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">783</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Write-down of inventory</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">33</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">39</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Capitalized interest</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">190</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Deferred income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">31</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">9</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Non-cash share based compensation expense</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">319</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">342</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Loss from equity method investment</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">143</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Reversal of allowance for doubtful accounts</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(1,178</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(158</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Changes in operating assets and liabilities:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Restricted cash</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(2,425</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(220</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Accounts receivable</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(3,600</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(309</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Inventories</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,621</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,412</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Accrued income taxes</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">239</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">212</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Other assets</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">725</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(167</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Accounts payable</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">78</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(4,861</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Accrued liabilities and customer deposits</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">584</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(3,354</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:52px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Deferred profit</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(619</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(50</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Net cash used in operating activities</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(3,537</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(10,753</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Investing Activities</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Purchases of property, plant and equipment</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(86</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(108</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Proceeds from sale of property, plant and equipment</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Proceeds from partial sale of subsidiary</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">7,012</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Net cash (used in) provided by investing activities</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(85</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">6,904</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Financing Activities</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Proceeds from the exercise of stock options</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Payments on long-term debt</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(160</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(180</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Borrowings on long-term debt</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">21</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">830</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Net cash (used in) provided by financing activities</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(138</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">650</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Effect of Exchange Rate Changes on Cash</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(257</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(36</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Net Decrease in Cash and Cash Equivalents</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(4,017</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(3,235</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Cash and Cash Equivalents, Beginning of Period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">27,655</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">25,852</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Cash and Cash Equivalents, End of Period</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">23,638</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">22,617</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Supplemental Cash Flow Information:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Cash paid for interest</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">66</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">89</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Income tax refunds</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">262</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Income tax payments</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">67</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">The accompanying notes are an integral part of these condensed consolidated financial statements.</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6</font></div></div><hr style="page-break-after:always"><div><a name="sD46D69559B9D5CEB8720E247DC41BBEC"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">AMTECH SYSTEMS, INC. AND SUBSIDIARIES</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">NOTES TO CONDENSED CONSOLIDATED FINANCIAL STATEMENTS</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">THREE MONTHS ENDED DECEMBER 31, 2016 AND 2015</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(UNAUDITED)</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><a name="s7ADE711FFA4B5AEABDC1A7E0B95C2FD4"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Summary of Significant Accounting Policies</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nature of Operations and Basis of Presentation </font><font style="font-family:inherit;font-size:10pt;">-&#160;Amtech Systems, Inc. (the &#8220;Company&#8221;, &#8220;Amtech&#8221;, &#8220;we&#8221;, &#8220;us&#8221; or &#8220;our&#8221;) is a global manufacturer of capital equipment, atomic layer deposition (&#8220;ALD&#8221;) including thermal processing, silicon wafer handling automation, and related consumables used in fabricating solar cells, LED and semiconductor devices. The Company sells these products to solar cell and semiconductor manufacturers worldwide, particularly in Asia, the United States and Europe. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &#8220;SEC&#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K, as amended, for the fiscal year ended September&#160;30, 2016.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The consolidated results of operations for the three months ended December 31, 2016, are not necessarily indicative of the results to be expected for the full fiscal year.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Principles of Consolidation &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&#8217;s equity. The equity method of accounting is used for investments over which the Company has a significant influence but not a controlling financial interest. All material intercompany accounts and transactions have been eliminated in consolidation.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Use of Estimates</font><font style="font-family:inherit;font-size:10pt;">&#32;- The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Revenue Recognition</font><font style="font-family:inherit;font-size:10pt;">&#32;- We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer&#8217;s defined specifications have been met with at least </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Where there have been installation and acceptance of more than </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;similarly configured items of equipment, but installation and acceptance have not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in&#160;one&#160;period will be lower and the gross margin reported in a subsequent period will improve.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For products where the customer&#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Deferred Profit</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Revenue deferred pursuant to the Company&#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:72%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred revenues</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,164</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,029</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred costs</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,352</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,320</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:30px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,812</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,709</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Cash Equivalents &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;The Company considers all highly liquid investments with a maturity of three months or less when purchased to be cash equivalents. Cash and cash equivalents consist of amounts invested in U.S.&#160;money market funds and various U.S.&#160;and foreign bank operating and time deposit accounts.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Restricted Cash</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Restricted cash of </font><font style="font-family:inherit;font-size:10pt;">$3.3 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$0.9 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, and September 30, 2016, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment. Restricted cash as of </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">September&#160;30, 2016</font><font style="font-family:inherit;font-size:10pt;">&#32;includes </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million relating the Company's proportional responsibility, assumed in connection with the BTU International Inc. (&#8220;BTU&#8221;) acquisition, for clean-up costs at a Superfund site. Refer to Note 8 to Condensed Consolidated Financial Statements, Commitments and Contingencies, for more detail regarding our proportional liability related to the Superfund site.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable and Allowance for Doubtful Accounts &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable - Unbilled and Other</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Unbilled and other accounts receivable consist mainly of  a contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. Accounts receivable also includes Value-added tax  (&#8220;VAT&#8221;) receivable.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Concentrations of Credit Risk &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company&#8217;s customers consist of solar cell and semiconductor manufacturers worldwide, as well as the lapping and polishing marketplace. Credit risk is managed by performing ongoing credit evaluations of our customers&#8217; financial condition, by requiring significant deposits where appropriate, and by </font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Approximately </font><font style="font-family:inherit;font-size:10pt;">65%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the Company's total cash balances are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&#8217;s cash is maintained with financial institutions with reputable credit ratings in The Netherlands, France and China.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;">&#32;customer individually represented </font><font style="font-family:inherit;font-size:10pt;">12%</font><font style="font-family:inherit;font-size:10pt;">&#32;of accounts receivable.  As of September 30, 2016, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;">&#32;customer individually represented </font><font style="font-family:inherit;font-size:10pt;">11%</font><font style="font-family:inherit;font-size:10pt;">&#32;of accounts receivable.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Refer to Note 6 to Condensed Consolidated Financial Statements, Major Customers and Foreign Sales, for information regarding revenue and assets in other countries subject to fluctuation in foreign currency exchange rates.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Inventories</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; We value our inventory at the lower of cost or net realizable value.  Costs for approximately </font><font style="font-family:inherit;font-size:10pt;">50%</font><font style="font-family:inherit;font-size:10pt;">&#32;of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis. The components of inventories are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:72%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchased parts and raw materials</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,148</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,435</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Work-in-process</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,832</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,044</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Finished goods</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,873</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,744</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,853</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">23,223</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Property, Plant and Equipment</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation and amortization is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings from </font><font style="font-family:inherit;font-size:10pt;">20-30</font><font style="font-family:inherit;font-size:10pt;">&#32;years.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of property, plant and equipment:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:72%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Land, building and leasehold improvements</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17,799</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,255</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Equipment and machinery</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,749</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,056</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Furniture and fixtures</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,199</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,426</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31,747</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32,737</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accumulated depreciation and amortization</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(16,457</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(16,777</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,290</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,960</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Goodwill </font><font style="font-family:inherit;font-size:10pt;">&#8211; Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in goodwill:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td style="width:49%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Semiconductor</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Polishing</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,597</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,388</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,269</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,269</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at September 30, 2016</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,328</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,119</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net foreign exchange differences</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at December 31, 2016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,998</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,789</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,177</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,968</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,179</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,179</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at December 31, 2016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,998</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,789</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Intangibles</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Intangible assets are capitalized and amortized on a straight-line basis over their useful lives if the life is determinable. If the life is not determinable, amortization is not recorded.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of intangibles:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="22"></td></tr><tr><td style="width:22%;"></td><td style="width:13%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td><td style="width:4%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Useful Life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">December&#160;31, 2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September&#160;30, 2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Customer lists</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6-10 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,387</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,172</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,215</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,432</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,164</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,268</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Technology</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5-10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,014</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,576</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,438</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,214</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,678</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,536</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Trade names</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10-15 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,441</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,241</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,455</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(219</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,236</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2-10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">260</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(239</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">277</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(217</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">60</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,102</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,187</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,915</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,378</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,278</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,100</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-lived assets </font><font style="font-family:inherit;font-size:10pt;">&#8211;</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">&#32;</font><font style="font-family:inherit;font-size:10pt;">Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Warranty &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;A limited warranty is provided free of charge, generally for periods of </font><font style="font-family:inherit;font-size:10pt;">12</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">24</font><font style="font-family:inherit;font-size:10pt;">&#32;months, for all purchases of the Company&#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. Estimates are based on past experience and take into account the nature of the products under warranty. The following is a summary of activity in accrued warranty expense:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:73%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning balance</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">795</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">793</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Additions for warranties issued during the period</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">383</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">146</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Reductions in the liability for payments made under the warranty</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(109</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Changes related to pre-existing warranties</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(245</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(54</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Currency translation adjustment</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending balance</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">879</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">766</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stock-Based Compensation -</font><font style="font-family:inherit;font-size:10pt;">&#32;The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9"></td></tr><tr><td style="width:68%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:13%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:13%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(319</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(342</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">48</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(284</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(294</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock options issued under the terms of the Company's option plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the NASDAQ the trading day prior to the date of the option grant and expire no later than </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">10 years</font><font style="font-family:inherit;font-size:10pt;">&#32;from the date of grant, with the most recent option grant expiring in 2026. Options issued by the Company generally vest over </font><font style="font-family:inherit;font-size:10pt;">six months</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">four</font><font style="font-family:inherit;font-size:10pt;">&#32;years, subject to the Company's board of directors' (the &#8220;Board&#8221;) discretion pursuant to the Company's share-based compensation plans.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16"></td></tr><tr><td style="width:49%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,841,567</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627,477</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.11</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100,000</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.99</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">344,075</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.25</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.80</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(55,446</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13.34</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(33,642</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.90</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,885,941</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.84</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,937,910</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.34</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,375,174</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.26</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,189,855</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.21</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2.88</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.03</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"><tr><td colspan="4"></td></tr><tr><td style="width:65%;"></td><td style="width:17%;"></td><td style="width:1%;"></td><td style="width:17%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company awards restricted shares under its existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two to four year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &#8220;service period&#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted stock transactions and awards outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="14"></td></tr><tr><td style="width:49%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning Outstanding</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,540</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Released</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(13,540</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending Outstanding</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value of Financial Instruments </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board (&#8220;FASB&#8221;) Accounting Standards Codification (&#8220;ASC&#8221;), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 2 - Valuation is based upon quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.&#160;<br>        <br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Cash, Cash Equivalents and Restricted Cash</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets are money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC) and foreign bank operating and time deposit accounts. The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Receivables and Payables</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments. If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Debt </font><font style="font-family:inherit;font-size:10pt;">&#8211;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;">&#32;</font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Pensions </font><font style="font-family:inherit;font-size:10pt;">&#8211; The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches certain employee funds on a discretionary basis while certain subsidiaries require a minimum match to maintain their safe harbor status.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shipping expense</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$0.4 million</font><font style="font-family:inherit;font-size:10pt;">&#32;for each of the three months ended </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">2015</font><font style="font-family:inherit;font-size:10pt;">, are included in selling, general and administrative expenses. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Research, development and engineering expense</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. The table below shows gross research and development expenses and grants earned:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9"></td></tr><tr><td style="width:70%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br>2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,830</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,615</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Grants earned</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(203</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(327</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;&#160;Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,288</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In November 2016, the FASB issued Accounting Standards Update ("ASU") No. 2016-18,&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;">Statement of Cash Flows: Restricted Cash</font><font style="font-family:inherit;font-size:10pt;">. The amendments address diversity in practice that exists in the classification and presentation of changes in restricted cash and require that a statement of cash flows explain the change during the period in the total of cash, cash equivalents, and amounts generally described as restricted cash or restricted cash equivalents. This ASU is effective retrospectively for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In October 2016, the FASB issued ASU No. 2016-16,&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;">Income Taxes: Intra-Entity Transfers of Assets Other than Inventory</font><font style="font-family:inherit;font-size:10pt;">. The amendments in this ASU remove the prohibition against the recognition of current and deferred income tax effects of intra-entity transfers of assets other than inventory until the asset has been sold to an outside party. The ASU is effective for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In August 2016, the FASB issued ASU 2016-15, &#8220;Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments&#8221;. These amendments provide cash flow statement classification guidance for: 1. Debt Prepayment or Debt Extinguishment Costs; 2. Settlement of Zero-Coupon Debt Instruments or Other Debt Instruments with Coupon Interest Rates That Are Insignificant in Relation to the Effective Interest Rate of the Borrowing; 3. Contingent Consideration Payments Made after a Business Combination; 4. Proceeds from the Settlement of Insurance Claims; 5. Proceeds from the Settlement of Corporate-Owned Life Insurance Policies, including Bank-Owned Life Insurance Policies; 6. Distributions Received from Equity Method Investees; 7. Beneficial Interests in Securitization Transactions; and 8. Separately Identifiable Cash Flows and Application of the Predominance Principle. The amendments in this ASU are effective for public business entities for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. Early application is permitted, including adoption in an interim period. The Company is currently in the process of evaluating the impact of the adoption on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2016, the FASB issued ASU 2016-13, &#8220;Financial Instruments - Credit Losses: Measurement of Credit Losses on Financial Instruments&#8221;. ASU 2016-13 amends the impairment model to utilize an expected loss methodology in place of the currently used incurred loss methodology, which will result in the more timely recognition of losses. The new standard applies to financial assets measured at amortized cost basis, including receivables that result from revenue transactions and held-to-maturity debt securities.&#160;The new guidance will be effective for the Company starting in the first quarter of fiscal 2021. Early adoption is permitted starting in the first quarter of fiscal 2020. The Company is in the process of determining the effects the adoption will have on its consolidated financial&#160;statements as well as whether to adopt the new guidance early.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May 2014, the FASB issued ASU No. 2014-09 regarding ASC Topic 606, &#8220;Revenue from Contracts with Customers.&#8221; ASU 2014-09 provides principles for recognizing revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for those goods or services. In August 2015, the FASB issued ASU 2015-14 to defer the effective date by one year with early adoption permitted as of the original effective date. ASU 2014-09 will be effective for Amtech&#8217;s fiscal year beginning October 1, 2018 unless we elect the earlier date of October 1, 2017. In addition, the FASB issued ASU 2016-08, ASU 2016-10, ASU 2016-12 and ASU 2016-20 in March 2016, April 2016, May 2016 and December 2016, respectively, to help provide interpretive clarifications on the new guidance in ASC Topic 606. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In March 2016, the FASB issued ASU No. 2016-09,&#160;Compensation - &#8220;Stock Compensation (Topic 718)&#8221;. ASU 2016-09 identifies areas for simplification involving several aspects of accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, an option to recognize gross stock compensation expense with actual forfeitures recognized as they occur, as well as certain classifications on the statement of cash flows. The amendments in this ASU are effective for annual periods beginning after December 15, 2016 and for the interim periods therein. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In March 2016, the FASB issued ASU 2016-07,&#160;&#8220;Equity Method and Joint Ventures&#8221;&#160;affecting all entities that have an investment that becomes qualified for the equity method of accounting as a result of an increase in the level of ownership or degree of influence. ASU 2016-07 is effective for the Company beginning on&#160;</font><font style="font-family:inherit;font-size:10pt;color:#222222;">January 1, 2017</font><font style="font-family:inherit;font-size:10pt;">, early adoption is permitted.  The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">16</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In February 2016, the FASB issued ASU No. 2016-02, &#8220;Leases (Topic 842)&#8221;, which requires companies to generally recognize on the balance sheet operating and financing lease liabilities and corresponding right-of-use-assets. ASU 2016-02 also requires improved disclosures to help users of financial statements better understand the amount, timing and uncertainty of cash flows arising from leases. This ASU is effective for fiscal years beginning after December 15, 2018 and early application is permitted. The Company is currently in the process of evaluating the impact of this standard on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2016, the FASB issued ASU No. 2016-01, &#8220;Financial Instruments - Overall (Subtopic 825-10), Recognition and Measurement of Financial Assets and Financial Liabilities&#8221;, which addresses certain aspects of recognition, measurement, presentation, and disclosure of financial instruments. This ASU is effective for fiscal years beginning after December 15, 2017 and early adoption is not permitted. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In November 2015, the FASB issued ASU No. 2015-17, &#8220;Balance Sheet Classification of Deferred Taxes&#8221;. This ASU requires entities to classify deferred tax liabilities and assets as noncurrent in a classified statement of financial position. This ASU is effective for fiscal years beginning after December 15, 2016, and interim periods within those annual periods. Early adoption is permitted for all entities as of the beginning of an interim or annual reporting period. The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued ASU No. 2015-16,&#160;&#8220;Business Combinations (Topic 805): Simplifying the Accounting for Measurement-Period Adjustments&#8221;, which simplifies the accounting for measurement-period adjustments to provisional amounts recognized in a business combination. ASU 2015-16 is effective for fiscal years (and interim reporting periods within those years) beginning after December 15, 2016. The provisions of ASU 2015-16 are not expected to have a material effect on the Company's financial condition, results of operations, or cash flows.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued ASU No. 2015-11, &#8220;Simplifying the Measurement of Inventory&#8221;. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. The Company does not expect adoption of this ASU to have a material impact on the Company's consolidated financial position and results of operations.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s1369DA7DC65F516DA474F717650923AB"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Income Taxes</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The quarterly income tax provision is calculated using an estimated annual effective tax rate, based upon expected annual income, permanent items, statutory rates and planned tax strategies in the various jurisdictions in which the Company operates. However, losses in certain jurisdictions and discrete items are treated separately. </font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred tax assets and liabilities reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The Company records a valuation allowance if, based on the weight of available evidence, it is more likely than not that some portion or all of a deferred tax asset will not be realized. Our expectations regarding realization of our deferred tax assets is based upon the weight of all available evidence, including such factors as our recent earnings history, expected future taxable income and available tax planning strategies. The Company maintains a valuation allowance with respect to certain state, federal and foreign deferred tax assets that may not be recovered.  We have established valuation allowances on substantially all net deferred tax assets, after considering all of the available objective evidence, both positive and negative, historical and prospective, with greater weight given to historical evidence, and determined it is not more likely than not that these assets will be realized</font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies all of our uncertain tax positions as non-current income taxes payable.  At December 31, 2016 and September 30, 2016, the total amount of unrecognized tax benefits was approximately </font><font style="font-family:inherit;font-size:10pt;">$3.9</font><font style="font-family:inherit;font-size:10pt;">&#32;million. If recognized, these amounts would favorably impact the effective tax rate.  Income taxes payable long-term primarily includes, among other items, withholding taxes that are not due until the related intercompany service fees are paid.</font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies interest and penalties related to unrecognized tax benefits as income tax expense. As of December 31, 2016 and September 30, 2016, the Company had an accrual for potential interest and penalties of approximately </font><font style="font-family:inherit;font-size:10pt;">$2.4</font><font style="font-family:inherit;font-size:10pt;">&#32;million and </font><font style="font-family:inherit;font-size:10pt;">$2.3</font><font style="font-family:inherit;font-size:10pt;">&#32;million, respectively, classified with non-current income taxes payable.   </font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company and one or more of its subsidiaries file income tax returns in The Netherlands, France, China, Singapore, Malaysia, Hong Kong, and Germany, as well as the U.S. and various states in the U.S. The Company and its subsidiaries have a number of open tax years dictated by statute in each of their respective taxing jurisdictions, but generally it is from </font><font style="font-family:inherit;font-size:10pt;">3</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">5</font><font style="font-family:inherit;font-size:10pt;">&#32;years in the jurisdictions in which the Company files tax returns.</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17</font></div></div><hr style="page-break-after:always"><div><a name="s868AEC4726AB5016A0BD95C96A8FBAE8"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Earnings Per Share</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic earnings per share ("EPS") is computed by dividing net income (loss) by the weighted average number of common shares outstanding for the period. Diluted EPS is computed similarly to basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued. In the case of a net loss, diluted earnings per share is calculated in the same manner as basic EPS.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,886,000</font><font style="font-family:inherit;font-size:10pt;">&#32;shares are excluded from the diluted EPS calculations because they are anti-dilutive. For the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2015</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,938,000</font><font style="font-family:inherit;font-size:10pt;">&#32;shares were excluded from the diluted EPS calculations because they were anti-dilutive.  </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table outlines basic and diluted EPS:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:73%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basic Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(53</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,015</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Diluted Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,015</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted shares</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br></font></div><div><a name="s2DC138B850995CC49CE3B39C05E43C81"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">4.  Stockholders' Equity</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shareholder Rights Plan</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the &#8220;Rights Agent&#8221;), entered into an Amended and Restated Rights Agreement (the &#8220;Restated Rights Agreement&#8221;) which amended and restated the terms governing the previously authorized shareholder rights (each a &#8220;Right&#8221;) to purchase fractional shares of the Company&#8217;s Series A Participating Preferred Stock (&#8220;Series A Preferred&#8221;) currently attached to each of the Company&#8217;s outstanding Common Shares, par value  </font><font style="font-family:inherit;font-size:10pt;">$0.01</font><font style="font-family:inherit;font-size:10pt;">&#32;&#32;per share (&#8220;Common Shares&#8221;). As amended, each Right entitles the registered holder to purchase from the Company </font><font style="font-family:inherit;font-size:10pt;">one one-thousandth</font><font style="font-family:inherit;font-size:10pt;">&#32;of a share of Series A Preferred at an exercise price of </font><font style="font-family:inherit;font-size:10pt;">$51.60</font><font style="font-family:inherit;font-size:10pt;">&#32;(the &#8220;Exercise Price&#8221;), subject to adjustment. The Rights will expire </font><font style="font-family:inherit;font-size:10pt;">10</font><font style="font-family:inherit;font-size:10pt;">&#32;years after issuance and will be exercisable if (a) a person or group becomes the beneficial owner of </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;">&#32;or more of the Company&#8217;s common stock or (b) a person or group commences a tender or exchange offer that would result in the offeror beneficially owning </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;">&#32;or more of the Company&#8217;s common stock.&#160; The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On October 1, 2015, the Company entered into a Second Amended and Restated Rights Agreement (the &#8220;Second Restated Rights Agreement&#8221;) with the Rights Agent, which expands the definition of Exempted Person to include any person that the Board, in its sole and absolute discretion, exempts from becoming an Acquiring Person under the Second Restated Rights Agreement. A Person deemed an Exempted Person under the Second Restated Rights Agreement cannot trigger any of the Rights provided therein so long as such Exempted Person complies with the terms and conditions by which the Board approved such exemption from the Restated Rights Agreement.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As previously disclosed, on October 8, 2015, the Company entered into a Letter Agreement (the &#8220;Agreement&#8221;) by and between the Company and certain shareholders of the Company who jointly file (the &#8220;Joint Filers&#8221;) under Section 13 of the Securities Exchange Act of 1934, as amended (the &#8220;Exchange Act&#8221;). One of the Joint Filers became a member of our Board after the Agreement was approved by the Board.&#160;The Agreement permits the Joint Filers, pursuant to the Second Restated Rights Agreement, to individually acquire shares of common stock of the Company that would, in the aggregate, bring the Joint Filers&#8217; collective </font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">ownership to no more than </font><font style="font-family:inherit;font-size:10pt;">19.9%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the Company&#8217;s issued and outstanding common stock at any time. In the event the Joint Filers&#8217; collective ownership at any time exceeds </font><font style="font-family:inherit;font-size:10pt;">19.9%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the Company&#8217;s issued and outstanding shares of common stock, the Company is entitled to specific performance and all other remedies entitled to the Company at law or equity, among others. The Company&#8217;s board of directors approved the Agreement and transactions contemplated thereunder, and has the sole authority to terminate the Agreement at any time.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="sE1F510BF877A5810BED6140EF06A8E6A"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Business Segment Information</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company&#8217;s </font><font style="font-family:inherit;font-size:10pt;">three</font><font style="font-family:inherit;font-size:10pt;">&#32;reportable segments are as follows:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Solar - </font><font style="font-family:inherit;font-size:10pt;">The Company is a leading supplier of thermal processing systems, ALD, related automation, parts and services, to the solar/photovoltaic industry and also offers PECVD (plasma-enhanced chemical vapor deposition) equipment to the global solar market. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Semiconductor - </font><font style="font-family:inherit;font-size:10pt;">In the Company&#8217;s Semiconductor segment, it designs, manufactures, sells and services thermal processing equipment and related controls and parts for use by leading semiconductor manufacturers, and in electronics, automotive and other industries. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Polishing - </font><font style="font-family:inherit;font-size:10pt;">In the Company's Polishing segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Information concerning our business segments is as follows:</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.6328125%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:69%;"></td><td style="width:1%;"></td><td style="width:13%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:13%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net Revenues:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,424</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,543</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,703</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,700</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,008</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,831</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,135</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">22,074</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating income (loss):</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,023</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,361</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(160</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">464</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">169</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related </font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,982</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(2,074</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,929</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*  The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than </font><font style="font-family:inherit;font-size:10pt;">25%</font><font style="font-family:inherit;font-size:10pt;">&#32;of the Solar segment revenue.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">19</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8"></td></tr><tr><td style="width:70%;"></td><td style="width:1%;"></td><td style="width:12%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:13%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable Assets:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">43,334</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">42,962</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">51,898</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">51,985</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,906</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,819</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,780</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,664</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">115,918</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">118,430</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="sCFE4C474C78A570DBD5F856844B87F36"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">6.  Major Customers and Foreign Sales</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, there were no customers who individually represented greater than </font><font style="font-family:inherit;font-size:10pt;">10%</font><font style="font-family:inherit;font-size:10pt;">&#32;of net revenues.  During the three months ended December 31, 2015, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;">&#32;customer represented </font><font style="font-family:inherit;font-size:10pt;">14%</font><font style="font-family:inherit;font-size:10pt;">&#32;of net revenues. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company has operations in The Netherlands, United States, France, and China. Our net revenues were to customers in the following geographic regions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="6"></td></tr><tr><td style="width:66%;"></td><td style="width:15%;"></td><td style="width:1%;"></td><td style="width:2%;"></td><td style="width:15%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">United States</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">28</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total North America</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">20</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">China</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Malaysia</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taiwan</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Asia</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">61</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">54</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Germany</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Europe</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s37F8E373FA665C45B13DC3F4E9B7039C"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">7.  Long-term Debt</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company holds debt in the form of a mortgage note secured by its real property in Billerica, Massachusetts that has a remaining balance of </font><font style="font-family:inherit;font-size:10pt;">$6.5</font><font style="font-family:inherit;font-size:10pt;">&#32;million as of December 31, 2016. The debt has an interest rate of </font><font style="font-family:inherit;font-size:10pt;">4.11%</font><font style="font-family:inherit;font-size:10pt;">&#32;through September 26, 2021, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus </font><font style="font-family:inherit;font-size:10pt;">two hundred forty</font><font style="font-family:inherit;font-size:10pt;">&#32;basis points. The maturity date of the debt is September 26, 2023. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SoLayTec B.V. ("SoLayTec"), a division of the Company's solar segment, holds long-term debt with a remaining balance of </font><font style="font-family:inherit;font-size:10pt;">$3.6 million</font><font style="font-family:inherit;font-size:10pt;">. During the quarter ended December 31, 2016, SoLayTec borrowed less than </font><font style="font-family:inherit;font-size:10pt;">$0.1 million</font><font style="font-family:inherit;font-size:10pt;">. The debt has interest rates ranging from </font><font style="font-family:inherit;font-size:10pt;">4.5%</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">12.5%</font><font style="font-family:inherit;font-size:10pt;">&#32;and maturity dates ranging from fiscal 2017 to fiscal 2021. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s24A10A71845A500AB161F5620ED4F835"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">8.  Commitments and Contingencies</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Purchase Obligations</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211; As of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, the Company had purchase obligations in the amount of </font><font style="font-family:inherit;font-size:10pt;">$14.2 million</font><font style="font-family:inherit;font-size:10pt;">&#32;compared to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$11.3 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of September 30, 2016. These purchase obligations consist of outstanding purchase orders for goods and services. While the amount represents purchase agreements, the actual amounts to be paid may be less if any agreements are renegotiated, canceled or terminated.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Development projects</font><font style="font-family:inherit;font-size:10pt;">&#32;&#8211;  In fiscal 2014, our wholly owned subsidiary, Tempress Systems, Inc. ("Tempress"), entered into an agreement with the Energy Research Centre of the Netherlands ("ECN"), a Netherlands government sponsored research institute, for a joint research and development project.  Under the terms of the agreement, Tempress sold an ion implanter ("Equipment") to ECN for </font><font style="font-family:inherit;font-size:10pt;">$1.4</font><font style="font-family:inherit;font-size:10pt;">&#32;million.  Both Tempress and ECN are performing research and development projects utilizing the Equipment at the ECN facilities. Each party to the agreement will have </font><font style="font-family:inherit;font-size:10pt;">100%</font><font style="font-family:inherit;font-size:10pt;">&#32;rights to the results of the projects developed separately by the individual parties.  Any results co-developed will be jointly owned.  Over the </font><font style="font-family:inherit;font-size:10pt;">four</font><font style="font-family:inherit;font-size:10pt;">-year period of the agreement, Tempress is required to contribute </font><font style="font-family:inherit;font-size:10pt;">$1.4 million</font><font style="font-family:inherit;font-size:10pt;">&#32;&#32;to the project in the form of  installation of the equipment, acceptance testing, project meeting attendance, training, parts, and service, including keeping the equipment in good condition and repair for the first </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;years of the agreement. As of December 31, 2016, Tempress has contributed all of the required </font><font style="font-family:inherit;font-size:10pt;">$1.4</font><font style="font-family:inherit;font-size:10pt;">&#32;million to the project.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">EPA Accrual</font><font style="font-family:inherit;font-size:10pt;">&#32;- As a result of the BTU acquisition, the Company assumed BTU&#8217;s proportional responsibility for clean-up costs at a Superfund site.  As an equipment manufacturer, BTU generated and disposed of small quantities of solid waste that were considered hazardous under Environment Protection Agency (&#8220;EPA&#8221;) regulations. Because BTU historically used a waste disposal firm that disposed of the solid waste at a site that the EPA designated as a Superfund site, BTU was named by the EPA as one of the entities responsible for a portion of the expected clean-up costs. Based on the Company's proportional responsibility, as negotiated with and agreed to by the EPA, the Company's liability related to this matter is less than </font><font style="font-family:inherit;font-size:10pt;">$0.1</font><font style="font-family:inherit;font-size:10pt;">&#32;million, which is included in Other Accrued Liabilities on the Condensed Consolidated Balance Sheets as of December 31, 2016 and September 30, 2016.  In accordance with the agreement, the Company established a letter of credit for </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million to the benefit of the EPA for potential cash payments as settlements for the Company&#8217;s proportional liability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Legal Proceedings &#8211;</font><font style="font-family:inherit;font-size:10pt;">&#32;The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. The Company does not believe that any matters or proceedings presently pending will have a material adverse effect on its consolidated financial position, results of operations or liquidity. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As previously disclosed in the Company&#8217;s filings with the SEC, shortly after the Company entered into the merger agreement with BTU, </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;separate putative stockholder class action complaints (together, the "Stockholder Actions") were filed in the Court of Chancery of the State of Delaware (the "Delaware Court"). The first was filed on November 4, 2014 and the second on November 17, 2014, on behalf of BTU&#8217;s public stockholders, against BTU, members of the BTU board, Amtech and the special purpose merger subsidiary. The Stockholder Actions were consolidated on December 4, 2014. The complaints generally alleged that, in connection with entering into the merger agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders. The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On February 18, 2016, the Delaware Court entered the Order approving the Amended Stipulation of Settlement. As a result, the Released Claims were dismissed with prejudice and without any admission of wrongdoing by any of the parties to the Stockholder Actions. Pursuant to the Amended Stipulation of Settlement, BTU, its insurer(s), or its successor(s) in interest are responsible for payment of fees and expenses in the amount of </font><font style="font-family:inherit;font-size:10pt;">$325,000</font><font style="font-family:inherit;font-size:10pt;">&#32;which were paid in full on April 1, 2016.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As described above, the Released Claims are limited solely to claims related to any disclosures (or lack thereof) to BTU&#8217;s stockholders concerning the merger and any fiduciary claims concerning the decision to enter into the merger. While we are currently unaware of any other pending or threatened litigation related to additional claims arising from the Stockholder Actions, any future claims are uncertain, so additional harm could potentially result to the Company from this litigation, which may cause the Company to incur substantial costs and divert management&#8217;s attention from operational matters.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s261803DA221453638513BF43C7BA5881"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">9.  Investments</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company&#8217;s equity method investments include a </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;">&#32;interest in Kingstone Technology Hong Kong Limited (&#8220;Kingstone&#8221;). The Company recognizes its portion of net income or losses on a one-quarter lag.  The carrying value of the equity method investment in Kingstone was </font><font style="font-family:inherit;font-size:10pt;">$2.9</font><font style="font-family:inherit;font-size:10pt;">&#32;million and </font><font style="font-family:inherit;font-size:10pt;">$3.0</font><font style="font-family:inherit;font-size:10pt;">&#32;million as of December 31, 2016 and September 30, 2016, respectively.  For the three months ended December 31, 2016 we recognized investment loss of </font><font style="font-family:inherit;font-size:10pt;">$0.1 million</font><font style="font-family:inherit;font-size:10pt;">. For the three months ended December 31, 2015, the investment loss was not material to our consolidated statement of operations.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s61ACFA7C88715C8EB65791018C695A9D"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">10.  Related Party Transactions</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In the fourth quarter of 2015, the Company deconsolidated Kingstone, reducing its ownership to </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;">&#32;of Kingstone Hong Kong, the Hong Kong holding company. Upon the deconsolidation, Kingstone became a related party of the Company.  At December 31, 2016, and September 30, 2016, the Company's accounts receivable due from Kingstone were </font><font style="font-family:inherit;font-size:10pt;">$0.3 million</font><font style="font-family:inherit;font-size:10pt;">, which are included in Accounts Receivable on the Condensed Consolidated Balance Sheet.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of December 31, 2016, SoLayTec has borrowed approximately </font><font style="font-family:inherit;font-size:10pt;">$1.2</font><font style="font-family:inherit;font-size:10pt;">&#32;million from its shareholder, TNO Technostarters B.V.  The loans have varying interest rates from </font><font style="font-family:inherit;font-size:10pt;">9.5%</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">12.5%</font><font style="font-family:inherit;font-size:10pt;">&#32;and mature in 2021.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s6e61458e5af84ddd88a0a2944d55e18b"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">11.  Subsequent Event</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As a result of customer deposits received after the end of the quarter, cash, cash equivalents, and restricted cash increased to </font><font style="font-family:inherit;font-size:10pt;">$45.8 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of January 31, 2017, compared to cash, cash equivalents, and restricted cash of </font><font style="font-family:inherit;font-size:10pt;">$26.9 million</font><font style="font-family:inherit;font-size:10pt;">, as of December 31, 2016.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="sF125A46EF991527F85F40324FE20145C"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">MANAGEMENT&#8217;S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following discussion and analysis of our financial condition and results of operations should be read in conjunction with our condensed consolidated financial statements and the related notes included in Item 1, &#8220;Condensed Consolidated Financial Statements&#8221; in this quarterly report on Form 10-Q and our consolidated financial statements and related notes included in Item 8, &#8220;Financial Statements and Supplementary Data&#8221; in our Annual Report on Form 10-K as amended for the fiscal year ended September 30, 2016.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><a name="s054CA3634CAD505F8B069439E6BEAD4E"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Cautionary Statement Regarding Forward-Looking Statements</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;padding-bottom:13px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certain information contained or incorporated by reference in this Quarterly Report on Form 10-Q is forward-looking in nature. All statements included or incorporated by reference in this Quarterly Report on Form 10-Q, or made by management of Amtech Systems, Inc. and its subsidiaries (&#8220;Company&#8221;, &#8220;Amtech&#8221;, &#8220;we&#8221; or &#8220;our&#8221;), other than statements of historical fact, are hereby identified as &#8220;forward-looking statements&#8221; (as such term is defined in Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended (the &#8220;Exchange Act&#8220;)). In some cases, forward-looking statements can be identified by terminology such as &#8220;may,&#8221; &#8220;will,&#8221; &#8220;should,&#8221; &#8220;would,&#8221; &#8220;expects,&#8221; &#8220;plans,&#8221; &#8220;anticipates,&#8221; &#8220;intends,&#8221; &#8220;believes,&#8221; &#8220;estimates,&#8221; &#8220;predicts,&#8221; &#8220;potential,&#8221; &#8220;continue,&#8221; or the negative of these terms or other comparable terminology.  Examples of forward-looking statements include statements regarding Amtech's future financial results, operating results, business strategies, projected costs, products under development, competitive positions and plans and objectives of the Company and its management for future operations. These and many other factors could affect Amtech&#8217;s future operating results and financial condition, and could cause actual results to differ materially from expectations based on forward-looking statements made in this document or elsewhere by Amtech or on its behalf.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">You should not place undue reliance on these forward-looking statements. We cannot guarantee that any forward-looking statement will be realized, although we believe that the expectations reflected in the forward-looking statements are reasonable. Achievement of future results is subject to risks, uncertainties and potentially inaccurate assumptions. The Form 10-K, as amended, that we filed with the Securities and Exchange Commission for the year-ended September 30, 2016 listed various important factors that could affect Amtech's future operating results and financial condition and could cause actual results to differ materially from historical results and expectations based on forward-looking statements made in this document or elsewhere by Amtech or on its behalf.  These factors can be found under the heading &#8220;Risk Factors&#8221; in the Form 10-K, as amended, and investors should refer to them as well as the risk factors identified in this quarterly report.  Because it is not possible to predict or identify all such factors, any such list cannot be considered a complete set of all potential risks or uncertainties.  Except as required by law, we undertake no obligation to publicly update forward-looking statements, whether as a result of new information, future events, or otherwise.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Introduction</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Management&#8217;s Discussion and Analysis (&#8220;MD&amp;A&#8221;) is intended to facilitate an understanding of our business and results of operations. MD&amp;A consists of the following sections:</font></div><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Overview&#160;</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Results of Operations</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Liquidity and Capital Resources</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Off &#8211; Balance Sheet Arrangements&#160;</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Contractual Obligations&#160;</font></div></td></tr></table><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Critical Accounting Policies&#160;</font></div></td></tr></table><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">22</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><table cellpadding="0" cellspacing="0" style="padding-top:8px;font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">&#8226;</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Impact of Recently Issued Accounting Pronouncements</font></div></td></tr></table><div style="line-height:120%;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s65BEE675AF8754D5ABFEB7BF7E297E4A"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Overview</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We operate in three reportable business segments: (i) solar, (ii) semiconductor and (iii) polishing.  In our solar segment, we are a leading global supplier of thermal processing systems, including diffusion, plasma-enhanced chemical vapor deposition (&#8220;PECVD&#8221;), atomic layer deposition (&#8220;ALD&#8221;), and related automation, parts and services, to the solar/photovoltaic industry. In our semiconductor segment, we supply thermal processing equipment, including solder reflow equipment and related controls for use by leading semiconductor manufacturers, and in electronics assembly for automotive and other industries. In our polishing supplies segment, we produce consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystalline materials, ceramics and metal components. </font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our customers are primarily manufacturers of solar cells and integrated circuits.  The solar cell and semiconductor industries are cyclical and historically have experienced significant fluctuations.  Our revenue is impacted by these broad industry trends.  Since 2012, the solar cell industry has experienced a structural imbalance between supply and demand. This imbalance has increased competitive pressure on selling prices and negatively impacted our results of operations. Our strategy has been, and continues to be, to grow the Company through strategic product development and acquisitions.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><a name="s0EA1F29D0C4B51A38F6094F4B6A7B05C"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Results of Operations</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table sets forth certain operational data as a percentage of net revenue for the periods indicated:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="6"></td></tr><tr><td style="width:77%;"></td><td style="width:10%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:10%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">December&#160;31, <br>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">December&#160;31, <br>2015</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net revenue</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Cost of sales</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">71</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">73</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross margin</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Selling, general and administrative</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">34</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating loss</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(17</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gain on sale of other assets</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income (loss) from equity method investment</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Interest expense and other income, net</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Loss before income taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(18</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Income taxes provision</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(19</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Add: net loss (income) attributable to noncontrolling interest</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(17</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)%</font></div></td></tr></table></div></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">23</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Net Revenue</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net revenue consists of revenue recognized upon shipment or installation of equipment, with the exception of products using new technology, for which revenue is recognized upon customer acceptance. Spare parts sales are recognized upon shipment and service revenue is recognized upon completion of the service activity or ratably over the term of the service contract. Since the majority of our revenue is generated from large system sales, revenue and operating income can be significantly impacted by the timing of system shipments, and recognition of revenue based on customer acceptances.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="15"></td></tr><tr><td style="width:63%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:8%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:5%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:6%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended December 31,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Segment</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Incr</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">% Change</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="14" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">11,424</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">9,543</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,881</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">20</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">15,703</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">10,700</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5,003</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">47</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,008</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,831</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">177</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">10</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Total net revenue</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">29,135</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">22,074</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">7,061</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">32</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net revenue for the quarters ended December 31, 2016 and 2015 were </font><font style="font-family:inherit;font-size:10pt;">$29.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$22.1 million</font><font style="font-family:inherit;font-size:10pt;">, respectively, an increase of </font><font style="font-family:inherit;font-size:10pt;">$7.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;or </font><font style="font-family:inherit;font-size:10pt;">32%</font><font style="font-family:inherit;font-size:10pt;">. Revenue from the solar segment increased </font><font style="font-family:inherit;font-size:10pt;">20%</font><font style="font-family:inherit;font-size:10pt;">&#32;compared to the prior year quarter due to a significant increase in shipments of PECVD equipment compared to the first quarter of fiscal 2016, offset by a net deferral of revenue in the first quarter of fiscal 2017 compared to net recognition of previously-deferred revenue in the first quarter of fiscal 2016. We shipped our first complete PERC solution (PECVD and ALD combined) during the quarter-ended December 31, 2016.  As a new technology offering, all of the revenue associated with this shipment is deferred until acceptance and accounts for the increased deferred revenue.  Due to a large n-type bi-facial turnkey order received in January 2017, revenue is expected to increase significantly in the second half of fiscal 2017.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Revenue from the semiconductor segment increased </font><font style="font-family:inherit;font-size:10pt;">47%</font><font style="font-family:inherit;font-size:10pt;">&#32;compared to the prior year quarter due primarily to increased shipments of thermal processing systems and diffusion furnaces to the semiconductor industry.  Revenue from the polishing segment increased </font><font style="font-family:inherit;font-size:10pt;">10%</font><font style="font-family:inherit;font-size:10pt;">&#32;compared to the prior year quarter due primarily to increases in sales of polishing templates and consumables.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Backlog and Orders</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our order backlog as of December 31, 2016 and 2015 was $51.5 million and $42.9 million, respectively, an increase of $8.6  million or 20%. Our backlog as of December 31, 2016 includes approximately $35.8 million of orders and deferred revenue from our solar industry customers, compared to $31.3 million at December 31, 2015.  New orders booked in the quarter ended December 31, 2016 were $34.7 million ($15.9 million solar) compared to $35.6 million ($23.0 million solar) of customer orders in the quarter ended December 31, 2015.  As of December 31, 2016 three customers individually accounted for 20%, 17% and 12% of our backlog. The backlog as of December 31, 2016 and the orders booked during that quarter, do not include the n-type bi-facial turnkey order included in the January 24, 2017 order announcement, with which we concurrently received a large customer deposit.  The orders included in our backlog are generally credit approved customer purchase orders believed to be firm, and are generally expected to ship within the next twelve months. Because our orders are typically subject to cancellation or delay by the customer, our backlog at any particular point in time is not necessarily representative of actual sales for succeeding periods, nor is backlog any assurance that we will realize profit from completing these orders. Our backlog also includes revenue deferred pursuant to our revenue recognition policy, derived from orders that have already been shipped, but which have not met the criteria for revenue recognition.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">24</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Gross Profit and Gross Margin</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross profit is the difference between net revenue and cost of goods sold. Cost of goods sold consists of purchased material, labor and overhead to manufacture equipment and spare parts and the cost of service and support to customers for installation, warranty and paid service calls. Gross margin is gross profit as a percent of net revenue.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:92.3828125%;border-collapse:collapse;text-align:left;"><tr><td colspan="15"></td></tr><tr><td style="width:56%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:11%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:6%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:6%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months ended December 31,</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Segment</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Incr (Decr)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">% Change</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,611</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,748</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(137</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(8</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">6,095</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">3,742</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,353</font></div></td><td style="vertical-align:bottom;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">63</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">737</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">465</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">272</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">59</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Total gross profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">8,443</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">5,955</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,488</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">42</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Gross profit for the three months ended December 31, 2016 and 2015 was $8.4 million (29% of sales) and $6.0 million (27% of sales), respectively, an increase of $2.4 million. Gross profit and margin on products from our solar segment decreased compared to the first three months of fiscal 2016, as the higher gross margin due to sales volume and better product mix was more than offset by the lower recognition of previously deferred profit and lower cancellation fee revenue.  In the semiconductor segment, gross profit and margin increased primarily due to higher sales volumes and improved product mix.  Gross profit and margin on products from our polishing segment increased primarily due to higher sales volumes and higher capacity utilization.  For the three months ended December 31, 2016 and 2015, we recognized previously-deferred profit of $0.3 million and $0.6 million, respectively.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Selling, General and Administrative</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Selling, general and administrative expenses ("SG&amp;A") consist of the cost of employees, consultants and contractors, facility costs, sales commissions, shipping costs, promotional marketing expenses, legal, accounting expenses and bad debt expense.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SG&amp;A expenses for the three months ended December 31, 2016 and 2015 were </font><font style="font-family:inherit;font-size:10pt;">$7.0 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$7.6 million</font><font style="font-family:inherit;font-size:10pt;">, respectively. SG&amp;A decreased compared to the prior year quarter due primarily to collections of previously reserved accounts receivable of approximately $1.0 million, partially offset by higher commissions resulting from higher shipments. SG&amp;A expense includes $0.3 million of stock-based compensation expense for the three months ended December 31, 2016 and 2015.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Research, Development and Engineering</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering ("RD&amp;E") expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes as well as materials and supplies used in producing prototypes. We receive reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:90.234375%;border-collapse:collapse;text-align:left;"><tr><td colspan="15"></td></tr><tr><td style="width:60%;"></td><td style="width:1%;"></td><td style="width:9%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:9%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:6%;"></td><td style="width:1%;"></td><td style="width:1%;"></td><td style="width:6%;"></td><td style="width:1%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Three Months ended December 31,</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">2015</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">Incr.</font></div><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(Decr.)</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">% Change</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,830</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,615</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(785</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(30</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Grants earned</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(203</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(327</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">124</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(38</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">1,627</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">2,288</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(661</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:right;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">(29</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;"><div style="text-align:left;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;">)%</font></div></td></tr></table></div></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">RD&amp;E expense, net of grants earned, for the three months ended December 31, 2016, decreased </font><font style="font-family:inherit;font-size:10pt;">$0.7 million</font><font style="font-family:inherit;font-size:10pt;">&#32;compared to the three months ended December 31, 2015, due primarily to less spending on RD&amp;E at our solar divisions.  </font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">25</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Income from Equity Method Investment</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three months ended December 31, 2016 we recognized investment loss of $0.1million related to our 15% equity investment in Kingstone.  We did not recognize any investment income or loss for the three months ended December 31, 2015.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Income Taxes</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three months ended December 31, 2016 and 2015 we recorded income tax expense of $0.1 million and $0.3 million, respectively. The income tax provisions are based upon estimates of annual income, annual permanent differences and statutory tax rates in the various jurisdictions in which we operate, except that certain loss jurisdictions and discrete items are treated separately. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company establishes a valuation allowance when it is &#8220;more likely than not&#8221; that all or a portion of deferred tax assets will not be realized. A review of all available positive and negative evidence needs to be considered, including a company's performance, the market environment in which the company operates and the length of carryback and carryforward periods. According to those standards, it is difficult to conclude that a valuation allowance is not needed when the negative evidence includes cumulative losses in recent years. Therefore, cumulative losses weigh heavily in the overall assessment. As a result of the review, where cumulative losses had been incurred, we concluded in 2015 and 2016 that it was appropriate to maintain a full valuation allowance for substantially all net deferred tax assets in foreign jurisdictions and the carryforwards of U.S. net operating losses and foreign tax credits, which were acquired in the merger with BTU International. Tax planning strategies to reduce sources of future taxable income caused us to conclude in the fourth quarter of fiscal 2016 that a valuation allowance should be established on the remaining U.S. deferred tax assets.</font></div><div><a name="s571CF6C98FBD5E25942A4936ACD232D1"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Liquidity and Capital Resources</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">At December 31, 2016, and September 30, 2016, cash and cash equivalents were </font><font style="font-family:inherit;font-size:10pt;">$23.6 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$27.7 million</font><font style="font-family:inherit;font-size:10pt;">, respectively. At December 31, 2016, and September 30, 2016, restricted cash was </font><font style="font-family:inherit;font-size:10pt;">$3.3 million</font><font style="font-family:inherit;font-size:10pt;">&#32;and </font><font style="font-family:inherit;font-size:10pt;">$0.9 million</font><font style="font-family:inherit;font-size:10pt;">, respectively. Our working capital was </font><font style="font-family:inherit;font-size:10pt;">$45.4 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of December 31, 2016 and </font><font style="font-family:inherit;font-size:10pt;">$44.9 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of September 30, 2016.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The decrease in cash for the first three months of fiscal 2017 of $4.0 million was primarily due to cash used in operating activities of $3.5 million. We maintain a portion of our cash and cash equivalents in Euros at our Dutch and French operations; therefore, changes in the exchange rate have an impact on our cash balances. Restricted cash increased due to an increase in customer deposits requiring bank guarantees collateralized by cash.&#160;Our ratio of current assets to current liabilities was </font><font style="font-family:inherit;font-size:10pt;">2.2</font><font style="font-family:inherit;font-size:10pt;">:1 as of December 31, 2016, and September 30, 2016.  We have never paid dividends on our common stock.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On January 24, 2017, we announced a significant n-type bi-facial turnkey order from a new customer in China.  As a result of significant customer deposits from that and other orders both from Solar and Semiconductor, the balance of cash and cash equivalents increased by </font><font style="font-family:inherit;font-size:10pt;">$18.5 million</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">$42.1 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of January 31, 2017, compared to </font><font style="font-family:inherit;font-size:10pt;">$23.6 million</font><font style="font-family:inherit;font-size:10pt;">&#32;as of December 31, 2016.  The increased cash will facilitate the fulfillment of those orders.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The success of our growth strategy is dependent upon the availability of additional capital resources on terms satisfactory to management. Our sources of capital in the past have included the sale of equity securities, which include common and preferred stock sold in private transactions and public offerings, capital leases, long-term debt and customer deposits.  We believe that our principal sources of liquidity discussed above are sufficient to support operations for at least the next twelve months.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Cash Flows from Operating Activities</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Cash used in our operating activities was </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$3.5 million</font><font style="font-family:inherit;font-size:10pt;">&#32;for the three months ended December 31, 2016, compared to $10.8 million used in such activities for the three months ended December 31, 2015.  During the three months ended December 31, 2016, cash was reduced by increases in accounts receivable and restricted cash, offset by decreases in inventory. D</font><font style="font-family:inherit;font-size:10pt;background-color:#ffffff;">uring the three months ended December 31, 2015, $3.4 million was used in losses on operations, net of non-cash charges, and cash of $8.2 million was used to pay accounts payable and other accrued liabilities.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Cash Flows from Investing Activities</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our investing activities for each of the three month periods ended December 31, 2016 and 2015 consisted of purchases of property, plant and equipment of approximately $0.1 million.  In the first quarter of fiscal 2015, we received cash of $7.0 million from the partial sale of Kingstone.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Cash Flows from Financing Activities</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three months ended December 31, 2016, $0.1 million of cash used by financing activities was primarily comprised of payments on long-term debt of $0.2 million, net of borrowings of less than $0.1 million. For the three months ended December 31, 2015, the primary source of $0.6 million of cash provided by financing activities were borrowings of long-term debt of $0.8 million, net of payments on long-term debt of $0.2 million.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">27</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s553E57AD1AB058E895763E1C4474E841"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Off-Balance Sheet Arrangements</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of December 31, 2016, Amtech had no off-balance sheet arrangements as defined in Item 303(a)(4) of Regulation S-K promulgated by the Securities and Exchange Commission.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><a name="s2AF115A1FA6E56EFA5D2539C50529D26"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Contractual Obligations</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchase obligations were $14.2 million as of December 31, 2016, compared to $11.3 million as of September 30, 2016, an increase of $2.9 million due to increased customer orders.  </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During the three months ended December 31, 2016, SoLayTec borrowed an additional $0.1 million. As of December 31, 2016 the SoLayTec debt has a remaining balance of $3.7 million, with interest capitalized per the agreement bearing interest at rates ranging from </font><font style="font-family:inherit;font-size:10pt;">4.5%</font><font style="font-family:inherit;font-size:10pt;">&#32;to </font><font style="font-family:inherit;font-size:10pt;">12.5%</font><font style="font-family:inherit;font-size:10pt;">&#32;and maturity dates ranging from fiscal 2017 to fiscal 2021. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Refer to Amtech&#8217;s annual report on Form 10-K, as amended, for the year ended September 30, 2016, for information on the Company&#8217;s other contractual obligations.&#160;</font></div><div><a name="s470C625E38415E58AA64442A84F25D46"></a></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Critical Accounting Policies</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8220;Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations&#8221; discusses our condensed consolidated financial statements that have been prepared in accordance with accounting principles generally accepted in the United States of America. The preparation of these condensed consolidated financial statements requires us to make estimates and assumptions that affect the reported amount of assets and liabilities at the date of the condensed consolidated financial statements, the disclosure of contingent assets and liabilities at the date of the condensed consolidated financial statements and the reported amounts of revenue and expenses during the reporting period.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On an ongoing basis, we evaluate our estimates and judgments, including those related to revenue recognition, inventory valuation, accounts and notes receivable collectability, warranty and impairment of long-lived assets. We base our estimates and judgments on historical experience and on various other factors that we believe to be reasonable under the circumstances. The results of these estimates and judgments form the basis for making conclusions about the carrying value of assets and liabilities that are not readily apparent from other sources. Actual results may differ from these estimates under different assumptions or conditions.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">A critical accounting policy is one that is both important to the presentation of our financial position and results of operations, and requires management&#8217;s most difficult, subjective or complex judgments, often as a result of the need to make estimates about the effect of matters that are inherently uncertain. These uncertainties are discussed in Part I, Item 1A of our Annual Report on Form 10-K, as amended, for the year ended September 30, 2016. We believe our critical accounting policies relate to the more significant judgments and estimates used in the preparation of our consolidated financial statements.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We believe the critical accounting policies discussed in the section entitled &#8220;Item 7: Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations &#8211; Critical Accounting Policies&#8221; in our Annual Report on Form 10-K, as amended, for the fiscal year ended September 30, 2016 represent the most significant judgments and estimates used in the preparation of our consolidated financial statements. There have been no significant changes in our critical accounting policies during the three months ended December 31, 2016.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><a name="s8E375087408D5740A0B8FCB3FAEB3A58"></a></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For discussion of the impact of recently issued accounting pronouncements, see &#8220;Item 1: Financial Information&#8221; under &#8220;Impact of Recently Issued Accounting Pronouncements&#8221;.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">28</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="sD826AC2192BF57FC81A3365D0F17C9B7"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We are exposed to foreign currency exchange rates to the extent sales contracts, purchase contracts, assets or liabilities of our operations are denominated in currencies other than their functional currency. Our operations in the United States are generally conducted in U.S. dollars.  Our operations in Europe, China and other countries conduct business primarily in their respective functional currencies, but occasionally we enter into transactions in non-functional currencies. It is highly uncertain how currency exchange rates will fluctuate in the future. Actual changes in foreign exchange rates could adversely affect our operating results or financial condition.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During fiscal 2016 and in the first three months of fiscal 2017, we did not hold any stand-alone or separate derivative instruments. We incurred net foreign currency transaction losses of less than $0.1 million and gains of $0.1 million during the three months ended December 31, 2016 and 2015, respectively. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We incurred foreign currency translation losses of $0.9 million and $0.5 million during the three months ended December 31, 2016 and 2015, respectively, a type of other comprehensive loss, which is a direct adjustment to stockholders&#8217; equity. Our net investment in and advances to our foreign operations totaled $49.2 million as of December 31, 2016. A 10% change in the value of the foreign currencies relative to the U.S. dollar would cause approximately $5.0 million of other comprehensive income (loss). </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of December 31, 2016, sales commitments denominated in a currency other than the functional currency of our transacting operation totaled approximately $15.6 million. Our lead-times to fulfill these commitments generally range between 13 and 26 weeks.  A 10% change in the relevant exchange rates between the time the order was taken and the time of shipment cause our gross profit on such orders to be $1.6 million greater or less than expected on the date the order was taken. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#32;As of December 31, 2016, purchase commitments denominated in a currency other than the functional currency of our transacting operation totaled $2.4 million. A 10% change in the relevant exchange rates between the time the purchase order was placed and the time the order is received would not cause our cost of such items to be significantly greater or less than expected on the date the purchase order was placed.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s17A1AE1E8D0D591694F0B17BCD5899ED"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">CONTROLS AND PROCEDURES</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Disclosure Controls and Procedures</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our management, including the Chief Executive Officer (&#8220;CEO&#8221;) and the Chief Financial Officer (&#8220;CFO&#8221;), has carried out an evaluation of the effectiveness of our disclosure controls and procedures as of December 31, 2016, pursuant to Exchange Act Rules 13a-15(e) and 15(d)-15(e).  Disclosure controls and procedures means controls and other procedures that are designed to ensure that information required to be disclosed by the Company in the reports it files or submits under the Exchange Act is recorded, processed, summarized and reported within the time periods specified in the Securities and Exchange Commission's rules and forms. Disclosure controls and procedures include, without limitation, controls and procedures designed to ensure that information required to be disclosed by the Company in the reports that it files or submits under the Exchange Act is accumulated and communicated to management, including the principal executive and principal financial officer, as appropriate, to allow timely decisions regarding required disclosure.  Based upon that evaluation, our CEO and CFO have concluded that as of such date, our disclosure controls and procedures in place were effective. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Changes in Internal Control Over Financial Reporting</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">There were no changes in Amtech's internal control over financial reporting during the three months ended December 31, 2016 that has materially affected, or is reasonably likely to materially affect, its internal control over financial reporting. </font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">30</font></div></div><hr style="page-break-after:always"><div><a name="sD1DACA929C6D55229E0D01EB2CABA6CA"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">PART II. OTHER INFORMATION</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><a name="s01925B3FE4BC5CDC9DC90323AADB962F"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Legal Proceedings</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. The Company does not believe that any matters or proceedings presently pending will have a material adverse effect on its consolidated financial position, results of operations or liquidity. As previously disclosed in the Company&#8217;s filings with the SEC, shortly after the Company entered into the merger agreement with BTU, </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;">&#32;separate putative stockholder class action complaints (together, the "Stockholder Actions") were filed in the Court of Chancery of the State of Delaware (the "Delaware Court"). The first was filed on November 4, 2014 and the second on November 17, 2014, on behalf of BTU&#8217;s public stockholders, against BTU, members of the BTU board, Amtech and the special purpose merger subsidiary. The Stockholder Actions were consolidated on December 4, 2014. The complaints generally alleged that, in connection with entering into the merger agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders. The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On February 18, 2016, the Delaware Court entered the Order approving the Amended Stipulation of Settlement. As a result, the Released Claims were dismissed with prejudice and without any admission of wrongdoing by any of the parties to the Stockholder Actions. Pursuant to the Amended Stipulation of Settlement, BTU, its insurer(s), or its successor(s) in interest are responsible for payment of fees and expenses in the amount of $325,000 which were paid in full on April 1, 2016.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As described above, the Released Claims are limited solely to claims related to any disclosures (or lack thereof) to BTU&#8217;s stockholders concerning the merger and any fiduciary claims concerning the decision to enter into the merger. While we are currently unaware of any other pending or threatened litigation related to additional claims arising from the Stockholder Actions, any future claims are uncertain, so additional harm could potentially result to the Company from this litigation, which may cause the Company to incur substantial costs and divert management&#8217;s attention from operational matters.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s485F69F08D705BA1A04F357B49E86086"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  1A.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Risk Factors</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The most significant risk factors applicable to Amtech are described in Part I, Item 1A (Risk Factors) of Amtech&#8217;s Annual Report on Form 10-K, as amended, for the fiscal year ended September 30, 2016. There have been no material changes to the risk factors previously disclosed in our Form 10-K, as amended, for the fiscal year ended September 30, 2016.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">If the United States were to&#160;withdraw from or materially modify&#160;NAFTA&#160;or&#160;certain other international trade agreements, or change tax provisions related to the global manufacturing and sales of our products, our financial condition and results of operations&#160;could be adversely affected</font><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;color:#252525;">A</font><font style="font-family:inherit;font-size:10pt;color:#ff0000;">&#32;</font><font style="font-family:inherit;font-size:10pt;color:#252525;">portion of our business activities are conducted in foreign countries, including China, Malaysia, Taiwan, and the Netherlands.</font><font style="font-family:inherit;font-size:10pt;">&#32;Our business benefits from free trade agreements such as the North American Free Trade Agreement (&#8220;NAFTA&#8221;) and we also rely on various U.S. corporate tax provisions related to international commerce as we build, market and sell our products globally. The current presidential administration has made comments suggesting that he is not supportive of certain existing international trade agreements, including NAFTA. At this time, it remains unclear what President Trump would or would not do with respect to these international trade agreements and U.S. tax provisions related to international commerce. Any action to withdraw from or materially modify NAFTA or certain other international trade agreements, or change corporate tax policy related to international commerce, could adversely affect our financial condition and results of operations.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div><a name="s458656EBB39C55978C50AB44351C3606"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Unregistered Sales of Equity Securities and Use of Proceeds</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">None.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s3ADA4718D4355E33888D96FB1ACC598B"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Defaults Upon Senior Securities</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">None.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s157E59442A785D6EAA1D612CA0837E3C"></a></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Mine Safety Disclosures</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Not applicable. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31</font></div></div><hr style="page-break-after:always"><div><a name="s8430F3117BFA5C048A6F06B700BD77F1"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item 5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Other Information</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">None.</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32</font></div></div><hr style="page-break-after:always"><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><a name="s4C2D0F86B42D5721B525BCB158D9ACA7"></a></div><div style="line-height:120%;padding-left:72px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:72px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Item  6.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exhibits </font></div></td></tr></table><div style="line-height:120%;padding-left:72px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:94.140625%;border-collapse:collapse;text-align:left;"><tr><td colspan="3"></td></tr><tr><td style="width:9%;"></td><td style="width:76%;"></td><td style="width:15%;"></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.1</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fifth Amendment to Employment Agreement, dated November 10, 2016, between Amtech Systems, Inc. and Fokko Pentinga (incorporated herein by reference to Exhibit 10.1 to the Company&#8217;s Current Report on Form 8-K filed with the SEC on November 16, 2016)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.2</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Terms of Employment for Robert T. Hass, dated November 10, 2016, between Amtech Systems, Inc. and Robert T. Hass (incorporated herein by reference to Exhibit 10.2 to the Company&#8217;s Current Report on Form 8-K filed with the SEC on November 16, 2016)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10.3</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Change of Control and Severance Agreement, dated November 10, 2016, between Amtech Systems, Inc. and Robert T. Hass (incorporated herein by reference to Exhibit 10.3 to the Company&#8217;s Current Report on Form 10-K filed with the SEC on November 16, 2016)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:13px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31.1</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Executive Officer Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31.2</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Financial Officer Pursuant to Rule 13a-14(a)/15d-14(a) of the Securities Exchange Act of 1934, as Amended</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32.1</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Executive Officer Pursuant to 18 U.S.C. Section 1350, as Adopted Pursuant to Section 906 of the Sarbanes-Oxley Act of 2002</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32.2</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Certification of Chief Financial Officer Pursuant to 18 U.S.C. Section 1350, as Adopted Pursuant to Section 906 of the Sarbanes-Oxley Act of 2002</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.INS&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Instance Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.SCH&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Extension Schema Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.PRE&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taxonomy Presentation Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.CAL&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Calculation Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.LAB&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Label Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;height:12px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">101.DEF&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">XBRL Taxonomy Extension Definition Linkbase Document</font></div></td><td style="vertical-align:top;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">____________________</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">*</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Filed herewith.</font></div></td></tr></table><div style="line-height:120%;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;text-indent:-48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">33</font></div></div><hr style="page-break-after:always"><div><a name="sA5C1FFC6B06159A6913036F358D8FD5B"></a></div><div><div style="line-height:120%;font-size:10pt;"><a style="font-family:inherit;font-size:10pt;" href="#sE3453EABE8275CAFAA28AEEE5A8C89EE"><font style="font-family:inherit;font-size:10pt;">Table of Contents</font></a></div></div><div><br></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SIGNATURES&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;text-indent:16px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#32;Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:12pt;"><font style="font-family:inherit;font-size:12pt;">&#160;&#160;&#160;&#160;</font><font style="font-family:inherit;font-size:10pt;">&#32;AMTECH SYSTEMS, INC.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="5"></td></tr><tr><td style="width:7%;"></td><td style="width:49%;"></td><td style="width:1%;"></td><td style="width:6%;"></td><td style="width:37%;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">/s/ Robert T. Hass</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dated:&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">February&#160;9, 2017</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Robert T. Hass</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Vice President &#8211; Finance and Chief Financial Officer</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(Principal Financial Officer, Principal Accounting Officer, and Duly Authorize Officer)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">34</font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>2
<FILENAME>asys123116-ex311.htm
<DESCRIPTION>EXHIBIT 31.1
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2017 Workiva -->
		<title>Exhibit</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<div><a name="s5FB842666583530790FB95D521E2A6A7"></a></div><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><div><br></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 31.1&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO RULE 13a-14(a)/15d-14(a)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">OF THE SECURITIES EXCHANGE ACT OF 1934, AS AMENDED</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I, Fokko Pentinga, certify that:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I have reviewed this Quarterly Report on Form 10-Q of Amtech Systems, Inc. (the &#8220;registrant&#8221;),</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, this quarterly report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(c)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(d)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:37px;"></td><td style="width:645px;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">President and Chief Executive Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">February&#160;9, 2017</font></div></td></tr></table></div></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>3
<FILENAME>asys123116-ex312.htm
<DESCRIPTION>EXHIBIT 31.2
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2017 Workiva -->
		<title>Exhibit</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<div><a name="s70BAD2DFFC2158FBADD86A736C3B7BBB"></a></div><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><div><br></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 31.2</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO RULE 13a-14(a)/15d-14(a)</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">OF THE SECURITIES EXCHANGE ACT OF 1934, AS AMENDED</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I, Robert T. Hass, certify that:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">I have reviewed this Quarterly Report on Form 10-Q of Amtech Systems, Inc. (the &#8220;registrant&#8221;),</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, this quarterly report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this quarterly report;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(c)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(d)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:24px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:0px;"><font style="font-family:inherit;font-size:10pt;">5.</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The registrant&#8217;s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(a)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(b)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:37px;"></td><td style="width:645px;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Robert T. Hass</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Robert T. Hass</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Vice President &#8211; Finance and Chief Financial Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">February&#160;9, 2017</font></div></td></tr></table></div></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>4
<FILENAME>asys123116-ex321.htm
<DESCRIPTION>EXHIBIT 32.1
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2017 Workiva -->
		<title>Exhibit</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<div><a name="sFDB13CF14E745F18AA9AE2ECBA0D1126"></a></div><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><div><br></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 32.1</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18 U.S.C. SECTION 1350,</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AS ADOPTED PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;text-indent:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In connection with the Quarterly Report of Amtech Systems, Inc. (the &#8220;Company&#8221;) on Form 10-Q for the period ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;), I, Fokko Pentinga, President and Chief Executive Officer of the Company, certify, pursuant to 18 U.S.C. section 1350, as adopted pursuant to section 906 of the Sarbanes-Oxley Act of 2002, that, to the best of my knowledge:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(2)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:37px;"></td><td style="width:645px;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Fokko Pentinga</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">President and Chief Executive Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">February&#160;9, 2017</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The foregoing certification is being furnished pursuant to 18 U.S.C. Section 1350. It is not being filed for purposes of Section 18 of the Securities Exchange Act of 1934, as amended, and it is not to be incorporated by reference into any filing of the Company, regardless of any general incorporation language in such filing.</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.2
<SEQUENCE>5
<FILENAME>asys123116-ex322.htm
<DESCRIPTION>EXHIBIT 32.2
<TEXT>
<!DOCTYPE html PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd">
<html>
	<head>
		<!-- Document created using Wdesk 1 -->
		<!-- Copyright 2017 Workiva -->
		<title>Exhibit</title>
	</head>
	<body style="font-family:Times New Roman;font-size:10pt;">
<div><a name="sCC05A105473E55F0B9374908475491A6"></a></div><div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div><div><br></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exhibit 32.2</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">CERTIFICATION PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18 U.S.C. SECTION 1350,</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">AS ADOPTED PURSUANT TO</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;text-indent:16px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#32;In connection with the Quarterly Report of Amtech Systems, Inc. (the &#8220;Company&#8221;) on Form 10-Q for the period ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, as filed with the Securities and Exchange Commission on the date hereof (the &#8220;Report&#8221;), I, Robert T. Hass, Interim Chief Financial Officer of the Company, certify, pursuant to 18 U.S.C. sections 1350, as adopted pursuant to sections 906 of the Sarbanes-Oxley Act of 2002, that, to the best of my knowledge:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(1)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;The Report fully complies with the requirements of Section 13(a) or 15(d) of the Securities Exchange Act of 1934; and</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;"></td><td></td></tr><tr><td style="vertical-align:top"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">(2)</font></div></td><td style="vertical-align:top;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.</font></div></td></tr></table><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:682px;border-collapse:collapse;text-align:left;"><tr><td colspan="2"></td></tr><tr><td style="width:37px;"></td><td style="width:645px;"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">By&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;text-decoration:underline;">/s/ Robert T. Hass</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Robert T. Hass</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Vice President &#8211; Finance and Chief Financial Officer</font></div></td></tr><tr><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Amtech Systems, Inc.</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Date:</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">February&#160;9, 2017</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The foregoing certification is being furnished pursuant to 18 U.S.C. Section 1350. It is not being filed for purposes of Section 18 of the Securities Exchange Act of 1934, as amended, and it is not to be incorporated by reference into any filing of the Company, regardless of any general incorporation language in such filing.</font></div><div><br></div><div style="text-align:center;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br></font></div></div>	</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.INS
<SEQUENCE>6
<FILENAME>asys-20161231.xml
<DESCRIPTION>XBRL INSTANCE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!--p:d254f46170eb405ba30a60ebe98ef1f0,x:6f7e16cbd4e04ce8aab2116874366fec-->
<xbrli:xbrl xmlns:asys="http://www.amtechsystems.com/20161231" xmlns:country="http://xbrl.sec.gov/country/2013-01-31" xmlns:currency="http://xbrl.sec.gov/currency/2014-01-31" xmlns:dei="http://xbrl.sec.gov/dei/2014-01-31" xmlns:exch="http://xbrl.sec.gov/exch/2015-01-31" xmlns:invest="http://xbrl.sec.gov/invest/2013-01-31" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:naics="http://xbrl.sec.gov/naics/2011-01-31" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:sic="http://xbrl.sec.gov/sic/2011-01-31" xmlns:stpr="http://xbrl.sec.gov/stpr/2011-01-31" xmlns:us-gaap="http://fasb.org/us-gaap/2015-01-31" xmlns:us-roles="http://fasb.org/us-roles/2015-01-31" xmlns:us-types="http://fasb.org/us-types/2015-01-31" xmlns:utreg="http://www.xbrl.org/2009/utr" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
	<link:schemaRef xlink:href="asys-20161231.xsd" xlink:type="simple" />
	<xbrli:context id="FD2017Q1YTD">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2017Q2January30">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2017-01-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q4">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q1">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q1YTD">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2014-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandBuildingsAndImprovementsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LandBuildingsAndImprovementsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_asys_CashAndCashEquivalentsAndRestrictedCashMember_us-gaap_InvestmentTypeAxis_asys_USTreasuriesandFDICInsuredMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">asys:CashAndCashEquivalentsAndRestrictedCashMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:InvestmentTypeAxis">asys:USTreasuriesandFDICInsuredMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2016-06-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q4YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2016-09-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q3">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-06-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_EnvironmentalRemediationSiteAxis_asys_SuperfundSiteMember_us-gaap_OtherCommitmentsAxis_us-gaap_EnvironmentalRestorationCostsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:EnvironmentalRemediationSiteAxis">asys:SuperfundSiteMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:OtherCommitmentsAxis">us-gaap:EnvironmentalRestorationCostsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerListsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerListsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2015Q4YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2014-10-01</xbrli:startDate>
			<xbrli:endDate>2015-09-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_EnvironmentalRemediationSiteAxis_asys_SuperfundSiteMember_us-gaap_OtherCommitmentsAxis_us-gaap_EnvironmentalRestorationCostsMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:EnvironmentalRemediationSiteAxis">asys:SuperfundSiteMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:OtherCommitmentsAxis">us-gaap:EnvironmentalRestorationCostsMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerListsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:CustomerListsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:TradeNamesMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:OtherIntangibleAssetsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:FiniteLivedIntangibleAssetsByMajorClassAxis">us-gaap:PatentedTechnologyMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:FurnitureAndFixturesMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingAndBuildingImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:LeaseholdImprovementsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:MachineryAndEquipmentMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:RestrictedStockMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis">us-gaap:EmployeeStockOptionMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2008Q1ShareholdersRights_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">us-gaap:SeriesAPreferredStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2008-12-15</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2016Q1Oct8_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">us-gaap:SeriesAPreferredStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-08</xbrli:startDate>
			<xbrli:endDate>2015-10-08</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2009Q1Dec15">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2008-12-15</xbrli:startDate>
			<xbrli:endDate>2008-12-15</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2009Q1Dec15_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:StatementClassOfStockAxis">us-gaap:SeriesAPreferredStockMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2008-12-15</xbrli:startDate>
			<xbrli:endDate>2008-12-15</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:CorporateNonSegmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:CorporateNonSegmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SolarEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:PolishingSuppliesAndEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:CorporateNonSegmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:OperatingSegmentsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConsolidationItemsAxis">us-gaap:CorporateNonSegmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueProductLineMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_ProductConcentrationRiskMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueProductLineMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:ProductConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementBusinessSegmentsAxis">asys:SemiconductorEquipmentMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:NorthAmericaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:EuropeMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_CN">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:AsiaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_TW">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:TW</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_AmericasOtherMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:AmericasOtherMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_AmericasOtherMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:AmericasOtherMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_MY">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:MY</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_TW">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:TW</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:EuropeMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_US">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_US">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:US</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:NorthAmericaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_DE">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:DE</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">asys:SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">us-gaap:AsiaMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_CN">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:CN</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_DE">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:DE</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_MY">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:GeographicConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:StatementGeographicalAxis">country:MY</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberOneMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:MajorCustomersAxis">asys:CustomerNumberOneMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_dei_LegalEntityAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MinimumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="dei:LegalEntityAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_LongtermDebtTypeAxis_asys_MortgageNoteMember_us-gaap_VariableRateAxis_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:LongtermDebtTypeAxis">asys:MortgageNoteMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:VariableRateAxis">asys:FederalHomeLoanBoardFiveYearClassicAdvanceRateMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_dei_LegalEntityAxis_asys_SoLayTecB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="dei:LegalEntityAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_dei_LegalEntityAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MaximumMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="dei:LegalEntityAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_LongtermDebtTypeAxis_asys_MortgageNoteMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:LongtermDebtTypeAxis">asys:MortgageNoteMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_dei_LegalEntityAxis_asys_SoLayTecB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="dei:LegalEntityAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2014Q4_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis">asys:TempressSystemsandEnergyResearchCentreAgreementMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2014-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2014Q4YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis">asys:TempressSystemsandEnergyResearchCentreAgreementMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2013-10-01</xbrli:startDate>
			<xbrli:endDate>2014-09-30</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="D2016Q3Arp1_us-gaap_LitigationCaseAxis_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_us-gaap_LitigationStatusAxis_us-gaap_SettledLitigationMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:LitigationCaseAxis">asys:StockholderActionsPutativeStockholderClassActionComplaintsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:LitigationStatusAxis">us-gaap:SettledLitigationMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-04-01</xbrli:startDate>
			<xbrli:endDate>2016-04-01</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_LitigationCaseAxis_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_us-gaap_LitigationStatusAxis_us-gaap_SettledLitigationMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:LitigationCaseAxis">asys:StockholderActionsPutativeStockholderClassActionComplaintsMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:LitigationStatusAxis">us-gaap:SettledLitigationMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis">asys:TempressSystemsandEnergyResearchCentreAgreementMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BusinessAcquisitionAxis">asys:BTUInternationalIncBTUMergerMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:LossContingenciesByNatureOfContingencyAxis">us-gaap:LossFromCatastrophesMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHoldingCompanyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHoldingCompanyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHoldingCompanyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2016Q1YTD_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHoldingCompanyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2015-10-01</xbrli:startDate>
			<xbrli:endDate>2015-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2015Q4_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis">asys:KingstoneHoldingCompanyMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2015-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2017Q1_us-gaap_BalanceSheetLocationAxis_us-gaap_AccountsReceivableMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_KingstoneHongKongMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BalanceSheetLocationAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionsByRelatedPartyAxis">asys:KingstoneHongKongMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-12-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MaximumMember_us-gaap_RelatedPartyTransactionAxis_asys_TNOTechnostartersB.V.LoansMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_TNOTechnostartersB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MaximumMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionAxis">asys:TNOTechnostartersB.V.LoansMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionsByRelatedPartyAxis">asys:TNOTechnostartersB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MinimumMember_us-gaap_RelatedPartyTransactionAxis_asys_TNOTechnostartersB.V.LoansMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_TNOTechnostartersB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:RangeAxis">us-gaap:MinimumMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionAxis">asys:TNOTechnostartersB.V.LoansMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionsByRelatedPartyAxis">asys:TNOTechnostartersB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FD2017Q1YTD_dei_LegalEntityAxis_asys_SoLayTecB.V.Member_us-gaap_RelatedPartyTransactionAxis_asys_TNOTechnostartersB.V.LoansMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_TNOTechnostartersB.V.Member">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="dei:LegalEntityAxis">asys:SoLayTecB.V.Member</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionAxis">asys:TNOTechnostartersB.V.LoansMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionsByRelatedPartyAxis">asys:TNOTechnostartersB.V.Member</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:startDate>2016-10-01</xbrli:startDate>
			<xbrli:endDate>2016-12-31</xbrli:endDate>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="FI2016Q4_us-gaap_BalanceSheetLocationAxis_us-gaap_AccountsReceivableMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_KingstoneHongKongMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:BalanceSheetLocationAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
				<xbrldi:explicitMember dimension="us-gaap:RelatedPartyTransactionsByRelatedPartyAxis">asys:KingstoneHongKongMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2016-09-30</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:context id="I2017Q2January31_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember">
		<xbrli:entity>
			<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
			<xbrli:segment>
				<xbrldi:explicitMember dimension="us-gaap:SubsequentEventTypeAxis">us-gaap:SubsequentEventMember</xbrldi:explicitMember>
			</xbrli:segment>
		</xbrli:entity>
		<xbrli:period>
			<xbrli:instant>2017-01-31</xbrli:instant>
		</xbrli:period>
	</xbrli:context>
	<xbrli:unit id="shares">
		<xbrli:measure>xbrli:shares</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="systems">
		<xbrli:measure>asys:systems</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="Customer">
		<xbrli:measure>asys:Customer</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="number">
		<xbrli:measure>xbrli:pure</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="usd">
		<xbrli:measure>iso4217:USD</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="claims">
		<xbrli:measure>asys:claims</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="usdPerShare">
		<xbrli:divide>
			<xbrli:unitNumerator>
				<xbrli:measure>iso4217:USD</xbrli:measure>
			</xbrli:unitNumerator>
			<xbrli:unitDenominator>
				<xbrli:measure>xbrli:shares</xbrli:measure>
			</xbrli:unitDenominator>
		</xbrli:divide>
	</xbrli:unit>
	<xbrli:unit id="segment">
		<xbrli:measure>asys:segment</xbrli:measure>
	</xbrli:unit>
	<xbrli:unit id="equipment">
		<xbrli:measure>asys:equipment</xbrli:measure>
	</xbrli:unit>
	<asys:CashCashEquivalentsAndRestrictedCash contextRef="FI2017Q1" decimals="-5" id="Fact-81E1A1C4E8BB8EE5D7461E5EAE062A74" unitRef="usd">26900000</asys:CashCashEquivalentsAndRestrictedCash>
	<asys:CashCashEquivalentsAndRestrictedCash contextRef="I2017Q2January31_us-gaap_SubsequentEventTypeAxis_us-gaap_SubsequentEventMember" decimals="-5" id="Fact-BCF6FAC89BA242AD0A571E5EF0F7764C" unitRef="usd">45800000</asys:CashCashEquivalentsAndRestrictedCash>
	<asys:ClassOfWarrantOrRightExpirationPeriod contextRef="D2009Q1Dec15_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" id="Fact-1B46E485E17957408D28E9033DA6D873">P10Y</asys:ClassOfWarrantOrRightExpirationPeriod>
	<asys:CommonStockCollectiveOwnershipThresholdForJointFilers contextRef="D2016Q1Oct8_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" decimals="INF" id="Fact-4292AD1DFFDA256818210F8C5C53F0E8" unitRef="number">0.199</asys:CommonStockCollectiveOwnershipThresholdForJointFilers>
	<asys:CommonStockMinimumPercentOwnershipForExerciseOfRights contextRef="D2009Q1Dec15" decimals="INF" id="Fact-37DF64D781225428827674B5DD9C88DC" unitRef="number">0.15</asys:CommonStockMinimumPercentOwnershipForExerciseOfRights>
	<asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations contextRef="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-4964441CD90154FFBF4E216FA2BB2A3E">P5Y</asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations>
	<asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations contextRef="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-CAFA561B8B4A513094B462A5ADEC87A3">P3Y</asys:IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations>
	<asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits contextRef="FD2016Q1YTD" decimals="-3" id="Fact-91D46107E2C95F128DD18840BAB4BC91" unitRef="usd">-3354000</asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits>
	<asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits contextRef="FD2017Q1YTD" decimals="-3" id="Fact-E433598532D459A08F3695B482007F47" unitRef="usd">584000</asys:IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits>
	<asys:IncreaseDecreaseInDeferredProfit contextRef="FD2016Q1YTD" decimals="-3" id="Fact-C941141226BC59AFB21F5003CF623EC2" unitRef="usd">-50000</asys:IncreaseDecreaseInDeferredProfit>
	<asys:IncreaseDecreaseInDeferredProfit contextRef="FD2017Q1YTD" decimals="-3" id="Fact-CCB68E30B4EE5350A6A6A8D1A0C11429" unitRef="usd">-619000</asys:IncreaseDecreaseInDeferredProfit>
	<asys:NumberOfCustomers contextRef="FD2015Q4YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember" decimals="INF" id="Fact-1AABC12B6BFE5D6CA30EDAA1DB512019" unitRef="Customer">0</asys:NumberOfCustomers>
	<asys:NumberOfCustomers contextRef="FD2016Q4YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember" decimals="INF" id="Fact-CA3070D09B43C7DDD60B0F5441773CF9" unitRef="Customer">1</asys:NumberOfCustomers>
	<asys:NumberOfCustomers contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember" decimals="INF" id="Fact-F2BEB3C603D956B3912F975556541EFA" unitRef="Customer">1</asys:NumberOfCustomers>
	<asys:NumberOfSimilarlyConfiguredItemsOfEquipment contextRef="FI2017Q1" decimals="INF" id="Fact-6A2075461A9E5067BEF3A0055C62DDB2" unitRef="equipment">2</asys:NumberOfSimilarlyConfiguredItemsOfEquipment>
	<asys:NumberOfSimilarlyConfiguredSystemsAndProcesses contextRef="FI2017Q1" decimals="INF" id="Fact-4349877140D45E3292CA1AB78C865E25" unitRef="systems">2</asys:NumberOfSimilarlyConfiguredSystemsAndProcesses>
	<asys:OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties contextRef="FD2014Q4YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" decimals="INF" id="Fact-B7E0EE2DDCED5F4C999D30212ACF1119" unitRef="number">1</asys:OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties>
	<asys:ResearchAndDevelopmentNetOfGrantsEarned contextRef="FD2016Q1YTD" decimals="-3" id="Fact-0A6B3EE9A38F59CC9AA804F1F36F579F" unitRef="usd">2288000</asys:ResearchAndDevelopmentNetOfGrantsEarned>
	<asys:ResearchAndDevelopmentNetOfGrantsEarned contextRef="FD2017Q1YTD" decimals="-3" id="Fact-19089DB4541352638F6FA689C661999B" unitRef="usd">1627000</asys:ResearchAndDevelopmentNetOfGrantsEarned>
	<asys:ResearchandDevelopmentAgreementTerm contextRef="FD2014Q4YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" id="Fact-B8F043FF14305DD38916DBCA4A2737ED">P4Y</asys:ResearchandDevelopmentAgreementTerm>
	<asys:ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance contextRef="FD2014Q4YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" id="Fact-D18D3AABF37B50D5A33870111D603087">P2Y</asys:ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance>
	<asys:ResearchandDevelopmentRequiredContribution contextRef="FI2017Q1_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" decimals="-5" id="Fact-7325BD37CD565033A744E91D93F86593" unitRef="usd">1400000</asys:ResearchandDevelopmentRequiredContribution>
	<asys:ResearchandDevelopmentRequiredContributionLaborandAssets contextRef="FI2014Q4_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" decimals="-5" id="Fact-710071D14AC5536FBC6B70B3F54A5557" unitRef="usd">1400000</asys:ResearchandDevelopmentRequiredContributionLaborandAssets>
	<asys:StandardProductWarrantyPeriod contextRef="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-787886930F805B0581E3829F19B20909">P24M</asys:StandardProductWarrantyPeriod>
	<asys:StandardProductWarrantyPeriod contextRef="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-62EC5A4A3C1F58FAA043D30A659DFD00">P12M</asys:StandardProductWarrantyPeriod>
	<asys:UnbilledAndOther contextRef="FI2016Q4" decimals="-3" id="Fact-00DA7943D0AB5AB192ED8410944A7F67" unitRef="usd">8634000</asys:UnbilledAndOther>
	<asys:UnbilledAndOther contextRef="FI2017Q1" decimals="-3" id="Fact-6FF1C92D558C55D49149E750991772D7" unitRef="usd">7094000</asys:UnbilledAndOther>
	<dei:AmendmentFlag contextRef="FD2017Q1YTD" id="Fact-3DBF4022F2685BE1830900230CDC7F40">false</dei:AmendmentFlag>
	<dei:CurrentFiscalYearEndDate contextRef="FD2017Q1YTD" id="Fact-F6A935A636E95B14A513E18D669E2B38">--09-30</dei:CurrentFiscalYearEndDate>
	<dei:DocumentFiscalPeriodFocus contextRef="FD2017Q1YTD" id="Fact-EC326B2DB4F053E78F866FDB7541AC73">Q1</dei:DocumentFiscalPeriodFocus>
	<dei:DocumentFiscalYearFocus contextRef="FD2017Q1YTD" id="Fact-EA98844A1AC258B1B190506C62F73CD3">2017</dei:DocumentFiscalYearFocus>
	<dei:DocumentPeriodEndDate contextRef="FD2017Q1YTD" id="Fact-3D01B4FA8B835F91A99EB368991718F8">2016-12-31</dei:DocumentPeriodEndDate>
	<dei:DocumentType contextRef="FD2017Q1YTD" id="Fact-09B780094F7656FB80474DFF8FAFD546">10-Q</dei:DocumentType>
	<dei:EntityCentralIndexKey contextRef="FD2017Q1YTD" id="Fact-BCF505CAD17958BF815A918F56E6B783">0000720500</dei:EntityCentralIndexKey>
	<dei:EntityCommonStockSharesOutstanding contextRef="I2017Q2January30" decimals="INF" id="Fact-72C8C6CE602153EE8B35B4714C36F94F" unitRef="shares">13179535</dei:EntityCommonStockSharesOutstanding>
	<dei:EntityFilerCategory contextRef="FD2017Q1YTD" id="Fact-488B5B4EB9605D748079677DEAF974AD">Accelerated Filer</dei:EntityFilerCategory>
	<dei:EntityRegistrantName contextRef="FD2017Q1YTD" id="Fact-65B91239FAD45098BE6917CE3BAE7759">AMTECH SYSTEMS INC</dei:EntityRegistrantName>
	<us-gaap:AccountsPayableCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-420155A8A00B524E85AC01C6D1718369" unitRef="usd">15397000</us-gaap:AccountsPayableCurrent>
	<us-gaap:AccountsPayableCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-678D11F5068A507FBD54630AF8FA0201" unitRef="usd">14986000</us-gaap:AccountsPayableCurrent>
	<us-gaap:AccountsReceivableNetCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-E89B2A7FEB1857ED8AC7E12B9FA5FA19" unitRef="usd">17642000</us-gaap:AccountsReceivableNetCurrent>
	<us-gaap:AccountsReceivableNetCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-CD951B85A2165DFD9205797EAF1EEE2B" unitRef="usd">23146000</us-gaap:AccountsReceivableNetCurrent>
	<us-gaap:AccruedIncomeTaxesCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-19F9E1E5908E57F2B8A74578BE54A3FD" unitRef="usd">1100000</us-gaap:AccruedIncomeTaxesCurrent>
	<us-gaap:AccruedIncomeTaxesCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-AA5E805DFE155C9CB0E1272032A36DBF" unitRef="usd">960000</us-gaap:AccruedIncomeTaxesCurrent>
	<us-gaap:AccruedLiabilitiesCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-21D3B1E1A40857E08EE08DB050274A8C" unitRef="usd">2164000</us-gaap:AccruedLiabilitiesCurrent>
	<us-gaap:AccruedLiabilitiesCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-9A209CE67AD557648FD9DB11A3633503" unitRef="usd">1577000</us-gaap:AccruedLiabilitiesCurrent>
	<us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment contextRef="FI2016Q4" decimals="-3" id="Fact-2B67C8E337E4556892DC0D6C1855D8B7" unitRef="usd">16777000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
	<us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment contextRef="FI2017Q1" decimals="-3" id="Fact-9D60A91F8DB550E3A74011CFD8C2A7BD" unitRef="usd">16457000</us-gaap:AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment>
	<us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax contextRef="FI2016Q4" decimals="-3" id="Fact-52A1FB561A0D5B42B0B961C55BACF7B7" unitRef="usd">-8876000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
	<us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax contextRef="FI2017Q1" decimals="-3" id="Fact-7B339FA80EF353FD81FE579DF4D3ACF5" unitRef="usd">-9721000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
	<us-gaap:AdditionalPaidInCapital contextRef="FI2016Q4" decimals="-3" id="Fact-5E25F0CD0D6F5C34B24AC254B23B9859" unitRef="usd">111631000</us-gaap:AdditionalPaidInCapital>
	<us-gaap:AdditionalPaidInCapital contextRef="FI2017Q1" decimals="-3" id="Fact-74D966EA524050FAAADC21E708BB2A4B" unitRef="usd">111952000</us-gaap:AdditionalPaidInCapital>
	<us-gaap:AllocatedShareBasedCompensationExpense contextRef="FD2016Q1YTD" decimals="-3" id="Fact-38BA2D3DEAF653D6848266BFEBC6D650" unitRef="usd">342000</us-gaap:AllocatedShareBasedCompensationExpense>
	<us-gaap:AllocatedShareBasedCompensationExpense contextRef="FD2017Q1YTD" decimals="-3" id="Fact-03D61B59591755AC886C6C2754E31CF6" unitRef="usd">319000</us-gaap:AllocatedShareBasedCompensationExpense>
	<us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax contextRef="FD2016Q1YTD" decimals="-3" id="Fact-839984B709F85EE186AAECF453AAD724" unitRef="usd">294000</us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax>
	<us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax contextRef="FD2017Q1YTD" decimals="-3" id="Fact-B173DE6FAC935EA0BEEAF5AB0A264EFB" unitRef="usd">284000</us-gaap:AllocatedShareBasedCompensationExpenseNetOfTax>
	<us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-AB07D245FA235FF6AD08C402B1F6BBD5" unitRef="usd">3730000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
	<us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-4A9EE9AB267456EDBCBD36202A0190F5" unitRef="usd">1787000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
	<us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount contextRef="FD2016Q1YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember" decimals="0" id="Fact-1AE8862CF83B5FAFB97A320253ADFD34" unitRef="shares">1938000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
	<us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount contextRef="FD2017Q1YTD_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_us-gaap_EmployeeStockOptionMember" decimals="0" id="Fact-143423126EC55406B7DFC69D14CC3319" unitRef="shares">1886000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
	<us-gaap:Assets contextRef="FI2016Q4" decimals="-3" id="Fact-1C4E973EF5745AEF800FBFE552BD1D49" unitRef="usd">118430000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember" decimals="-3" id="Fact-9399946263D7540D8ECE7669E98BD825" unitRef="usd">18664000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-7E1DBA97F1295E9B87D46F054FEAA36D" unitRef="usd">4819000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-80B9AD5EF15D590BAFF0C578CC442DB5" unitRef="usd">51985000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2016Q4_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-D3793AFCE25B530ABAFC9E6BA1E16920" unitRef="usd">42962000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2017Q1" decimals="-3" id="Fact-98FC0EAC23705C0992093138BE5B3963" unitRef="usd">115918000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember" decimals="-3" id="Fact-B485A6149B9D5564905DC6ACD50362E4" unitRef="usd">15780000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-8D6BA22246695D5CBB9C6CBAABEA795D" unitRef="usd">4906000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-E5D97B2770D05723B64049B397D6C099" unitRef="usd">51898000</us-gaap:Assets>
	<us-gaap:Assets contextRef="FI2017Q1_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-89196985EA6D5F6AAD9F952589C3BC00" unitRef="usd">43334000</us-gaap:Assets>
	<us-gaap:AssetsCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-69EA1CCBCD165CDAAA7FA14C6C47980C" unitRef="usd">82924000</us-gaap:AssetsCurrent>
	<us-gaap:AssetsCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-CF5B2EB3CA1D5409A0BAF53F36870D7C" unitRef="usd">81785000</us-gaap:AssetsCurrent>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2015Q4" decimals="-3" id="Fact-B1008F8D5A3050DDA81F4496FC8C4A38" unitRef="usd">25852000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2016Q1" decimals="-3" id="Fact-1F1A583DDE995D90ACBEFAD4B7E92271" unitRef="usd">22617000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2016Q4" decimals="-3" id="Fact-93F4F825125F5555800B43A7B19BFDEA" unitRef="usd">27655000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsAtCarryingValue contextRef="FI2017Q1" decimals="-3" id="Fact-8D5F46D7E96B58ED8A0A49F2E671EFF4" unitRef="usd">23638000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
	<us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease contextRef="FD2016Q1YTD" decimals="-3" id="Fact-BDCF7A8FA4F951B8BBE2C05816B33794" unitRef="usd">-3235000</us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease>
	<us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease contextRef="FD2017Q1YTD" decimals="-3" id="Fact-49540F52273956C89C76328CCAC57057" unitRef="usd">-4017000</us-gaap:CashAndCashEquivalentsPeriodIncreaseDecrease>
	<us-gaap:ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1 contextRef="I2008Q1ShareholdersRights_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" decimals="INF" id="Fact-CFB08D12B04E516DA22F4D36A270B14D" unitRef="usdPerShare">51.60</us-gaap:ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1>
	<us-gaap:ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights contextRef="I2008Q1ShareholdersRights_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" decimals="INF" id="Fact-C568F1899BB6CD9223D60F8A6A4EF15D" unitRef="shares">0.001</us-gaap:ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights>
	<us-gaap:CommitmentsAndContingencies contextRef="FI2016Q4" id="Fact-BB3BA2CC2CDF5E18BE734AA19AF6610C" unitRef="usd" xsi:nil="true" />
	<us-gaap:CommitmentsAndContingencies contextRef="FI2017Q1" id="Fact-3FED4229B6805784844AC8D58ED20A8B" unitRef="usd" xsi:nil="true" />
	<us-gaap:CommonStockParOrStatedValuePerShare contextRef="FI2016Q4" decimals="INF" id="Fact-C0B32E6A33AB5991A42127C7C1529258" unitRef="usdPerShare">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
	<us-gaap:CommonStockParOrStatedValuePerShare contextRef="FI2017Q1" decimals="INF" id="Fact-162EBA57D80558518E5A13EAAAE873AE" unitRef="usdPerShare">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
	<us-gaap:CommonStockParOrStatedValuePerShare contextRef="I2008Q1ShareholdersRights_us-gaap_StatementClassOfStockAxis_us-gaap_SeriesAPreferredStockMember" decimals="INF" id="Fact-C03C2237C28B55F8B36B864E7D709725" unitRef="usdPerShare">0.01</us-gaap:CommonStockParOrStatedValuePerShare>
	<us-gaap:CommonStockSharesAuthorized contextRef="FI2016Q4" decimals="INF" id="Fact-196F11028F265F4DB984FCA1876F173A" unitRef="shares">100000000</us-gaap:CommonStockSharesAuthorized>
	<us-gaap:CommonStockSharesAuthorized contextRef="FI2017Q1" decimals="INF" id="Fact-09DED91A8F85542CBF87A27991C9F71E" unitRef="shares">100000000</us-gaap:CommonStockSharesAuthorized>
	<us-gaap:CommonStockSharesIssued contextRef="FI2016Q4" decimals="INF" id="Fact-EB3F2DB7E18653719E273B3777C1AB17" unitRef="shares">13179355</us-gaap:CommonStockSharesIssued>
	<us-gaap:CommonStockSharesIssued contextRef="FI2017Q1" decimals="INF" id="Fact-5B42C044756E5C09B2425AA35992D458" unitRef="shares">13179535</us-gaap:CommonStockSharesIssued>
	<us-gaap:CommonStockSharesOutstanding contextRef="FI2016Q4" decimals="INF" id="Fact-06CEFBB9F4B153A9A74525FA1A0E1E29" unitRef="shares">13179355</us-gaap:CommonStockSharesOutstanding>
	<us-gaap:CommonStockSharesOutstanding contextRef="FI2017Q1" decimals="INF" id="Fact-B40F6744D4FC5C39BEE87D65681F8A6E" unitRef="shares">13179535</us-gaap:CommonStockSharesOutstanding>
	<us-gaap:CommonStockValue contextRef="FI2016Q4" decimals="-3" id="Fact-B6FC73B3BCCF5064A896C515DA92996F" unitRef="usd">132000</us-gaap:CommonStockValue>
	<us-gaap:CommonStockValue contextRef="FI2017Q1" decimals="-3" id="Fact-7B3C2EFA1B67554AB6B4636ED2AB45EE" unitRef="usd">132000</us-gaap:CommonStockValue>
	<us-gaap:ComprehensiveIncomeNetOfTax contextRef="FD2016Q1YTD" decimals="-3" id="Fact-482D27EA6AB951FFA2B67293FA50AAC6" unitRef="usd">-4550000</us-gaap:ComprehensiveIncomeNetOfTax>
	<us-gaap:ComprehensiveIncomeNetOfTax contextRef="FD2017Q1YTD" decimals="-3" id="Fact-8A061240B14D5A8E801530DC9766E468" unitRef="usd">-898000</us-gaap:ComprehensiveIncomeNetOfTax>
	<us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest contextRef="FD2016Q1YTD" decimals="-3" id="Fact-5C7823A5FE075321AAF7D4A64AD731EA" unitRef="usd">-433000</us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest contextRef="FD2017Q1YTD" decimals="-3" id="Fact-F115C6E4653B5E38B8009E087C09E256" unitRef="usd">-375000</us-gaap:ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest contextRef="FD2016Q1YTD" decimals="-3" id="Fact-E6EE35A719AE56BEAE9A7723CBA7C74E" unitRef="usd">-4983000</us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest contextRef="FD2017Q1YTD" decimals="-3" id="Fact-6984A976A2A55EE8A8591A645BC23C5D" unitRef="usd">-1273000</us-gaap:ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_us-gaap_MajorCustomersAxis_asys_CustomerNumberOneMember" decimals="2" id="Fact-841F08A7306C50A0A727AF91BE9B97FB" unitRef="number">0.14</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember" decimals="2" id="Fact-30A81BFADF3A58AD8F32240FC4BA669A" unitRef="number">1.00</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_AmericasOtherMember" decimals="2" id="Fact-06DE1A9BEF5D5279AB8703528DE78577" unitRef="number">0.03</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" decimals="2" id="Fact-A5BAF690494C5FD682E3E5890C98CBDA" unitRef="number">0.03</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" decimals="2" id="Fact-554F369435995EFEBE14D2D9D4CEFA82" unitRef="number">0.13</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_CN" decimals="2" id="Fact-F890076D514D579C8D1ED08E4F53E7FD" unitRef="number">0.20</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_DE" decimals="2" id="Fact-FE396A2D21825797A6B132F55109227C" unitRef="number">0.02</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_MY" decimals="2" id="Fact-EE776ACDFDC65B4596319564C18C6870" unitRef="number">0.18</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_TW" decimals="2" id="Fact-3E844A280052537D8A46AAD75175D880" unitRef="number">0.13</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_US" decimals="2" id="Fact-6FA209E345AB51D8AED3F0016BDA19CF" unitRef="number">0.28</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember" decimals="2" id="Fact-7FB3A13358915EC38C4275C47AEDE8A0" unitRef="number">0.54</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember" decimals="2" id="Fact-09B3CFA08FED5FF397664FAE3E954416" unitRef="number">0.15</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember" decimals="2" id="Fact-4E547BB9B42C5570A31FEDE7E201BA5C" unitRef="number">0.31</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q3YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_asys_CashAndCashEquivalentsAndRestrictedCashMember_us-gaap_InvestmentTypeAxis_asys_USTreasuriesandFDICInsuredMember" decimals="2" id="Fact-94ECAA71780951DF8ED7C2F1A7C60456" unitRef="number">0.65</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2016Q4YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember" decimals="2" id="Fact-C7EFBAC5CC93B2AB5BF80F55B0820105" unitRef="number">0.11</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember" decimals="2" id="Fact-F7063F0279DA5A37A126C4C5992D162D" unitRef="number">0.12</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember" decimals="2" id="Fact-F5A4130ABA7F5F1E81A0B966E25175DA" unitRef="number">1.00</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_AmericasOtherMember" decimals="2" id="Fact-63BABF1C67505A46B42D0BE21BF26762" unitRef="number">0.02</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" decimals="2" id="Fact-B8EC99B66E37540CB19BF56489BBABA3" unitRef="number">0.06</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" decimals="2" id="Fact-B472F9F9B4B15686B3DBEECE34C5B855" unitRef="number">0.14</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_CN" decimals="2" id="Fact-D38DB203CECC539F9B27A4DA607D4576" unitRef="number">0.26</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_DE" decimals="2" id="Fact-AFEA5E4EACBA5598B18D6F22BADD104A" unitRef="number">0.05</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_MY" decimals="2" id="Fact-7CF6E1187F985ED692C2867FB2A30F8D" unitRef="number">0.17</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_TW" decimals="2" id="Fact-E924159410505F1EAFA74B06F5A6A78D" unitRef="number">0.12</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_country_US" decimals="2" id="Fact-A4D25CBB53855039953F216D8D96A079" unitRef="number">0.18</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_AsiaMember" decimals="2" id="Fact-063A33339EAB5941878BFE9464408E87" unitRef="number">0.61</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_EuropeMember" decimals="2" id="Fact-F8121EB08F0B5808AE9D565581D7D1C1" unitRef="number">0.19</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_GeographicConcentrationRiskMember_us-gaap_StatementGeographicalAxis_us-gaap_NorthAmericaMember" decimals="2" id="Fact-E0ADF2EDFFEA5574ABC6CD92B204A1B2" unitRef="number">0.20</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:ConcentrationRiskPercentage1 contextRef="FD2017Q1YTD_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueProductLineMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_ProductConcentrationRiskMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="2" id="Fact-AA384D9EDDDA597DAD71DD870DB00CA9" unitRef="number">0.25</us-gaap:ConcentrationRiskPercentage1>
	<us-gaap:CostOfGoodsAndServicesSold contextRef="FD2016Q1YTD" decimals="-3" id="Fact-E5A14E350F225E19AECA9FD7F1FAB3F8" unitRef="usd">16119000</us-gaap:CostOfGoodsAndServicesSold>
	<us-gaap:CostOfGoodsAndServicesSold contextRef="FD2017Q1YTD" decimals="-3" id="Fact-BEAA83D61A435A5E805454835E64301D" unitRef="usd">20692000</us-gaap:CostOfGoodsAndServicesSold>
	<us-gaap:CustomerAdvancesCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-4AC38BE3CB88508FBDABBFA82635E4DA" unitRef="usd">7055000</us-gaap:CustomerAdvancesCurrent>
	<us-gaap:CustomerAdvancesCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-D550F3B4ED1D5A06A45BF08322D56B42" unitRef="usd">6920000</us-gaap:CustomerAdvancesCurrent>
	<us-gaap:DebtInstrumentBasisSpreadOnVariableRate1 contextRef="FD2017Q1YTD_us-gaap_LongtermDebtTypeAxis_asys_MortgageNoteMember_us-gaap_VariableRateAxis_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember" decimals="INF" id="Fact-DCAF25E53BFD50CEB1E0E8F56FA03D46" unitRef="number">2.4</us-gaap:DebtInstrumentBasisSpreadOnVariableRate1>
	<us-gaap:DebtInstrumentInterestRateStatedPercentage contextRef="FI2017Q1_dei_LegalEntityAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MaximumMember" decimals="INF" id="Fact-9AFF977499BEB8FA59590FA1ABB36B5A" unitRef="number">0.125</us-gaap:DebtInstrumentInterestRateStatedPercentage>
	<us-gaap:DebtInstrumentInterestRateStatedPercentage contextRef="FI2017Q1_dei_LegalEntityAxis_asys_SoLayTecB.V.Member_us-gaap_RangeAxis_us-gaap_MinimumMember" decimals="INF" id="Fact-AFA8A6A8EF24B65EF3BD0FA180DC0F4D" unitRef="number">0.045</us-gaap:DebtInstrumentInterestRateStatedPercentage>
	<us-gaap:DebtInstrumentInterestRateStatedPercentage contextRef="FI2017Q1_us-gaap_LongtermDebtTypeAxis_asys_MortgageNoteMember" decimals="INF" id="Fact-54909EC96009AF262A290FA0C10027A6" unitRef="number">0.0411</us-gaap:DebtInstrumentInterestRateStatedPercentage>
	<us-gaap:DeferredCostsCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-BB7373F9CA1A5C62A20A913C75712987" unitRef="usd">2320000</us-gaap:DeferredCostsCurrent>
	<us-gaap:DeferredCostsCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-23E62D040F505BBA83A76D3E160EA601" unitRef="usd">4352000</us-gaap:DeferredCostsCurrent>
	<us-gaap:DeferredRevenue contextRef="FI2016Q4" decimals="-3" id="Fact-7B47CC79A89A5954B2D8FC8F0453F704" unitRef="usd">7029000</us-gaap:DeferredRevenue>
	<us-gaap:DeferredRevenue contextRef="FI2017Q1" decimals="-3" id="Fact-D94C43A609E55492A2E331F736A571B8" unitRef="usd">8164000</us-gaap:DeferredRevenue>
	<us-gaap:DeferredTaxAssetsNetNoncurrent contextRef="FI2016Q4" decimals="-3" id="Fact-A5568B5D1528524AA8EB4CE067EAB049" unitRef="usd">200000</us-gaap:DeferredTaxAssetsNetNoncurrent>
	<us-gaap:DeferredTaxAssetsNetNoncurrent contextRef="FI2017Q1" decimals="-3" id="Fact-7599B3F37BC65665911B65DCA481BD52" unitRef="usd">200000</us-gaap:DeferredTaxAssetsNetNoncurrent>
	<us-gaap:DepreciationDepletionAndAmortization contextRef="FD2016Q1YTD" decimals="-3" id="Fact-6B1485D851545631A8A99505D054C499" unitRef="usd">783000</us-gaap:DepreciationDepletionAndAmortization>
	<us-gaap:DepreciationDepletionAndAmortization contextRef="FD2017Q1YTD" decimals="-3" id="Fact-E0A6D180A66E5DF6AE09A15EB46FA48B" unitRef="usd">654000</us-gaap:DepreciationDepletionAndAmortization>
	<us-gaap:DueFromRelatedParties contextRef="FI2016Q4_us-gaap_BalanceSheetLocationAxis_us-gaap_AccountsReceivableMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_KingstoneHongKongMember" decimals="-5" id="Fact-ED55CFBDAA0725684F2B0FC58BF1A1CA" unitRef="usd">300000</us-gaap:DueFromRelatedParties>
	<us-gaap:DueFromRelatedParties contextRef="FI2017Q1_us-gaap_BalanceSheetLocationAxis_us-gaap_AccountsReceivableMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_KingstoneHongKongMember" decimals="-5" id="Fact-D22A083ABAC75B98B6F00B7FB5073CC3" unitRef="usd">300000</us-gaap:DueFromRelatedParties>
	<us-gaap:EarningsPerShareBasic contextRef="FD2016Q1YTD" decimals="2" id="Fact-D0641BA9D5805796836655B6731389AC" unitRef="usdPerShare">-0.31</us-gaap:EarningsPerShareBasic>
	<us-gaap:EarningsPerShareBasic contextRef="FD2017Q1YTD" decimals="2" id="Fact-24F44B3E0E8754B787B71769DB9A939E" unitRef="usdPerShare">0.00</us-gaap:EarningsPerShareBasic>
	<us-gaap:EarningsPerShareDiluted contextRef="FD2016Q1YTD" decimals="2" id="Fact-E2E2E18CB21852988EF6F244D8CB0592" unitRef="usdPerShare">-0.31</us-gaap:EarningsPerShareDiluted>
	<us-gaap:EarningsPerShareDiluted contextRef="FD2017Q1YTD" decimals="2" id="Fact-07FFEEF949AB54398B1C5C699C6F8983" unitRef="usdPerShare">0.00</us-gaap:EarningsPerShareDiluted>
	<us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents contextRef="FD2016Q1YTD" decimals="-3" id="Fact-DBBA04857E745839924A2CD44670333E" unitRef="usd">-36000</us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents>
	<us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents contextRef="FD2017Q1YTD" decimals="-3" id="Fact-4A800882EBDB5863B1B3F801D81284FB" unitRef="usd">-257000</us-gaap:EffectOfExchangeRateOnCashAndCashEquivalents>
	<us-gaap:EmployeeRelatedLiabilitiesCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-1BE67EE052A158A899BDF51219DB7DD3" unitRef="usd">5710000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
	<us-gaap:EmployeeRelatedLiabilitiesCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-3FB3CCC262785B0893B7DC8648992072" unitRef="usd">6232000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
	<us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense contextRef="FD2016Q1YTD" decimals="-3" id="Fact-3F907AB369FE5F32A05FA0479E573764" unitRef="usd">48000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
	<us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense contextRef="FD2017Q1YTD" decimals="-3" id="Fact-B51A251520545048A0E285FD43DE90E8" unitRef="usd">35000</us-gaap:EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="FI2015Q4_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember" decimals="2" id="Fact-1D5CD2FA056D5E358429D3F4886143D7" unitRef="number">0.15</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestmentOwnershipPercentage contextRef="FI2017Q1_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember" decimals="2" id="Fact-674A70DABB3F50E6A943E32C0DA6D41A" unitRef="number">0.15</us-gaap:EquityMethodInvestmentOwnershipPercentage>
	<us-gaap:EquityMethodInvestments contextRef="FI2016Q4" decimals="-3" id="Fact-4ED7F7E2B30A58CEA25A6360728238CD" unitRef="usd">3032000</us-gaap:EquityMethodInvestments>
	<us-gaap:EquityMethodInvestments contextRef="FI2016Q4_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember" decimals="-5" id="Fact-50797833F6F65485BA7AC169675E851F" unitRef="usd">3000000</us-gaap:EquityMethodInvestments>
	<us-gaap:EquityMethodInvestments contextRef="FI2017Q1" decimals="-3" id="Fact-FB92A94AB37E5D4591776A837674AD49" unitRef="usd">2890000</us-gaap:EquityMethodInvestments>
	<us-gaap:EquityMethodInvestments contextRef="FI2017Q1_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember" decimals="-5" id="Fact-4B9BBA690E2F55869CEA70104975DAEE" unitRef="usd">2900000</us-gaap:EquityMethodInvestments>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-44C0385675A25A378A4A6E834FF518BD">P10Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-158C83295405CFDC063D18EAA3193862">P6Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-5CC63B2D6BC256D7B749AA332A104675">P10Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-B76486B1A44D51689FC96E85B7B54D08">P2Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-105AE73751CB56C686CB12AB8E3F3894">P10Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-0FB7D168711F5277AD3D00A2E80F949E">P5Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-68F9327E3F5B56FCBC9631D2806B6651">P15Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetUsefulLife contextRef="FD2017Q1YTD_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-7539AAE0A6C05F45966980BD588B7F5D">P10Y</us-gaap:FiniteLivedIntangibleAssetUsefulLife>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2016Q4" decimals="-3" id="Fact-E59DAEFFCB37567D9120A0E2A6A61494" unitRef="usd">3278000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-814FDC7336655EABBCB0C2290EEBFA89" unitRef="usd">1164000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-43B272829F2458398266881C5AB0A88B" unitRef="usd">217000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-D23B4547D00658B6B2560B22AAD0925A" unitRef="usd">1678000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-1782261607E55D4FA86157AB002F9687" unitRef="usd">219000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2017Q1" decimals="-3" id="Fact-CD04FC80A2BF5422AED0164C9AB65C8C" unitRef="usd">3187000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-DEFED3A08E4A596F9473AEB500FA7148" unitRef="usd">1172000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-53064BE7BA1E5FB49D84175F0F1B00F7" unitRef="usd">239000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-9309A967B9E65C96AF04FB9758B10E5D" unitRef="usd">1576000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-093165B536D35DAB92F34AB5C79E4AC5" unitRef="usd">200000</us-gaap:FiniteLivedIntangibleAssetsAccumulatedAmortization>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2016Q4" decimals="-3" id="Fact-29AB13D10E0F5607A3845BCCF22FAF52" unitRef="usd">7378000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-658EF796531E5495A57151E0139AD9A0" unitRef="usd">2432000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-81000CFFE63058F6B5F5F82ADC587BA3" unitRef="usd">277000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-D32BDE50DFF857B0A6191FEC399AA67E" unitRef="usd">3214000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-239034BB2D26573FA7ABC1D3EF5CF39F" unitRef="usd">1455000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2017Q1" decimals="-3" id="Fact-D60B895FE76350138606C75FA5A8AEF4" unitRef="usd">7102000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-26EFE7C4D1595F9E9745C043C7823FAB" unitRef="usd">2387000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-286570C0BF44519E8A1E73C6C55A5965" unitRef="usd">260000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-85176DF42EAF55A5B9F305934F1BFEAE" unitRef="usd">3014000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsGross contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-F348356F3A865958902F12A33E837B2C" unitRef="usd">1441000</us-gaap:FiniteLivedIntangibleAssetsGross>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2016Q4" decimals="-3" id="Fact-D14F9873B21F5D09B3C88CEC59EA391D" unitRef="usd">4100000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-1E89ABB997C45B168EEFDDAD62B1DA5B" unitRef="usd">1268000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-01FB9C1CF636586ABE9E707859972C90" unitRef="usd">60000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-43AC8FB997CB59D8AD9780BCA96CBB18" unitRef="usd">1536000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2016Q4_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-D120D7A294E8531BB6EAA4853672DC6E" unitRef="usd">1236000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2017Q1" decimals="-3" id="Fact-39151BBF58455824A10516D9D0E8123D" unitRef="usd">3915000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_CustomerListsMember" decimals="-3" id="Fact-543BC7EA74F25C6C87610E59C0A120B8" unitRef="usd">1215000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_OtherIntangibleAssetsMember" decimals="-3" id="Fact-2B48DBB129695A61AB9C2B149539F84F" unitRef="usd">21000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_PatentedTechnologyMember" decimals="-3" id="Fact-A375A4A05DAB5E35803C8FD98252CFBC" unitRef="usd">1438000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:FiniteLivedIntangibleAssetsNet contextRef="FI2017Q1_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_us-gaap_TradeNamesMember" decimals="-3" id="Fact-2E2872A7E9D654E2A5779AD928709E8F" unitRef="usd">1241000</us-gaap:FiniteLivedIntangibleAssetsNet>
	<us-gaap:Goodwill contextRef="FI2016Q4" decimals="-3" id="Fact-9B3DB58124AD5CCB80EA2B624F82A33E" unitRef="usd">11119000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-2689CE8A76B656459A348B3C579970EF" unitRef="usd">728000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-FFEEB7966CA455649DABBA9C979DD201" unitRef="usd">5063000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-E569235F379A5B57BB74E92619BB1AE0" unitRef="usd">5328000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2017Q1" decimals="-3" id="Fact-A6F72D5D9D205A98A42EDEDBB8C25677" unitRef="usd">10789000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-897B4C47F9175AF7AFC3676CCB3811EE" unitRef="usd">728000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-5D5104C7ECC25F268B2EF9CDA8EFD44D" unitRef="usd">5063000</us-gaap:Goodwill>
	<us-gaap:Goodwill contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-C982A0E778A6554F9326962701C21250" unitRef="usd">4998000</us-gaap:Goodwill>
	<us-gaap:GoodwillGross contextRef="FI2016Q4" decimals="-3" id="Fact-D2AB663D592457F68791528AFF5EAF24" unitRef="usd">12388000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-CA86B32BF4615225A52FF27978422D4B" unitRef="usd">728000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-8D1B4757C80F5D31959BDA08BB7A2BC4" unitRef="usd">5063000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-D3C3CEB8AF785D17A6180D3A03D18049" unitRef="usd">6597000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2017Q1" decimals="-3" id="Fact-ABEB87D2FC1A5C1AB239A12B00C5302F" unitRef="usd">11968000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-0DFC87B583F15C079EC7BC75D6C42B90" unitRef="usd">728000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-348EE626D2BF5F6EA338672B7D6DD32D" unitRef="usd">5063000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillGross contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-617242141ACC57F7BE9CE34649C0DC3D" unitRef="usd">6177000</us-gaap:GoodwillGross>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2016Q4" decimals="-3" id="Fact-2F96DFA23B515F12A81EAD4FDB00E112" unitRef="usd">1269000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-D0DD4AB211F95F0596CE84441BF38CC2" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-CE84B3A3A3275D1698A80CDD0CAC984A" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2016Q4_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-B3BBB7DDB5785CB7A39B20203BC947E2" unitRef="usd">1269000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2017Q1" decimals="-3" id="Fact-D993552E661B529DA1CA2D5006BB1DDB" unitRef="usd">1179000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-C8E220BA6A8A58AABB64153F0C01367E" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-4F66122B359853508FC35C5D8659235F" unitRef="usd">0</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillImpairedAccumulatedImpairmentLoss contextRef="FI2017Q1_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-5C0532AB67E75C7BAD85FF338AADCBF9" unitRef="usd">1179000</us-gaap:GoodwillImpairedAccumulatedImpairmentLoss>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2017Q1YTD" decimals="-3" id="Fact-77F628298790520CAB3873EEB02CE676" unitRef="usd">-330000</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2017Q1YTD_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-9477A858EF395AE1AAF7FF377EA4BB42" unitRef="usd">0</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2017Q1YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-2CADFE8916115BBEA76E904E6278D692" unitRef="usd">0</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GoodwillTranslationAdjustments contextRef="FD2017Q1YTD_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-D44140E1677658D9BCB972AF728C8366" unitRef="usd">-330000</us-gaap:GoodwillTranslationAdjustments>
	<us-gaap:GrossProfit contextRef="FD2016Q1YTD" decimals="-3" id="Fact-25A5A5A0A95A5884B545402C95FCECC0" unitRef="usd">5955000</us-gaap:GrossProfit>
	<us-gaap:GrossProfit contextRef="FD2017Q1YTD" decimals="-3" id="Fact-939FC4D785D257FA85D98B4D378B9978" unitRef="usd">8443000</us-gaap:GrossProfit>
	<us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments contextRef="FD2016Q1YTD" decimals="-3" id="Fact-16D572225C5B50A7AE784D521217AB1C" unitRef="usd">-4148000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments contextRef="FD2017Q1YTD" decimals="-3" id="Fact-89EA79297B2B59CEA26329DFCD7D37B4" unitRef="usd">-242000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromEquityMethodInvestments contextRef="FD2016Q1YTD" decimals="-3" id="Fact-F36E02633DA75773B682ED41F0673CAD" unitRef="usd">-17000</us-gaap:IncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromEquityMethodInvestments contextRef="FD2016Q1YTD_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember" decimals="-5" id="Fact-FB95E7F01336D11A80510FB59929AEE7" unitRef="usd">0</us-gaap:IncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromEquityMethodInvestments contextRef="FD2017Q1YTD" decimals="-3" id="Fact-9CBC2DA787C35FF7BA58EC30DA4CE311" unitRef="usd">-143000</us-gaap:IncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeLossFromEquityMethodInvestments contextRef="FD2017Q1YTD_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_asys_KingstoneHoldingCompanyMember" decimals="-5" id="Fact-7F590FEA2CAF57D0BB9AA146465A0BBB" unitRef="usd">-100000</us-gaap:IncomeLossFromEquityMethodInvestments>
	<us-gaap:IncomeTaxExpenseBenefit contextRef="FD2016Q1YTD" decimals="-3" id="Fact-EA223710D4A8583CAEB3AD462E242A0D" unitRef="usd">300000</us-gaap:IncomeTaxExpenseBenefit>
	<us-gaap:IncomeTaxExpenseBenefit contextRef="FD2017Q1YTD" decimals="-3" id="Fact-DA51E2423B635A2DB99DC5C8A7A776BA" unitRef="usd">90000</us-gaap:IncomeTaxExpenseBenefit>
	<us-gaap:IncomeTaxesPaid contextRef="FD2016Q1YTD" decimals="-3" id="Fact-3EA1FF0187B456FC8070B4D53919C80E" unitRef="usd">0</us-gaap:IncomeTaxesPaid>
	<us-gaap:IncomeTaxesPaid contextRef="FD2017Q1YTD" decimals="-3" id="Fact-C1DABAC697B45FADA7AF744EEB61A757" unitRef="usd">67000</us-gaap:IncomeTaxesPaid>
	<us-gaap:IncomeTaxesReceivable contextRef="FI2016Q4" decimals="-3" id="Fact-9CA5E9485B0A5A7BA25BF992210B230E" unitRef="usd">260000</us-gaap:IncomeTaxesReceivable>
	<us-gaap:IncomeTaxesReceivable contextRef="FI2017Q1" decimals="-3" id="Fact-B88D1C19066559318B25D7753E6AB1C7" unitRef="usd">0</us-gaap:IncomeTaxesReceivable>
	<us-gaap:IncreaseDecreaseInAccountsPayable contextRef="FD2016Q1YTD" decimals="-3" id="Fact-0A9EB6FD673C5E7EBAF3E85618B9306B" unitRef="usd">-4861000</us-gaap:IncreaseDecreaseInAccountsPayable>
	<us-gaap:IncreaseDecreaseInAccountsPayable contextRef="FD2017Q1YTD" decimals="-3" id="Fact-92D7CC80E7AF5C08AA26BC769BC1B428" unitRef="usd">78000</us-gaap:IncreaseDecreaseInAccountsPayable>
	<us-gaap:IncreaseDecreaseInAccountsReceivable contextRef="FD2016Q1YTD" decimals="-3" id="Fact-382EA8A71C8F5940A85FF2DC98A6D3F7" unitRef="usd">309000</us-gaap:IncreaseDecreaseInAccountsReceivable>
	<us-gaap:IncreaseDecreaseInAccountsReceivable contextRef="FD2017Q1YTD" decimals="-3" id="Fact-B511B35480A25C5AB981332A491A8C1C" unitRef="usd">3600000</us-gaap:IncreaseDecreaseInAccountsReceivable>
	<us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable contextRef="FD2016Q1YTD" decimals="-3" id="Fact-1F289FC3304E5E7DA949ACBDE3EFE81A" unitRef="usd">212000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
	<us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable contextRef="FD2017Q1YTD" decimals="-3" id="Fact-376380B4ADC158A98D5816A1E7EC361A" unitRef="usd">239000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
	<us-gaap:IncreaseDecreaseInDeferredIncomeTaxes contextRef="FD2016Q1YTD" decimals="-3" id="Fact-81599C27E39B53F386C3D554FC13D312" unitRef="usd">-9000</us-gaap:IncreaseDecreaseInDeferredIncomeTaxes>
	<us-gaap:IncreaseDecreaseInDeferredIncomeTaxes contextRef="FD2017Q1YTD" decimals="-3" id="Fact-1A012C6E127458159346D4171939B5F5" unitRef="usd">-31000</us-gaap:IncreaseDecreaseInDeferredIncomeTaxes>
	<us-gaap:IncreaseDecreaseInInventories contextRef="FD2016Q1YTD" decimals="-3" id="Fact-160239DDB6FD51908C25193CF94C718C" unitRef="usd">-1412000</us-gaap:IncreaseDecreaseInInventories>
	<us-gaap:IncreaseDecreaseInInventories contextRef="FD2017Q1YTD" decimals="-3" id="Fact-F0E3788F428A5FDAA5D8773A76E9C4FF" unitRef="usd">-1621000</us-gaap:IncreaseDecreaseInInventories>
	<us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets contextRef="FD2016Q1YTD" decimals="-3" id="Fact-ED2F0F798D6552CAA43319B289115FC9" unitRef="usd">167000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
	<us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets contextRef="FD2017Q1YTD" decimals="-3" id="Fact-831C896260F35B47B0166D7B2508EC04" unitRef="usd">-725000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
	<us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities contextRef="FD2016Q1YTD" decimals="-3" id="Fact-AD232B24F82856A1B2C86758E8B986F1" unitRef="usd">220000</us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities>
	<us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities contextRef="FD2017Q1YTD" decimals="-3" id="Fact-CDD4FE66839D5026A001A9F9E55E10FC" unitRef="usd">2425000</us-gaap:IncreaseDecreaseInRestrictedCashForOperatingActivities>
	<us-gaap:IntangibleAssetsNetExcludingGoodwill contextRef="FI2016Q4" decimals="-3" id="Fact-87539B52AAB6592DA63A3A67EAE21CE6" unitRef="usd">4100000</us-gaap:IntangibleAssetsNetExcludingGoodwill>
	<us-gaap:IntangibleAssetsNetExcludingGoodwill contextRef="FI2017Q1" decimals="-3" id="Fact-761F54A78EED596C9C4429F0CC1D0D29" unitRef="usd">3915000</us-gaap:IntangibleAssetsNetExcludingGoodwill>
	<us-gaap:InterestCostsCapitalized contextRef="FD2016Q1YTD" decimals="-3" id="Fact-0F604F8250DD5802A04BF1416A55D021" unitRef="usd">0</us-gaap:InterestCostsCapitalized>
	<us-gaap:InterestCostsCapitalized contextRef="FD2017Q1YTD" decimals="-3" id="Fact-D9751CA9A56C5A408600D14E274FA17C" unitRef="usd">190000</us-gaap:InterestCostsCapitalized>
	<us-gaap:InterestPaid contextRef="FD2016Q1YTD" decimals="-3" id="Fact-364188D4A7FF5F359E6620778267DD04" unitRef="usd">89000</us-gaap:InterestPaid>
	<us-gaap:InterestPaid contextRef="FD2017Q1YTD" decimals="-3" id="Fact-104674C6F2A059F59C421D3F06FA5D87" unitRef="usd">66000</us-gaap:InterestPaid>
	<us-gaap:InventoryFinishedGoodsNetOfReserves contextRef="FI2016Q4" decimals="-3" id="Fact-50617728976D5395B8F1A20581010649" unitRef="usd">3744000</us-gaap:InventoryFinishedGoodsNetOfReserves>
	<us-gaap:InventoryFinishedGoodsNetOfReserves contextRef="FI2017Q1" decimals="-3" id="Fact-E598AFBEA64252B0A3341F6E707B6A5F" unitRef="usd">2873000</us-gaap:InventoryFinishedGoodsNetOfReserves>
	<us-gaap:InventoryNet contextRef="FI2016Q4" decimals="-3" id="Fact-08A1C5BCA879533F90DF473F5F5430E6" unitRef="usd">23223000</us-gaap:InventoryNet>
	<us-gaap:InventoryNet contextRef="FI2017Q1" decimals="-3" id="Fact-82D5A7D6C90C53C8BCCDB7760592CB66" unitRef="usd">20853000</us-gaap:InventoryNet>
	<us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves contextRef="FI2016Q4" decimals="-3" id="Fact-313FDF61FDBC5863AA4DF893B1123F79" unitRef="usd">12435000</us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves>
	<us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves contextRef="FI2017Q1" decimals="-3" id="Fact-7C5C3DC7D9B05E818B38C533556F566B" unitRef="usd">12148000</us-gaap:InventoryRawMaterialsAndSuppliesNetOfReserves>
	<us-gaap:InventoryWorkInProcessNetOfReserves contextRef="FI2016Q4" decimals="-3" id="Fact-92E5216217A65943A05AC88ED7445CF7" unitRef="usd">7044000</us-gaap:InventoryWorkInProcessNetOfReserves>
	<us-gaap:InventoryWorkInProcessNetOfReserves contextRef="FI2017Q1" decimals="-3" id="Fact-2728ACE3B8075B7185F5DA615D095CDC" unitRef="usd">5832000</us-gaap:InventoryWorkInProcessNetOfReserves>
	<us-gaap:InventoryWriteDown contextRef="FD2016Q1YTD" decimals="-3" id="Fact-8C35BFB0FA695360AF9DF31406CF0B70" unitRef="usd">39000</us-gaap:InventoryWriteDown>
	<us-gaap:InventoryWriteDown contextRef="FD2017Q1YTD" decimals="-3" id="Fact-5F46B3FBB5EA53FC8179CEF8B17BF4D4" unitRef="usd">33000</us-gaap:InventoryWriteDown>
	<us-gaap:LettersOfCreditOutstandingAmount contextRef="FI2017Q1_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember" decimals="-5" id="Fact-DC9E122613D351A0948467A4FCA0208E" unitRef="usd">200000</us-gaap:LettersOfCreditOutstandingAmount>
	<us-gaap:Liabilities contextRef="FI2016Q4" decimals="-3" id="Fact-7B8E30C636BB56C599EC9EDCC4E0DB6B" unitRef="usd">53091000</us-gaap:Liabilities>
	<us-gaap:Liabilities contextRef="FI2017Q1" decimals="-3" id="Fact-9576FAA3E097584DA4E6F5D0EFAC0CC8" unitRef="usd">51531000</us-gaap:Liabilities>
	<us-gaap:LiabilitiesAndStockholdersEquity contextRef="FI2016Q4" decimals="-3" id="Fact-BCBC69DA7A415D34BEE65A02C66874AC" unitRef="usd">118430000</us-gaap:LiabilitiesAndStockholdersEquity>
	<us-gaap:LiabilitiesAndStockholdersEquity contextRef="FI2017Q1" decimals="-3" id="Fact-F31574F3C8F55719B8DA54AD9E1A1367" unitRef="usd">115918000</us-gaap:LiabilitiesAndStockholdersEquity>
	<us-gaap:LiabilitiesCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-64608626A23E53839270289DEC3017CF" unitRef="usd">38064000</us-gaap:LiabilitiesCurrent>
	<us-gaap:LiabilitiesCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-E6D0AE04414D5834B5D7FDB5A6916163" unitRef="usd">36376000</us-gaap:LiabilitiesCurrent>
	<us-gaap:LiabilityForUncertainTaxPositionsNoncurrent contextRef="FI2016Q4" decimals="-3" id="Fact-BF9E39DFF0465ADBBE7A57499409ED16" unitRef="usd">5930000</us-gaap:LiabilityForUncertainTaxPositionsNoncurrent>
	<us-gaap:LiabilityForUncertainTaxPositionsNoncurrent contextRef="FI2017Q1" decimals="-3" id="Fact-AEBD4F270E2055B9AF085DDECCE3982B" unitRef="usd">6050000</us-gaap:LiabilityForUncertainTaxPositionsNoncurrent>
	<us-gaap:LongTermDebt contextRef="FI2017Q1_dei_LegalEntityAxis_asys_SoLayTecB.V.Member" decimals="-5" id="Fact-EF94DBB2C2F85869B39D237B10CF4399" unitRef="usd">3600000</us-gaap:LongTermDebt>
	<us-gaap:LongTermDebt contextRef="FI2017Q1_us-gaap_LongtermDebtTypeAxis_asys_MortgageNoteMember" decimals="-5" id="Fact-C0C8531DC179558DB7D65C2EAA5547E1" unitRef="usd">6500000</us-gaap:LongTermDebt>
	<us-gaap:LongTermDebtCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-0E67D371B7935D23AC5AA1F29B53B25B" unitRef="usd">1134000</us-gaap:LongTermDebtCurrent>
	<us-gaap:LongTermDebtCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-8F20DF971B41582BA194CAAE011CF5A3" unitRef="usd">1010000</us-gaap:LongTermDebtCurrent>
	<us-gaap:LongTermDebtNoncurrent contextRef="FI2016Q4" decimals="-3" id="Fact-99BAC28029C057EEB5FF429CD6110BA9" unitRef="usd">9097000</us-gaap:LongTermDebtNoncurrent>
	<us-gaap:LongTermDebtNoncurrent contextRef="FI2017Q1" decimals="-3" id="Fact-75D2124887BC58B18E6B3A21BA602D64" unitRef="usd">9105000</us-gaap:LongTermDebtNoncurrent>
	<us-gaap:LossContingencyAccrualAtCarryingValue contextRef="FI2017Q1_us-gaap_BusinessAcquisitionAxis_asys_BTUInternationalIncBTUMergerMember_us-gaap_LossContingenciesByNatureOfContingencyAxis_us-gaap_LossFromCatastrophesMember" decimals="-5" id="Fact-7F6A927BA2CC5F1B9BE235872D089859" unitRef="usd">100000</us-gaap:LossContingencyAccrualAtCarryingValue>
	<us-gaap:LossContingencyClaimsSettledNumber contextRef="FD2017Q1YTD_us-gaap_LitigationCaseAxis_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_us-gaap_LitigationStatusAxis_us-gaap_SettledLitigationMember" decimals="INF" id="Fact-CE317557D543539DA512ED411E22F323" unitRef="claims">2</us-gaap:LossContingencyClaimsSettledNumber>
	<us-gaap:MinorityInterest contextRef="FI2016Q4" decimals="-3" id="Fact-1DB14AB409CA5AB5829D6E49BFD2F16B" unitRef="usd">-1718000</us-gaap:MinorityInterest>
	<us-gaap:MinorityInterest contextRef="FI2017Q1" decimals="-3" id="Fact-EF9D4960C1115B488EA6660F55A3A381" unitRef="usd">-2093000</us-gaap:MinorityInterest>
	<us-gaap:NetCashProvidedByUsedInFinancingActivities contextRef="FD2016Q1YTD" decimals="-3" id="Fact-2789E549183751B59F5C2F115702CE72" unitRef="usd">650000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
	<us-gaap:NetCashProvidedByUsedInFinancingActivities contextRef="FD2017Q1YTD" decimals="-3" id="Fact-87D815679D615951BBB988D843365E0A" unitRef="usd">-138000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
	<us-gaap:NetCashProvidedByUsedInInvestingActivities contextRef="FD2016Q1YTD" decimals="-3" id="Fact-BA861D82665B5185ABDFDD37B6DCDB4F" unitRef="usd">6904000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
	<us-gaap:NetCashProvidedByUsedInInvestingActivities contextRef="FD2017Q1YTD" decimals="-3" id="Fact-D7FF98FF2D1C55E0A64119962360BD84" unitRef="usd">-85000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
	<us-gaap:NetCashProvidedByUsedInOperatingActivities contextRef="FD2016Q1YTD" decimals="-3" id="Fact-77705D2ABE835B6D85D6144ABFA2F3E8" unitRef="usd">-10753000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
	<us-gaap:NetCashProvidedByUsedInOperatingActivities contextRef="FD2017Q1YTD" decimals="-3" id="Fact-5E689A33EE8753B8BA148C179F524742" unitRef="usd">-3537000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
	<us-gaap:NetIncomeLoss contextRef="FD2016Q1YTD" decimals="-3" id="Fact-74116E70D7F55175AF107A0AC5CD6F03" unitRef="usd">-4015000</us-gaap:NetIncomeLoss>
	<us-gaap:NetIncomeLoss contextRef="FD2017Q1YTD" decimals="-3" id="Fact-289B365487A3551FA3136253816993A2" unitRef="usd">-53000</us-gaap:NetIncomeLoss>
	<us-gaap:NetIncomeLossAttributableToNoncontrollingInterest contextRef="FD2016Q1YTD" decimals="-3" id="Fact-541D2C0693135A939AF0B9C7ECC8DADA" unitRef="usd">-433000</us-gaap:NetIncomeLossAttributableToNoncontrollingInterest>
	<us-gaap:NetIncomeLossAttributableToNoncontrollingInterest contextRef="FD2017Q1YTD" decimals="-3" id="Fact-E7ECF3FF909F5D60A28868D344D81A84" unitRef="usd">-279000</us-gaap:NetIncomeLossAttributableToNoncontrollingInterest>
	<us-gaap:NumberOfOperatingSegments contextRef="FD2017Q1YTD" decimals="INF" id="Fact-AD9493FE3BBB50A1B4200EFDB1F42FB0" unitRef="segment">3</us-gaap:NumberOfOperatingSegments>
	<us-gaap:OperatingIncomeLoss contextRef="FD2016Q1YTD" decimals="-3" id="Fact-42014B9AD3CA51FDB35E1BE6BEFDF8CE" unitRef="usd">-3929000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember" decimals="-3" id="Fact-3EDE329001905BCA9F11179761EA9C7A" unitRef="usd">-2074000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-96B8FD78C2CE572AB9193FA38CE69F9B" unitRef="usd">169000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-9981BC3B855758AABFEB7EE6C09B2F9D" unitRef="usd">-160000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-3CF42D9D39A75BF6969B348B8BDEDA9D" unitRef="usd">-1864000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2017Q1YTD" decimals="-3" id="Fact-5A437FFB26725E97BCF0555F5CB2EDD2" unitRef="usd">-180000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_CorporateNonSegmentMember" decimals="-3" id="Fact-8898E7E22EAD5C1896E7883B05A7DC49" unitRef="usd">-1982000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-C69655B87FDA57FF908639B9CB244C51" unitRef="usd">464000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-13D43507973151DE95F5702889CA17CA" unitRef="usd">2361000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OperatingIncomeLoss contextRef="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-214CEC177DCD5D7DB59C973B163233F9" unitRef="usd">-1023000</us-gaap:OperatingIncomeLoss>
	<us-gaap:OtherAssetsCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-D913B46929C55A81BC4B5A06D00180ED" unitRef="usd">4617000</us-gaap:OtherAssetsCurrent>
	<us-gaap:OtherAssetsCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-F65DB2D945615ADA9B2DCF4DFD48CC60" unitRef="usd">3804000</us-gaap:OtherAssetsCurrent>
	<us-gaap:OtherAssetsNoncurrent contextRef="FI2016Q4" decimals="-3" id="Fact-9094B8A96FEF5496843D5F3D6391FC59" unitRef="usd">1095000</us-gaap:OtherAssetsNoncurrent>
	<us-gaap:OtherAssetsNoncurrent contextRef="FI2017Q1" decimals="-3" id="Fact-7096CF7A3C89581D921540062D0FA529" unitRef="usd">1049000</us-gaap:OtherAssetsNoncurrent>
	<us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax contextRef="FD2016Q1YTD" decimals="-3" id="Fact-7D0C5F3D40E95B40984B0912A3404068" unitRef="usd">-535000</us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax>
	<us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax contextRef="FD2017Q1YTD" decimals="-3" id="Fact-DCA1035308A651C69CD690F8437415D3" unitRef="usd">-941000</us-gaap:OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax>
	<us-gaap:OtherDeferredCreditsCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-5D837E14469E5EA2BEA95DBD2FDD3142" unitRef="usd">4709000</us-gaap:OtherDeferredCreditsCurrent>
	<us-gaap:OtherDeferredCreditsCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-F89D3DC2BB1851BCB0692188C7F76E2D" unitRef="usd">3812000</us-gaap:OtherDeferredCreditsCurrent>
	<us-gaap:OtherNonoperatingIncomeExpense contextRef="FD2016Q1YTD" decimals="-3" id="Fact-6CA160DE270D56C499760B0BC32112DD" unitRef="usd">-202000</us-gaap:OtherNonoperatingIncomeExpense>
	<us-gaap:OtherNonoperatingIncomeExpense contextRef="FD2017Q1YTD" decimals="-3" id="Fact-541632DC528A548CB510164B9E940C94" unitRef="usd">81000</us-gaap:OtherNonoperatingIncomeExpense>
	<us-gaap:PaymentsForLegalSettlements contextRef="D2016Q3Arp1_us-gaap_LitigationCaseAxis_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_us-gaap_LitigationStatusAxis_us-gaap_SettledLitigationMember" decimals="-3" id="Fact-4FC6FAE04A2354C59BD0BD590B80E84C" unitRef="usd">325000</us-gaap:PaymentsForLegalSettlements>
	<us-gaap:PaymentsToAcquirePropertyPlantAndEquipment contextRef="FD2014Q4YTD_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_asys_TempressSystemsandEnergyResearchCentreAgreementMember" decimals="-5" id="Fact-C0E13F093ABC5C96B92B5D66C18C2EB0" unitRef="usd">1400000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
	<us-gaap:PaymentsToAcquirePropertyPlantAndEquipment contextRef="FD2016Q1YTD" decimals="-3" id="Fact-5CE09148C6A25F98B2E9ECD9CFE720B7" unitRef="usd">108000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
	<us-gaap:PaymentsToAcquirePropertyPlantAndEquipment contextRef="FD2017Q1YTD" decimals="-3" id="Fact-E1870D0904625400BDA740F695BB8C18" unitRef="usd">86000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
	<us-gaap:PercentageOfWeightedAverageCostInventory contextRef="FI2016Q3" decimals="2" id="Fact-66B2546D1C0556C79D167FFE85219EE7" unitRef="number">0.50</us-gaap:PercentageOfWeightedAverageCostInventory>
	<us-gaap:PreferredStockSharesAuthorized contextRef="FI2016Q4" decimals="INF" id="Fact-A7A676CD4A555B4F9F9F8F7801D14967" unitRef="shares">100000000</us-gaap:PreferredStockSharesAuthorized>
	<us-gaap:PreferredStockSharesAuthorized contextRef="FI2017Q1" decimals="INF" id="Fact-FF2CE9ABBECC57A09E246FDE6DD00C35" unitRef="shares">100000000</us-gaap:PreferredStockSharesAuthorized>
	<us-gaap:PreferredStockSharesIssued contextRef="FI2016Q4" decimals="INF" id="Fact-310ED5EF9C565AFE812ABC2E5AC75EE9" unitRef="shares">0</us-gaap:PreferredStockSharesIssued>
	<us-gaap:PreferredStockSharesIssued contextRef="FI2017Q1" decimals="INF" id="Fact-2D737020F5D85FE3BF5513BC9D8EB60A" unitRef="shares">0</us-gaap:PreferredStockSharesIssued>
	<us-gaap:PreferredStockValue contextRef="FI2016Q4" decimals="-3" id="Fact-32D1679AB9E05C0D80F9D5212E7EEF63" unitRef="usd">0</us-gaap:PreferredStockValue>
	<us-gaap:PreferredStockValue contextRef="FI2017Q1" decimals="-3" id="Fact-6EF1205AD1A656DF92ABD0CB5C4CF448" unitRef="usd">0</us-gaap:PreferredStockValue>
	<us-gaap:ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries contextRef="FD2016Q1YTD" decimals="-3" id="Fact-A3A7E92921EE5C259DB0FD6B47342622" unitRef="usd">7012000</us-gaap:ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries>
	<us-gaap:ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries contextRef="FD2017Q1YTD" decimals="-3" id="Fact-1F391394388C5E3BA00EAE904F7212D7" unitRef="usd">0</us-gaap:ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries>
	<us-gaap:ProceedsFromIncomeTaxRefunds contextRef="FD2015Q1YTD" decimals="-3" id="Fact-759563457F4A50DCA1D6D89BF3EA42DA" unitRef="usd">0</us-gaap:ProceedsFromIncomeTaxRefunds>
	<us-gaap:ProceedsFromIncomeTaxRefunds contextRef="FD2016Q1YTD" decimals="-3" id="Fact-ABF343AE873858648F3685A6EF4ACE32" unitRef="usd">262000</us-gaap:ProceedsFromIncomeTaxRefunds>
	<us-gaap:ProceedsFromIssuanceOfCommonStock contextRef="FD2016Q1YTD" decimals="-3" id="Fact-3AD0BBA3D9B75C3CADE0658DF457767B" unitRef="usd">0</us-gaap:ProceedsFromIssuanceOfCommonStock>
	<us-gaap:ProceedsFromIssuanceOfCommonStock contextRef="FD2017Q1YTD" decimals="-3" id="Fact-47FFF681537B5943AE4D354DBD952E70" unitRef="usd">1000</us-gaap:ProceedsFromIssuanceOfCommonStock>
	<us-gaap:ProceedsFromIssuanceOfDebt contextRef="FD2017Q1YTD_dei_LegalEntityAxis_asys_SoLayTecB.V.Member" decimals="-5" id="Fact-364F709DD77E1EE4614E0FA712A5DBD2" unitRef="usd">100000</us-gaap:ProceedsFromIssuanceOfDebt>
	<us-gaap:ProceedsFromIssuanceOfLongTermDebt contextRef="FD2016Q1YTD" decimals="-3" id="Fact-596A296965FD549D9B115818F187A4CB" unitRef="usd">830000</us-gaap:ProceedsFromIssuanceOfLongTermDebt>
	<us-gaap:ProceedsFromIssuanceOfLongTermDebt contextRef="FD2017Q1YTD" decimals="-3" id="Fact-67FB7A757DB855DA88D220DF8C4EA1B8" unitRef="usd">21000</us-gaap:ProceedsFromIssuanceOfLongTermDebt>
	<us-gaap:ProceedsFromRelatedPartyDebt contextRef="FD2017Q1YTD_dei_LegalEntityAxis_asys_SoLayTecB.V.Member_us-gaap_RelatedPartyTransactionAxis_asys_TNOTechnostartersB.V.LoansMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_TNOTechnostartersB.V.Member" decimals="-5" id="Fact-4691D28AD55CCBA7FEA40FB9A79BCFDD" unitRef="usd">1200000</us-gaap:ProceedsFromRelatedPartyDebt>
	<us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment contextRef="FD2016Q1YTD" decimals="-3" id="Fact-86B90FE7F4D35A7DA31D3B22F9EC37D5" unitRef="usd">0</us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment>
	<us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment contextRef="FD2017Q1YTD" decimals="-3" id="Fact-C82C34706A5A5FF992F698199C0F7943" unitRef="usd">1000</us-gaap:ProceedsFromSaleOfPropertyPlantAndEquipment>
	<us-gaap:ProductWarrantyAccrualClassifiedCurrent contextRef="FI2016Q4" decimals="-3" id="Fact-A2AEA04337985DA286662595AA2CE9F4" unitRef="usd">795000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
	<us-gaap:ProductWarrantyAccrualClassifiedCurrent contextRef="FI2017Q1" decimals="-3" id="Fact-5D13800AFC00507A8D1E0ECC3473547D" unitRef="usd">879000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
	<us-gaap:ProfitLoss contextRef="FD2016Q1YTD" decimals="-3" id="Fact-3D8B5ECB2F215B51B8438FAFBE14A23F" unitRef="usd">-4448000</us-gaap:ProfitLoss>
	<us-gaap:ProfitLoss contextRef="FD2017Q1YTD" decimals="-3" id="Fact-0D6A7064E48951CDAA1AC58FB75C8E86" unitRef="usd">-332000</us-gaap:ProfitLoss>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2016Q4" decimals="-3" id="Fact-402D992ABC575D888B10783C0FB1A38D" unitRef="usd">32737000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2016Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember" decimals="-3" id="Fact-721BD297C9F157318F9A056CF2A2E32E" unitRef="usd">5426000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2016Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember" decimals="-3" id="Fact-29A5EB78362454A5B81E81DA3784CEA5" unitRef="usd">18255000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2016Q4_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember" decimals="-3" id="Fact-57588B481D5D51859CF91B4B59B1F65F" unitRef="usd">9056000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2017Q1" decimals="-3" id="Fact-7CFA8F509E4E51ED8E787A18050B64E1" unitRef="usd">31747000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2017Q1_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember" decimals="-3" id="Fact-11CD4E9F476E5801A6E404E9010CBC3C" unitRef="usd">5199000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2017Q1_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LandBuildingsAndImprovementsMember" decimals="-3" id="Fact-94864EDFB46A5BCB868604BB64C544EE" unitRef="usd">17799000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentGross contextRef="FI2017Q1_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember" decimals="-3" id="Fact-27131F7393DB549092A3269AA633490B" unitRef="usd">8749000</us-gaap:PropertyPlantAndEquipmentGross>
	<us-gaap:PropertyPlantAndEquipmentNet contextRef="FI2016Q4" decimals="-3" id="Fact-1D7451C55FE6567DA4BDC9DEE38BAC38" unitRef="usd">15960000</us-gaap:PropertyPlantAndEquipmentNet>
	<us-gaap:PropertyPlantAndEquipmentNet contextRef="FI2017Q1" decimals="-3" id="Fact-DFDA59DE6A875DAE99D2DD11791576FF" unitRef="usd">15290000</us-gaap:PropertyPlantAndEquipmentNet>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-268407516350501D8080E96707210AF2">P30Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingAndBuildingImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-8281077D7DDD50DE8494D57CC6E3FD60">P20Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-29AE83168EEB5D2E8FC49CCAD1EE1782">P10Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_FurnitureAndFixturesMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-5DE8C059B6F85E9AA12D20D134BDECBF">P5Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-589DDBF092935B748C2F9821D91DBCA4">P7Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_LeaseholdImprovementsMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-B864D04AB0325593BE4F349E005599EF">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-92FEBA8444BC5CC2A2A5DBD35ABBCC37">P7Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:PropertyPlantAndEquipmentUsefulLife contextRef="FD2017Q1YTD_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_MachineryAndEquipmentMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-68E57C94F6655BA5BC031C86AD7D5D81">P3Y</us-gaap:PropertyPlantAndEquipmentUsefulLife>
	<us-gaap:ProvisionForDoubtfulAccounts contextRef="FD2016Q1YTD" decimals="-3" id="Fact-056FFA5920CA5B44B024CE14907F15D2" unitRef="usd">-158000</us-gaap:ProvisionForDoubtfulAccounts>
	<us-gaap:ProvisionForDoubtfulAccounts contextRef="FD2017Q1YTD" decimals="-3" id="Fact-2C1C085E9E4858B6A06EB3E94194362A" unitRef="usd">-1178000</us-gaap:ProvisionForDoubtfulAccounts>
	<us-gaap:PurchaseObligation contextRef="FI2016Q4" decimals="-5" id="Fact-16DA8E3E0B8952129202BBFB032D42F4" unitRef="usd">11300000</us-gaap:PurchaseObligation>
	<us-gaap:PurchaseObligation contextRef="FI2017Q1" decimals="-5" id="Fact-0B258AA312E75292917DCA1F221D107F" unitRef="usd">14200000</us-gaap:PurchaseObligation>
	<us-gaap:RelatedPartyTransactionRate contextRef="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MaximumMember_us-gaap_RelatedPartyTransactionAxis_asys_TNOTechnostartersB.V.LoansMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_TNOTechnostartersB.V.Member" decimals="3" id="Fact-756A4A523617E358EDFE0FC023C33517" unitRef="number">0.125</us-gaap:RelatedPartyTransactionRate>
	<us-gaap:RelatedPartyTransactionRate contextRef="FD2017Q1YTD_us-gaap_RangeAxis_us-gaap_MinimumMember_us-gaap_RelatedPartyTransactionAxis_asys_TNOTechnostartersB.V.LoansMember_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_asys_TNOTechnostartersB.V.Member" decimals="3" id="Fact-D3F7CB2F80FCC2B1C25D0FC023BCC904" unitRef="number">0.095</us-gaap:RelatedPartyTransactionRate>
	<us-gaap:RepaymentsOfLongTermDebt contextRef="FD2016Q1YTD" decimals="-3" id="Fact-88BA8F61C0AD537E937E64AEC4B9E7D3" unitRef="usd">180000</us-gaap:RepaymentsOfLongTermDebt>
	<us-gaap:RepaymentsOfLongTermDebt contextRef="FD2017Q1YTD" decimals="-3" id="Fact-0BCA9542915958378E296C1CD0133B14" unitRef="usd">160000</us-gaap:RepaymentsOfLongTermDebt>
	<us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred contextRef="FD2016Q1YTD" decimals="-3" id="Fact-559775825C9953E6A3AE6BEE56F89A46" unitRef="usd">327000</us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred>
	<us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred contextRef="FD2017Q1YTD" decimals="-3" id="Fact-DADC59F256C654E4B89BABC3E4CB3B94" unitRef="usd">203000</us-gaap:ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred>
	<us-gaap:ResearchAndDevelopmentExpense contextRef="FD2016Q1YTD" decimals="-3" id="Fact-02BFCDCB8F75527E9E5C5AF35D8AFE32" unitRef="usd">2615000</us-gaap:ResearchAndDevelopmentExpense>
	<us-gaap:ResearchAndDevelopmentExpense contextRef="FD2017Q1YTD" decimals="-3" id="Fact-275FAEFEA28F554C93B765017D0EFABD" unitRef="usd">1830000</us-gaap:ResearchAndDevelopmentExpense>
	<us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue contextRef="FI2016Q4" decimals="-3" id="Fact-A51701DA96CE5773BBBE8EFA58AE0096" unitRef="usd">893000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
	<us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue contextRef="FI2016Q4" decimals="-5" id="Fact-E49A77F08B3F28E5CFC00F1EB0273086" unitRef="usd">900000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
	<us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue contextRef="FI2016Q4_us-gaap_EnvironmentalRemediationSiteAxis_asys_SuperfundSiteMember_us-gaap_OtherCommitmentsAxis_us-gaap_EnvironmentalRestorationCostsMember" decimals="-5" id="Fact-0D52AC972A1B5E6199A418147C94EE44" unitRef="usd">200000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
	<us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue contextRef="FI2017Q1" decimals="-3" id="Fact-33AB69394C355723BFC005A91A149943" unitRef="usd">3250000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
	<us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue contextRef="FI2017Q1_us-gaap_EnvironmentalRemediationSiteAxis_asys_SuperfundSiteMember_us-gaap_OtherCommitmentsAxis_us-gaap_EnvironmentalRestorationCostsMember" decimals="-5" id="Fact-FAF5CE7ED5275292973C141F8543F1A3" unitRef="usd">200000</us-gaap:RestrictedCashAndCashEquivalentsAtCarryingValue>
	<us-gaap:RetainedEarningsAccumulatedDeficit contextRef="FI2016Q4" decimals="-3" id="Fact-29DD50D57D955E29AB075079B65C6438" unitRef="usd">-35830000</us-gaap:RetainedEarningsAccumulatedDeficit>
	<us-gaap:RetainedEarningsAccumulatedDeficit contextRef="FI2017Q1" decimals="-3" id="Fact-A671BA8B1B4A5331A7E923154D8A2D14" unitRef="usd">-35883000</us-gaap:RetainedEarningsAccumulatedDeficit>
	<us-gaap:SalesRevenueNet contextRef="FD2016Q1YTD" decimals="-3" id="Fact-E007B83B31A4551C8D86256053E8048E" unitRef="usd">22074000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-08FE54DA17B152549029F56F703E44A1" unitRef="usd">1831000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-C41AF621C1C956C0A5E417A3C439D153" unitRef="usd">10700000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2016Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-39A139C44C5A59359FEB138D10C85010" unitRef="usd">9543000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2017Q1YTD" decimals="-3" id="Fact-80BF6AF5E3D1544DB9B65FCBCD57C144" unitRef="usd">29135000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_PolishingSuppliesAndEquipmentMember" decimals="-3" id="Fact-A727A9E939425632AFABEF09A3230CC9" unitRef="usd">2008000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SemiconductorEquipmentMember" decimals="-3" id="Fact-D3F899F0560257C68D4B55DC7AA5264C" unitRef="usd">15703000</us-gaap:SalesRevenueNet>
	<us-gaap:SalesRevenueNet contextRef="FD2017Q1YTD_us-gaap_ConsolidationItemsAxis_us-gaap_OperatingSegmentsMember_us-gaap_StatementBusinessSegmentsAxis_asys_SolarEquipmentMember" decimals="-3" id="Fact-3DE314AD31BF5348A0819ED72914801E" unitRef="usd">11424000</us-gaap:SalesRevenueNet>
	<us-gaap:SellingGeneralAndAdministrativeExpense contextRef="FD2016Q1YTD" decimals="-3" id="Fact-DD8286DC8FA95C8F94514EBF8D67C75D" unitRef="usd">7596000</us-gaap:SellingGeneralAndAdministrativeExpense>
	<us-gaap:SellingGeneralAndAdministrativeExpense contextRef="FD2017Q1YTD" decimals="-3" id="Fact-E2BB35CF52045A0FA3CFAA2EC5FA8189" unitRef="usd">6996000</us-gaap:SellingGeneralAndAdministrativeExpense>
	<us-gaap:ShareBasedCompensation contextRef="FD2016Q1YTD" decimals="-3" id="Fact-E4BA782AC84455D2851B24F39AA6404D" unitRef="usd">342000</us-gaap:ShareBasedCompensation>
	<us-gaap:ShareBasedCompensation contextRef="FD2017Q1YTD" decimals="-3" id="Fact-8FD588646AC55F35B3EE7A1766356327" unitRef="usd">319000</us-gaap:ShareBasedCompensation>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-3C35BD9854555001B0F4F0944E139B6C">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-8F62457AEFDF53A497269621ABA794E9">P6M</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-0A240AB8DE5957769F9F8AC1FED94E3A">P4Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1 contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember_us-gaap_RangeAxis_us-gaap_MinimumMember" id="Fact-09E2B52383A754CAB5EF979D59BA5A45">P2Y</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2015Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-94D450CF2D315DE9AE929B370DB3A780" unitRef="shares">13540</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-50648D702D5C5B439D7BEA0D958EA522" unitRef="shares">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2016Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-EC16740337B65F0BA4B2879FB61A38D1" unitRef="shares">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber contextRef="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-DF458208AA8D57F790439598075CE2C5" unitRef="shares">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2015Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-72C36F3639515A99BD9E8FD545F8BF16" unitRef="usdPerShare">7.98</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-0408516CCA43558FACAB23765AC05EFD" unitRef="usdPerShare">0.00</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2016Q4_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-37188BC95FBE5FBA9B15E8C4E264886D" unitRef="usdPerShare">0.00</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue contextRef="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-AB0A1018FFE3528583178C536C08E0A9" unitRef="usdPerShare">0.00</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-64C66963D4D65DB0A5997BFDDC96DB27" unitRef="shares">13540</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="INF" id="Fact-B3844AD5D4FA5C5AA16A1201069814A9" unitRef="shares">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-859994449C7758CA88C9F223DF85C3E5" unitRef="usdPerShare">7.98</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_RestrictedStockMember" decimals="2" id="Fact-A070B08901F15DB38803265C4FF1C66A" unitRef="usdPerShare">0.00</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-1BCD820845F45355A5EF82C1FA89A085" unitRef="number">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-762C5E0058365B5C964990785DBDAD2B" unitRef="number">0</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-404C261D87775860B715F5499474FD3A" unitRef="number">0.62</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-532E0ADDAA9D537B811060803ED5B26C" unitRef="number">0.62</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-18DEB95C4696560D8D41FBC3F32FEF4A" unitRef="number">0.02</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-03E8CC9825EE51AD8356E17B6C47D078" unitRef="number">0.02</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber contextRef="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-22A5168788905DD8969F0B2AE57FC104" unitRef="shares">1189855</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber contextRef="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-1F79BB68C06D5226BF20A1293928B1A7" unitRef="shares">1375174</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice contextRef="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-F2ADD5D784E15F3D9EE336B243649D18" unitRef="usdPerShare">9.21</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice contextRef="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-C67B564B43B155DFBC9945272BBDF3CB" unitRef="usdPerShare">8.26</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-7F64327D27EA5B5898F2FB42DB8FFF46" unitRef="shares">33642</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-431994E0E10254539C0BCC05C49EFA59" unitRef="shares">55446</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-8479E4FC95FF5F41B3B3A9E5840E3BC6" unitRef="shares">344075</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-EFD1DA5F094E5497AAAE1051B7AEA7E6" unitRef="shares">100000</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-34AB01F03B6E5208B88037C1B3B64D7E" unitRef="usdPerShare">3.03</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-F9912601AA84514FB96CF75B50128905" unitRef="usdPerShare">2.88</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2015Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-B9BEAF0D53A152F4B19AA5FA1E433EE9" unitRef="shares">1627477</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-2AE342056C0C5C2DA7507A4309F661F4" unitRef="shares">1937910</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2016Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-B78DC8B4AFBB50659046B82BE352DEB9" unitRef="shares">1841567</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber contextRef="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-FEE9144ACBA25E64A0CF12FE7BB22522" unitRef="shares">1885941</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2015Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-7E8E39D360C755A8A62DFA18ED505E18" unitRef="usdPerShare">9.11</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2016Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-76269886814F55AEBE1FB9A1B44E0BA6" unitRef="usdPerShare">8.34</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2016Q4_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-33D38636C2FF5F7491C61DFE6004B192" unitRef="usdPerShare">8.15</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice contextRef="FI2017Q1_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-7BE5E3AE8C7A53E1A1F5D10498AD066C" unitRef="usdPerShare">7.84</us-gaap:ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-0D3D297EFA255EEBA537F040C94BEB66" unitRef="usdPerShare">0.00</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-98A15BC7D2DD5F6E85FB2798242E694C" unitRef="usdPerShare">3.80</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-8C8A8E2FAAB15B3AA5320BA35E84498A" unitRef="usdPerShare">14.90</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-D74FFA2509375562837AE3338944C18F" unitRef="usdPerShare">13.34</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-A279A4082D0558FCB612DDA310F58BC4" unitRef="usdPerShare">5.25</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice>
	<us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="2" id="Fact-8527B8293CDF5136AADD114A82969091" unitRef="usdPerShare">4.99</us-gaap:ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice>
	<us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember_us-gaap_RangeAxis_us-gaap_MaximumMember" id="Fact-1EC34B1FF12055EB962EA87A17EF33CD">P10Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
	<us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" id="Fact-4322799F852857CE82A281E75598B42F">P6Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
	<us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1 contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" id="Fact-B7BED23B552F5FD19875B25AFC0FF837">P6Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1>
	<us-gaap:ShippingHandlingAndTransportationCosts contextRef="FD2016Q1YTD" decimals="-5" id="Fact-B78FC70678985D0F970B61BFF4730E27" unitRef="usd">400000</us-gaap:ShippingHandlingAndTransportationCosts>
	<us-gaap:StandardProductWarrantyAccrual contextRef="FI2015Q4" decimals="-3" id="Fact-F1A2DBA0227F58E6B688253E6754AEFF" unitRef="usd">793000</us-gaap:StandardProductWarrantyAccrual>
	<us-gaap:StandardProductWarrantyAccrual contextRef="FI2016Q1" decimals="-3" id="Fact-7B31FFE6602D52E581E051270420403B" unitRef="usd">766000</us-gaap:StandardProductWarrantyAccrual>
	<us-gaap:StandardProductWarrantyAccrual contextRef="FI2016Q4" decimals="-3" id="Fact-28717F9E823458C787C6A5BC0EEE119A" unitRef="usd">795000</us-gaap:StandardProductWarrantyAccrual>
	<us-gaap:StandardProductWarrantyAccrual contextRef="FI2017Q1" decimals="-3" id="Fact-3A594DF2AD1E54D1907D543CC80D8713" unitRef="usd">879000</us-gaap:StandardProductWarrantyAccrual>
	<us-gaap:StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease contextRef="FD2016Q1YTD" decimals="-3" id="Fact-90AB8F63F8165359B5C47A4497C0A772" unitRef="usd">-10000</us-gaap:StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease>
	<us-gaap:StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease contextRef="FD2017Q1YTD" decimals="-3" id="Fact-605A68ABE7925E17986ACE81859B4FDE" unitRef="usd">-27000</us-gaap:StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease>
	<us-gaap:StandardProductWarrantyAccrualPayments contextRef="FD2016Q1YTD" decimals="-3" id="Fact-33F3148551425EC5B6823659C4F46EDD" unitRef="usd">109000</us-gaap:StandardProductWarrantyAccrualPayments>
	<us-gaap:StandardProductWarrantyAccrualPayments contextRef="FD2017Q1YTD" decimals="-3" id="Fact-ED10EF2CD4B25C7692B0D214851658D9" unitRef="usd">27000</us-gaap:StandardProductWarrantyAccrualPayments>
	<us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease contextRef="FD2016Q1YTD" decimals="-3" id="Fact-A1965DA7F9EC56E690AF7D8AB1667032" unitRef="usd">-54000</us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease>
	<us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease contextRef="FD2017Q1YTD" decimals="-3" id="Fact-EF78C68CC0B856E89CB06C76739A7143" unitRef="usd">-245000</us-gaap:StandardProductWarrantyAccrualPreexistingIncreaseDecrease>
	<us-gaap:StandardProductWarrantyAccrualWarrantiesIssued contextRef="FD2016Q1YTD" decimals="-3" id="Fact-D3AEF4E2400B5BA18124B81F859CD2F9" unitRef="usd">146000</us-gaap:StandardProductWarrantyAccrualWarrantiesIssued>
	<us-gaap:StandardProductWarrantyAccrualWarrantiesIssued contextRef="FD2017Q1YTD" decimals="-3" id="Fact-2AA30FC2925953AD89D6F5760BD6A79C" unitRef="usd">383000</us-gaap:StandardProductWarrantyAccrualWarrantiesIssued>
	<us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised contextRef="FD2016Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-A7A3C243240352B096971653AD9A66F7" unitRef="shares">0</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
	<us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised contextRef="FD2017Q1YTD_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockOptionMember" decimals="INF" id="Fact-D582B03FE98A599B84084AC368BC179D" unitRef="shares">180</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
	<us-gaap:StockholdersEquity contextRef="FI2016Q4" decimals="-3" id="Fact-E0A2BE97427D5067A0BAC53471388D61" unitRef="usd">67057000</us-gaap:StockholdersEquity>
	<us-gaap:StockholdersEquity contextRef="FI2017Q1" decimals="-3" id="Fact-17A47EA05DB25AFBAE2D7EDA6B5A2DFF" unitRef="usd">66480000</us-gaap:StockholdersEquity>
	<us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest contextRef="FI2016Q4" decimals="-3" id="Fact-744AD85FBAF25F1288FB4B2B72DAF265" unitRef="usd">65339000</us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest contextRef="FI2017Q1" decimals="-3" id="Fact-379A9BC6011E5D0B8F42DDCB848B4BAD" unitRef="usd">64387000</us-gaap:StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest>
	<us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued contextRef="FI2016Q4" decimals="-5" id="Fact-69B2BCFF79975AF3AFDCE023E5722600" unitRef="usd">2300000</us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued>
	<us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued contextRef="FI2017Q1" decimals="-5" id="Fact-9F85CBC327A35D8CA26C6428B8A56DE7" unitRef="usd">2400000</us-gaap:UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued>
	<us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate contextRef="FI2016Q3" decimals="-5" id="Fact-FF1D52CDD35550BD9BD04118A1EBE8F8" unitRef="usd">1800000</us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate>
	<us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate contextRef="FI2017Q1" decimals="-5" id="Fact-CBDA6D2C5F7355B8B428260766AAE65D" unitRef="usd">3900000</us-gaap:UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate>
	<us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding contextRef="FD2016Q1YTD" decimals="-3" id="Fact-F2B88178E5E55E08AA184D6653767569" unitRef="shares">13152000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
	<us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding contextRef="FD2017Q1YTD" decimals="-3" id="Fact-2CCDCB3524F756C8812A80C778B958AA" unitRef="shares">13179000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
	<us-gaap:WeightedAverageNumberOfSharesOutstandingBasic contextRef="FD2016Q1YTD" decimals="-3" id="Fact-D5A3B4AE17EC5ACB8586A7152508DF02" unitRef="shares">13152000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
	<us-gaap:WeightedAverageNumberOfSharesOutstandingBasic contextRef="FD2017Q1YTD" decimals="-3" id="Fact-D196150CF0A257BE8084627151073BBD" unitRef="shares">13179000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
	<asys:ResearchAndDevelopmentExpenseTableTextBlock contextRef="FD2017Q1YTD" id="Fact-ED1C9FCB156158378D8BCE35CE21FA1B">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The table below shows gross research and development expenses and grants earned:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="9" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:70%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,830&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,615&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Grants earned&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(203&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(327&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Net research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,627&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,288&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</asys:ResearchAndDevelopmentExpenseTableTextBlock>
	<us-gaap:BasisOfAccountingPolicyPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-2D1F00A0DB8B54ABA146C21FBFAEAC26">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nature of Operations and Basis of Presentation &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;-&amp;#160;Amtech Systems, Inc. (the &amp;#8220;Company&amp;#8221;, &amp;#8220;Amtech&amp;#8221;, &amp;#8220;we&amp;#8221;, &amp;#8220;us&amp;#8221; or &amp;#8220;our&amp;#8221;) is a global manufacturer of capital equipment, atomic layer deposition (&amp;#8220;ALD&amp;#8221;) including thermal processing, silicon wafer handling automation, and related consumables used in fabricating solar cells, LED and semiconductor devices. The Company sells these products to solar cell and semiconductor manufacturers worldwide, particularly in Asia, the United States and Europe. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&amp;#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &amp;#8220;SEC&amp;#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K, as amended, for the fiscal year ended September&amp;#160;30, 2016.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The consolidated results of operations for the three months ended December 31, 2016, are not necessarily indicative of the results to be expected for the full fiscal year.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:BasisOfAccountingPolicyPolicyTextBlock>
	<us-gaap:CashAndCashEquivalentsPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-910ECF34465F53259AECAA795CE59EC5">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Cash Equivalents &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The Company considers all highly liquid investments with a maturity of three months or less when purchased to be cash equivalents. Cash and cash equivalents consist of amounts invested in U.S.&amp;#160;money market funds and various U.S.&amp;#160;and foreign bank operating and time deposit accounts.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:CashAndCashEquivalentsPolicyTextBlock>
	<us-gaap:CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy contextRef="FD2017Q1YTD" id="Fact-50CE138A7A3F5E0EA2B13B4E649AD060">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Restricted cash of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$3.3 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.9 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, and September 30, 2016, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment. Restricted cash as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;September&amp;#160;30, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; includes &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million relating the Company's proportional responsibility, assumed in connection with the BTU International Inc. (&amp;#8220;BTU&amp;#8221;) acquisition, for clean-up costs at a Superfund site.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy>
	<us-gaap:CommitmentsAndContingenciesDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-EE0F03B404FB549283CD7FE4FC18FFE0">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Commitments and Contingencies&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Purchase Obligations&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; As of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, the Company had purchase obligations in the amount of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$14.2 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; compared to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;$11.3 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of September 30, 2016. These purchase obligations consist of outstanding purchase orders for goods and services. While the amount represents purchase agreements, the actual amounts to be paid may be less if any agreements are renegotiated, canceled or terminated.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Development projects&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211;  In fiscal 2014, our wholly owned subsidiary, Tempress Systems, Inc. ("Tempress"), entered into an agreement with the Energy Research Centre of the Netherlands ("ECN"), a Netherlands government sponsored research institute, for a joint research and development project.  Under the terms of the agreement, Tempress sold an ion implanter ("Equipment") to ECN for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.4&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million.  Both Tempress and ECN are performing research and development projects utilizing the Equipment at the ECN facilities. Each party to the agreement will have &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; rights to the results of the projects developed separately by the individual parties.  Any results co-developed will be jointly owned.  Over the &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;four&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;-year period of the agreement, Tempress is required to contribute &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.4 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;  to the project in the form of  installation of the equipment, acceptance testing, project meeting attendance, training, parts, and service, including keeping the equipment in good condition and repair for the first &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years of the agreement. As of December 31, 2016, Tempress has contributed all of the required &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.4&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million to the project.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;EPA Accrual&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - As a result of the BTU acquisition, the Company assumed BTU&amp;#8217;s proportional responsibility for clean-up costs at a Superfund site.  As an equipment manufacturer, BTU generated and disposed of small quantities of solid waste that were considered hazardous under Environment Protection Agency (&amp;#8220;EPA&amp;#8221;) regulations. Because BTU historically used a waste disposal firm that disposed of the solid waste at a site that the EPA designated as a Superfund site, BTU was named by the EPA as one of the entities responsible for a portion of the expected clean-up costs. Based on the Company's proportional responsibility, as negotiated with and agreed to by the EPA, the Company's liability related to this matter is less than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.1&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million, which is included in Other Accrued Liabilities on the Condensed Consolidated Balance Sheets as of December 31, 2016 and September 30, 2016.  In accordance with the agreement, the Company established a letter of credit for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million to the benefit of the EPA for potential cash payments as settlements for the Company&amp;#8217;s proportional liability.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Legal Proceedings &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. The Company does not believe that any matters or proceedings presently pending will have a material adverse effect on its consolidated financial position, results of operations or liquidity. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;As previously disclosed in the Company&amp;#8217;s filings with the SEC, shortly after the Company entered into the merger agreement with BTU, &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; separate putative stockholder class action complaints (together, the "Stockholder Actions") were filed in the Court of Chancery of the State of Delaware (the "Delaware Court"). The first was filed on November 4, 2014 and the second on November 17, 2014, on behalf of BTU&amp;#8217;s public stockholders, against BTU, members of the BTU board, Amtech and the special purpose merger subsidiary. The Stockholder Actions were consolidated on December 4, 2014. The complaints generally alleged that, in connection with entering into the merger agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders. The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;On February 18, 2016, the Delaware Court entered the Order approving the Amended Stipulation of Settlement. As a result, the Released Claims were dismissed with prejudice and without any admission of wrongdoing by any of the parties to the Stockholder Actions. Pursuant to the Amended Stipulation of Settlement, BTU, its insurer(s), or its successor(s) in interest are responsible for payment of fees and expenses in the amount of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$325,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; which were paid in full on April 1, 2016.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;As described above, the Released Claims are limited solely to claims related to any disclosures (or lack thereof) to BTU&amp;#8217;s stockholders concerning the merger and any fiduciary claims concerning the decision to enter into the merger. While we are currently unaware of any other pending or threatened litigation related to additional claims arising from the Stockholder Actions, any future claims are uncertain, so additional harm could potentially result to the Company from this litigation, which may cause the Company to incur substantial costs and divert management&amp;#8217;s attention from operational matters.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:CommitmentsAndContingenciesDisclosureTextBlock>
	<us-gaap:ConcentrationRiskCreditRisk contextRef="FD2017Q1YTD" id="Fact-D42A693D47D555B782924456F4262C43">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Concentrations of Credit Risk &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company&amp;#8217;s customers consist of solar cell and semiconductor manufacturers worldwide, as well as the lapping and polishing marketplace. Credit risk is managed by performing ongoing credit evaluations of our customers&amp;#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;65%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Company's total cash balances are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&amp;#8217;s cash is maintained with financial institutions with reputable credit ratings in The Netherlands, France and China.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ConcentrationRiskCreditRisk>
	<us-gaap:ConcentrationRiskDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-7A083DA4DA7F54E5B11937F1AE89DCA8">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Major Customers and Foreign Sales&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;During the three months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, there were no customers who individually represented greater than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of net revenues.  During the three months ended December 31, 2015, &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;one&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; customer represented &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of net revenues. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company has operations in The Netherlands, United States, France, and China. Our net revenues were to customers in the following geographic regions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="6" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:66%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:15%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:2%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:15%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;United States&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;28&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total North America&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;20&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;China&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Malaysia&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;17&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Taiwan&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Asia&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;61&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;54&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Germany&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Europe&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;19&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;15&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ConcentrationRiskDisclosureTextBlock>
	<us-gaap:ConsolidationPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-2DACA4A21D745F51830FB244D0B02DE8">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Principles of Consolidation &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&amp;#8217;s equity. The equity method of accounting is used for investments over which the Company has a significant influence but not a controlling financial interest. All material intercompany accounts and transactions have been eliminated in consolidation.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ConsolidationPolicyTextBlock>
	<us-gaap:DeferredRevenueByArrangementDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-1B8669A3BD495F84A78543803981327E">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The components of deferred profit are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:72%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred revenues&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,164&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,029&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred costs&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,352&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,320&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:30px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred profit&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,812&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,709&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:DeferredRevenueByArrangementDisclosureTextBlock>
	<us-gaap:EarningsPerShareTextBlock contextRef="FD2017Q1YTD" id="Fact-30439BC3D0015EFB9D50539D5CE45CF4">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Earnings Per Share&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic earnings per share ("EPS") is computed by dividing net income (loss) by the weighted average number of common shares outstanding for the period. Diluted EPS is computed similarly to basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued. In the case of a net loss, diluted earnings per share is calculated in the same manner as basic EPS.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For the three months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, options for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,886,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; shares are excluded from the diluted EPS calculations because they are anti-dilutive. For the three months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;December&amp;#160;31, 2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, options for &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,938,000&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; shares were excluded from the diluted EPS calculations because they were anti-dilutive.  &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following table outlines basic and diluted EPS:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:73%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(in thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Basic Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,152&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.00&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Diluted Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,152&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted shares&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,152&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.00&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;</us-gaap:EarningsPerShareTextBlock>
	<us-gaap:EquityMethodInvestmentsDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-3ABB891F32875165B6D267363F3EFA1F">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Investments&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company&amp;#8217;s equity method investments include a &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; interest in Kingstone Technology Hong Kong Limited (&amp;#8220;Kingstone&amp;#8221;). The Company recognizes its portion of net income or losses on a one-quarter lag.  The carrying value of the equity method investment in Kingstone was &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$2.9&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$3.0&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million as of December 31, 2016 and September 30, 2016, respectively.  For the three months ended December 31, 2016 we recognized investment loss of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.1 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. For the three months ended December 31, 2015, the investment loss was not material to our consolidated statement of operations.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:EquityMethodInvestmentsDisclosureTextBlock>
	<us-gaap:FairValueOfFinancialInstrumentsPolicy contextRef="FD2017Q1YTD" id="Fact-2ECC4EB45E8D540290C63BC9740A6445">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value of Financial Instruments &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board (&amp;#8220;FASB&amp;#8221;) Accounting Standards Codification (&amp;#8220;ASC&amp;#8221;), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;text-indent:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 2 - Valuation is based upon quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.&amp;#160;&lt;br clear="none"/&gt;        &lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Cash, Cash Equivalents and Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets are money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC) and foreign bank operating and time deposit accounts. The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Receivables and Payables&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments. If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Debt &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt; &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:FairValueOfFinancialInstrumentsPolicy>
	<us-gaap:GoodwillAndIntangibleAssetsGoodwillPolicy contextRef="FD2017Q1YTD" id="Fact-B261CE7A2F725CD9B6858C24D1A1259A">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Goodwill &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211; Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:GoodwillAndIntangibleAssetsGoodwillPolicy>
	<us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsPolicy contextRef="FD2017Q1YTD" id="Fact-FE37A5DB8AA251BD8FF3918B7901DED2">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Intangibles&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Intangible assets are capitalized and amortized on a straight-line basis over their useful lives if the life is determinable. If the life is not determinable, amortization is not recorded.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:GoodwillAndIntangibleAssetsIntangibleAssetsPolicy>
	<us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-4E8E7E80E0955142A783D95C119BBFE7">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Long-lived assets &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt; &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock>
	<us-gaap:IncomeTaxDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-E2C6A66B85AA5CD8AE79C9554CA417AF">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Income Taxes&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The quarterly income tax provision is calculated using an estimated annual effective tax rate, based upon expected annual income, permanent items, statutory rates and planned tax strategies in the various jurisdictions in which the Company operates. However, losses in certain jurisdictions and discrete items are treated separately. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred tax assets and liabilities reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The Company records a valuation allowance if, based on the weight of available evidence, it is more likely than not that some portion or all of a deferred tax asset will not be realized. Our expectations regarding realization of our deferred tax assets is based upon the weight of all available evidence, including such factors as our recent earnings history, expected future taxable income and available tax planning strategies. The Company maintains a valuation allowance with respect to certain state, federal and foreign deferred tax assets that may not be recovered.  We have established valuation allowances on substantially all net deferred tax assets, after considering all of the available objective evidence, both positive and negative, historical and prospective, with greater weight given to historical evidence, and determined it is not more likely than not that these assets will be realized&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company classifies all of our uncertain tax positions as non-current income taxes payable.  At December 31, 2016 and September 30, 2016, the total amount of unrecognized tax benefits was approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$3.9&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million. If recognized, these amounts would favorably impact the effective tax rate.  Income taxes payable long-term primarily includes, among other items, withholding taxes that are not due until the related intercompany service fees are paid.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company classifies interest and penalties related to unrecognized tax benefits as income tax expense. As of December 31, 2016 and September 30, 2016, the Company had an accrual for potential interest and penalties of approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$2.4&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$2.3&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million, respectively, classified with non-current income taxes payable.   &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company and one or more of its subsidiaries file income tax returns in The Netherlands, France, China, Singapore, Malaysia, Hong Kong, and Germany, as well as the U.S. and various states in the U.S. The Company and its subsidiaries have a number of open tax years dictated by statute in each of their respective taxing jurisdictions, but generally it is from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years in the jurisdictions in which the Company files tax returns.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:IncomeTaxDisclosureTextBlock>
	<us-gaap:InventoryPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-D454DBB2B98E5A7FAB85C81ACB41E4AC">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Inventories&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; We value our inventory at the lower of cost or net realizable value.  Costs for approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;50%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:InventoryPolicyTextBlock>
	<us-gaap:LongTermDebtTextBlock contextRef="FD2017Q1YTD" id="Fact-113FEBECA4EA5D91A8CD3D99AA353766">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Long-term Debt&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company holds debt in the form of a mortgage note secured by its real property in Billerica, Massachusetts that has a remaining balance of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$6.5&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million as of December 31, 2016. The debt has an interest rate of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.11%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; through September 26, 2021, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two hundred forty&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; basis points. The maturity date of the debt is September 26, 2023. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;SoLayTec B.V. ("SoLayTec"), a division of the Company's solar segment, holds long-term debt with a remaining balance of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$3.6 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. During the quarter ended December 31, 2016, SoLayTec borrowed less than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.1 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. The debt has interest rates ranging from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.5%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12.5%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and maturity dates ranging from fiscal 2017 to fiscal 2021.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:LongTermDebtTextBlock>
	<us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-CCD6C57186D5545F89723D5C5EA3FF74">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Impact of Recently Issued Accounting Pronouncements&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In November 2016, the FASB issued Accounting Standards Update ("ASU") No. 2016-18,&amp;#160;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Statement of Cash Flows: Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. The amendments address diversity in practice that exists in the classification and presentation of changes in restricted cash and require that a statement of cash flows explain the change during the period in the total of cash, cash equivalents, and amounts generally described as restricted cash or restricted cash equivalents. This ASU is effective retrospectively for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In October 2016, the FASB issued ASU No. 2016-16,&amp;#160;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Income Taxes: Intra-Entity Transfers of Assets Other than Inventory&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. The amendments in this ASU remove the prohibition against the recognition of current and deferred income tax effects of intra-entity transfers of assets other than inventory until the asset has been sold to an outside party. The ASU is effective for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In August 2016, the FASB issued ASU 2016-15, &amp;#8220;Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments&amp;#8221;. These amendments provide cash flow statement classification guidance for: 1. Debt Prepayment or Debt Extinguishment Costs; 2. Settlement of Zero-Coupon Debt Instruments or Other Debt Instruments with Coupon Interest Rates That Are Insignificant in Relation to the Effective Interest Rate of the Borrowing; 3. Contingent Consideration Payments Made after a Business Combination; 4. Proceeds from the Settlement of Insurance Claims; 5. Proceeds from the Settlement of Corporate-Owned Life Insurance Policies, including Bank-Owned Life Insurance Policies; 6. Distributions Received from Equity Method Investees; 7. Beneficial Interests in Securitization Transactions; and 8. Separately Identifiable Cash Flows and Application of the Predominance Principle. The amendments in this ASU are effective for public business entities for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. Early application is permitted, including adoption in an interim period. The Company is currently in the process of evaluating the impact of the adoption on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In June 2016, the FASB issued ASU 2016-13, &amp;#8220;Financial Instruments - Credit Losses: Measurement of Credit Losses on Financial Instruments&amp;#8221;. ASU 2016-13 amends the impairment model to utilize an expected loss methodology in place of the currently used incurred loss methodology, which will result in the more timely recognition of losses. The new standard applies to financial assets measured at amortized cost basis, including receivables that result from revenue transactions and held-to-maturity debt securities.&amp;#160;The new guidance will be effective for the Company starting in the first quarter of fiscal 2021. Early adoption is permitted starting in the first quarter of fiscal 2020. The Company is in the process of determining the effects the adoption will have on its consolidated financial&amp;#160;statements as well as whether to adopt the new guidance early.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In May 2014, the FASB issued ASU No. 2014-09 regarding ASC Topic 606, &amp;#8220;Revenue from Contracts with Customers.&amp;#8221; ASU 2014-09 provides principles for recognizing revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for those goods or services. In August 2015, the FASB issued ASU 2015-14 to defer the effective date by one year with early adoption permitted as of the original effective date. ASU 2014-09 will be effective for Amtech&amp;#8217;s fiscal year beginning October 1, 2018 unless we elect the earlier date of October 1, 2017. In addition, the FASB issued ASU 2016-08, ASU 2016-10, ASU 2016-12 and ASU 2016-20 in March 2016, April 2016, May 2016 and December 2016, respectively, to help provide interpretive clarifications on the new guidance in ASC Topic 606. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In March 2016, the FASB issued ASU No. 2016-09,&amp;#160;Compensation - &amp;#8220;Stock Compensation (Topic 718)&amp;#8221;. ASU 2016-09 identifies areas for simplification involving several aspects of accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, an option to recognize gross stock compensation expense with actual forfeitures recognized as they occur, as well as certain classifications on the statement of cash flows. The amendments in this ASU are effective for annual periods beginning after December 15, 2016 and for the interim periods therein. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In March 2016, the FASB issued ASU 2016-07,&amp;#160;&amp;#8220;Equity Method and Joint Ventures&amp;#8221;&amp;#160;affecting all entities that have an investment that becomes qualified for the equity method of accounting as a result of an increase in the level of ownership or degree of influence. ASU 2016-07 is effective for the Company beginning on&amp;#160;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#222222;"&gt;January 1, 2017&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, early adoption is permitted.  The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In February 2016, the FASB issued ASU No. 2016-02, &amp;#8220;Leases (Topic 842)&amp;#8221;, which requires companies to generally recognize on the balance sheet operating and financing lease liabilities and corresponding right-of-use-assets. ASU 2016-02 also requires improved disclosures to help users of financial statements better understand the amount, timing and uncertainty of cash flows arising from leases. This ASU is effective for fiscal years beginning after December 15, 2018 and early application is permitted. The Company is currently in the process of evaluating the impact of this standard on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In January 2016, the FASB issued ASU No. 2016-01, &amp;#8220;Financial Instruments - Overall (Subtopic 825-10), Recognition and Measurement of Financial Assets and Financial Liabilities&amp;#8221;, which addresses certain aspects of recognition, measurement, presentation, and disclosure of financial instruments. This ASU is effective for fiscal years beginning after December 15, 2017 and early adoption is not permitted. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In November 2015, the FASB issued ASU No. 2015-17, &amp;#8220;Balance Sheet Classification of Deferred Taxes&amp;#8221;. This ASU requires entities to classify deferred tax liabilities and assets as noncurrent in a classified statement of financial position. This ASU is effective for fiscal years beginning after December 15, 2016, and interim periods within those annual periods. Early adoption is permitted for all entities as of the beginning of an interim or annual reporting period. The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In July 2015, the FASB issued ASU No. 2015-16,&amp;#160;&amp;#8220;Business Combinations (Topic 805): Simplifying the Accounting for Measurement-Period Adjustments&amp;#8221;, which simplifies the accounting for measurement-period adjustments to provisional amounts recognized in a business combination. ASU 2015-16 is effective for fiscal years (and interim reporting periods within those years) beginning after December 15, 2016. The provisions of ASU 2015-16 are not expected to have a material effect on the Company's financial condition, results of operations, or cash flows.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In July 2015, the FASB issued ASU No. 2015-11, &amp;#8220;Simplifying the Measurement of Inventory&amp;#8221;. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. The Company does not expect adoption of this ASU to have a material impact on the Company's consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:NewAccountingPronouncementsPolicyPolicyTextBlock>
	<us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock contextRef="FD2017Q1YTD" id="Fact-DB97DD066CED5CB39977F07D3E953B9C">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Summary of Significant Accounting Policies&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Nature of Operations and Basis of Presentation &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;-&amp;#160;Amtech Systems, Inc. (the &amp;#8220;Company&amp;#8221;, &amp;#8220;Amtech&amp;#8221;, &amp;#8220;we&amp;#8221;, &amp;#8220;us&amp;#8221; or &amp;#8220;our&amp;#8221;) is a global manufacturer of capital equipment, atomic layer deposition (&amp;#8220;ALD&amp;#8221;) including thermal processing, silicon wafer handling automation, and related consumables used in fabricating solar cells, LED and semiconductor devices. The Company sells these products to solar cell and semiconductor manufacturers worldwide, particularly in Asia, the United States and Europe. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&amp;#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &amp;#8220;SEC&amp;#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K, as amended, for the fiscal year ended September&amp;#160;30, 2016.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The consolidated results of operations for the three months ended December 31, 2016, are not necessarily indicative of the results to be expected for the full fiscal year.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Principles of Consolidation &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&amp;#8217;s equity. The equity method of accounting is used for investments over which the Company has a significant influence but not a controlling financial interest. All material intercompany accounts and transactions have been eliminated in consolidation.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Use of Estimates&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Revenue Recognition&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&amp;#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer&amp;#8217;s defined specifications have been met with at least &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Where there have been installation and acceptance of more than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; similarly configured items of equipment, but installation and acceptance have not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in&amp;#160;one&amp;#160;period will be lower and the gross margin reported in a subsequent period will improve.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For products where the customer&amp;#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Deferred Profit&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Revenue deferred pursuant to the Company&amp;#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:72%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred revenues&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,164&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,029&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred costs&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,352&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,320&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:30px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Deferred profit&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,812&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,709&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Cash Equivalents &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The Company considers all highly liquid investments with a maturity of three months or less when purchased to be cash equivalents. Cash and cash equivalents consist of amounts invested in U.S.&amp;#160;money market funds and various U.S.&amp;#160;and foreign bank operating and time deposit accounts.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Restricted cash of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$3.3 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.9 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, and September 30, 2016, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment. Restricted cash as of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;September&amp;#160;30, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; includes &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million relating the Company's proportional responsibility, assumed in connection with the BTU International Inc. (&amp;#8220;BTU&amp;#8221;) acquisition, for clean-up costs at a Superfund site. Refer to Note 8 to Condensed Consolidated Financial Statements, Commitments and Contingencies, for more detail regarding our proportional liability related to the Superfund site.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Accounts Receivable and Allowance for Doubtful Accounts &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Accounts Receivable - Unbilled and Other&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Unbilled and other accounts receivable consist mainly of  a contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. Accounts receivable also includes Value-added tax  (&amp;#8220;VAT&amp;#8221;) receivable.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Concentrations of Credit Risk &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company&amp;#8217;s customers consist of solar cell and semiconductor manufacturers worldwide, as well as the lapping and polishing marketplace. Credit risk is managed by performing ongoing credit evaluations of our customers&amp;#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;65%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Company's total cash balances are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&amp;#8217;s cash is maintained with financial institutions with reputable credit ratings in The Netherlands, France and China.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;As of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;one&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; customer individually represented &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of accounts receivable.  As of September 30, 2016, &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;one&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; customer individually represented &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of accounts receivable.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Refer to Note 6 to Condensed Consolidated Financial Statements, Major Customers and Foreign Sales, for information regarding revenue and assets in other countries subject to fluctuation in foreign currency exchange rates.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Inventories&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; We value our inventory at the lower of cost or net realizable value.  Costs for approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;50%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis. The components of inventories are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:72%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Purchased parts and raw materials&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,148&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,435&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Work-in-process&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,832&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,044&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Finished goods&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,873&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,744&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20,853&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;23,223&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Property, Plant and Equipment&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation and amortization is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20-30&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of property, plant and equipment:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:72%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Land, building and leasehold improvements&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;17,799&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18,255&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Equipment and machinery&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,749&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,056&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Furniture and fixtures&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,199&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,426&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;31,747&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;32,737&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Accumulated depreciation and amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(16,457&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(16,777&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,290&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,960&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Goodwill &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211; Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of activity in goodwill:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:49%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Total&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,597&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,388&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,269&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,269&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at September 30, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,328&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net foreign exchange differences&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at December 31, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,998&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,789&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,177&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,968&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at December 31, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,998&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,789&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Intangibles&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Intangible assets are capitalized and amortized on a straight-line basis over their useful lives if the life is determinable. If the life is not determinable, amortization is not recorded.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of intangibles:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="22" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:22%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:4%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Useful Life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;September&amp;#160;30, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Customer lists&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,387&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,172&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,215&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,432&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,164&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,268&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Technology&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,576&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,438&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,214&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,678&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,536&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Trade names&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10-15 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,441&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(200&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,241&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,455&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(219&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,236&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;260&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(239&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;21&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;277&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(217&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;60&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,102&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,187&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,915&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,378&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,278&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Long-lived assets &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt; &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.    &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Warranty &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; A limited warranty is provided free of charge, generally for periods of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;24&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; months, for all purchases of the Company&amp;#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. Estimates are based on past experience and take into account the nature of the products under warranty. The following is a summary of activity in accrued warranty expense:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:73%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;795&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;793&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Additions for warranties issued during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;383&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;146&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Reductions in the liability for payments made under the warranty&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(109&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Changes related to pre-existing warranties&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(245&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(54&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Currency translation adjustment&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(10&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;879&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;766&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Stock-Based Compensation -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock-based compensation expense reduced the Company&amp;#8217;s results of operations by the following amounts:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="9" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:68%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income before income taxes (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(319&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(342&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income taxes&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;35&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;48&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on net income&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(284&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(294&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Stock-based compensation expense is included in selling, general and administrative expenses.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock options issued under the terms of the Company's option plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the NASDAQ the trading day prior to the date of the option grant and expire no later than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;10 years&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; from the date of grant, with the most recent option grant expiring in 2026. Options issued by the Company generally vest over &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;six months&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;four&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years, subject to the Company's board of directors' (the &amp;#8220;Board&amp;#8221;) discretion pursuant to the Company's share-based compensation plans.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock option transactions and the options outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:49%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at beginning of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,841,567&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.15&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,627,477&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.11&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Granted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100,000&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.99&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;344,075&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.25&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercised&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(180&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.80&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Forfeited&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(55,446&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13.34&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(33,642&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14.90&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,885,941&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.84&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,937,910&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.34&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercisable at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,375,174&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.26&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,189,855&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.21&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted average fair value of options &lt;/font&gt;&lt;/div&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;granted during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2.88&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.03&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:65%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:17%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:17%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Risk free interest rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Expected life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Dividend rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Volatility&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;62%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;62%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company awards restricted shares under its existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two to four year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &amp;#8220;service period&amp;#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Restricted stock transactions and awards outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="14" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:49%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,540&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.98&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Released&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(13,540&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.98&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value of Financial Instruments &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board (&amp;#8220;FASB&amp;#8221;) Accounting Standards Codification (&amp;#8220;ASC&amp;#8221;), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;text-indent:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 2 - Valuation is based upon quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.&amp;#160;&lt;br clear="none"/&gt;        &lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Cash, Cash Equivalents and Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets are money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC) and foreign bank operating and time deposit accounts. The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Receivables and Payables&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments. If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Debt &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt; &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Pensions &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211; The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&amp;#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches certain employee funds on a discretionary basis while certain subsidiaries require a minimum match to maintain their safe harbor status.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Shipping expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Shipping expenses of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.4 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; for each of the three months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, are included in selling, general and administrative expenses. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Research, development and engineering expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. The table below shows gross research and development expenses and grants earned:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="9" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:70%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,830&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,615&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Grants earned&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(203&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(327&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;&amp;#160;Net research, development and engineering&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,627&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,288&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Impact of Recently Issued Accounting Pronouncements&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In November 2016, the FASB issued Accounting Standards Update ("ASU") No. 2016-18,&amp;#160;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Statement of Cash Flows: Restricted Cash&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. The amendments address diversity in practice that exists in the classification and presentation of changes in restricted cash and require that a statement of cash flows explain the change during the period in the total of cash, cash equivalents, and amounts generally described as restricted cash or restricted cash equivalents. This ASU is effective retrospectively for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In October 2016, the FASB issued ASU No. 2016-16,&amp;#160;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;"&gt;Income Taxes: Intra-Entity Transfers of Assets Other than Inventory&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;. The amendments in this ASU remove the prohibition against the recognition of current and deferred income tax effects of intra-entity transfers of assets other than inventory until the asset has been sold to an outside party. The ASU is effective for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In August 2016, the FASB issued ASU 2016-15, &amp;#8220;Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments&amp;#8221;. These amendments provide cash flow statement classification guidance for: 1. Debt Prepayment or Debt Extinguishment Costs; 2. Settlement of Zero-Coupon Debt Instruments or Other Debt Instruments with Coupon Interest Rates That Are Insignificant in Relation to the Effective Interest Rate of the Borrowing; 3. Contingent Consideration Payments Made after a Business Combination; 4. Proceeds from the Settlement of Insurance Claims; 5. Proceeds from the Settlement of Corporate-Owned Life Insurance Policies, including Bank-Owned Life Insurance Policies; 6. Distributions Received from Equity Method Investees; 7. Beneficial Interests in Securitization Transactions; and 8. Separately Identifiable Cash Flows and Application of the Predominance Principle. The amendments in this ASU are effective for public business entities for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. Early application is permitted, including adoption in an interim period. The Company is currently in the process of evaluating the impact of the adoption on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In June 2016, the FASB issued ASU 2016-13, &amp;#8220;Financial Instruments - Credit Losses: Measurement of Credit Losses on Financial Instruments&amp;#8221;. ASU 2016-13 amends the impairment model to utilize an expected loss methodology in place of the currently used incurred loss methodology, which will result in the more timely recognition of losses. The new standard applies to financial assets measured at amortized cost basis, including receivables that result from revenue transactions and held-to-maturity debt securities.&amp;#160;The new guidance will be effective for the Company starting in the first quarter of fiscal 2021. Early adoption is permitted starting in the first quarter of fiscal 2020. The Company is in the process of determining the effects the adoption will have on its consolidated financial&amp;#160;statements as well as whether to adopt the new guidance early.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In May 2014, the FASB issued ASU No. 2014-09 regarding ASC Topic 606, &amp;#8220;Revenue from Contracts with Customers.&amp;#8221; ASU 2014-09 provides principles for recognizing revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for those goods or services. In August 2015, the FASB issued ASU 2015-14 to defer the effective date by one year with early adoption permitted as of the original effective date. ASU 2014-09 will be effective for Amtech&amp;#8217;s fiscal year beginning October 1, 2018 unless we elect the earlier date of October 1, 2017. In addition, the FASB issued ASU 2016-08, ASU 2016-10, ASU 2016-12 and ASU 2016-20 in March 2016, April 2016, May 2016 and December 2016, respectively, to help provide interpretive clarifications on the new guidance in ASC Topic 606. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In March 2016, the FASB issued ASU No. 2016-09,&amp;#160;Compensation - &amp;#8220;Stock Compensation (Topic 718)&amp;#8221;. ASU 2016-09 identifies areas for simplification involving several aspects of accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, an option to recognize gross stock compensation expense with actual forfeitures recognized as they occur, as well as certain classifications on the statement of cash flows. The amendments in this ASU are effective for annual periods beginning after December 15, 2016 and for the interim periods therein. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In March 2016, the FASB issued ASU 2016-07,&amp;#160;&amp;#8220;Equity Method and Joint Ventures&amp;#8221;&amp;#160;affecting all entities that have an investment that becomes qualified for the equity method of accounting as a result of an increase in the level of ownership or degree of influence. ASU 2016-07 is effective for the Company beginning on&amp;#160;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#222222;"&gt;January 1, 2017&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, early adoption is permitted.  The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In February 2016, the FASB issued ASU No. 2016-02, &amp;#8220;Leases (Topic 842)&amp;#8221;, which requires companies to generally recognize on the balance sheet operating and financing lease liabilities and corresponding right-of-use-assets. ASU 2016-02 also requires improved disclosures to help users of financial statements better understand the amount, timing and uncertainty of cash flows arising from leases. This ASU is effective for fiscal years beginning after December 15, 2018 and early application is permitted. The Company is currently in the process of evaluating the impact of this standard on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In January 2016, the FASB issued ASU No. 2016-01, &amp;#8220;Financial Instruments - Overall (Subtopic 825-10), Recognition and Measurement of Financial Assets and Financial Liabilities&amp;#8221;, which addresses certain aspects of recognition, measurement, presentation, and disclosure of financial instruments. This ASU is effective for fiscal years beginning after December 15, 2017 and early adoption is not permitted. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In November 2015, the FASB issued ASU No. 2015-17, &amp;#8220;Balance Sheet Classification of Deferred Taxes&amp;#8221;. This ASU requires entities to classify deferred tax liabilities and assets as noncurrent in a classified statement of financial position. This ASU is effective for fiscal years beginning after December 15, 2016, and interim periods within those annual periods. Early adoption is permitted for all entities as of the beginning of an interim or annual reporting period. The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In July 2015, the FASB issued ASU No. 2015-16,&amp;#160;&amp;#8220;Business Combinations (Topic 805): Simplifying the Accounting for Measurement-Period Adjustments&amp;#8221;, which simplifies the accounting for measurement-period adjustments to provisional amounts recognized in a business combination. ASU 2015-16 is effective for fiscal years (and interim reporting periods within those years) beginning after December 15, 2016. The provisions of ASU 2015-16 are not expected to have a material effect on the Company's financial condition, results of operations, or cash flows.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In July 2015, the FASB issued ASU No. 2015-11, &amp;#8220;Simplifying the Measurement of Inventory&amp;#8221;. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. The Company does not expect adoption of this ASU to have a material impact on the Company's consolidated financial position and results of operations.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock>
	<us-gaap:PensionAndOtherPostretirementPlansPensionsPolicy contextRef="FD2017Q1YTD" id="Fact-852398A3867D56AF81DCCA25FD93B4C7">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Pensions &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8211; The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&amp;#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches certain employee funds on a discretionary basis while certain subsidiaries require a minimum match to maintain their safe harbor status.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:PensionAndOtherPostretirementPlansPensionsPolicy>
	<us-gaap:PropertyPlantAndEquipmentPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-2185BC4E6881531AAA0B7775969F12B2">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Property, Plant and Equipment&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation and amortization is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20-30&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:PropertyPlantAndEquipmentPolicyTextBlock>
	<us-gaap:PropertyPlantAndEquipmentTextBlock contextRef="FD2017Q1YTD" id="Fact-4CE40E96AA50540FB10AB4C252555053">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of property, plant and equipment:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:72%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Land, building and leasehold improvements&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;17,799&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18,255&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Equipment and machinery&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8,749&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,056&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Furniture and fixtures&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,199&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,426&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;31,747&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;32,737&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Accumulated depreciation and amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(16,457&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(16,777&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,290&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,960&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:PropertyPlantAndEquipmentTextBlock>
	<us-gaap:ReceivablesPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-846D8B86C577552A9318D1BA0760B527">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Accounts Receivable and Allowance for Doubtful Accounts &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Accounts Receivable - Unbilled and Other&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Unbilled and other accounts receivable consist mainly of  a contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ReceivablesPolicyTextBlock>
	<us-gaap:RelatedPartyTransactionsDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-F4D76550BFFC528F970C73D5FCF00D55">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Related Party Transactions&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In the fourth quarter of 2015, the Company deconsolidated Kingstone, reducing its ownership to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of Kingstone Hong Kong, the Hong Kong holding company. Upon the deconsolidation, Kingstone became a related party of the Company.  At December 31, 2016, and September 30, 2016, the Company's accounts receivable due from Kingstone were &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.3 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, which are included in Accounts Receivable on the Condensed Consolidated Balance Sheet.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;As of December 31, 2016, SoLayTec has borrowed approximately &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$1.2&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; million from its shareholder, TNO Technostarters B.V.  The loans have varying interest rates from &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.5%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12.5%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and mature in 2021.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:RelatedPartyTransactionsDisclosureTextBlock>
	<us-gaap:ResearchAndDevelopmentExpensePolicy contextRef="FD2017Q1YTD" id="Fact-DE80E0EB30AB5122A6590AC81706DB2E">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Research, development and engineering expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ResearchAndDevelopmentExpensePolicy>
	<us-gaap:RevenueRecognitionDeferredRevenue contextRef="FD2017Q1YTD" id="Fact-909DB31FC48857DAA3EED132E445A140">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Deferred Profit&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Revenue deferred pursuant to the Company&amp;#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:RevenueRecognitionDeferredRevenue>
	<us-gaap:RevenueRecognitionPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-59745C4B51F558508B9E6151C5156517">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Revenue Recognition&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&amp;#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer&amp;#8217;s defined specifications have been met with at least &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Where there have been installation and acceptance of more than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;two&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; similarly configured items of equipment, but installation and acceptance have not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in&amp;#160;one&amp;#160;period will be lower and the gross margin reported in a subsequent period will improve.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;For products where the customer&amp;#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:10pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:RevenueRecognitionPolicyTextBlock>
	<us-gaap:ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock contextRef="FD2017Q1YTD" id="Fact-D53CE8CBDD5055928C829E5E9577956D">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock-based compensation expense reduced the Company&amp;#8217;s results of operations by the following amounts:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="9" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:68%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income before income taxes (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(319&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(342&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income taxes&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;35&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;48&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on net income&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(284&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(294&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Stock-based compensation expense is included in selling, general and administrative expenses.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;</us-gaap:ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock>
	<us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock contextRef="FD2017Q1YTD" id="Fact-A304BB460CC856E684D01C9CDE1DAC0F">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following table outlines basic and diluted EPS:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:73%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(in thousands, except per share amounts)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Basic Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,152&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Basic loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.00&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Diluted Loss Per Share Computation&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net loss attributable to Amtech Systems, Inc.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(53&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(4,015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted Average Shares Outstanding:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Common stock&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,152&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted shares&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,152&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Diluted loss per share attributable to Amtech shareholders&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.00&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(0.31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;</us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock>
	<us-gaap:ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock contextRef="FD2017Q1YTD" id="Fact-7310D13A70325F6C8982617AC8F552D8">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of intangibles:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="22" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:22%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:4%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:8%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Useful Life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Gross Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Accumulated Amortization&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Net Carrying Amount&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;September&amp;#160;30, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Customer lists&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,387&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,172&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,215&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,432&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,164&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,268&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Technology&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,014&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,576&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,438&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,214&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,678&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,536&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Trade names&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10-15 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,441&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(200&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,241&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,455&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(219&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,236&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2-10 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;260&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(239&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;21&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;277&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(217&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;60&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,102&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,187&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,915&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,378&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,278&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock>
	<us-gaap:ScheduleOfGoodwillTextBlock contextRef="FD2017Q1YTD" id="Fact-A0736671F3605200B6CF157E8A496D50">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of activity in goodwill:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:49%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;Total&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,597&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,388&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,269&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,269&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at September 30, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,328&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,119&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net foreign exchange differences&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(330&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at December 31, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,998&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,789&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Goodwill&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6,177&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,968&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&amp;#160;&amp;#160;Accumulated impairment losses&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,179&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Carrying value at December 31, 2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,998&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,063&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;728&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,789&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfGoodwillTextBlock>
	<us-gaap:ScheduleOfInventoryCurrentTableTextBlock contextRef="FD2017Q1YTD" id="Fact-15C0A88A69D959BFA12278FD4AAF9C8C">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The components of inventories are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:72%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Purchased parts and raw materials&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,148&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12,435&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Work-in-process&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5,832&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7,044&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Finished goods&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,873&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3,744&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20,853&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;23,223&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfInventoryCurrentTableTextBlock>
	<us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock contextRef="FD2017Q1YTD" id="Fact-C840CA7D6E2C5155A3A09D0E411C29F0">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The following is a summary of activity in accrued warranty expense:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:73%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;795&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;793&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Additions for warranties issued during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;383&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;146&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Reductions in the liability for payments made under the warranty&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(109&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Changes related to pre-existing warranties&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(245&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(54&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Currency translation adjustment&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(27&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(10&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending balance&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;879&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;766&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock>
	<us-gaap:ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock contextRef="FD2017Q1YTD" id="Fact-21E7EBC1A73F54F5B50B4886328B113F">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Our net revenues were to customers in the following geographic regions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="6" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:66%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:15%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:2%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:15%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;United States&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;28&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total North America&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;20&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;31&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:10px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;China&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;26&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;20&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Malaysia&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;17&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Taiwan&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Asia&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;61&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;54&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Germany&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;text-indent:18px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Other&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Total Europe&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;19&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;15&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;100&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock>
	<us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock contextRef="FD2017Q1YTD" id="Fact-D9A57A7F22BF5CF89CDB1658126C9657">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Information concerning our business segments is as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.6328125%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:69%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net Revenues:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,424&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,543&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,703&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,700&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,008&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,831&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;29,135&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;22,074&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Operating income (loss):&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,023&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,864&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,361&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(160&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;464&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;169&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,982&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(2,074&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(180&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,929&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;*  The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Solar segment revenue.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:70%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Identifiable Assets:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;43,334&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;42,962&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;51,898&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;51,985&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,906&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,819&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,780&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18,664&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;115,918&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;118,430&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfSegmentReportingInformationBySegmentTextBlock>
	<us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock contextRef="FD2017Q1YTD" id="Fact-11C80AB63C6B5FC2876C27AA7B2E367B">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock option transactions and the options outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:49%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at beginning of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,841,567&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.15&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,627,477&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.11&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Granted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100,000&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.99&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;344,075&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.25&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercised&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(180&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.80&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Forfeited&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(55,446&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13.34&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(33,642&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14.90&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,885,941&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.84&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,937,910&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.34&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercisable at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,375,174&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.26&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,189,855&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.21&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted average fair value of options &lt;/font&gt;&lt;/div&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;granted during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2.88&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.03&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock>
	<us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock contextRef="FD2017Q1YTD" id="Fact-7DAE2B6637265650A516C6246DC060D5">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:65%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:17%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:17%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Risk free interest rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Expected life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Dividend rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Volatility&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;62%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;62%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock>
	<us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock contextRef="FD2017Q1YTD" id="Fact-21DB09B1B4A35860841417F8FD9AFD74">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Restricted stock transactions and awards outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="14" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:49%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:11%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Awards&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Grant Date&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Fair Value&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Beginning Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13,540&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.98&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Released&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(13,540&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.98&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Ending Outstanding&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock>
	<us-gaap:SegmentReportingDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-67FD8E2A539650DBB0BAFAEEB9FEAC63">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Business Segment Information&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company&amp;#8217;s &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;three&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; reportable segments are as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Solar - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company is a leading supplier of thermal processing systems, ALD, related automation, parts and services, to the solar/photovoltaic industry and also offers PECVD (plasma-enhanced chemical vapor deposition) equipment to the global solar market. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Semiconductor - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In the Company&amp;#8217;s Semiconductor segment, it designs, manufactures, sells and services thermal processing equipment and related controls and parts for use by leading semiconductor manufacturers, and in electronics, automotive and other industries. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;"&gt;Polishing - &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;In the Company's Polishing segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Information concerning our business segments is as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.6328125%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:69%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Net Revenues:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;11,424&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9,543&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,703&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10,700&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,008&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,831&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;29,135&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;22,074&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Operating income (loss):&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar *&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,023&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,864&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2,361&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(160&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;464&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;169&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related &lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(1,982&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(2,074&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(180&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(3,929&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;*  The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;25%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Solar segment revenue.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:center;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="8" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:70%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:12%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;December&amp;#160;31, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;September&amp;#160;30, &lt;br clear="none"/&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:9pt;"&gt;&lt;font style="font-family:inherit;font-size:9pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Identifiable Assets:&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Solar&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;43,334&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;42,962&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Semiconductor&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;51,898&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;51,985&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Polishing&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,906&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4,819&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Non-segment related&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15,780&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;18,664&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;115,918&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;118,430&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:SegmentReportingDisclosureTextBlock>
	<us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy contextRef="FD2017Q1YTD" id="Fact-6E5D286BD5BE553A855B0798E32844BC">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Stock-Based Compensation -&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities. &lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock-based compensation expense reduced the Company&amp;#8217;s results of operations by the following amounts:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="9" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:68%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:13%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;(dollars in thousands)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income before income taxes (1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(319&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(342&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on income taxes&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;35&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;48&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Effect on net income&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(284&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(294&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"&gt;&lt;tr&gt;&lt;td style="width:48px;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:top" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;font-size:8pt;padding-left:24px;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;(1)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:top;" rowspan="1" colspan="1"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;Stock-based compensation expense is included in selling, general and administrative expenses.&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"&gt;&lt;font style="font-family:inherit;font-size:8pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock options issued under the terms of the Company's option plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the NASDAQ the trading day prior to the date of the option grant and expire no later than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;10 years&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; from the date of grant, with the most recent option grant expiring in 2026. Options issued by the Company generally vest over &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;six months&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;"&gt;four&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years, subject to the Company's board of directors' (the &amp;#8220;Board&amp;#8221;) discretion pursuant to the Company's share-based compensation plans.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Stock option transactions and the options outstanding are summarized as follows:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="16" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:49%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:10%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Options&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Weighted&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Average&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Exercise&lt;/font&gt;&lt;/div&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Price&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at beginning of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,841,567&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.15&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,627,477&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.11&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Granted&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;100,000&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;4.99&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;344,075&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;5.25&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercised&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(180&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.80&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#8212;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Forfeited&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(55,446&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;13.34&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;(33,642&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;)&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;14.90&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Outstanding at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,885,941&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;7.84&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,937,910&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.34&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="overflow:hidden;height:20px;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Exercisable at end of period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,375,174&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;8.26&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;1,189,855&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;9.21&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Weighted average fair value of options &lt;/font&gt;&lt;/div&gt;&lt;div style="font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;granted during the period&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2.88&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:right;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;3.03&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"&gt;&lt;table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"&gt;&lt;tr&gt;&lt;td colspan="4" rowspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="width:65%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:17%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:1%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;td style="width:17%;" rowspan="1" colspan="1"&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Three Months Ended December 31,&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2016&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;2015&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Risk free interest rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Expected life&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;6 years&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Dividend rate&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;0%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:left;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;Volatility&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;62%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="overflow:hidden;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"&gt;&lt;div style="text-align:center;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;62%&lt;/font&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;/div&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&amp;#160;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;The Company awards restricted shares under its existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two to four year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &amp;#8220;service period&amp;#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ShareBasedCompensationOptionAndIncentivePlansPolicy>
	<us-gaap:ShippingAndHandlingCostPolicyTextBlock contextRef="FD2017Q1YTD" id="Fact-D462941A544F5C5FBDFAF1F7C76B60BD">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Shipping expense&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; Shipping expenses of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.4 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; for each of the three months ended &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;December&amp;#160;31, 2016&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; and &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;2015&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, are included in selling, general and administrative expenses.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:ShippingAndHandlingCostPolicyTextBlock>
	<us-gaap:StandardProductWarrantyPolicy contextRef="FD2017Q1YTD" id="Fact-C901A0C310A75D7EAAFE8F8B6EDF25B4">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Warranty &amp;#8211;&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; A limited warranty is provided free of charge, generally for periods of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;12&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;24&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; months, for all purchases of the Company&amp;#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. Estimates are based on past experience and take into account the nature of the products under warranty.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:StandardProductWarrantyPolicy>
	<us-gaap:StockholdersEquityNoteDisclosureTextBlock contextRef="FD2017Q1YTD" id="Fact-33571F1A37145BF693FC97EB1374C972">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Stockholders' Equity&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Shareholder Rights Plan&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; &amp;#8211; On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the &amp;#8220;Rights Agent&amp;#8221;), entered into an Amended and Restated Rights Agreement (the &amp;#8220;Restated Rights Agreement&amp;#8221;) which amended and restated the terms governing the previously authorized shareholder rights (each a &amp;#8220;Right&amp;#8221;) to purchase fractional shares of the Company&amp;#8217;s Series A Participating Preferred Stock (&amp;#8220;Series A Preferred&amp;#8221;) currently attached to each of the Company&amp;#8217;s outstanding Common Shares, par value  &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$0.01&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;  per share (&amp;#8220;Common Shares&amp;#8221;). As amended, each Right entitles the registered holder to purchase from the Company &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;one one-thousandth&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of a share of Series A Preferred at an exercise price of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$51.60&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; (the &amp;#8220;Exercise Price&amp;#8221;), subject to adjustment. The Rights will expire &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;10&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; years after issuance and will be exercisable if (a) a person or group becomes the beneficial owner of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; or more of the Company&amp;#8217;s common stock or (b) a person or group commences a tender or exchange offer that would result in the offeror beneficially owning &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;15%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; or more of the Company&amp;#8217;s common stock.&amp;#160; The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;On October 1, 2015, the Company entered into a Second Amended and Restated Rights Agreement (the &amp;#8220;Second Restated Rights Agreement&amp;#8221;) with the Rights Agent, which expands the definition of Exempted Person to include any person that the Board, in its sole and absolute discretion, exempts from becoming an Acquiring Person under the Second Restated Rights Agreement. A Person deemed an Exempted Person under the Second Restated Rights Agreement cannot trigger any of the Rights provided therein so long as such Exempted Person complies with the terms and conditions by which the Board approved such exemption from the Restated Rights Agreement.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;As previously disclosed, on October 8, 2015, the Company entered into a Letter Agreement (the &amp;#8220;Agreement&amp;#8221;) by and between the Company and certain shareholders of the Company who jointly file (the &amp;#8220;Joint Filers&amp;#8221;) under Section 13 of the Securities Exchange Act of 1934, as amended (the &amp;#8220;Exchange Act&amp;#8221;). One of the Joint Filers became a member of our Board after the Agreement was approved by the Board.&amp;#160;The Agreement permits the Joint Filers, pursuant to the Second Restated Rights Agreement, to individually acquire shares of common stock of the Company that would, in the aggregate, bring the Joint Filers&amp;#8217; collective ownership to no more than &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;19.9%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Company&amp;#8217;s issued and outstanding common stock at any time. In the event the Joint Filers&amp;#8217; collective ownership at any time exceeds &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;19.9%&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; of the Company&amp;#8217;s issued and outstanding shares of common stock, the Company is entitled to specific performance and all other remedies entitled to the Company at law or equity, among others. The Company&amp;#8217;s board of directors approved the Agreement and transactions contemplated thereunder, and has the sole authority to terminate the Agreement at any time.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:StockholdersEquityNoteDisclosureTextBlock>
	<us-gaap:SubsequentEventsTextBlock contextRef="FD2017Q1YTD" id="Fact-B3DDCBA4631CFF4EA13F18EE8A641A55">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Subsequent Event&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;As a result of customer deposits received after the end of the quarter, cash, cash equivalents, and restricted cash increased to &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$45.8 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; as of January 31, 2017, compared to cash, cash equivalents, and restricted cash of &lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;$26.9 million&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;, as of December 31, 2016.&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:SubsequentEventsTextBlock>
	<us-gaap:UseOfEstimates contextRef="FD2017Q1YTD" id="Fact-5D1F4A7B1559522E872F397A7418245D">&lt;div style="font-family:Times New Roman;font-size:10pt;"&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;font-weight:bold;"&gt;Use of Estimates&lt;/font&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt; - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.&lt;/font&gt;&lt;/div&gt;&lt;div style="line-height:120%;text-align:justify;font-size:10pt;"&gt;&lt;font style="font-family:inherit;font-size:10pt;"&gt;&lt;br clear="none"/&gt;&lt;/font&gt;&lt;/div&gt;&lt;/div&gt;</us-gaap:UseOfEstimates>
	<link:footnoteLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:type="extended">
	</link:footnoteLink>
</xbrli:xbrl>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>7
<FILENAME>asys-20161231.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<xsd:schema attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://www.amtechsystems.com/20161231" xmlns:asys="http://www.amtechsystems.com/20161231" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <xsd:import namespace="http://fasb.org/us-gaap/2015-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2015-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2015/elts/us-roles-2015-01-31.xsd" />
  <xsd:import namespace="http://fasb.org/us-types/2015-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2015/elts/us-types-2015-01-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact" schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/net" schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/country/2013-01-31" schemaLocation="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/currency/2014-01-31" schemaLocation="http://xbrl.sec.gov/currency/2014/currency-2014-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/dei/2014-01-31" schemaLocation="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/exch/2015-01-31" schemaLocation="http://xbrl.sec.gov/exch/2015/exch-2015-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/invest/2013-01-31" schemaLocation="http://xbrl.sec.gov/invest/2013/invest-2013-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/naics/2011-01-31" schemaLocation="http://xbrl.sec.gov/naics/2011/naics-2011-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/sic/2011-01-31" schemaLocation="http://xbrl.sec.gov/sic/2011/sic-2011-01-31.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/stpr/2011-01-31" schemaLocation="http://xbrl.sec.gov/stpr/2011/stpr-2011-01-31.xsd" />
  <xsd:annotation>
    <xsd:appinfo>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20161231_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20161231_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20161231_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20161231_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:type="simple" />
      <link:roleType id="BusinessSegmentInformation" roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation">
        <link:definition>2107100 - Disclosure - Business Segment Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BusinessSegmentInformationDetails" roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails">
        <link:definition>2407402 - Disclosure - Business Segment Information (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="BusinessSegmentInformationTables" roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables">
        <link:definition>2307301 - Disclosure - Business Segment Information (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsAndContingencies" roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies">
        <link:definition>2111100 - Disclosure - Commitments and Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CommitmentsAndContingenciesDetails" roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails">
        <link:definition>2411401 - Disclosure - Commitments and Contingencies (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedBalanceSheets" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets">
        <link:definition>1001000 - Statement - Condensed Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedBalanceSheetsParenthetical" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical">
        <link:definition>1001501 - Statement - Condensed Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfCashFlows" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows">
        <link:definition>1004000 - Statement - Condensed Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfComprehensiveLoss" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss">
        <link:definition>1003000 - Statement - Condensed Consolidated Statements of Comprehensive Loss</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="CondensedConsolidatedStatementsOfOperations" roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations">
        <link:definition>1002000 - Statement - Condensed Consolidated Statements of Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="DocumentAndEntityInformation" roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation">
        <link:definition>0001000 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EarningsPerShare" roleURI="http://www.amtechsystems.com/role/EarningsPerShare">
        <link:definition>2103100 - Disclosure - Earnings Per Share</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EarningsPerShareDetails" roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails">
        <link:definition>2403402 - Disclosure - Earnings Per Share (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="EarningsPerShareTables" roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables">
        <link:definition>2303301 - Disclosure - Earnings Per Share (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxes" roleURI="http://www.amtechsystems.com/role/IncomeTaxes">
        <link:definition>2102100 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="IncomeTaxesDetails" roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails">
        <link:definition>2402401 - Disclosure - Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="Investments" roleURI="http://www.amtechsystems.com/role/Investments">
        <link:definition>2112100 - Disclosure - Investments</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="InvestmentsDetails" roleURI="http://www.amtechsystems.com/role/InvestmentsDetails">
        <link:definition>2412401 - Disclosure - Investments (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LongTermDebt" roleURI="http://www.amtechsystems.com/role/LongTermDebt">
        <link:definition>2110100 - Disclosure - Long-term Debt</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="LongTermDebtDetails" roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails">
        <link:definition>2410401 - Disclosure - Long-term Debt (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="MajorCustomersAndForeignSales" roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales">
        <link:definition>2108100 - Disclosure - Major Customers and Foreign Sales</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="MajorCustomersAndForeignSalesDetails" roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails">
        <link:definition>2408402 - Disclosure - Major Customers and Foreign Sales (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="MajorCustomersAndForeignSalesTables" roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables">
        <link:definition>2308301 - Disclosure - Major Customers and Foreign Sales (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RelatedPartyTransactions" roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactions">
        <link:definition>2114100 - Disclosure - Related Party Transactions</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="RelatedPartyTransactionsDetails" roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails">
        <link:definition>2414401 - Disclosure - Related Party Transactions (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockholdersEquity" roleURI="http://www.amtechsystems.com/role/StockholdersEquity">
        <link:definition>2105100 - Disclosure - Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="StockholdersEquityDetails" roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails">
        <link:definition>2405401 - Disclosure - Stockholders' Equity (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEvent" roleURI="http://www.amtechsystems.com/role/SubsequentEvent">
        <link:definition>2115100 - Disclosure - Subsequent Event</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SubsequentEventDetails" roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails">
        <link:definition>2415401 - Disclosure - Subsequent Event (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPolicies" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies">
        <link:definition>2101100 - Disclosure - Summary of Significant Accounting Policies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails">
        <link:definition>2401405 - Disclosure - Summary of Significant Accounting Policies - Concentrations of Credit Risk (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails">
        <link:definition>2401403 - Disclosure - Summary of Significant Accounting Policies - Deferred Profit (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesGoodwillDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails">
        <link:definition>2401408 - Disclosure - Summary of Significant Accounting Policies - Goodwill (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesIntangiblesDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails">
        <link:definition>2401409 - Disclosure - Summary of Significant Accounting Policies - Intangibles (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesInventoriesDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails">
        <link:definition>2401406 - Disclosure - Summary of Significant Accounting Policies - Inventories (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesPolicies" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies">
        <link:definition>2201201 - Disclosure - Summary of Significant Accounting Policies (Policies)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails">
        <link:definition>2401407 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails">
        <link:definition>2401413 - Disclosure - Summary of Significant Accounting Policies - Research and Development Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails">
        <link:definition>2401404 - Disclosure - Summary of Significant Accounting Policies - Restricted Cash (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails">
        <link:definition>2401412 - Disclosure - Summary of Significant Accounting Policies - Shipping Expense (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails">
        <link:definition>2401411 - Disclosure - Summary of Significant Accounting Policies - Stock-Based Compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesTables" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables">
        <link:definition>2301302 - Disclosure - Summary of Significant Accounting Policies (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType id="SummaryOfSignificantAccountingPoliciesWarrantyDetails" roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails">
        <link:definition>2401410 - Disclosure - Summary of Significant Accounting Policies - Warranty (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:element abstract="true" id="asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" name="AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_AmericasOtherMember" name="AmericasOtherMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_BTUInternationalIncBTUMergerMember" name="BTUInternationalIncBTUMergerMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_CashAndCashEquivalentsAndRestrictedCashMember" name="CashAndCashEquivalentsAndRestrictedCashMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_CashCashEquivalentsAndRestrictedCash" name="CashCashEquivalentsAndRestrictedCash" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
  <xsd:element id="asys_ClassOfWarrantOrRightExpirationPeriod" name="ClassOfWarrantOrRightExpirationPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_CommonStockCollectiveOwnershipThresholdForJointFilers" name="CommonStockCollectiveOwnershipThresholdForJointFilers" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" name="CommonStockMinimumPercentOwnershipForExerciseOfRights" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_CustomerNumberOneMember" name="CustomerNumberOneMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_DocumentAndEntityInformationAbstract" name="DocumentAndEntityInformationAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember" name="FederalHomeLoanBoardFiveYearClassicAdvanceRateMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" name="IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" name="IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="asys_IncreaseDecreaseInDeferredProfit" name="IncreaseDecreaseInDeferredProfit" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_KingstoneHoldingCompanyMember" name="KingstoneHoldingCompanyMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_KingstoneHongKongMember" name="KingstoneHongKongMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_MajorCustomersAndForeignSalesAbstract" name="MajorCustomersAndForeignSalesAbstract" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_MortgageNoteMember" name="MortgageNoteMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_NumberOfCustomers" name="NumberOfCustomers" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_NumberOfSimilarlyConfiguredItemsOfEquipment" name="NumberOfSimilarlyConfiguredItemsOfEquipment" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="instant" />
  <xsd:element id="asys_NumberOfSimilarlyConfiguredSystemsAndProcesses" name="NumberOfSimilarlyConfiguredSystemsAndProcesses" nillable="true" substitutionGroup="xbrli:item" type="xbrli:integerItemType" xbrli:periodType="instant" />
  <xsd:element id="asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" name="OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" nillable="true" substitutionGroup="xbrli:item" type="num:percentItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_PolishingSuppliesAndEquipmentMember" name="PolishingSuppliesAndEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchAndDevelopmentExpenseTableTextBlock" name="ResearchAndDevelopmentExpenseTableTextBlock" nillable="true" substitutionGroup="xbrli:item" type="nonnum:textBlockItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchAndDevelopmentNetOfGrantsEarned" name="ResearchAndDevelopmentNetOfGrantsEarned" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchandDevelopmentAgreementTerm" name="ResearchandDevelopmentAgreementTerm" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" name="ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_ResearchandDevelopmentRequiredContribution" name="ResearchandDevelopmentRequiredContribution" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element id="asys_ResearchandDevelopmentRequiredContributionLaborandAssets" name="ResearchandDevelopmentRequiredContributionLaborandAssets" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="credit" xbrli:periodType="instant" />
  <xsd:element abstract="true" id="asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" name="ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_ScheduleOfProductWarrantyLineItems" name="ScheduleOfProductWarrantyLineItems" nillable="true" substitutionGroup="xbrli:item" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_ScheduleOfWarrantiesTable" name="ScheduleOfWarrantiesTable" nillable="true" substitutionGroup="xbrldt:hypercubeItem" type="xbrli:stringItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" name="SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" name="SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SemiconductorEquipmentMember" name="SemiconductorEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SoLayTecB.V.Member" name="SoLayTecB.V.Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SolarEquipmentMember" name="SolarEquipmentMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_StandardProductWarrantyPeriod" name="StandardProductWarrantyPeriod" nillable="true" substitutionGroup="xbrli:item" type="xbrli:durationItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_StockholderActionsPutativeStockholderClassActionComplaintsMember" name="StockholderActionsPutativeStockholderClassActionComplaintsMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_SuperfundSiteMember" name="SuperfundSiteMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_TNOTechnostartersB.V.LoansMember" name="TNOTechnostartersB.V.LoansMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_TNOTechnostartersB.V.Member" name="TNOTechnostartersB.V.Member" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_TempressSystemsandEnergyResearchCentreAgreementMember" name="TempressSystemsandEnergyResearchCentreAgreementMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element abstract="true" id="asys_USTreasuriesandFDICInsuredMember" name="USTreasuriesandFDICInsuredMember" nillable="true" substitutionGroup="xbrli:item" type="nonnum:domainItemType" xbrli:periodType="duration" />
  <xsd:element id="asys_UnbilledAndOther" name="UnbilledAndOther" nillable="true" substitutionGroup="xbrli:item" type="xbrli:monetaryItemType" xbrli:balance="debit" xbrli:periodType="instant" />
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.CAL
<SEQUENCE>8
<FILENAME>asys-20161231_cal.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:href="asys-20161231.xsd#BusinessSegmentInformation" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:href="asys-20161231.xsd#BusinessSegmentInformationDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:href="asys-20161231.xsd#BusinessSegmentInformationTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:href="asys-20161231.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:href="asys-20161231.xsd#CommitmentsAndContingenciesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:href="asys-20161231.xsd#CondensedConsolidatedBalanceSheets" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:href="asys-20161231.xsd#CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfCashFlows" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfOperations" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:href="asys-20161231.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShare" xlink:href="asys-20161231.xsd#EarningsPerShare" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:href="asys-20161231.xsd#EarningsPerShareDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:href="asys-20161231.xsd#EarningsPerShareTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxes" xlink:href="asys-20161231.xsd#IncomeTaxes" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:href="asys-20161231.xsd#IncomeTaxesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/Investments" xlink:href="asys-20161231.xsd#Investments" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/InvestmentsDetails" xlink:href="asys-20161231.xsd#InvestmentsDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebt" xlink:href="asys-20161231.xsd#LongTermDebt" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:href="asys-20161231.xsd#LongTermDebtDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSales" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSalesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSalesTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactions" xlink:href="asys-20161231.xsd#RelatedPartyTransactions" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails" xlink:href="asys-20161231.xsd#RelatedPartyTransactionsDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquity" xlink:href="asys-20161231.xsd#StockholdersEquity" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:href="asys-20161231.xsd#StockholdersEquityDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEvent" xlink:href="asys-20161231.xsd#SubsequentEvent" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:href="asys-20161231.xsd#SubsequentEventDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPolicies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesPolicies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:type="simple" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:to="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_359b0ac4-80ce-a291-f73b-cff103b81eae" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_PreferredStockValue_359b0ac4-80ce-a291-f73b-cff103b81eae" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_ce40a301-9b6b-9fc3-bfb6-dfbb8fcdf29b" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_CommonStockValue_ce40a301-9b6b-9fc3-bfb6-dfbb8fcdf29b" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_9158c8ad-1189-2464-9c41-553e6a22df6c" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_AdditionalPaidInCapital_9158c8ad-1189-2464-9c41-553e6a22df6c" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_dd6b7206-c19f-4dd5-339b-1369c57cfe0f" xlink:type="locator" />
    <link:calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_dd6b7206-c19f-4dd5-339b-1369c57cfe0f" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_1d565cd0-d7bf-de89-4dbe-a484007b1fe8" xlink:type="locator" />
    <link:calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquity_d0f349aa-18e3-6323-86ad-665f8773c064" xlink:to="loc_us-gaap_RetainedEarningsAccumulatedDeficit_1d565cd0-d7bf-de89-4dbe-a484007b1fe8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinorityInterest" xlink:label="loc_us-gaap_MinorityInterest_be52b263-dda5-21e0-250c-b71c8efa5893" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_9a5c5aff-ee63-a4f2-571a-3515b5d26a3b" xlink:to="loc_us-gaap_MinorityInterest_be52b263-dda5-21e0-250c-b71c8efa5893" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:to="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:to="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_22caddf9-3843-6329-6e39-dc458323b572" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_AccountsPayableCurrent_22caddf9-3843-6329-6e39-dc458323b572" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_edc340b7-5c57-03d7-7d1e-ad6feb822363" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_edc340b7-5c57-03d7-7d1e-ad6feb822363" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_dc2d2699-bb05-9712-118d-7b99e8fe65c9" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_dc2d2699-bb05-9712-118d-7b99e8fe65c9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:type="locator" />
    <link:calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerAdvancesCurrent" xlink:label="loc_us-gaap_CustomerAdvancesCurrent_c7b5b1ce-c262-73ad-c0e3-19cce4719ca6" xlink:type="locator" />
    <link:calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_CustomerAdvancesCurrent_c7b5b1ce-c262-73ad-c0e3-19cce4719ca6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_eaf92fb1-642d-2c65-5ba7-1a63a3697f47" xlink:type="locator" />
    <link:calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_AccruedLiabilitiesCurrent_eaf92fb1-642d-2c65-5ba7-1a63a3697f47" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_d02cabf3-c4d9-166f-23df-bbec715cbe7f" xlink:type="locator" />
    <link:calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_AccruedIncomeTaxesCurrent_d02cabf3-c4d9-166f-23df-bbec715cbe7f" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_cb391e84-b205-7d47-a257-0dea5fb19043" xlink:type="locator" />
    <link:calculationArc order="8" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesCurrent_1de50dbc-01a9-6657-f83f-d1e74edfdf18" xlink:to="loc_us-gaap_LongTermDebtCurrent_cb391e84-b205-7d47-a257-0dea5fb19043" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilityForUncertainTaxPositionsNoncurrent" xlink:label="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_962ef027-557f-2e9c-093e-fcc6950ee443" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:to="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_962ef027-557f-2e9c-093e-fcc6950ee443" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_fe891e5b-d2af-f798-198f-f728ce0375a1" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Liabilities_4e70462c-e5f6-e2d9-0cf5-7f1332ddbc05" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_fe891e5b-d2af-f798-198f-f728ce0375a1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_53d4115f-c3d1-6e9c-3f23-fd144b27061e" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_4a314f0d-c6fa-5cf2-0be1-add747465af3" xlink:to="loc_us-gaap_CommitmentsAndContingencies_53d4115f-c3d1-6e9c-3f23-fd144b27061e" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_cd34decb-53b6-e0a9-28d5-0a9741c4b0f8" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_cd34decb-53b6-e0a9-28d5-0a9741c4b0f8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_05676487-dc23-faad-ff63-cd1ae2cdcbac" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_05676487-dc23-faad-ff63-cd1ae2cdcbac" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_4d24e56f-a5cb-07ba-0508-f5f1533ae24e" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_AccountsReceivableNetCurrent_4d24e56f-a5cb-07ba-0508-f5f1533ae24e" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_UnbilledAndOther" xlink:label="loc_asys_UnbilledAndOther_a276dc84-4ea1-907a-ba18-f541cfd6e9c2" xlink:type="locator" />
    <link:calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_asys_UnbilledAndOther_a276dc84-4ea1-907a-ba18-f541cfd6e9c2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:type="locator" />
    <link:calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsCurrent" xlink:label="loc_us-gaap_OtherAssetsCurrent_33278e4f-d71c-924a-f185-bd5aaa288d0b" xlink:type="locator" />
    <link:calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_OtherAssetsCurrent_33278e4f-d71c-924a-f185-bd5aaa288d0b" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesReceivable" xlink:label="loc_us-gaap_IncomeTaxesReceivable_7a61c15e-09d6-6a5c-81c0-2dfb596b27a3" xlink:type="locator" />
    <link:calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AssetsCurrent_39eaeb62-7ee3-5503-48f5-08c2dff05e50" xlink:to="loc_us-gaap_IncomeTaxesReceivable_7a61c15e-09d6-6a5c-81c0-2dfb596b27a3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_41359e4c-71d8-9161-b054-7e575267275a" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_41359e4c-71d8-9161-b054-7e575267275a" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_9b98e689-e6db-3e5b-e5c3-3324fffb4edf" xlink:type="locator" />
    <link:calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_OtherAssetsNoncurrent_9b98e689-e6db-3e5b-e5c3-3324fffb4edf" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestments" xlink:label="loc_us-gaap_EquityMethodInvestments_92ff315d-8a43-54e7-6ab9-e3a23fd1788a" xlink:type="locator" />
    <link:calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_EquityMethodInvestments_92ff315d-8a43-54e7-6ab9-e3a23fd1788a" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_894a128f-2068-d267-1e3e-64c93d0ed5ca" xlink:type="locator" />
    <link:calculationArc order="6" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_894a128f-2068-d267-1e3e-64c93d0ed5ca" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="locator" />
    <link:calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Assets_effc14df-fd72-eec8-ede9-64e0071b91bc" xlink:to="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_783b94c5-664a-4bc7-f813-8c258cc934b7" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_DepreciationDepletionAndAmortization_783b94c5-664a-4bc7-f813-8c258cc934b7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_3fd14fb0-3183-5236-c919-0e1ba96c1bb3" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_InventoryWriteDown_3fd14fb0-3183-5236-c919-0e1ba96c1bb3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InterestCostsCapitalized" xlink:label="loc_us-gaap_InterestCostsCapitalized_8e5eba94-48ef-e5cd-36db-3284446b48df" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_InterestCostsCapitalized_8e5eba94-48ef-e5cd-36db-3284446b48df" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredIncomeTaxes" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_05b30b26-9089-bc8b-603d-049bbd5be545" xlink:type="locator" />
    <link:calculationArc order="4" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_05b30b26-9089-bc8b-603d-049bbd5be545" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_d4c99b59-c44a-c4ac-309f-0bddfdb944a5" xlink:type="locator" />
    <link:calculationArc order="5" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_ShareBasedCompensation_d4c99b59-c44a-c4ac-309f-0bddfdb944a5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_b71b86f8-adb0-6f61-c3a9-37e1e67b4d68" xlink:type="locator" />
    <link:calculationArc order="6" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncomeLossFromEquityMethodInvestments_b71b86f8-adb0-6f61-c3a9-37e1e67b4d68" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="loc_us-gaap_ProvisionForDoubtfulAccounts_030f5c40-af7e-2a00-2417-01509e80b7e6" xlink:type="locator" />
    <link:calculationArc order="7" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_ProvisionForDoubtfulAccounts_030f5c40-af7e-2a00-2417-01509e80b7e6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="locator" />
    <link:calculationArc order="8" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities" xlink:label="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_d93d5f02-d089-fb60-608e-73232ee32133" xlink:type="locator" />
    <link:calculationArc order="9" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_d93d5f02-d089-fb60-608e-73232ee32133" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_91d80b53-6368-7466-a11d-02030d33de5c" xlink:type="locator" />
    <link:calculationArc order="10" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_91d80b53-6368-7466-a11d-02030d33de5c" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_59947135-2495-391e-9e35-ed6effebb894" xlink:type="locator" />
    <link:calculationArc order="11" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInInventories_59947135-2495-391e-9e35-ed6effebb894" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_3eb22aca-47ee-3290-8d2e-e73a1c67010e" xlink:type="locator" />
    <link:calculationArc order="12" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_3eb22aca-47ee-3290-8d2e-e73a1c67010e" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_709900d0-f7b0-b950-eae5-eeb8fc36b367" xlink:type="locator" />
    <link:calculationArc order="13" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_709900d0-f7b0-b950-eae5-eeb8fc36b367" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayable_a167e25c-e8b1-aeb8-f355-3727e3f06f3e" xlink:type="locator" />
    <link:calculationArc order="14" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsPayable_a167e25c-e8b1-aeb8-f355-3727e3f06f3e" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" xlink:label="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_86bcf3a0-1964-20b3-3c74-f541cff4ff95" xlink:type="locator" />
    <link:calculationArc order="15" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_86bcf3a0-1964-20b3-3c74-f541cff4ff95" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_IncreaseDecreaseInDeferredProfit" xlink:label="loc_asys_IncreaseDecreaseInDeferredProfit_e579765b-4d0c-4d98-db86-f541cfcacb27" xlink:type="locator" />
    <link:calculationArc order="16" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_916e1eb7-21fa-e5f0-a15f-0b05ed633776" xlink:to="loc_asys_IncreaseDecreaseInDeferredProfit_e579765b-4d0c-4d98-db86-f541cfcacb27" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_386292ff-155c-0309-455a-2b91b395b3da" xlink:type="locator" />
    <link:calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_386292ff-155c-0309-455a-2b91b395b3da" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="loc_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_20b2f8e5-bc13-7276-9568-761d012338aa" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:to="loc_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_20b2f8e5-bc13-7276-9568-761d012338aa" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries" xlink:label="loc_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_dd09f7be-9714-cdc1-20d4-b0a3c9ac11bd" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_58a5bd26-e5f4-de8f-6118-f713733148b8" xlink:to="loc_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_dd09f7be-9714-cdc1-20d4-b0a3c9ac11bd" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_bb66d22b-00d8-8213-df94-91578f68ce48" xlink:type="locator" />
    <link:calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_bb66d22b-00d8-8213-df94-91578f68ce48" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfLongTermDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_dbe54487-f43f-8212-69b5-2b562fa61c57" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_dbe54487-f43f-8212-69b5-2b562fa61c57" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfCommonStock" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_8c608436-f07c-e907-aa0d-bfd819a80a12" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_a678c20d-a481-ef6a-800a-4bd566075d81" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_8c608436-f07c-e907-aa0d-bfd819a80a12" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_438c1b09-9f50-5f5e-b6af-87ca1807a1a2" xlink:type="locator" />
    <link:calculationArc order="4" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_ff5db18e-7b91-5a5d-e914-0527b02a8012" xlink:to="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_438c1b09-9f50-5f5e-b6af-87ca1807a1a2" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_640557c9-9806-6bef-9084-9cc792948f77" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_560dfcb1-0fb6-5ffa-6e3b-8257ed923a94" xlink:type="locator" />
    <link:calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_640557c9-9806-6bef-9084-9cc792948f77" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_560dfcb1-0fb6-5ffa-6e3b-8257ed923a94" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_640557c9-9806-6bef-9084-9cc792948f77" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:to="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_fbd5cad0-09ca-a68e-f9d5-77ff2ba61ae4" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_038f4602-9abc-1f60-05a2-6f69306a77ae" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_fbd5cad0-09ca-a68e-f9d5-77ff2ba61ae4" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_e62ce8b8-4401-2622-8598-3e644745e95e" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLossAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_6e1329dd-9911-a537-956e-8ca9c6805be6" xlink:type="locator" />
    <link:calculationArc order="1" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetIncomeLoss_e62ce8b8-4401-2622-8598-3e644745e95e" xlink:to="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_6e1329dd-9911-a537-956e-8ca9c6805be6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_NetIncomeLoss_e62ce8b8-4401-2622-8598-3e644745e95e" xlink:to="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:to="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:to="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:to="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_533a4e74-899a-26d7-f9ea-a738a9e615c4" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:to="loc_us-gaap_SalesRevenueNet_533a4e74-899a-26d7-f9ea-a738a9e615c4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_a64684b5-99de-91bb-54dd-5702d4624c68" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_GrossProfit_ae720951-4a78-255d-8bd1-88ff26a27caf" xlink:to="loc_us-gaap_CostOfGoodsAndServicesSold_a64684b5-99de-91bb-54dd-5702d4624c68" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_SellingGeneralAndAdministrativeExpense_37d23128-e0be-7b8b-d6c6-f3d1ac14cac9" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:to="loc_us-gaap_SellingGeneralAndAdministrativeExpense_37d23128-e0be-7b8b-d6c6-f3d1ac14cac9" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:type="locator" />
    <link:calculationArc order="3" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OperatingIncomeLoss_0ea1551e-1643-5e21-4c6e-6431fd87aa68" xlink:to="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_b71b86f8-adb0-6f61-c3a9-37e1e67b4d68" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:to="loc_us-gaap_IncomeLossFromEquityMethodInvestments_b71b86f8-adb0-6f61-c3a9-37e1e67b4d68" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_51486ac3-3cfb-dff4-43ca-0d3980775a1d" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_f0ea1b66-a9f7-f42c-6882-4cca5faefea1" xlink:to="loc_us-gaap_OtherNonoperatingIncomeExpense_51486ac3-3cfb-dff4-43ca-0d3980775a1d" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_b8dcf191-083d-828d-7b9f-e2d2969b89f4" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_ProfitLoss_5f8983ec-dfa4-10d0-f53d-c0676300a16f" xlink:to="loc_us-gaap_IncomeTaxExpenseBenefit_b8dcf191-083d-828d-7b9f-e2d2969b89f4" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShare" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxes" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/Investments" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/InvestmentsDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebt" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/RelatedPartyTransactions" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquity" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEvent" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenue" xlink:label="loc_us-gaap_DeferredRevenue_43932d18-c762-b83d-ffef-46041f3e53dc" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:to="loc_us-gaap_DeferredRevenue_43932d18-c762-b83d-ffef-46041f3e53dc" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredCostsCurrent" xlink:label="loc_us-gaap_DeferredCostsCurrent_90b96690-629b-dc2a-d355-28a2a2b5c772" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_dfa5d6f8-93e9-51a9-8412-1958594d696d" xlink:to="loc_us-gaap_DeferredCostsCurrent_90b96690-629b-dc2a-d355-28a2a2b5c772" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_05009a8c-cb46-f259-46aa-63ca17f041e9" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:to="loc_us-gaap_GoodwillGross_05009a8c-cb46-f259-46aa-63ca17f041e9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_e577d935-b558-81ce-afc0-2216628a2c00" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_Goodwill_b108d604-1348-4e65-3817-2944b734c65a" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_e577d935-b558-81ce-afc0-2216628a2c00" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_d1f67248-e9b5-f4cc-7b0f-6057f1a3d17a" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_0b66a991-68b5-43d2-3cb3-4ea68bba2b7e" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_d1f67248-e9b5-f4cc-7b0f-6057f1a3d17a" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_0b66a991-68b5-43d2-3cb3-4ea68bba2b7e" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_5fad788a-33b8-6ace-c3c4-7d91cd9f63e4" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_d1f67248-e9b5-f4cc-7b0f-6057f1a3d17a" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_5fad788a-33b8-6ace-c3c4-7d91cd9f63e4" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves" xlink:label="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_37c1df56-8d3f-20f2-9679-e36e8dd7ed1a" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:to="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_37c1df56-8d3f-20f2-9679-e36e8dd7ed1a" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="loc_us-gaap_InventoryWorkInProcessNetOfReserves_8162f0c6-3901-3410-efb8-4a460fb9898c" xlink:type="locator" />
    <link:calculationArc order="2" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:to="loc_us-gaap_InventoryWorkInProcessNetOfReserves_8162f0c6-3901-3410-efb8-4a460fb9898c" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_52e0aebe-a03f-09bd-b0a5-024dc9cc6bc5" xlink:type="locator" />
    <link:calculationArc order="3" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_InventoryNet_eae794c2-73ec-cd91-efb3-99a2ff1f24cf" xlink:to="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_52e0aebe-a03f-09bd-b0a5-024dc9cc6bc5" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_6591f040-08b3-69a1-a560-c70736475ada" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_6591f040-08b3-69a1-a560-c70736475ada" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_b84a1570-30ad-4e3a-2391-9767a64e15fd" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_7ce178a4-245f-fa78-36a1-552609a67554" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_b84a1570-30ad-4e3a-2391-9767a64e15fd" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:type="extended">
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_6a3cb05a-f9c0-32f6-d20f-a948f53d0ee5" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpense_6a3cb05a-f9c0-32f6-d20f-a948f53d0ee5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_342320df-9194-bd4e-54f9-238e52047b2b" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_acbddf02-7fff-a3fe-55ae-f541cfe8d9d6" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_342320df-9194-bd4e-54f9-238e52047b2b" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ed55a377-3e01-611f-cd7f-0fbe24ab1ea8" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_3d8b2111-7dfd-aac1-d600-3c06aa98a76d" xlink:type="locator" />
    <link:calculationArc order="1" weight="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ed55a377-3e01-611f-cd7f-0fbe24ab1ea8" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpense_3d8b2111-7dfd-aac1-d600-3c06aa98a76d" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_1cd67c75-2b70-2503-15d7-39868db2360d" xlink:type="locator" />
    <link:calculationArc order="2" weight="-1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_ed55a377-3e01-611f-cd7f-0fbe24ab1ea8" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_1cd67c75-2b70-2503-15d7-39868db2360d" xlink:type="arc" />
  </link:calculationLink>
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables" xlink:type="extended" />
  <link:calculationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:type="extended" />
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>9
<FILENAME>asys-20161231_def.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:href="asys-20161231.xsd#BusinessSegmentInformation" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:href="asys-20161231.xsd#BusinessSegmentInformationDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:href="asys-20161231.xsd#BusinessSegmentInformationTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:href="asys-20161231.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:href="asys-20161231.xsd#CommitmentsAndContingenciesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:href="asys-20161231.xsd#CondensedConsolidatedBalanceSheets" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:href="asys-20161231.xsd#CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfCashFlows" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfOperations" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:href="asys-20161231.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShare" xlink:href="asys-20161231.xsd#EarningsPerShare" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:href="asys-20161231.xsd#EarningsPerShareDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:href="asys-20161231.xsd#EarningsPerShareTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxes" xlink:href="asys-20161231.xsd#IncomeTaxes" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:href="asys-20161231.xsd#IncomeTaxesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/Investments" xlink:href="asys-20161231.xsd#Investments" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/InvestmentsDetails" xlink:href="asys-20161231.xsd#InvestmentsDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebt" xlink:href="asys-20161231.xsd#LongTermDebt" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:href="asys-20161231.xsd#LongTermDebtDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSales" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSalesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSalesTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactions" xlink:href="asys-20161231.xsd#RelatedPartyTransactions" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails" xlink:href="asys-20161231.xsd#RelatedPartyTransactionsDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquity" xlink:href="asys-20161231.xsd#StockholdersEquity" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:href="asys-20161231.xsd#StockholdersEquityDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEvent" xlink:href="asys-20161231.xsd#SubsequentEvent" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:href="asys-20161231.xsd#SubsequentEventDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPolicies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesPolicies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:type="simple" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/all" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#all" xlink:type="simple" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-default" xlink:type="simple" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-domain" xlink:type="simple" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/domain-member" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#domain-member" xlink:type="simple" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#hypercube-dimension" xlink:type="simple" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationItemsAxis" xlink:label="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationItemsDomain" xlink:label="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:to="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationItemsDomain" xlink:label="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:to="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingSegmentsMember" xlink:label="loc_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:to="loc_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CorporateNonSegmentMember" xlink:label="loc_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:to="loc_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_10C58CB8F9CE80595C430F4EFFAE2C8B" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_10C58CB8F9CE80595C430F4EFFAE2C8B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_10C58CB8F9CE80595C430F4EFFAE2C8B" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_10C58CB8F9CE80595C430F4EFFAE2C8B" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductConcentrationRiskMember" xlink:label="loc_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F" xlink:to="loc_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_456F1470C177DA0655620F4EFFAFE798" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_456F1470C177DA0655620F4EFFAFE798" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_456F1470C177DA0655620F4EFFAFE798" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_456F1470C177DA0655620F4EFFAFE798" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueProductLineMember" xlink:label="loc_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0" xlink:to="loc_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_7688F56E344B683358610F4EFFAF21C6" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_7688F56E344B683358610F4EFFAF21C6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_7688F56E344B683358610F4EFFAF21C6" xlink:to="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_7688F56E344B683358610F4EFFAF21C6" xlink:to="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:to="loc_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_C7CC6282B10A35E068110F4EFFAFBEE5" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:to="loc_asys_SemiconductorEquipmentMember_C7CC6282B10A35E068110F4EFFAFBEE5" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_D8EB7BB505FA0668AE3E0F4EFFAF4A23" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_D8EB7BB505FA0668AE3E0F4EFFAF4A23" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="loc_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationCaseAxis" xlink:label="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationCaseTypeDomain" xlink:label="loc_us-gaap_LitigationCaseTypeDomain_107F45B85991F83C9C954854F87B9462_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:to="loc_us-gaap_LitigationCaseTypeDomain_107F45B85991F83C9C954854F87B9462_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationCaseTypeDomain" xlink:label="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:to="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_StockholderActionsPutativeStockholderClassActionComplaintsMember" xlink:label="loc_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:to="loc_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationStatusAxis" xlink:label="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationStatusDomain" xlink:label="loc_us-gaap_LitigationStatusDomain_8F50E40C56C98E6374E24854F87BCEBB_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:to="loc_us-gaap_LitigationStatusDomain_8F50E40C56C98E6374E24854F87BCEBB_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationStatusDomain" xlink:label="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:to="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SettledLitigationMember" xlink:label="loc_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:to="loc_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingenciesByNatureOfContingencyAxis" xlink:label="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_864F6DF52717379149DF4854F87B6AFC_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:to="loc_us-gaap_LossContingencyNatureDomain_864F6DF52717379149DF4854F87B6AFC_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:to="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossFromCatastrophesMember" xlink:label="loc_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:to="loc_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_ED8CFAB882CA8A86B8C74854F87BD311_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_ED8CFAB882CA8A86B8C74854F87BD311_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_05F44E5298C6A2D6731C4854F87B7D88_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_05F44E5298C6A2D6731C4854F87B7D88_69C9F9711C5E5691889C224BA1EF54A5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_TempressSystemsandEnergyResearchCentreAgreementMember" xlink:label="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:to="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PurchaseObligation" xlink:label="loc_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" xlink:label="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentAgreementTerm" xlink:label="loc_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentRequiredContributionLaborandAssets" xlink:label="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" xlink:label="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:type="locator" />
    <link:definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentRequiredContribution" xlink:label="loc_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:type="locator" />
    <link:definitionArc order="7" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyAccrualAtCarryingValue" xlink:label="loc_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:type="locator" />
    <link:definitionArc order="8" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="loc_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:type="locator" />
    <link:definitionArc order="9" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyClaimsSettledNumber" xlink:label="loc_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:type="locator" />
    <link:definitionArc order="10" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsForLegalSettlements" xlink:label="loc_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:type="locator" />
    <link:definitionArc order="11" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShare" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:to="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:to="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:to="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_59BBE650196964C1AB2F0FB4DA3146A5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:to="loc_us-gaap_EmployeeStockOptionMember_59BBE650196964C1AB2F0FB4DA3146A5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxes" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyLineItems" xlink:label="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyTable" xlink:label="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:to="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:to="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:to="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:to="loc_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:to="loc_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" xlink:label="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/Investments" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/InvestmentsDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_FC2C18675D8B68517C9F0FB4DA02082F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_FC2C18675D8B68517C9F0FB4DA02082F" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_9C50A28C34BBDA5250550FB4DA02539F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_FC2C18675D8B68517C9F0FB4DA02082F" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_9C50A28C34BBDA5250550FB4DA02539F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_9C50A28C34BBDA5250550FB4DA02539F" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_9C50A28C34BBDA5250550FB4DA02539F" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_1024BDD97F74D5DBFF410FB4DA0293FC" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26" xlink:to="loc_asys_KingstoneHoldingCompanyMember_1024BDD97F74D5DBFF410FB4DA0293FC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_11A517265F63AF23E69D0FB4DA02AE25" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_11A517265F63AF23E69D0FB4DA02AE25" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestments" xlink:label="loc_us-gaap_EquityMethodInvestments_90961F01037BD267C3720FB4DA021FDE" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:to="loc_us-gaap_EquityMethodInvestments_90961F01037BD267C3720FB4DA021FDE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:to="loc_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/LongTermDebt" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:to="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:to="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:to="loc_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_VariableRateAxis" xlink:label="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_VariableRateDomain" xlink:label="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:to="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_VariableRateDomain" xlink:label="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:to="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember" xlink:label="loc_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:to="loc_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:to="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:to="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_MortgageNoteMember" xlink:label="loc_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:to="loc_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_D09263FFD312617A643B1E5B3711048D" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_us-gaap_RangeAxis_D09263FFD312617A643B1E5B3711048D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_D09263FFD312617A643B1E5B3711048D" xlink:to="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_D09263FFD312617A643B1E5B3711048D" xlink:to="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_13A5CA4038C9CB8CE1E61E5B37114498" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:to="loc_us-gaap_MinimumMember_13A5CA4038C9CB8CE1E61E5B37114498" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_CAB6599000D84B2E8A001E5B3711FB05" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:to="loc_us-gaap_MaximumMember_CAB6599000D84B2E8A001E5B3711FB05" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="loc_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_545A1EB1A54476C19C900F4EFFA13A6D" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_545A1EB1A54476C19C900F4EFFA13A6D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_545A1EB1A54476C19C900F4EFFA13A6D" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_545A1EB1A54476C19C900F4EFFA13A6D" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="loc_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19" xlink:to="loc_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_3D8AC74D7F4853A5633D0F4EFFA18547" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_3D8AC74D7F4853A5633D0F4EFFA18547" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_3D8AC74D7F4853A5633D0F4EFFA18547" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_3D8AC74D7F4853A5633D0F4EFFA18547" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_F128DB47A90AB82548D10F4EFFA12330" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:to="loc_us-gaap_CustomerConcentrationRiskMember_F128DB47A90AB82548D10F4EFFA12330" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GeographicConcentrationRiskMember" xlink:label="loc_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:to="loc_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CustomerNumberOneMember" xlink:label="loc_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:to="loc_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:to="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:to="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_AmericasOtherMember" xlink:label="loc_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NorthAmericaMember" xlink:label="loc_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_CN" xlink:label="loc_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_MY" xlink:label="loc_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_TW" xlink:label="loc_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:type="locator" />
    <link:definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:type="locator" />
    <link:definitionArc order="7" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AsiaMember" xlink:label="loc_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:type="locator" />
    <link:definitionArc order="8" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_DE" xlink:label="loc_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:type="locator" />
    <link:definitionArc order="9" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:type="locator" />
    <link:definitionArc order="10" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EuropeMember" xlink:label="loc_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:type="locator" />
    <link:definitionArc order="11" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_FE1E75A2AAE4C22317330F4EFFA3F357" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_FE1E75A2AAE4C22317330F4EFFA3F357" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/RelatedPartyTransactions" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionLineItems" xlink:label="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable" xlink:label="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_BE7CC9AC63C8594221700FC8F7EADEBE" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_RangeAxis_BE7CC9AC63C8594221700FC8F7EADEBE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_BE7CC9AC63C8594221700FC8F7EADEBE" xlink:to="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_BE7CC9AC63C8594221700FC8F7EADEBE" xlink:to="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_7A3E39928ADE363438100FC92ACF8AA2" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:to="loc_us-gaap_MinimumMember_7A3E39928ADE363438100FC92ACF8AA2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_E1E4A7CA85C6B239D79D0FC94D6141AE" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:to="loc_us-gaap_MaximumMember_E1E4A7CA85C6B239D79D0FC94D6141AE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_F38574436AE4217DFE860FC7F46495A3" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_dei_LegalEntityAxis_F38574436AE4217DFE860FC7F46495A3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_dei_LegalEntityAxis_F38574436AE4217DFE860FC7F46495A3" xlink:to="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_dei_LegalEntityAxis_F38574436AE4217DFE860FC7F46495A3" xlink:to="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_75B3C6DF1CFE47783E610FC7F4B00542" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0" xlink:to="loc_asys_SoLayTecB.V.Member_75B3C6DF1CFE47783E610FC7F4B00542" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:to="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:to="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_TNOTechnostartersB.V.LoansMember" xlink:label="loc_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:to="loc_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:to="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:to="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_1E5CA029FC341446C15F0FB4D9F2B1C5" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:to="loc_us-gaap_AccountsReceivableMember_1E5CA029FC341446C15F0FB4D9F2B1C5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:to="loc_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsByRelatedPartyAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:type="locator" />
    <link:definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyDomain" xlink:label="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:to="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyDomain" xlink:label="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:to="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHongKongMember" xlink:label="loc_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:to="loc_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_TNOTechnostartersB.V.Member" xlink:label="loc_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:to="loc_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DueFromRelatedParties" xlink:label="loc_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromRelatedPartyDebt" xlink:label="loc_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionRate" xlink:label="loc_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquity" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockLineItems" xlink:label="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:to="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:to="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:to="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SeriesAPreferredStockMember" xlink:label="loc_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:to="loc_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights" xlink:label="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1" xlink:label="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ClassOfWarrantOrRightExpirationPeriod" xlink:label="loc_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" xlink:label="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CommonStockCollectiveOwnershipThresholdForJointFilers" xlink:label="loc_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:type="locator" />
    <link:definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SubsequentEvent" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:to="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:to="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:to="loc_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CashCashEquivalentsAndRestrictedCash" xlink:label="loc_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:to="loc_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:to="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InvestmentTypeAxis" xlink:label="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:to="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:to="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_USTreasuriesandFDICInsuredMember" xlink:label="loc_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:to="loc_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CashAndCashEquivalentsAndRestrictedCashMember" xlink:label="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:to="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:to="loc_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:to="loc_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_NumberOfCustomers" xlink:label="loc_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:to="loc_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillLineItems" xlink:label="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:to="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:to="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:to="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:to="loc_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:to="loc_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillRollForward" xlink:label="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:to="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillTranslationAdjustments" xlink:label="loc_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:type="extended">
    <link:loc xlink:href="asys-20161231.xsd#asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" xlink:label="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:type="locator" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" xlink:label="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerListsMember" xlink:label="loc_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PatentedTechnologyMember" xlink:label="loc_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="loc_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_15A73C3A94BBF734B1BA18E6DE0E2AD3" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:to="loc_us-gaap_RangeAxis_15A73C3A94BBF734B1BA18E6DE0E2AD3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_15A73C3A94BBF734B1BA18E6DE0E2AD3" xlink:to="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_15A73C3A94BBF734B1BA18E6DE0E2AD3" xlink:to="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_6F961D35C7D0B29722F418E6DE0FE126" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:to="loc_us-gaap_MinimumMember_6F961D35C7D0B29722F418E6DE0FE126" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_C946A204B988825D84C418E6DE0F8BD5" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:to="loc_us-gaap_MaximumMember_C946A204B988825D84C418E6DE0F8BD5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LandBuildingsAndImprovementsMember" xlink:label="loc_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="loc_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="loc_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="loc_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="loc_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_BEAD48B4F764DE83B0560F2E8B281F8D" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:to="loc_us-gaap_RangeAxis_BEAD48B4F764DE83B0560F2E8B281F8D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_BEAD48B4F764DE83B0560F2E8B281F8D" xlink:to="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_BEAD48B4F764DE83B0560F2E8B281F8D" xlink:to="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_990BCA0A6E13E6A921820F2E8B288205" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:to="loc_us-gaap_MinimumMember_990BCA0A6E13E6A921820F2E8B288205" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_E6872FDC172E68B0D17F0F2E8B28D173" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:to="loc_us-gaap_MaximumMember_E6872FDC172E68B0D17F0F2E8B28D173" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsLineItems" xlink:label="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsTable" xlink:label="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:to="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsAxis" xlink:label="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:to="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsDomain" xlink:label="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:to="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsDomain" xlink:label="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:to="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRestorationCostsMember" xlink:label="loc_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:to="loc_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRemediationSiteAxis" xlink:label="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:to="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRemediationSiteDomain" xlink:label="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:to="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRemediationSiteDomain" xlink:label="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:to="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SuperfundSiteMember" xlink:label="loc_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:to="loc_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:to="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:to="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:to="loc_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:to="loc_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_0A7975AA23B210D427280F328493915D" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:to="loc_us-gaap_RangeAxis_0A7975AA23B210D427280F328493915D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_0A7975AA23B210D427280F328493915D" xlink:to="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_0A7975AA23B210D427280F328493915D" xlink:to="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_1EBF1AC99763182510EC0F328494065C" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:to="loc_us-gaap_MaximumMember_1EBF1AC99763182510EC0F328494065C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_23FFEB594F680582F1F60F328494B8F3" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:to="loc_us-gaap_MinimumMember_23FFEB594F680582F1F60F328494B8F3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:type="locator" />
    <link:definitionArc order="6" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:type="locator" />
    <link:definitionArc order="7" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:type="locator" />
    <link:definitionArc order="8" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:type="locator" />
    <link:definitionArc order="9" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:type="locator" />
    <link:definitionArc order="10" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:type="locator" />
    <link:definitionArc order="11" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:type="locator" />
    <link:definitionArc order="12" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:type="locator" />
    <link:definitionArc order="13" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:type="arc" />
  </link:definitionLink>
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables" xlink:type="extended" />
  <link:definitionLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:type="extended">
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfProductWarrantyLineItems" xlink:label="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:type="locator" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfWarrantiesTable" xlink:label="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:to="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:type="arc" xbrldt:closed="true" xbrldt:contextElement="segment" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_015473520B14F10CE81D0F3284A99BC8" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:from="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:to="loc_us-gaap_RangeAxis_015473520B14F10CE81D0F3284A99BC8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20_default" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:from="loc_us-gaap_RangeAxis_015473520B14F10CE81D0F3284A99BC8" xlink:to="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20_default" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:from="loc_us-gaap_RangeAxis_015473520B14F10CE81D0F3284A99BC8" xlink:to="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_78E9624157D1EE959DAB0F3284A9FEAF" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:to="loc_us-gaap_MinimumMember_78E9624157D1EE959DAB0F3284A9FEAF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_6E067F644FBF0DAF6BFD0F3284AACD79" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:to="loc_us-gaap_MaximumMember_6E067F644FBF0DAF6BFD0F3284AACD79" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_StandardProductWarrantyPeriod" xlink:label="loc_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:to="loc_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MovementInStandardProductWarrantyAccrualRollForward" xlink:label="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:to="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrual" xlink:label="loc_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:type="locator" />
    <link:definitionArc order="1" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualWarrantiesIssued" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:type="locator" />
    <link:definitionArc order="2" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPayments" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:type="locator" />
    <link:definitionArc order="3" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:type="locator" />
    <link:definitionArc order="4" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:type="locator" />
    <link:definitionArc order="5" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:type="arc" />
  </link:definitionLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>10
<FILENAME>asys-20161231_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/netLabel" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple" />
  <link:labelLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:type="extended">
    <link:label id="lab_us-gaap_IncomeTaxDisclosureAbstract_A5C7FE88BDE73D8191470F4EFFC7B3FF_label_en-US" xlink:label="lab_us-gaap_IncomeTaxDisclosureAbstract_A5C7FE88BDE73D8191470F4EFFC7B3FF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Disclosure [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_A5C7FE88BDE73D8191470F4EFFC7B3FF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_A5C7FE88BDE73D8191470F4EFFC7B3FF" xlink:to="lab_us-gaap_IncomeTaxDisclosureAbstract_A5C7FE88BDE73D8191470F4EFFC7B3FF" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Table]</link:label>
    <link:label id="lab_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD_label_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyTable" xlink:label="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:to="lab_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:type="arc" />
    <link:label id="lab_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F_terseLabel_en-US" xlink:label="lab_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Range [Axis]</link:label>
    <link:label id="lab_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F_label_en-US" xlink:label="lab_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Range [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:to="lab_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:type="arc" />
    <link:label id="lab_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB_terseLabel_en-US" xlink:label="lab_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Range [Domain]</link:label>
    <link:label id="lab_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB_label_en-US" xlink:label="lab_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Range [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:to="lab_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:type="arc" />
    <link:label id="lab_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8_terseLabel_en-US" xlink:label="lab_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Minimum</link:label>
    <link:label id="lab_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8_label_en-US" xlink:label="lab_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Minimum [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:to="lab_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:type="arc" />
    <link:label id="lab_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3_terseLabel_en-US" xlink:label="lab_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Maximum</link:label>
    <link:label id="lab_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3_label_en-US" xlink:label="lab_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Maximum [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:to="lab_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Line Items]</link:label>
    <link:label id="lab_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99_label_en-US" xlink:label="lab_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Contingency [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyLineItems" xlink:label="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="lab_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:type="arc" />
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512_terseLabel_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Unrecognized tax benefits that would impact effective tax rate</link:label>
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512_label_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Unrecognized Tax Benefits that Would Impact Effective Tax Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:to="lab_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:type="arc" />
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E_terseLabel_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Unrecognized tax benefits, income tax penalties and interest accrued</link:label>
    <link:label id="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E_label_en-US" xlink:label="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Unrecognized Tax Benefits, Income Tax Penalties and Interest Accrued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:to="lab_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:type="arc" />
    <link:label id="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4_terseLabel_en-US" xlink:label="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of years open for tax examinations</link:label>
    <link:label id="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4_label_en-US" xlink:label="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Examination, Number of Years Generally Open For Tax Examinations</link:label>
    <link:label id="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4_documentation_en-US" xlink:label="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Income Tax Examination, Number of Years Generally Open For Tax Examinations</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" xlink:label="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:to="lab_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:type="arc" />
    <link:label id="lab_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A_label_en-US" xlink:label="lab_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Organization, Consolidation and Presentation of Financial Statements [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="lab_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Components of Deferred Profit</link:label>
    <link:label id="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427_label_en-US" xlink:label="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Revenue, by Arrangement, Disclosure [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenueByArrangementDisclosureTextBlock" xlink:label="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427" xlink:to="lab_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Inventory</link:label>
    <link:label id="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2_label_en-US" xlink:label="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Inventory, Current [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2" xlink:to="lab_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Activity in Goodwill</link:label>
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA_label_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Goodwill [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTextBlock" xlink:label="loc_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA" xlink:to="lab_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Summary of Intangibles</link:label>
    <link:label id="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E_label_en-US" xlink:label="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Finite-Lived Intangible Assets [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E" xlink:to="lab_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Summary of Activity in Accrued Warranty Expense</link:label>
    <link:label id="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3_label_en-US" xlink:label="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty Liability [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3" xlink:to="lab_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Effects of Share-based Compensation Expense</link:label>
    <link:label id="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669_label_en-US" xlink:label="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Compensation Cost for Share-based Payment Arrangements, Allocation of Share-based Compensation Costs by Plan [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669" xlink:to="lab_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stock Option Transactions and Options Outstanding</link:label>
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484_label_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation, Stock Options, Activity [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484" xlink:to="lab_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Options Fair Value Assumptions</link:label>
    <link:label id="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF_label_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Payment Award, Stock Options, Valuation Assumptions [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF" xlink:to="lab_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restricted Stock Transactions and Awards Outstanding</link:label>
    <link:label id="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8_label_en-US" xlink:label="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation, Restricted Stock and Restricted Stock Units Activity [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8" xlink:to="lab_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8" xlink:type="arc" />
    <link:label id="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8_terseLabel_en-US" xlink:label="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research and Development Expense and Grants Earned</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8_label_en-US" xlink:label="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Expense [Table Text Block]</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8_documentation_en-US" xlink:label="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development Expense [Table Text Block]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentExpenseTableTextBlock" xlink:label="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:to="lab_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtDisclosureAbstract_C6E4808244B2E7C50B701F2C5ED2FC04_label_en-US" xlink:label="lab_us-gaap_DebtDisclosureAbstract_8F79B7B53444505AA9E851E493D51D56" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Disclosure [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_8F79B7B53444505AA9E851E493D51D56" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtDisclosureAbstract_8F79B7B53444505AA9E851E493D51D56" xlink:to="lab_us-gaap_DebtDisclosureAbstract_8F79B7B53444505AA9E851E493D51D56" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebtTextBlock_A15B62C4CE10CCE8FC361F2C5ED2124D_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebtTextBlock_D0EC27BA970E564EBF2CD815B7233737" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term Debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebtTextBlock_A15B62C4CE10CCE8FC361F2C5ED2124D_label_en-US" xlink:label="lab_us-gaap_LongTermDebtTextBlock_D0EC27BA970E564EBF2CD815B7233737" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtTextBlock" xlink:label="loc_us-gaap_LongTermDebtTextBlock_D0EC27BA970E564EBF2CD815B7233737" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebtTextBlock_D0EC27BA970E564EBF2CD815B7233737" xlink:to="lab_us-gaap_LongTermDebtTextBlock_D0EC27BA970E564EBF2CD815B7233737" xlink:type="arc" />
    <link:label id="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983_terseLabel_en-US" xlink:label="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Acquired Finite and Indefinite-Lived Intangible Asset by Major Class [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983_label_en-US" xlink:label="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Acquired Finite and Indefinite-Lived Intangible Asset by Major Class [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983_documentation_en-US" xlink:label="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Schedule of Acquired Finite and Indefinite-Lived Intangible Asset by Major Class [Table]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" xlink:label="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:to="lab_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets by Major Class [Axis]</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets by Major Class [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Major Class Name [Domain]</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Major Class Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:type="arc" />
    <link:label id="lab_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028_terseLabel_en-US" xlink:label="lab_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer lists</link:label>
    <link:label id="lab_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028_label_en-US" xlink:label="lab_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Lists [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerListsMember" xlink:label="loc_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:to="lab_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:type="arc" />
    <link:label id="lab_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D_terseLabel_en-US" xlink:label="lab_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Technology</link:label>
    <link:label id="lab_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D_label_en-US" xlink:label="lab_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Patented Technology [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PatentedTechnologyMember" xlink:label="loc_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:to="lab_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:type="arc" />
    <link:label id="lab_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682_terseLabel_en-US" xlink:label="lab_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Trade names</link:label>
    <link:label id="lab_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682_label_en-US" xlink:label="lab_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Trade Names [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:to="lab_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220_terseLabel_en-US" xlink:label="lab_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220_label_en-US" xlink:label="lab_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Intangible Assets [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="loc_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:to="lab_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:type="arc" />
    <link:label id="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB_terseLabel_en-US" xlink:label="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</link:label>
    <link:label id="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB_label_en-US" xlink:label="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</link:label>
    <link:label id="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB_documentation_en-US" xlink:label="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" xlink:label="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="lab_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Gross Carrying Amount</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Accumulated Amortization</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Accumulated Amortization</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011_totalLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net Carrying Amount</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Assets, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:type="arc" />
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373_terseLabel_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Useful Life</link:label>
    <link:label id="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373_label_en-US" xlink:label="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Finite-Lived Intangible Asset, Useful Life</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:to="lab_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:type="arc" />
    <link:label id="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_B8B956FB0818A7EFE08873BDEC810FAA_terseLabel_en-US" xlink:label="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_98B527F0CE7D51F9B63F7BAA9CE9E494" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Summary of Significant Accounting Policies</link:label>
    <link:label id="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_B8B956FB0818A7EFE08873BDEC810FAA_label_en-US" xlink:label="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_98B527F0CE7D51F9B63F7BAA9CE9E494" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Organization, Consolidation, Basis of Presentation, Business Description and Accounting Policies [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:label="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_98B527F0CE7D51F9B63F7BAA9CE9E494" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_98B527F0CE7D51F9B63F7BAA9CE9E494" xlink:to="lab_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_98B527F0CE7D51F9B63F7BAA9CE9E494" xlink:type="arc" />
    <link:label id="lab_asys_DocumentAndEntityInformationAbstract_68F09679CB2D997A097E1F2C5E9DD08B_label_en-US" xlink:label="lab_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document and Entity Information [Abstract]</link:label>
    <link:label id="lab_asys_DocumentAndEntityInformationAbstract_68F09679CB2D997A097E1F2C5E9DD08B_documentation_en-US" xlink:label="lab_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Document and Entity Information [Abstract]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_DocumentAndEntityInformationAbstract" xlink:label="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="lab_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:type="arc" />
    <link:label id="lab_dei_EntityRegistrantName_083417275EBE35B7A1FE1F2C5E9DA759_terseLabel_en-US" xlink:label="lab_dei_EntityRegistrantName_2074D62616315C17AAB0C07301650B8E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Registrant Name</link:label>
    <link:label id="lab_dei_EntityRegistrantName_083417275EBE35B7A1FE1F2C5E9DA759_label_en-US" xlink:label="lab_dei_EntityRegistrantName_2074D62616315C17AAB0C07301650B8E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Registrant Name</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityRegistrantName" xlink:label="loc_dei_EntityRegistrantName_2074D62616315C17AAB0C07301650B8E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityRegistrantName_2074D62616315C17AAB0C07301650B8E" xlink:to="lab_dei_EntityRegistrantName_2074D62616315C17AAB0C07301650B8E" xlink:type="arc" />
    <link:label id="lab_dei_EntityCentralIndexKey_497C510FD29F002C0A151F2C5E9D955E_terseLabel_en-US" xlink:label="lab_dei_EntityCentralIndexKey_2968AD6C99525DB59EC385ACACB702DE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Central Index Key</link:label>
    <link:label id="lab_dei_EntityCentralIndexKey_497C510FD29F002C0A151F2C5E9D955E_label_en-US" xlink:label="lab_dei_EntityCentralIndexKey_2968AD6C99525DB59EC385ACACB702DE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Central Index Key</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="loc_dei_EntityCentralIndexKey_2968AD6C99525DB59EC385ACACB702DE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityCentralIndexKey_2968AD6C99525DB59EC385ACACB702DE" xlink:to="lab_dei_EntityCentralIndexKey_2968AD6C99525DB59EC385ACACB702DE" xlink:type="arc" />
    <link:label id="lab_dei_CurrentFiscalYearEndDate_3F28BF37A82C79E163861F2C5E9D6018_terseLabel_en-US" xlink:label="lab_dei_CurrentFiscalYearEndDate_45C3F2AD52B650FB98CE6D78BAF6C525" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current Fiscal Year End Date</link:label>
    <link:label id="lab_dei_CurrentFiscalYearEndDate_3F28BF37A82C79E163861F2C5E9D6018_label_en-US" xlink:label="lab_dei_CurrentFiscalYearEndDate_45C3F2AD52B650FB98CE6D78BAF6C525" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Current Fiscal Year End Date</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="loc_dei_CurrentFiscalYearEndDate_45C3F2AD52B650FB98CE6D78BAF6C525" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_CurrentFiscalYearEndDate_45C3F2AD52B650FB98CE6D78BAF6C525" xlink:to="lab_dei_CurrentFiscalYearEndDate_45C3F2AD52B650FB98CE6D78BAF6C525" xlink:type="arc" />
    <link:label id="lab_dei_EntityFilerCategory_BD4C39EB2D6FB2E3F5151F2C5E9E1758_terseLabel_en-US" xlink:label="lab_dei_EntityFilerCategory_E128C0F1C9A35FE1A859AF2B3C53AD96" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Filer Category</link:label>
    <link:label id="lab_dei_EntityFilerCategory_BD4C39EB2D6FB2E3F5151F2C5E9E1758_label_en-US" xlink:label="lab_dei_EntityFilerCategory_E128C0F1C9A35FE1A859AF2B3C53AD96" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Filer Category</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityFilerCategory" xlink:label="loc_dei_EntityFilerCategory_E128C0F1C9A35FE1A859AF2B3C53AD96" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityFilerCategory_E128C0F1C9A35FE1A859AF2B3C53AD96" xlink:to="lab_dei_EntityFilerCategory_E128C0F1C9A35FE1A859AF2B3C53AD96" xlink:type="arc" />
    <link:label id="lab_dei_DocumentType_29CDF9960EAE046A94831F2C5E9E667D_terseLabel_en-US" xlink:label="lab_dei_DocumentType_14A55DB3A6C953628879E069A28F6210" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Type</link:label>
    <link:label id="lab_dei_DocumentType_29CDF9960EAE046A94831F2C5E9E667D_label_en-US" xlink:label="lab_dei_DocumentType_14A55DB3A6C953628879E069A28F6210" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Type</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentType" xlink:label="loc_dei_DocumentType_14A55DB3A6C953628879E069A28F6210" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentType_14A55DB3A6C953628879E069A28F6210" xlink:to="lab_dei_DocumentType_14A55DB3A6C953628879E069A28F6210" xlink:type="arc" />
    <link:label id="lab_dei_DocumentPeriodEndDate_BC821054CA20725C6FFE1F2C5E9E4AFA_terseLabel_en-US" xlink:label="lab_dei_DocumentPeriodEndDate_CC465AE00D215E8A9F531FCA235DA34C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Period End Date</link:label>
    <link:label id="lab_dei_DocumentPeriodEndDate_BC821054CA20725C6FFE1F2C5E9E4AFA_label_en-US" xlink:label="lab_dei_DocumentPeriodEndDate_CC465AE00D215E8A9F531FCA235DA34C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Period End Date</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="loc_dei_DocumentPeriodEndDate_CC465AE00D215E8A9F531FCA235DA34C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentPeriodEndDate_CC465AE00D215E8A9F531FCA235DA34C" xlink:to="lab_dei_DocumentPeriodEndDate_CC465AE00D215E8A9F531FCA235DA34C" xlink:type="arc" />
    <link:label id="lab_dei_DocumentFiscalYearFocus_69A32093D1D9E3A96DFC1F2C5E9EEE47_terseLabel_en-US" xlink:label="lab_dei_DocumentFiscalYearFocus_BF6AF0CBA59F578790C15C886C6AA4BB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Fiscal Year Focus</link:label>
    <link:label id="lab_dei_DocumentFiscalYearFocus_69A32093D1D9E3A96DFC1F2C5E9EEE47_label_en-US" xlink:label="lab_dei_DocumentFiscalYearFocus_BF6AF0CBA59F578790C15C886C6AA4BB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Fiscal Year Focus</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="loc_dei_DocumentFiscalYearFocus_BF6AF0CBA59F578790C15C886C6AA4BB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentFiscalYearFocus_BF6AF0CBA59F578790C15C886C6AA4BB" xlink:to="lab_dei_DocumentFiscalYearFocus_BF6AF0CBA59F578790C15C886C6AA4BB" xlink:type="arc" />
    <link:label id="lab_dei_DocumentFiscalPeriodFocus_8D6E8F27253B7010EF7E1F2C5E9EA845_terseLabel_en-US" xlink:label="lab_dei_DocumentFiscalPeriodFocus_C15D4842479C5AAD8680D0A334B41454" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Document Fiscal Period Focus</link:label>
    <link:label id="lab_dei_DocumentFiscalPeriodFocus_8D6E8F27253B7010EF7E1F2C5E9EA845_label_en-US" xlink:label="lab_dei_DocumentFiscalPeriodFocus_C15D4842479C5AAD8680D0A334B41454" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Document Fiscal Period Focus</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="loc_dei_DocumentFiscalPeriodFocus_C15D4842479C5AAD8680D0A334B41454" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_DocumentFiscalPeriodFocus_C15D4842479C5AAD8680D0A334B41454" xlink:to="lab_dei_DocumentFiscalPeriodFocus_C15D4842479C5AAD8680D0A334B41454" xlink:type="arc" />
    <link:label id="lab_dei_AmendmentFlag_4F1030A457782D8D960D1F2C5E9EAE17_terseLabel_en-US" xlink:label="lab_dei_AmendmentFlag_AED28ADE54C254DBA9682A5F856A3EC6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Amendment Flag</link:label>
    <link:label id="lab_dei_AmendmentFlag_4F1030A457782D8D960D1F2C5E9EAE17_label_en-US" xlink:label="lab_dei_AmendmentFlag_AED28ADE54C254DBA9682A5F856A3EC6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Amendment Flag</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_AmendmentFlag" xlink:label="loc_dei_AmendmentFlag_AED28ADE54C254DBA9682A5F856A3EC6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_AmendmentFlag_AED28ADE54C254DBA9682A5F856A3EC6" xlink:to="lab_dei_AmendmentFlag_AED28ADE54C254DBA9682A5F856A3EC6" xlink:type="arc" />
    <link:label id="lab_dei_EntityCommonStockSharesOutstanding_5613D0E75F1F4AF754191F2C5E9E6F24_terseLabel_en-US" xlink:label="lab_dei_EntityCommonStockSharesOutstanding_2D40984FAC21568E9D6BD876B6A3322B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity Common Stock, Shares Outstanding</link:label>
    <link:label id="lab_dei_EntityCommonStockSharesOutstanding_5613D0E75F1F4AF754191F2C5E9E6F24_label_en-US" xlink:label="lab_dei_EntityCommonStockSharesOutstanding_2D40984FAC21568E9D6BD876B6A3322B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity Common Stock, Shares Outstanding</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="loc_dei_EntityCommonStockSharesOutstanding_2D40984FAC21568E9D6BD876B6A3322B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityCommonStockSharesOutstanding_2D40984FAC21568E9D6BD876B6A3322B" xlink:to="lab_dei_EntityCommonStockSharesOutstanding_2D40984FAC21568E9D6BD876B6A3322B" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityNoteAbstract_CCF4FFFC80AF89A7AE801F2C5DF2B086_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityNoteAbstract_182525E2AC7A59F89E66515D23E27350" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Note [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="loc_us-gaap_StockholdersEquityNoteAbstract_182525E2AC7A59F89E66515D23E27350" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityNoteAbstract_182525E2AC7A59F89E66515D23E27350" xlink:to="lab_us-gaap_StockholdersEquityNoteAbstract_182525E2AC7A59F89E66515D23E27350" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_B374B707B999BF281F221F2C5DF26C36_terseLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_6652101179C955FBA002CBDF9A7CD1D5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_B374B707B999BF281F221F2C5DF26C36_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_6652101179C955FBA002CBDF9A7CD1D5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Note Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_6652101179C955FBA002CBDF9A7CD1D5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_6652101179C955FBA002CBDF9A7CD1D5" xlink:to="lab_us-gaap_StockholdersEquityNoteDisclosureTextBlock_6652101179C955FBA002CBDF9A7CD1D5" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C_label_en-US" xlink:label="lab_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement of Cash Flows [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="lab_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9_terseLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Operating Activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Operating Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:to="lab_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E_verboseLabel_en-US" xlink:label="lab_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Net loss</link:label>
    <link:label id="lab_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E_label_en-US" xlink:label="lab_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E" xlink:to="lab_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E" xlink:type="arc" />
    <link:label id="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC_terseLabel_en-US" xlink:label="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Adjustments to reconcile net loss to net cash provided by (used in) operating activities:</link:label>
    <link:label id="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC_label_en-US" xlink:label="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="lab_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:type="arc" />
    <link:label id="lab_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F_terseLabel_en-US" xlink:label="lab_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Depreciation and amortization</link:label>
    <link:label id="lab_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F_label_en-US" xlink:label="lab_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Depreciation, Depletion and Amortization</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F" xlink:to="lab_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Write-down of inventory</link:label>
    <link:label id="lab_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99_label_en-US" xlink:label="lab_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory Write-down</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99" xlink:to="lab_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99" xlink:type="arc" />
    <link:label id="lab_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF_terseLabel_en-US" xlink:label="lab_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Capitalized interest</link:label>
    <link:label id="lab_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF_label_en-US" xlink:label="lab_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Interest Costs Capitalized</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InterestCostsCapitalized" xlink:label="loc_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF" xlink:to="lab_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE_negatedLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:type="resource" xml:lang="en-US">Deferred income taxes</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Deferred Income Taxes</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredIncomeTaxes" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE" xlink:to="lab_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Non-cash share based compensation expense</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419" xlink:to="lab_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Loss from equity method investment</link:label>
    <link:label id="lab_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8_label_en-US" xlink:label="lab_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income (Loss) from Equity Method Investments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8" xlink:to="lab_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD_terseLabel_en-US" xlink:label="lab_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Reversal of allowance for doubtful accounts</link:label>
    <link:label id="lab_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD_label_en-US" xlink:label="lab_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Provision for Doubtful Accounts</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="loc_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD" xlink:to="lab_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE_terseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Changes in operating assets and liabilities:</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Operating Capital [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="lab_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Restricted cash</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Restricted Cash for Operating Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities" xlink:label="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32" xlink:to="lab_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Accounts receivable</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Accounts Receivable</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665" xlink:to="lab_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Inventories</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Inventories</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0" xlink:to="lab_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A_terseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accrued income taxes</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Income Taxes Payable</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A" xlink:to="lab_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Other assets</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Prepaid Expense and Other Assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417" xlink:to="lab_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646_terseLabel_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts payable</link:label>
    <link:label id="lab_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646_label_en-US" xlink:label="lab_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) in Accounts Payable</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646" xlink:to="lab_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646" xlink:type="arc" />
    <link:label id="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546_terseLabel_en-US" xlink:label="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accrued liabilities and customer deposits</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546_label_en-US" xlink:label="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Accrued Liabilities And Customer Deposits</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546_documentation_en-US" xlink:label="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Accrued Liabilities And Customer Deposits</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" xlink:label="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:to="lab_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:type="arc" />
    <link:label id="lab_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460_terseLabel_en-US" xlink:label="lab_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred profit</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460_label_en-US" xlink:label="lab_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Deferred Profit</link:label>
    <link:label id="lab_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460_documentation_en-US" xlink:label="lab_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Increase (Decrease) In Deferred Profit</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_IncreaseDecreaseInDeferredProfit" xlink:label="loc_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:to="lab_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635_totalLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net cash used in operating activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Operating Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635" xlink:to="lab_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3_terseLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investing Activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Investing Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:to="lab_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:type="arc" />
    <link:label id="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Purchases of property, plant and equipment</link:label>
    <link:label id="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1_label_en-US" xlink:label="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Payments to Acquire Property, Plant, and Equipment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1" xlink:to="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Proceeds from sale of property, plant and equipment</link:label>
    <link:label id="lab_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0_label_en-US" xlink:label="lab_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Sale of Property, Plant, and Equipment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="loc_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0" xlink:to="lab_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Proceeds from partial sale of subsidiary</link:label>
    <link:label id="lab_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6_label_en-US" xlink:label="lab_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Divestiture of Interest in Consolidated Subsidiaries</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries" xlink:label="loc_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6" xlink:to="lab_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0_totalLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net cash (used in) provided by investing activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Investing Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0" xlink:to="lab_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4_terseLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Financing Activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Financing Activities [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:to="lab_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Proceeds from the exercise of stock options</link:label>
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F_label_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Issuance of Common Stock</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfCommonStock" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F" xlink:to="lab_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F" xlink:type="arc" />
    <link:label id="lab_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Payments on long-term debt</link:label>
    <link:label id="lab_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5_label_en-US" xlink:label="lab_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Repayments of Long-term Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5" xlink:to="lab_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Borrowings on long-term debt</link:label>
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD_label_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Issuance of Long-term Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfLongTermDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD" xlink:to="lab_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D_totalLabel_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net cash (used in) provided by financing activities</link:label>
    <link:label id="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D_label_en-US" xlink:label="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Cash Provided by (Used in) Financing Activities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D" xlink:to="lab_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D" xlink:type="arc" />
    <link:label id="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C_terseLabel_en-US" xlink:label="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Effect of Exchange Rate Changes on Cash</link:label>
    <link:label id="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C_label_en-US" xlink:label="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Effect of Exchange Rate on Cash and Cash Equivalents</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C" xlink:to="lab_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC_totalLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net Decrease in Cash and Cash Equivalents</link:label>
    <link:label id="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC_label_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, Period Increase (Decrease)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC" xlink:to="lab_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0_periodStartLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, Beginning of Period</link:label>
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0_label_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, at Carrying Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0" xlink:to="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_00CBA59BB7894401BA52245AD9A4E95A_periodEndLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_00CBA59BB7894401BA52245AD9A4E95A" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, End of Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_00CBA59BB7894401BA52245AD9A4E95A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_00CBA59BB7894401BA52245AD9A4E95A" xlink:to="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_00CBA59BB7894401BA52245AD9A4E95A" xlink:type="arc" />
    <link:label id="lab_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85_terseLabel_en-US" xlink:label="lab_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Supplemental Cash Flow Information:</link:label>
    <link:label id="lab_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85_label_en-US" xlink:label="lab_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Supplemental Cash Flow Information [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="loc_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:to="lab_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:type="arc" />
    <link:label id="lab_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711_terseLabel_en-US" xlink:label="lab_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Cash paid for interest</link:label>
    <link:label id="lab_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711_label_en-US" xlink:label="lab_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Interest Paid</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InterestPaid" xlink:label="loc_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711" xlink:to="lab_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income tax payments</link:label>
    <link:label id="lab_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9_label_en-US" xlink:label="lab_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Income Tax Refunds</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIncomeTaxRefunds" xlink:label="loc_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9" xlink:to="lab_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income tax payments</link:label>
    <link:label id="lab_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2_label_en-US" xlink:label="lab_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Taxes Paid</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesPaid" xlink:label="loc_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2" xlink:to="lab_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareAbstract_40F723A8FD74BF0473B01F2C5D2748AA_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareAbstract_A76B178FA42D58DB8BEA878651CA5ECF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_A76B178FA42D58DB8BEA878651CA5ECF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareAbstract_A76B178FA42D58DB8BEA878651CA5ECF" xlink:to="lab_us-gaap_EarningsPerShareAbstract_A76B178FA42D58DB8BEA878651CA5ECF" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareTextBlock_94ADDCF9B113BFC31A471F2C5D27D8C8_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareTextBlock_D07737EAA100580C863E9E63699DAD87" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Earnings Per Share</link:label>
    <link:label id="lab_us-gaap_EarningsPerShareTextBlock_94ADDCF9B113BFC31A471F2C5D27D8C8_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareTextBlock_D07737EAA100580C863E9E63699DAD87" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="loc_us-gaap_EarningsPerShareTextBlock_D07737EAA100580C863E9E63699DAD87" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareTextBlock_D07737EAA100580C863E9E63699DAD87" xlink:to="lab_us-gaap_EarningsPerShareTextBlock_D07737EAA100580C863E9E63699DAD87" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventsAbstract_49D09F4F5136074450CD18EE2192711C_label_en-US" xlink:label="lab_us-gaap_SubsequentEventsAbstract_49D09F4F5136074450CD18EE2192711C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Events [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_49D09F4F5136074450CD18EE2192711C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventsAbstract_49D09F4F5136074450CD18EE2192711C" xlink:to="lab_us-gaap_SubsequentEventsAbstract_49D09F4F5136074450CD18EE2192711C" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event</link:label>
    <link:label id="lab_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088_label_en-US" xlink:label="lab_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Events [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="loc_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088" xlink:to="lab_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088" xlink:type="arc" />
    <link:label id="lab_us-gaap_PercentageOfWeightedAverageCostInventory_F11F9530E8234AAC60F34854F94630CB_terseLabel_en-US" xlink:label="lab_us-gaap_PercentageOfWeightedAverageCostInventory_C0F2D6B3BD825E2D9C6DD823DC08BBCA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Percentage of average cost inventory</link:label>
    <link:label id="lab_us-gaap_PercentageOfWeightedAverageCostInventory_F11F9530E8234AAC60F34854F94630CB_label_en-US" xlink:label="lab_us-gaap_PercentageOfWeightedAverageCostInventory_C0F2D6B3BD825E2D9C6DD823DC08BBCA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Percentage of Weighted Average Cost Inventory</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PercentageOfWeightedAverageCostInventory" xlink:label="loc_us-gaap_PercentageOfWeightedAverageCostInventory_C0F2D6B3BD825E2D9C6DD823DC08BBCA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PercentageOfWeightedAverageCostInventory_C0F2D6B3BD825E2D9C6DD823DC08BBCA" xlink:to="lab_us-gaap_PercentageOfWeightedAverageCostInventory_C0F2D6B3BD825E2D9C6DD823DC08BBCA" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryNetAbstract_B756E1FD09D313636C794854F946CEE6_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Inventory, Net [Abstract]</link:label>
    <link:label id="lab_us-gaap_InventoryNetAbstract_B756E1FD09D313636C794854F946CEE6_label_en-US" xlink:label="lab_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Net [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNetAbstract" xlink:label="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:to="lab_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2E31C636627CC154A3CD4854F94667AF_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2ABA76ECE1105B41BE7F9D68F7D41A4E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Purchased parts and raw materials</link:label>
    <link:label id="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2E31C636627CC154A3CD4854F94667AF_label_en-US" xlink:label="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2ABA76ECE1105B41BE7F9D68F7D41A4E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Raw Materials and Supplies, Net of Reserves</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves" xlink:label="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2ABA76ECE1105B41BE7F9D68F7D41A4E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2ABA76ECE1105B41BE7F9D68F7D41A4E" xlink:to="lab_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2ABA76ECE1105B41BE7F9D68F7D41A4E" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryWorkInProcessNetOfReserves_8E11491B28BBC8C2A4D24854F946088D_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryWorkInProcessNetOfReserves_6F6E54E2C2325CFAA57B99927698AD44" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Work-in-process</link:label>
    <link:label id="lab_us-gaap_InventoryWorkInProcessNetOfReserves_8E11491B28BBC8C2A4D24854F946088D_label_en-US" xlink:label="lab_us-gaap_InventoryWorkInProcessNetOfReserves_6F6E54E2C2325CFAA57B99927698AD44" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Work in Process, Net of Reserves</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="loc_us-gaap_InventoryWorkInProcessNetOfReserves_6F6E54E2C2325CFAA57B99927698AD44" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryWorkInProcessNetOfReserves_6F6E54E2C2325CFAA57B99927698AD44" xlink:to="lab_us-gaap_InventoryWorkInProcessNetOfReserves_6F6E54E2C2325CFAA57B99927698AD44" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_64822633C46E24D46C424854F9465EB0_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_5AE27788288B522A9F938AD884887DE4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Finished goods</link:label>
    <link:label id="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_64822633C46E24D46C424854F9465EB0_label_en-US" xlink:label="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_5AE27788288B522A9F938AD884887DE4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Finished Goods, Net of Reserves</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_5AE27788288B522A9F938AD884887DE4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_5AE27788288B522A9F938AD884887DE4" xlink:to="lab_us-gaap_InventoryFinishedGoodsNetOfReserves_5AE27788288B522A9F938AD884887DE4" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryNet_881399C87D216998EB224854F946EAE0_totalLabel_en-US" xlink:label="lab_us-gaap_InventoryNet_25FA88BE8E995C0C9847FDF6532E7665" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Inventory</link:label>
    <link:label id="lab_us-gaap_InventoryNet_881399C87D216998EB224854F946EAE0_label_en-US" xlink:label="lab_us-gaap_InventoryNet_25FA88BE8E995C0C9847FDF6532E7665" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_25FA88BE8E995C0C9847FDF6532E7665" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryNet_25FA88BE8E995C0C9847FDF6532E7665" xlink:to="lab_us-gaap_InventoryNet_25FA88BE8E995C0C9847FDF6532E7665" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionsAbstract_1651AA541F303C0B210899E3ACEB7DCB_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionsAbstract_C71D609E68885C66903DF75B571F1E1C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transactions [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsAbstract" xlink:label="loc_us-gaap_RelatedPartyTransactionsAbstract_C71D609E68885C66903DF75B571F1E1C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionsAbstract_C71D609E68885C66903DF75B571F1E1C" xlink:to="lab_us-gaap_RelatedPartyTransactionsAbstract_C71D609E68885C66903DF75B571F1E1C" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_ABC448CBFE609812F93799E3C24C3AFB_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_8E61AC5117625108B006EF7E7C675320" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party Transactions</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_ABC448CBFE609812F93799E3C24C3AFB_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_8E61AC5117625108B006EF7E7C675320" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transactions Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsDisclosureTextBlock" xlink:label="loc_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_8E61AC5117625108B006EF7E7C675320" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_8E61AC5117625108B006EF7E7C675320" xlink:to="lab_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_8E61AC5117625108B006EF7E7C675320" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Long-term Debt Instruments [Table]</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Long-term Debt Instruments [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="lab_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:type="arc" />
    <link:label id="lab_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8_terseLabel_en-US" xlink:label="lab_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Legal Entity [Axis]</link:label>
    <link:label id="lab_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8_label_en-US" xlink:label="lab_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Legal Entity [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:to="lab_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:type="arc" />
    <link:label id="lab_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38_terseLabel_en-US" xlink:label="lab_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Entity [Domain]</link:label>
    <link:label id="lab_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38_label_en-US" xlink:label="lab_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Entity [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:to="lab_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:type="arc" />
    <link:label id="lab_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4_terseLabel_en-US" xlink:label="lab_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">SoLayTec, B.V.</link:label>
    <link:label id="lab_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4_label_en-US" xlink:label="lab_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">SoLayTec, B.V. [Member]</link:label>
    <link:label id="lab_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4_documentation_en-US" xlink:label="lab_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">SoLayTec, B.V.</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:to="lab_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:type="arc" />
    <link:label id="lab_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D_terseLabel_en-US" xlink:label="lab_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Variable Rate [Axis]</link:label>
    <link:label id="lab_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D_label_en-US" xlink:label="lab_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Variable Rate [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_VariableRateAxis" xlink:label="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:to="lab_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:type="arc" />
    <link:label id="lab_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1_terseLabel_en-US" xlink:label="lab_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Variable Rate [Domain]</link:label>
    <link:label id="lab_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1_label_en-US" xlink:label="lab_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Variable Rate [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_VariableRateDomain" xlink:label="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:to="lab_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:type="arc" />
    <link:label id="lab_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A_terseLabel_en-US" xlink:label="lab_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Federal Home Loan Board Five Year Classic Advance Rate</link:label>
    <link:label id="lab_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A_label_en-US" xlink:label="lab_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Federal Home Loan Board Five Year Classic Advance Rate [Member]</link:label>
    <link:label id="lab_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A_documentation_en-US" xlink:label="lab_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Federal Home Loan Board Five Year Classic Advance Rate</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember" xlink:label="loc_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:to="lab_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D_terseLabel_en-US" xlink:label="lab_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term Debt, Type [Axis]</link:label>
    <link:label id="lab_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D_label_en-US" xlink:label="lab_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt, Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:to="lab_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE_terseLabel_en-US" xlink:label="lab_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term Debt, Type [Domain]</link:label>
    <link:label id="lab_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE_label_en-US" xlink:label="lab_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt, Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:to="lab_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:type="arc" />
    <link:label id="lab_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF_terseLabel_en-US" xlink:label="lab_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Mortgage Note</link:label>
    <link:label id="lab_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF_label_en-US" xlink:label="lab_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Mortgage Note [Member]</link:label>
    <link:label id="lab_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF_documentation_en-US" xlink:label="lab_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Mortgage Note</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_MortgageNoteMember" xlink:label="loc_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:to="lab_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Debt Instrument [Line Items]</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Instrument [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="lab_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6_label_en-US" xlink:label="lab_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:to="lab_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Interest rate</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Instrument, Interest Rate, Stated Percentage</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:to="lab_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:type="arc" />
    <link:label id="lab_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E_terseLabel_en-US" xlink:label="lab_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Basis spread on variable rate</link:label>
    <link:label id="lab_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E_label_en-US" xlink:label="lab_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Debt Instrument, Basis Spread on Variable Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="loc_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:to="lab_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Proceeds from issuance of debt, less than</link:label>
    <link:label id="lab_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D_label_en-US" xlink:label="lab_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Issuance of Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:to="lab_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C_terseLabel_en-US" xlink:label="lab_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Commitments [Table]</link:label>
    <link:label id="lab_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C_label_en-US" xlink:label="lab_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Commitments [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsTable" xlink:label="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:to="lab_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E_terseLabel_en-US" xlink:label="lab_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Commitments [Axis]</link:label>
    <link:label id="lab_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E_label_en-US" xlink:label="lab_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Commitments [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsAxis" xlink:label="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:to="lab_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3_terseLabel_en-US" xlink:label="lab_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Commitments [Domain]</link:label>
    <link:label id="lab_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3_label_en-US" xlink:label="lab_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Commitments [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsDomain" xlink:label="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:to="lab_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:type="arc" />
    <link:label id="lab_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7_terseLabel_en-US" xlink:label="lab_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Environmental Restoration Costs</link:label>
    <link:label id="lab_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7_label_en-US" xlink:label="lab_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Environmental Restoration Costs [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRestorationCostsMember" xlink:label="loc_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:to="lab_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:type="arc" />
    <link:label id="lab_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892_terseLabel_en-US" xlink:label="lab_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Environmental Remediation Site [Axis]</link:label>
    <link:label id="lab_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892_label_en-US" xlink:label="lab_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Environmental Remediation Site [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRemediationSiteAxis" xlink:label="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:to="lab_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:type="arc" />
    <link:label id="lab_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8_terseLabel_en-US" xlink:label="lab_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Environmental Remediation Site [Domain]</link:label>
    <link:label id="lab_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8_label_en-US" xlink:label="lab_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Environmental Remediation Site [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRemediationSiteDomain" xlink:label="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:to="lab_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:type="arc" />
    <link:label id="lab_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04_terseLabel_en-US" xlink:label="lab_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Superfund Site</link:label>
    <link:label id="lab_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04_label_en-US" xlink:label="lab_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Superfund Site [Member]</link:label>
    <link:label id="lab_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04_documentation_en-US" xlink:label="lab_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Superfund Site</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_SuperfundSiteMember" xlink:label="loc_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:to="lab_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431_terseLabel_en-US" xlink:label="lab_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Commitments [Line Items]</link:label>
    <link:label id="lab_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431_label_en-US" xlink:label="lab_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Commitments [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsLineItems" xlink:label="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:to="lab_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:type="arc" />
    <link:label id="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E_terseLabel_en-US" xlink:label="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restricted cash</link:label>
    <link:label id="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E_label_en-US" xlink:label="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Restricted Cash and Cash Equivalents, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:to="lab_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:type="arc" />
    <link:label id="lab_asys_MajorCustomersAndForeignSalesAbstract_CC9D93E7E97D61937F271F2C5ECBEE76_label_en-US" xlink:label="lab_asys_MajorCustomersAndForeignSalesAbstract_0467D02FC725516A8D1296A042469478" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Major Customers and Foreign Sales [Abstract]</link:label>
    <link:label id="lab_asys_MajorCustomersAndForeignSalesAbstract_CC9D93E7E97D61937F271F2C5ECBEE76_documentation_en-US" xlink:label="lab_asys_MajorCustomersAndForeignSalesAbstract_0467D02FC725516A8D1296A042469478" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Major Customers and Foreign Sales [Abstract]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_0467D02FC725516A8D1296A042469478" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_0467D02FC725516A8D1296A042469478" xlink:to="lab_asys_MajorCustomersAndForeignSalesAbstract_0467D02FC725516A8D1296A042469478" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_258C1D438EE8C40C23971F2C5ECC43F7_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_B5FB906E2EE654978F9D3AF95802D84A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Major Customers And Foreign Sales</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_258C1D438EE8C40C23971F2C5ECC43F7_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_B5FB906E2EE654978F9D3AF95802D84A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:label="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_B5FB906E2EE654978F9D3AF95802D84A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_B5FB906E2EE654978F9D3AF95802D84A" xlink:to="lab_us-gaap_ConcentrationRiskDisclosureTextBlock_B5FB906E2EE654978F9D3AF95802D84A" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Goodwill [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77_label_en-US" xlink:label="lab_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Goodwill [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:to="lab_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098_terseLabel_en-US" xlink:label="lab_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Segments [Axis]</link:label>
    <link:label id="lab_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098_label_en-US" xlink:label="lab_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segments [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:to="lab_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Segment [Domain]</link:label>
    <link:label id="lab_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19_label_en-US" xlink:label="lab_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segments [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:to="lab_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:type="arc" />
    <link:label id="lab_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1_verboseLabel_en-US" xlink:label="lab_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Solar</link:label>
    <link:label id="lab_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1_label_en-US" xlink:label="lab_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Solar Equipment [Member]</link:label>
    <link:label id="lab_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1_documentation_en-US" xlink:label="lab_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Solar Equipment</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:to="lab_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:type="arc" />
    <link:label id="lab_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D_terseLabel_en-US" xlink:label="lab_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Semiconductor</link:label>
    <link:label id="lab_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D_label_en-US" xlink:label="lab_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Semiconductor Equipment [Member]</link:label>
    <link:label id="lab_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D_documentation_en-US" xlink:label="lab_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Semiconductor Equipment</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:to="lab_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:type="arc" />
    <link:label id="lab_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614_terseLabel_en-US" xlink:label="lab_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Polishing</link:label>
    <link:label id="lab_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614_label_en-US" xlink:label="lab_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Polishing Supplies And Equipment [Member]</link:label>
    <link:label id="lab_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614_documentation_en-US" xlink:label="lab_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Polishing supplies and equipment</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:to="lab_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill [Line Items]</link:label>
    <link:label id="lab_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94_label_en-US" xlink:label="lab_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillLineItems" xlink:label="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:to="lab_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4_label_en-US" xlink:label="lab_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillRollForward" xlink:label="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="lab_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2_periodStartLabel_en-US" xlink:label="lab_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Goodwill, gross, beginning of year</link:label>
    <link:label id="lab_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2_label_en-US" xlink:label="lab_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:to="lab_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC_negatedPeriodStartLabel_en-US" xlink:label="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:role="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:type="resource" xml:lang="en-US">Accumulated impairment losses</link:label>
    <link:label id="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC_label_en-US" xlink:label="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill, Impaired, Accumulated Impairment Loss</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:to="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:type="arc" />
    <link:label id="lab_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0_totalLabel_en-US" xlink:label="lab_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Goodwill, net, beginning of year</link:label>
    <link:label id="lab_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0_label_en-US" xlink:label="lab_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:to="lab_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net foreign exchange differences</link:label>
    <link:label id="lab_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4_label_en-US" xlink:label="lab_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill, Translation Adjustments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillTranslationAdjustments" xlink:label="loc_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:to="lab_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillGross_35A2882F8295D57EDDCE0F3284D24151_periodEndLabel_en-US" xlink:label="lab_us-gaap_GoodwillGross_35A2882F8295D57EDDCE0F3284D24151" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Goodwill, gross, end of quarter</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_35A2882F8295D57EDDCE0F3284D24151" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillGross_35A2882F8295D57EDDCE0F3284D24151" xlink:to="lab_us-gaap_GoodwillGross_35A2882F8295D57EDDCE0F3284D24151" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_90DB16412F5396ACF7720F3284D24C9C_negatedPeriodEndLabel_en-US" xlink:label="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_90DB16412F5396ACF7720F3284D24C9C" xlink:role="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:type="resource" xml:lang="en-US">Accumulated impairment losses</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_90DB16412F5396ACF7720F3284D24C9C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_90DB16412F5396ACF7720F3284D24C9C" xlink:to="lab_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_90DB16412F5396ACF7720F3284D24C9C" xlink:type="arc" />
    <link:label id="lab_us-gaap_Goodwill_1A5443839BF8393DCA9C0F3284D2A577_periodEndLabel_en-US" xlink:label="lab_us-gaap_Goodwill_1A5443839BF8393DCA9C0F3284D2A577" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Goodwill, net, end of quarter</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_1A5443839BF8393DCA9C0F3284D2A577" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Goodwill_1A5443839BF8393DCA9C0F3284D2A577" xlink:to="lab_us-gaap_Goodwill_1A5443839BF8393DCA9C0F3284D2A577" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Property, Plant and Equipment [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374_label_en-US" xlink:label="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:to="lab_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Axis]</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Domain]</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:type="arc" />
    <link:label id="lab_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA_terseLabel_en-US" xlink:label="lab_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Land, building and leasehold improvements</link:label>
    <link:label id="lab_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA_label_en-US" xlink:label="lab_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Land, Buildings and Improvements [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LandBuildingsAndImprovementsMember" xlink:label="loc_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:to="lab_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:type="arc" />
    <link:label id="lab_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57_terseLabel_en-US" xlink:label="lab_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Equipment and machinery</link:label>
    <link:label id="lab_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57_label_en-US" xlink:label="lab_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Machinery and Equipment [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="loc_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:to="lab_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:type="arc" />
    <link:label id="lab_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93_terseLabel_en-US" xlink:label="lab_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Leasehold improvements</link:label>
    <link:label id="lab_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93_label_en-US" xlink:label="lab_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Leasehold Improvements [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="loc_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:to="lab_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:type="arc" />
    <link:label id="lab_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549_terseLabel_en-US" xlink:label="lab_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Furniture and fixtures</link:label>
    <link:label id="lab_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549_label_en-US" xlink:label="lab_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Furniture and Fixtures [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="loc_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:to="lab_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:type="arc" />
    <link:label id="lab_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C_terseLabel_en-US" xlink:label="lab_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Buildings</link:label>
    <link:label id="lab_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C_label_en-US" xlink:label="lab_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Building and Building Improvements [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="loc_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:to="lab_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Line Items]</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, plant and equipment, useful life</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Useful Life</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, plant and equipment, gross</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Accumulated depreciation and amortization</link:label>
    <link:label id="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045_label_en-US" xlink:label="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accumulated Depreciation, Depletion and Amortization, Property, Plant, and Equipment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:to="lab_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF_totalLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Property, plant and equipment - net</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Basic and Diluted Earnings Per Share</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12" xlink:to="lab_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event [Table]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827_label_en-US" xlink:label="lab_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:to="lab_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Axis]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB_label_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:to="lab_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Domain]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B_label_en-US" xlink:label="lab_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:to="lab_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event</link:label>
    <link:label id="lab_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879_label_en-US" xlink:label="lab_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:to="lab_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:type="arc" />
    <link:label id="lab_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE_terseLabel_en-US" xlink:label="lab_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Subsequent Event [Line Items]</link:label>
    <link:label id="lab_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE_label_en-US" xlink:label="lab_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Subsequent Event [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:to="lab_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:type="arc" />
    <link:label id="lab_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909_verboseLabel_en-US" xlink:label="lab_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Cash, cash equivalents, and restricted cash</link:label>
    <link:label id="lab_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909_label_en-US" xlink:label="lab_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash, Cash Equivalents, And Restricted Cash</link:label>
    <link:label id="lab_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909_documentation_en-US" xlink:label="lab_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Cash, Cash Equivalents, And Restricted Cash</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_CashCashEquivalentsAndRestrictedCash" xlink:label="loc_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:to="lab_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D_label_en-US" xlink:label="lab_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement of Comprehensive Income [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:to="lab_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProfitLoss_F62175137F7F550757D00EE1E1218027_terseLabel_en-US" xlink:label="lab_us-gaap_ProfitLoss_F62175137F7F550757D00EE1E1218027" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net loss</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_F62175137F7F550757D00EE1E1218027" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProfitLoss_F62175137F7F550757D00EE1E1218027" xlink:to="lab_us-gaap_ProfitLoss_F62175137F7F550757D00EE1E1218027" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF_terseLabel_en-US" xlink:label="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Foreign currency translation adjustment</link:label>
    <link:label id="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF_label_en-US" xlink:label="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF" xlink:to="lab_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF" xlink:type="arc" />
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9_totalLabel_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Comprehensive loss</link:label>
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9_label_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Comprehensive Income (Loss), Net of Tax, Including Portion Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9" xlink:to="lab_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9" xlink:type="arc" />
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Comprehensive loss attributable to noncontrolling interest</link:label>
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24_label_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Comprehensive Income (Loss), Net of Tax, Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24" xlink:to="lab_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24" xlink:type="arc" />
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642_totalLabel_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Comprehensive loss attributable to Amtech Systems, Inc.</link:label>
    <link:label id="lab_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642_label_en-US" xlink:label="lab_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642" xlink:to="lab_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Stock by Class [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8_label_en-US" xlink:label="lab_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Stock by Class [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:to="lab_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0_terseLabel_en-US" xlink:label="lab_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Class of Stock [Axis]</link:label>
    <link:label id="lab_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0_label_en-US" xlink:label="lab_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Stock [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:to="lab_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Class of Stock [Domain]</link:label>
    <link:label id="lab_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9_label_en-US" xlink:label="lab_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Stock [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:to="lab_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:type="arc" />
    <link:label id="lab_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152_terseLabel_en-US" xlink:label="lab_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Series A Preferred Stock</link:label>
    <link:label id="lab_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152_label_en-US" xlink:label="lab_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Series A Preferred Stock [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SeriesAPreferredStockMember" xlink:label="loc_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:to="lab_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Class of Stock [Line Items]</link:label>
    <link:label id="lab_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878_label_en-US" xlink:label="lab_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Stock [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockLineItems" xlink:label="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="lab_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, par value (USD per share)</link:label>
    <link:label id="lab_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95_label_en-US" xlink:label="lab_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Par or Stated Value Per Share</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:to="lab_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of securities called by warrants or rights (in shares)</link:label>
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E_label_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Warrant or Right, Number of Securities Called by Warrants or Rights</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights" xlink:label="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:to="lab_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3_terseLabel_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercise price of rights (USD per share)</link:label>
    <link:label id="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3_label_en-US" xlink:label="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class of Warrant or Right, Exercise Price of Warrants or Rights</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1" xlink:label="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:to="lab_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:type="arc" />
    <link:label id="lab_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8_terseLabel_en-US" xlink:label="lab_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Rights expiration period</link:label>
    <link:label id="lab_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8_label_en-US" xlink:label="lab_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Class Of Warrant Or Right, Expiration Period</link:label>
    <link:label id="lab_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8_documentation_en-US" xlink:label="lab_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Class Of Warrant Or Right, Expiration Period</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ClassOfWarrantOrRightExpirationPeriod" xlink:label="loc_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:to="lab_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:type="arc" />
    <link:label id="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046_terseLabel_en-US" xlink:label="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Minimum percent ownership of common stock for exercise of rights</link:label>
    <link:label id="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046_label_en-US" xlink:label="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Minimum Percent Ownership For Exercise Of Rights</link:label>
    <link:label id="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046_documentation_en-US" xlink:label="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Common Stock, Minimum Percent Ownership For Exercise Of Rights</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" xlink:label="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:to="lab_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:type="arc" />
    <link:label id="lab_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842_terseLabel_en-US" xlink:label="lab_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Collective ownership threshold for joint filers</link:label>
    <link:label id="lab_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842_label_en-US" xlink:label="lab_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Collective Ownership Threshold For Joint Filers</link:label>
    <link:label id="lab_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842_documentation_en-US" xlink:label="lab_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Common Stock, Collective Ownership Threshold For Joint Filers</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_CommonStockCollectiveOwnershipThresholdForJointFilers" xlink:label="loc_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:to="lab_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxDisclosureTextBlock_53651D94A0A01D7B442C1F2C5F0C2B09_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxDisclosureTextBlock_04E9BF8D13A05808992F1E6D54AC5688" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Taxes</link:label>
    <link:label id="lab_us-gaap_IncomeTaxDisclosureTextBlock_53651D94A0A01D7B442C1F2C5F0C2B09_label_en-US" xlink:label="lab_us-gaap_IncomeTaxDisclosureTextBlock_04E9BF8D13A05808992F1E6D54AC5688" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="loc_us-gaap_IncomeTaxDisclosureTextBlock_04E9BF8D13A05808992F1E6D54AC5688" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxDisclosureTextBlock_04E9BF8D13A05808992F1E6D54AC5688" xlink:to="lab_us-gaap_IncomeTaxDisclosureTextBlock_04E9BF8D13A05808992F1E6D54AC5688" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk [Table]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="lab_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:type="arc" />
    <link:label id="lab_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD_terseLabel_en-US" xlink:label="lab_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investment Type [Axis]</link:label>
    <link:label id="lab_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD_label_en-US" xlink:label="lab_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Investment Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InvestmentTypeAxis" xlink:label="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:to="lab_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:type="arc" />
    <link:label id="lab_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA_terseLabel_en-US" xlink:label="lab_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investment [Domain]</link:label>
    <link:label id="lab_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA_label_en-US" xlink:label="lab_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Investments [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:to="lab_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:type="arc" />
    <link:label id="lab_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B_terseLabel_en-US" xlink:label="lab_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">US Treasuries and FDIC Insured</link:label>
    <link:label id="lab_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B_label_en-US" xlink:label="lab_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">US Treasuries and FDIC Insured [Member]</link:label>
    <link:label id="lab_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B_documentation_en-US" xlink:label="lab_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">US Treasuries and FDIC Insured [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_USTreasuriesandFDICInsuredMember" xlink:label="loc_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:to="lab_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Axis]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:to="lab_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Domain]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Benchmark [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:to="lab_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:type="arc" />
    <link:label id="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F_terseLabel_en-US" xlink:label="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents and Restricted Cash</link:label>
    <link:label id="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F_label_en-US" xlink:label="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash And Cash Equivalents And Restricted Cash [Member]</link:label>
    <link:label id="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F_documentation_en-US" xlink:label="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Cash And Cash Equivalents And Restricted Cash [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_CashAndCashEquivalentsAndRestrictedCashMember" xlink:label="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:to="lab_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts Receivable</link:label>
    <link:label id="lab_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B_label_en-US" xlink:label="lab_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Receivable [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:to="lab_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Axis]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:to="lab_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Domain]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:to="lab_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:type="arc" />
    <link:label id="lab_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54_terseLabel_en-US" xlink:label="lab_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer Concentration Risk</link:label>
    <link:label id="lab_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54_label_en-US" xlink:label="lab_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Concentration Risk [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:to="lab_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration Risk [Line Items]</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:to="lab_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentration risk, percentage</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk, Percentage</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:to="lab_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:type="arc" />
    <link:label id="lab_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4_terseLabel_en-US" xlink:label="lab_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of customers</link:label>
    <link:label id="lab_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4_label_en-US" xlink:label="lab_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Number Of Customers</link:label>
    <link:label id="lab_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4_documentation_en-US" xlink:label="lab_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Number Of Customers</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_NumberOfCustomers" xlink:label="loc_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:to="lab_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentReportingAbstract_3DB5514E3A73665984F71F2C5F27F399_label_en-US" xlink:label="lab_us-gaap_SegmentReportingAbstract_360BF005800C58C3A0DD8BFEA9767F2F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment Reporting [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_360BF005800C58C3A0DD8BFEA9767F2F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentReportingAbstract_360BF005800C58C3A0DD8BFEA9767F2F" xlink:to="lab_us-gaap_SegmentReportingAbstract_360BF005800C58C3A0DD8BFEA9767F2F" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentReportingDisclosureTextBlock_E02F119290CEB023E0A71F2C5F27CEA0_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentReportingDisclosureTextBlock_3534D6C205595F33A1F7A271C629E8B2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Segment Information</link:label>
    <link:label id="lab_us-gaap_SegmentReportingDisclosureTextBlock_E02F119290CEB023E0A71F2C5F27CEA0_label_en-US" xlink:label="lab_us-gaap_SegmentReportingDisclosureTextBlock_3534D6C205595F33A1F7A271C629E8B2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment Reporting Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="loc_us-gaap_SegmentReportingDisclosureTextBlock_3534D6C205595F33A1F7A271C629E8B2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentReportingDisclosureTextBlock_3534D6C205595F33A1F7A271C629E8B2" xlink:to="lab_us-gaap_SegmentReportingDisclosureTextBlock_3534D6C205595F33A1F7A271C629E8B2" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52_label_en-US" xlink:label="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:to="lab_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:type="arc" />
    <link:label id="lab_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C_terseLabel_en-US" xlink:label="lab_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Award Type [Axis]</link:label>
    <link:label id="lab_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C_label_en-US" xlink:label="lab_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Award Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:to="lab_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Award Type [Domain]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Award [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:type="arc" />
    <link:label id="lab_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D_terseLabel_en-US" xlink:label="lab_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stock Options</link:label>
    <link:label id="lab_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D_label_en-US" xlink:label="lab_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Employee Stock Option [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:to="lab_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:type="arc" />
    <link:label id="lab_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24_terseLabel_en-US" xlink:label="lab_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restricted Stock</link:label>
    <link:label id="lab_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24_label_en-US" xlink:label="lab_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Restricted Stock [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:to="lab_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:type="arc" />
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Effect on income before income taxes</link:label>
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C_label_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Allocated Share-based Compensation Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:to="lab_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:type="arc" />
    <link:label id="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8_terseLabel_en-US" xlink:label="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Effect on income taxes</link:label>
    <link:label id="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8_label_en-US" xlink:label="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Employee Service Share-based Compensation, Tax Benefit from Compensation Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:to="lab_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:type="arc" />
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D_negatedTotalLabel_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:role="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:type="resource" xml:lang="en-US">Effect on net income</link:label>
    <link:label id="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D_label_en-US" xlink:label="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Allocated Share-based Compensation Expense, Net of Tax</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:to="lab_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:type="arc" />
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343_terseLabel_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Option expiration period</link:label>
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343_label_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:to="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Option vesting period</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Award Vesting Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Outstanding at beginning of period (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Number</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Granted (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Gross</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Exercised (in shares)</link:label>
    <link:label id="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0_label_en-US" xlink:label="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:to="lab_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Forfeited (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Forfeitures in Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_D454DC25A967AD6424690F3284959EFD_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_D454DC25A967AD6424690F3284959EFD" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Outstanding at end of period (in shares)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_D454DC25A967AD6424690F3284959EFD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_D454DC25A967AD6424690F3284959EFD" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_D454DC25A967AD6424690F3284959EFD" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercisable at end of period (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Number</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Weighted average fair value of options granted during the period (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Outstanding at beginning of period, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Granted, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Grants in Period, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercised, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Exercises in Period, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Forfeited, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangements by Share-based Payment Award, Options, Forfeitures in Period, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_D25FC93B9E4CAFAE5EC80F32849514C7_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_D25FC93B9E4CAFAE5EC80F32849514C7" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Outstanding at end of period, Weighted Average Exercise Price (usd per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_D25FC93B9E4CAFAE5EC80F32849514C7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_D25FC93B9E4CAFAE5EC80F32849514C7" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_D25FC93B9E4CAFAE5EC80F32849514C7" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Exercisable at end of period, Weighted Average Exercise Price (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Exercise Price</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Risk free interest rate</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Risk Free Interest Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:type="arc" />
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882_terseLabel_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Expected life</link:label>
    <link:label id="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882_label_en-US" xlink:label="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Term</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:to="lab_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Dividend rate</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Dividend Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Volatility</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions, Expected Volatility Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Beginning Outstanding (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Released (in shares)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_F79DF9BDBC3F3FF948960F3284962E58_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_F79DF9BDBC3F3FF948960F3284962E58" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Ending Outstanding (in shares)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_F79DF9BDBC3F3FF948960F3284962E58" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_F79DF9BDBC3F3FF948960F3284962E58" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_F79DF9BDBC3F3FF948960F3284962E58" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2_periodStartLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Beginning Outstanding, Weighted Average Grant Date Fair Value (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Released, Weighted Average Grant Date Fair Value (usd per share)</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Vested in Period, Weighted Average Grant Date Fair Value</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_00946E16086CC08325E20F32849B82C5_periodEndLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_00946E16086CC08325E20F32849B82C5" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Ending Outstanding, Weighted Average Grant Date Fair Value (usd per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_00946E16086CC08325E20F32849B82C5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_00946E16086CC08325E20F32849B82C5" xlink:to="lab_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_00946E16086CC08325E20F32849B82C5" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_C67198BC9E2AEB0DDD654854F87A909D_label_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_5981BAB16AFF577D91B91907E9605DA6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies Disclosure [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_5981BAB16AFF577D91B91907E9605DA6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_5981BAB16AFF577D91B91907E9605DA6" xlink:to="lab_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_5981BAB16AFF577D91B91907E9605DA6" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1F240E34DB7F8B2F48B54854F87A84B1_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_1F240E34DB7F8B2F48B54854F87A84B1_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="lab_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:type="arc" />
    <link:label id="lab_us-gaap_LitigationCaseAxis_B3E914B0243270EAE3D34854F87B1735_terseLabel_en-US" xlink:label="lab_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Litigation Case [Axis]</link:label>
    <link:label id="lab_us-gaap_LitigationCaseAxis_B3E914B0243270EAE3D34854F87B1735_label_en-US" xlink:label="lab_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Litigation Case [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationCaseAxis" xlink:label="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:to="lab_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:type="arc" />
    <link:label id="lab_us-gaap_LitigationCaseTypeDomain_107F45B85991F83C9C954854F87B9462_terseLabel_en-US" xlink:label="lab_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Litigation Case [Domain]</link:label>
    <link:label id="lab_us-gaap_LitigationCaseTypeDomain_107F45B85991F83C9C954854F87B9462_label_en-US" xlink:label="lab_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Litigation Case [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationCaseTypeDomain" xlink:label="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:to="lab_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:type="arc" />
    <link:label id="lab_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_A7A1726C88859E98E42F4854F87B56FB_terseLabel_en-US" xlink:label="lab_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stockholder Actions (Putative Stockholder Class Action Complaints)</link:label>
    <link:label id="lab_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_A7A1726C88859E98E42F4854F87B56FB_label_en-US" xlink:label="lab_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholder Actions (Putative Stockholder Class Action Complaints) [Member]</link:label>
    <link:label id="lab_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_A7A1726C88859E98E42F4854F87B56FB_documentation_en-US" xlink:label="lab_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Stockholder Actions (Putative Stockholder Class Action Complaints)</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_StockholderActionsPutativeStockholderClassActionComplaintsMember" xlink:label="loc_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:to="lab_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:type="arc" />
    <link:label id="lab_us-gaap_LitigationStatusAxis_D3C4CA2126C8822ABF1A4854F87B3D3C_terseLabel_en-US" xlink:label="lab_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Litigation Status [Axis]</link:label>
    <link:label id="lab_us-gaap_LitigationStatusAxis_D3C4CA2126C8822ABF1A4854F87B3D3C_label_en-US" xlink:label="lab_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Litigation Status [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationStatusAxis" xlink:label="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:to="lab_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:type="arc" />
    <link:label id="lab_us-gaap_LitigationStatusDomain_8F50E40C56C98E6374E24854F87BCEBB_terseLabel_en-US" xlink:label="lab_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Litigation Status [Domain]</link:label>
    <link:label id="lab_us-gaap_LitigationStatusDomain_8F50E40C56C98E6374E24854F87BCEBB_label_en-US" xlink:label="lab_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Litigation Status [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationStatusDomain" xlink:label="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:to="lab_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:type="arc" />
    <link:label id="lab_us-gaap_SettledLitigationMember_FAB7A8CF3D5FD67B18644854F87B66FD_terseLabel_en-US" xlink:label="lab_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Settled Litigation</link:label>
    <link:label id="lab_us-gaap_SettledLitigationMember_FAB7A8CF3D5FD67B18644854F87B66FD_label_en-US" xlink:label="lab_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Settled Litigation [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SettledLitigationMember" xlink:label="loc_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:to="lab_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_B290950B5B92CEFC6B5A4854F87BEF06_terseLabel_en-US" xlink:label="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss Contingency Nature [Axis]</link:label>
    <link:label id="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_B290950B5B92CEFC6B5A4854F87BEF06_label_en-US" xlink:label="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss Contingency Nature [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingenciesByNatureOfContingencyAxis" xlink:label="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:to="lab_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossContingencyNatureDomain_864F6DF52717379149DF4854F87B6AFC_terseLabel_en-US" xlink:label="lab_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss Contingency, Nature [Domain]</link:label>
    <link:label id="lab_us-gaap_LossContingencyNatureDomain_864F6DF52717379149DF4854F87B6AFC_label_en-US" xlink:label="lab_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss Contingency, Nature [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:to="lab_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossFromCatastrophesMember_4981A058C8DB4C2EAF084854F87BF63E_terseLabel_en-US" xlink:label="lab_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Environmental Clean-up</link:label>
    <link:label id="lab_us-gaap_LossFromCatastrophesMember_4981A058C8DB4C2EAF084854F87BF63E_label_en-US" xlink:label="lab_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss from Catastrophes [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossFromCatastrophesMember" xlink:label="loc_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:to="lab_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionAxis_E4FFA47C1091894CDB0B4854F87BB76C_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Acquisition [Axis]</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionAxis_E4FFA47C1091894CDB0B4854F87BB76C_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:to="lab_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:type="arc" />
    <link:label id="lab_us-gaap_BusinessAcquisitionAcquireeDomain_ED8CFAB882CA8A86B8C74854F87BD311_terseLabel_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Acquisition, Acquiree [Domain]</link:label>
    <link:label id="lab_us-gaap_BusinessAcquisitionAcquireeDomain_ED8CFAB882CA8A86B8C74854F87BD311_label_en-US" xlink:label="lab_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Business Acquisition, Acquiree [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:to="lab_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:type="arc" />
    <link:label id="lab_asys_BTUInternationalIncBTUMergerMember_A61A7FCEE6B2B41BBB954854F87BA24B_terseLabel_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU) Merger</link:label>
    <link:label id="lab_asys_BTUInternationalIncBTUMergerMember_A61A7FCEE6B2B41BBB954854F87BA24B_label_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU) Merger [Member]</link:label>
    <link:label id="lab_asys_BTUInternationalIncBTUMergerMember_A61A7FCEE6B2B41BBB954854F87BA24B_documentation_en-US" xlink:label="lab_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">BTU International, Inc (BTU) Merger</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:to="lab_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_F08BB94B24B87FD4E1474854F87B8F2E_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Axis]</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_F08BB94B24B87FD4E1474854F87B8F2E_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:to="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_05F44E5298C6A2D6731C4854F87B7D88_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Domain]</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_05F44E5298C6A2D6731C4854F87B7D88_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement, Contract to Perform for Others, Type [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:to="lab_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:type="arc" />
    <link:label id="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD677B7A6CF273242FF84854F87BD911_terseLabel_en-US" xlink:label="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Tempress Systems and Energy Research Centre Agreement</link:label>
    <link:label id="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD677B7A6CF273242FF84854F87BD911_label_en-US" xlink:label="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Tempress Systems and Energy Research Centre Agreement [Member]</link:label>
    <link:label id="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD677B7A6CF273242FF84854F87BD911_documentation_en-US" xlink:label="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Tempress Systems and Energy Research Centre Agreement [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_TempressSystemsandEnergyResearchCentreAgreementMember" xlink:label="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:to="lab_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_6206827CB8F363631B424854F87C42C7_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Line Items]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_6206827CB8F363631B424854F87C42C7_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Equity Method Investments [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="lab_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:type="arc" />
    <link:label id="lab_us-gaap_PurchaseObligation_AF9FD33237ED0ED580E14854F87C7491_terseLabel_en-US" xlink:label="lab_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Purchase obligation</link:label>
    <link:label id="lab_us-gaap_PurchaseObligation_AF9FD33237ED0ED580E14854F87C7491_label_en-US" xlink:label="lab_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Purchase Obligation</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PurchaseObligation" xlink:label="loc_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:to="lab_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:type="arc" />
    <link:label id="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_79CC09EB3113B51668224854F87C858F_terseLabel_en-US" xlink:label="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Price of an ion implanter</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:to="lab_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:type="arc" />
    <link:label id="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_EC96DE9973AB87255F1D4854F87CA31B_terseLabel_en-US" xlink:label="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Ownership rights to results of projects developed separately by individual parties</link:label>
    <link:label id="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_EC96DE9973AB87255F1D4854F87CA31B_label_en-US" xlink:label="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Ownership Rights, Results of Projects Developed Separately By Individual Parties</link:label>
    <link:label id="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_EC96DE9973AB87255F1D4854F87CA31B_documentation_en-US" xlink:label="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Ownership Rights, Results of Projects Developed Separately By Individual Parties</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" xlink:label="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:to="lab_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:type="arc" />
    <link:label id="lab_asys_ResearchandDevelopmentAgreementTerm_27AE56C8E1151121A1824854F87C5A28_terseLabel_en-US" xlink:label="lab_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">R&amp;D agreement term</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentAgreementTerm_27AE56C8E1151121A1824854F87C5A28_label_en-US" xlink:label="lab_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Agreement Term</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentAgreementTerm_27AE56C8E1151121A1824854F87C5A28_documentation_en-US" xlink:label="lab_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development Agreement Term</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentAgreementTerm" xlink:label="loc_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:to="lab_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:type="arc" />
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_403E6EF8FA14248770064854F87C69EC_terseLabel_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Required contribution in form of labor and assets</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_403E6EF8FA14248770064854F87C69EC_label_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development, Required Contribution, Labor and Assets</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_403E6EF8FA14248770064854F87C69EC_documentation_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development, Required Contribution, Labor and Assets</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentRequiredContributionLaborandAssets" xlink:label="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:to="lab_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:type="arc" />
    <link:label id="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_25DD248EAA5B8DFB87F04854F87C4960_terseLabel_en-US" xlink:label="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Period from agreement start for contribution for project support</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_25DD248EAA5B8DFB87F04854F87C4960_label_en-US" xlink:label="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development, Period Required for Equipment Repairs and Maintenance</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_25DD248EAA5B8DFB87F04854F87C4960_documentation_en-US" xlink:label="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development, Period Required for Equipment Repairs and Maintenance</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" xlink:label="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:to="lab_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:type="arc" />
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContribution_B58D6537B4A59FF434AF4854F87CFBB6_terseLabel_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">R&amp;D, required contribution</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContribution_B58D6537B4A59FF434AF4854F87CFBB6_label_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development, Required Contribution</link:label>
    <link:label id="lab_asys_ResearchandDevelopmentRequiredContribution_B58D6537B4A59FF434AF4854F87CFBB6_documentation_en-US" xlink:label="lab_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research and Development, Required Contribution</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentRequiredContribution" xlink:label="loc_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:to="lab_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossContingencyAccrualAtCarryingValue_9B84802C293FBF4A4C804854F87CB7E4_terseLabel_en-US" xlink:label="lab_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss contingency accrual</link:label>
    <link:label id="lab_us-gaap_LossContingencyAccrualAtCarryingValue_9B84802C293FBF4A4C804854F87CB7E4_label_en-US" xlink:label="lab_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss Contingency Accrual</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyAccrualAtCarryingValue" xlink:label="loc_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:to="lab_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:type="arc" />
    <link:label id="lab_us-gaap_LettersOfCreditOutstandingAmount_1E8AF4507FA963DF0D354854F87C85A4_terseLabel_en-US" xlink:label="lab_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Letter of credit</link:label>
    <link:label id="lab_us-gaap_LettersOfCreditOutstandingAmount_1E8AF4507FA963DF0D354854F87C85A4_label_en-US" xlink:label="lab_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Letters of Credit Outstanding, Amount</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="loc_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:to="lab_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:type="arc" />
    <link:label id="lab_us-gaap_LossContingencyClaimsSettledNumber_41A654AB1A5CECDC9D044854F87C7F20_terseLabel_en-US" xlink:label="lab_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of settled claims</link:label>
    <link:label id="lab_us-gaap_LossContingencyClaimsSettledNumber_41A654AB1A5CECDC9D044854F87C7F20_label_en-US" xlink:label="lab_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Loss Contingency, Claims Settled, Number</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyClaimsSettledNumber" xlink:label="loc_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:to="lab_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:type="arc" />
    <link:label id="lab_us-gaap_PaymentsForLegalSettlements_A490C9673B276384F34A4854F87C7530_terseLabel_en-US" xlink:label="lab_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Legal settlement, payment of fees and expenses</link:label>
    <link:label id="lab_us-gaap_PaymentsForLegalSettlements_A490C9673B276384F34A4854F87C7530_label_en-US" xlink:label="lab_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Payments for Legal Settlements</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsForLegalSettlements" xlink:label="loc_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:to="lab_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6_label_en-US" xlink:label="lab_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Statement of Financial Position [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6" xlink:to="lab_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F_terseLabel_en-US" xlink:label="lab_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Assets</link:label>
    <link:label id="lab_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F_label_en-US" xlink:label="lab_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="lab_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49_verboseLabel_en-US" xlink:label="lab_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Current Assets</link:label>
    <link:label id="lab_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49_label_en-US" xlink:label="lab_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets, Current [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="lab_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_0DCC79F671B71503DB9C245162379A39_verboseLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_0DCC79F671B71503DB9C245162379A39" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Cash and cash equivalents</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_0DCC79F671B71503DB9C245162379A39" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_0DCC79F671B71503DB9C245162379A39" xlink:to="lab_us-gaap_CashAndCashEquivalentsAtCarryingValue_0DCC79F671B71503DB9C245162379A39" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts receivable</link:label>
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C_label_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Receivable, Net, Current [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrentAbstract" xlink:label="loc_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:to="lab_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Trade (less allowance for doubtful accounts of $1,787 and $3,730 at December 31, 2016, and September 30, 2016, respectively)</link:label>
    <link:label id="lab_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2_label_en-US" xlink:label="lab_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Receivable, Net, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2" xlink:to="lab_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2" xlink:type="arc" />
    <link:label id="lab_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756_terseLabel_en-US" xlink:label="lab_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Unbilled and other</link:label>
    <link:label id="lab_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756_label_en-US" xlink:label="lab_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Unbilled And Other</link:label>
    <link:label id="lab_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756_documentation_en-US" xlink:label="lab_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Primarily the contingent portion of the sales price that is not billable until acceptance of the product.  The majority of these amounts are offset by balances included in deferred profit.</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_UnbilledAndOther" xlink:label="loc_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:to="lab_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryNet_814DFA0BB718784F869C24516238FA36_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryNet_814DFA0BB718784F869C24516238FA36" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Inventories</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_814DFA0BB718784F869C24516238FA36" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryNet_814DFA0BB718784F869C24516238FA36" xlink:to="lab_us-gaap_InventoryNet_814DFA0BB718784F869C24516238FA36" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Refundable income taxes</link:label>
    <link:label id="lab_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE_label_en-US" xlink:label="lab_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Taxes Receivable, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesReceivable" xlink:label="loc_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE" xlink:to="lab_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E_terseLabel_en-US" xlink:label="lab_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other</link:label>
    <link:label id="lab_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E_label_en-US" xlink:label="lab_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Assets, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsCurrent" xlink:label="loc_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E" xlink:to="lab_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3_totalLabel_en-US" xlink:label="lab_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total current assets</link:label>
    <link:label id="lab_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3_label_en-US" xlink:label="lab_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3" xlink:to="lab_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentNet_3F8AA51A2215374728FF24516238A59C_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentNet_3F8AA51A2215374728FF24516238A59C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment - Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_3F8AA51A2215374728FF24516238A59C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentNet_3F8AA51A2215374728FF24516238A59C" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentNet_3F8AA51A2215374728FF24516238A59C" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred Income Taxes - Long Term</link:label>
    <link:label id="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40_label_en-US" xlink:label="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Tax Assets, Net of Valuation Allowance, Noncurrent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40" xlink:to="lab_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802_verboseLabel_en-US" xlink:label="lab_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Other Assets - Long Term</link:label>
    <link:label id="lab_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802_label_en-US" xlink:label="lab_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Assets, Noncurrent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802" xlink:to="lab_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421_terseLabel_en-US" xlink:label="lab_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investments</link:label>
    <link:label id="lab_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Method Investments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestments" xlink:label="loc_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421" xlink:to="lab_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421" xlink:type="arc" />
    <link:label id="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2_terseLabel_en-US" xlink:label="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Intangible Assets - Net</link:label>
    <link:label id="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2_label_en-US" xlink:label="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Intangible Assets, Net (Excluding Goodwill)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2" xlink:to="lab_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2" xlink:type="arc" />
    <link:label id="lab_us-gaap_Goodwill_B096FBD1F81C0FF120BD24516239C594_terseLabel_en-US" xlink:label="lab_us-gaap_Goodwill_B096FBD1F81C0FF120BD24516239C594" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_B096FBD1F81C0FF120BD24516239C594" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Goodwill_B096FBD1F81C0FF120BD24516239C594" xlink:to="lab_us-gaap_Goodwill_B096FBD1F81C0FF120BD24516239C594" xlink:type="arc" />
    <link:label id="lab_us-gaap_Assets_300BD239B9683BF944B624516239813C_totalLabel_en-US" xlink:label="lab_us-gaap_Assets_300BD239B9683BF944B624516239813C" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total Assets</link:label>
    <link:label id="lab_us-gaap_Assets_300BD239B9683BF944B624516239813C_label_en-US" xlink:label="lab_us-gaap_Assets_300BD239B9683BF944B624516239813C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_300BD239B9683BF944B624516239813C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Assets_300BD239B9683BF944B624516239813C" xlink:to="lab_us-gaap_Assets_300BD239B9683BF944B624516239813C" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B_terseLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Liabilities and Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B_label_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities and Equity [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="lab_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D_terseLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current Liabilities</link:label>
    <link:label id="lab_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D_label_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities, Current [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="lab_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378_terseLabel_en-US" xlink:label="lab_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts payable</link:label>
    <link:label id="lab_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378_label_en-US" xlink:label="lab_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accounts Payable, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378" xlink:to="lab_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current maturities of long-term debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED_label_en-US" xlink:label="lab_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt, Current Maturities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED" xlink:to="lab_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED" xlink:type="arc" />
    <link:label id="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74_terseLabel_en-US" xlink:label="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accrued compensation and related taxes</link:label>
    <link:label id="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74_label_en-US" xlink:label="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Employee-related Liabilities, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74" xlink:to="lab_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4_terseLabel_en-US" xlink:label="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accrued warranty expense</link:label>
    <link:label id="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4_label_en-US" xlink:label="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Product Warranty Accrual, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4" xlink:to="lab_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1_terseLabel_en-US" xlink:label="lab_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred profit</link:label>
    <link:label id="lab_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1_label_en-US" xlink:label="lab_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Deferred Credits, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1" xlink:to="lab_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1" xlink:type="arc" />
    <link:label id="lab_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED_terseLabel_en-US" xlink:label="lab_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer deposits</link:label>
    <link:label id="lab_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED_label_en-US" xlink:label="lab_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Advances, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerAdvancesCurrent" xlink:label="loc_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED" xlink:to="lab_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360_terseLabel_en-US" xlink:label="lab_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other accrued liabilities</link:label>
    <link:label id="lab_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360_label_en-US" xlink:label="lab_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accrued Liabilities, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360" xlink:to="lab_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57_terseLabel_en-US" xlink:label="lab_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income taxes payable</link:label>
    <link:label id="lab_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57_label_en-US" xlink:label="lab_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accrued Income Taxes, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57" xlink:to="lab_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D_totalLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total current liabilities</link:label>
    <link:label id="lab_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D_label_en-US" xlink:label="lab_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D" xlink:to="lab_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D" xlink:type="arc" />
    <link:label id="lab_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E_terseLabel_en-US" xlink:label="lab_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-term Debt</link:label>
    <link:label id="lab_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E_label_en-US" xlink:label="lab_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Long-term Debt, Excluding Current Maturities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E" xlink:to="lab_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13_terseLabel_en-US" xlink:label="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income Taxes Payable - Long Term</link:label>
    <link:label id="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13_label_en-US" xlink:label="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liability for Uncertain Tax Positions, Noncurrent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilityForUncertainTaxPositionsNoncurrent" xlink:label="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13" xlink:to="lab_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13" xlink:type="arc" />
    <link:label id="lab_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48_totalLabel_en-US" xlink:label="lab_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total liabilities</link:label>
    <link:label id="lab_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48_label_en-US" xlink:label="lab_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48" xlink:to="lab_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325_terseLabel_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies</link:label>
    <link:label id="lab_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325_label_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325" xlink:to="lab_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00_verboseLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:type="arc" />
    <link:label id="lab_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106_terseLabel_en-US" xlink:label="lab_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Preferred stock; 100,000,000 shares authorized; none issued</link:label>
    <link:label id="lab_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106_label_en-US" xlink:label="lab_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Preferred Stock, Value, Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106" xlink:to="lab_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 13,150,222 and 9,848,253 at June 30, 2015, and September 30, 2014, respectively</link:label>
    <link:label id="lab_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239_label_en-US" xlink:label="lab_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Value, Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239" xlink:to="lab_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239" xlink:type="arc" />
    <link:label id="lab_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD_terseLabel_en-US" xlink:label="lab_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Additional paid-in capital</link:label>
    <link:label id="lab_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD_label_en-US" xlink:label="lab_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Additional Paid in Capital</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD" xlink:to="lab_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD" xlink:type="arc" />
    <link:label id="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766_terseLabel_en-US" xlink:label="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accumulated other comprehensive loss</link:label>
    <link:label id="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766_label_en-US" xlink:label="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Accumulated Other Comprehensive Income (Loss), Net of Tax</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766" xlink:to="lab_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766" xlink:type="arc" />
    <link:label id="lab_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0_terseLabel_en-US" xlink:label="lab_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Retained deficit</link:label>
    <link:label id="lab_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0_label_en-US" xlink:label="lab_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Retained Earnings (Accumulated Deficit)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0" xlink:to="lab_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16_totalLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total stockholders' equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16_label_en-US" xlink:label="lab_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Attributable to Parent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16" xlink:to="lab_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16" xlink:type="arc" />
    <link:label id="lab_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E_terseLabel_en-US" xlink:label="lab_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Noncontrolling interest</link:label>
    <link:label id="lab_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E_label_en-US" xlink:label="lab_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinorityInterest" xlink:label="loc_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E" xlink:to="lab_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A_totalLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total equity</link:label>
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A_label_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Stockholders' Equity, Including Portion Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A" xlink:to="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A" xlink:type="arc" />
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC_totalLabel_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Total Liabilities and Stockholders' Equity</link:label>
    <link:label id="lab_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC_label_en-US" xlink:label="lab_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Liabilities and Equity</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC" xlink:to="lab_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_548E4333650179AB8E957AC0C84418F9_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_3F43B562FF275EF5A35A582C5DE2C411" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Method Investments and Joint Ventures [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract" xlink:label="loc_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_3F43B562FF275EF5A35A582C5DE2C411" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_3F43B562FF275EF5A35A582C5DE2C411" xlink:to="lab_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_3F43B562FF275EF5A35A582C5DE2C411" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_CFBA41C793A7F69977D67AC0C844F09C_terseLabel_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_010D5D7BAD505DCC8D138377EAB8106C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investments</link:label>
    <link:label id="lab_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_CFBA41C793A7F69977D67AC0C844F09C_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_010D5D7BAD505DCC8D138377EAB8106C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Method Investments and Joint Ventures Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentsDisclosureTextBlock" xlink:label="loc_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_010D5D7BAD505DCC8D138377EAB8106C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_010D5D7BAD505DCC8D138377EAB8106C" xlink:to="lab_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_010D5D7BAD505DCC8D138377EAB8106C" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpense_34BE86C4EDC585971EB473BDEC1B7F6D_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpense_61EDD09F0F4658969EFD9D9CD68CFE72" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research, development and engineering</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpense_34BE86C4EDC585971EB473BDEC1B7F6D_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpense_61EDD09F0F4658969EFD9D9CD68CFE72" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_61EDD09F0F4658969EFD9D9CD68CFE72" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentExpense_61EDD09F0F4658969EFD9D9CD68CFE72" xlink:to="lab_us-gaap_ResearchAndDevelopmentExpense_61EDD09F0F4658969EFD9D9CD68CFE72" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_1F4756BEFE55D2D3FFAB73BDEC1BC2A8_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_9BADC91635745BDEBC6BDAA8C69A521B" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Grants earned</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_1F4756BEFE55D2D3FFAB73BDEC1BC2A8_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_9BADC91635745BDEBC6BDAA8C69A521B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Arrangement with Federal Government, Customer Funding to Offset Costs Incurred</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_9BADC91635745BDEBC6BDAA8C69A521B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_9BADC91635745BDEBC6BDAA8C69A521B" xlink:to="lab_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_9BADC91635745BDEBC6BDAA8C69A521B" xlink:type="arc" />
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_EC2CF55D019D4EBE89C273BDEC1BD852_totalLabel_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net research, development and engineering</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_EC2CF55D019D4EBE89C273BDEC1BD852_label_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research And Development, Net Of Grants Earned</link:label>
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_EC2CF55D019D4EBE89C273BDEC1BD852_documentation_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Research And Development, Net Of Grants</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:to="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:type="arc" />
    <link:label id="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532_terseLabel_en-US" xlink:label="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Nature of Operations and Basis of Presentation</link:label>
    <link:label id="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532_label_en-US" xlink:label="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Basis of Accounting, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BasisOfAccountingPolicyPolicyTextBlock" xlink:label="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532" xlink:to="lab_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222_terseLabel_en-US" xlink:label="lab_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Principles of Consolidation</link:label>
    <link:label id="lab_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222_label_en-US" xlink:label="lab_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Consolidation, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationPolicyTextBlock" xlink:label="loc_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222" xlink:to="lab_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222" xlink:type="arc" />
    <link:label id="lab_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3_terseLabel_en-US" xlink:label="lab_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Use of Estimates</link:label>
    <link:label id="lab_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3_label_en-US" xlink:label="lab_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Use of Estimates, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UseOfEstimates" xlink:label="loc_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3" xlink:to="lab_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3" xlink:type="arc" />
    <link:label id="lab_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445_terseLabel_en-US" xlink:label="lab_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenue Recognition</link:label>
    <link:label id="lab_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445_label_en-US" xlink:label="lab_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue Recognition, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="loc_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445" xlink:to="lab_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445" xlink:type="arc" />
    <link:label id="lab_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55_terseLabel_en-US" xlink:label="lab_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred Profit</link:label>
    <link:label id="lab_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55_label_en-US" xlink:label="lab_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue Recognition, Deferred Revenue [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionDeferredRevenue" xlink:label="loc_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55" xlink:to="lab_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1_terseLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Cash Equivalents</link:label>
    <link:label id="lab_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1_label_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPolicyTextBlock" xlink:label="loc_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1" xlink:to="lab_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1" xlink:type="arc" />
    <link:label id="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400_terseLabel_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Restricted Cash</link:label>
    <link:label id="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400_label_en-US" xlink:label="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cash and Cash Equivalents, Restricted Cash and Cash Equivalents, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy" xlink:label="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400" xlink:to="lab_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400" xlink:type="arc" />
    <link:label id="lab_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250_terseLabel_en-US" xlink:label="lab_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Accounts Receivable and Allowance for Doubtful Accounts</link:label>
    <link:label id="lab_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250_label_en-US" xlink:label="lab_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Receivables, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ReceivablesPolicyTextBlock" xlink:label="loc_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250" xlink:to="lab_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C_terseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Concentrations of Credit Risk</link:label>
    <link:label id="lab_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C_label_en-US" xlink:label="lab_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Concentration Risk, Credit Risk, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="loc_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C" xlink:to="lab_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C" xlink:type="arc" />
    <link:label id="lab_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5_terseLabel_en-US" xlink:label="lab_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Inventories</link:label>
    <link:label id="lab_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5_label_en-US" xlink:label="lab_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Inventory, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="loc_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5" xlink:to="lab_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5" xlink:type="arc" />
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00_terseLabel_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment</link:label>
    <link:label id="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00_label_en-US" xlink:label="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Property, Plant and Equipment, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00" xlink:to="lab_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Goodwill</link:label>
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726_label_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill and Intangible Assets, Goodwill, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726" xlink:to="lab_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726" xlink:type="arc" />
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F_terseLabel_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Intangibles</link:label>
    <link:label id="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F_label_en-US" xlink:label="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Goodwill and Intangible Assets, Intangible Assets, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F" xlink:to="lab_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F" xlink:type="arc" />
    <link:label id="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E_terseLabel_en-US" xlink:label="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Long-lived Assets</link:label>
    <link:label id="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E_label_en-US" xlink:label="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Impairment or Disposal of Long-Lived Assets, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:label="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E" xlink:to="lab_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3_terseLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Warranty</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyPolicy" xlink:label="loc_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3" xlink:to="lab_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B_terseLabel_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stock-Based Compensation</link:label>
    <link:label id="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B_label_en-US" xlink:label="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Share-based Compensation, Option and Incentive Plans Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B" xlink:to="lab_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B" xlink:type="arc" />
    <link:label id="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053_terseLabel_en-US" xlink:label="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Fair Value of Financial Instruments</link:label>
    <link:label id="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053_label_en-US" xlink:label="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Fair Value of Financial Instruments, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:label="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053" xlink:to="lab_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053" xlink:type="arc" />
    <link:label id="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18_terseLabel_en-US" xlink:label="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Pensions</link:label>
    <link:label id="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18_label_en-US" xlink:label="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Pension and Other Postretirement Plans, Pensions, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy" xlink:label="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18" xlink:to="lab_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E_terseLabel_en-US" xlink:label="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Shipping Expense</link:label>
    <link:label id="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E_label_en-US" xlink:label="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Shipping and Handling Cost, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingAndHandlingCostPolicyTextBlock" xlink:label="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E" xlink:to="lab_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D_terseLabel_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research, Development and Engineering Expense</link:label>
    <link:label id="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D_label_en-US" xlink:label="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Research and Development Expense, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D" xlink:to="lab_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D" xlink:type="arc" />
    <link:label id="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0_terseLabel_en-US" xlink:label="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Impact of Recently Issued Accounting Pronouncements</link:label>
    <link:label id="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0_label_en-US" xlink:label="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">New Accounting Pronouncements, Policy [Policy Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0" xlink:to="lab_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0" xlink:type="arc" />
    <link:label id="lab_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_06B9848C776CD55CF58C73BDEC617979_terseLabel_en-US" xlink:label="lab_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of similarly configured systems and processes</link:label>
    <link:label id="lab_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_06B9848C776CD55CF58C73BDEC617979_label_en-US" xlink:label="lab_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Number Of Similarly Configured Systems And Processes</link:label>
    <link:label id="lab_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_06B9848C776CD55CF58C73BDEC617979_documentation_en-US" xlink:label="lab_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Number Of Similarly Configured Systems And Processes</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_NumberOfSimilarlyConfiguredSystemsAndProcesses" xlink:label="loc_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:to="lab_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:type="arc" />
    <link:label id="lab_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_5BE243EA2E7185B38DA573BDEC617D19_terseLabel_en-US" xlink:label="lab_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of similarly configured items of equipment</link:label>
    <link:label id="lab_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_5BE243EA2E7185B38DA573BDEC617D19_label_en-US" xlink:label="lab_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Number Of Similarly Configured Items Of Equipment</link:label>
    <link:label id="lab_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_5BE243EA2E7185B38DA573BDEC617D19_documentation_en-US" xlink:label="lab_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Number Of Similarly Configured Items Of Equipment</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_NumberOfSimilarlyConfiguredItemsOfEquipment" xlink:label="loc_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:to="lab_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredRevenue_EC13B2D3BD29DD2F33B273BDEC62FF58_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredRevenue_8A765BB0D43B51F1A16E8A25D18B571F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred revenues</link:label>
    <link:label id="lab_us-gaap_DeferredRevenue_EC13B2D3BD29DD2F33B273BDEC62FF58_label_en-US" xlink:label="lab_us-gaap_DeferredRevenue_8A765BB0D43B51F1A16E8A25D18B571F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Revenue</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenue" xlink:label="loc_us-gaap_DeferredRevenue_8A765BB0D43B51F1A16E8A25D18B571F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredRevenue_8A765BB0D43B51F1A16E8A25D18B571F" xlink:to="lab_us-gaap_DeferredRevenue_8A765BB0D43B51F1A16E8A25D18B571F" xlink:type="arc" />
    <link:label id="lab_us-gaap_DeferredCostsCurrent_13F27B7BB2BF709817D873BDEC62C193_terseLabel_en-US" xlink:label="lab_us-gaap_DeferredCostsCurrent_FE6EEF2B29FD5E9BBC4A5BA181D8B587" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Deferred costs</link:label>
    <link:label id="lab_us-gaap_DeferredCostsCurrent_13F27B7BB2BF709817D873BDEC62C193_label_en-US" xlink:label="lab_us-gaap_DeferredCostsCurrent_FE6EEF2B29FD5E9BBC4A5BA181D8B587" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Deferred Costs, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredCostsCurrent" xlink:label="loc_us-gaap_DeferredCostsCurrent_FE6EEF2B29FD5E9BBC4A5BA181D8B587" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DeferredCostsCurrent_FE6EEF2B29FD5E9BBC4A5BA181D8B587" xlink:to="lab_us-gaap_DeferredCostsCurrent_FE6EEF2B29FD5E9BBC4A5BA181D8B587" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherDeferredCreditsCurrent_E5DC4DDBFA9C9D1D95A173BDEC62814D_totalLabel_en-US" xlink:label="lab_us-gaap_OtherDeferredCreditsCurrent_B8103AE0FAF55007819D8BA036CA814D" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Deferred profit</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_B8103AE0FAF55007819D8BA036CA814D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherDeferredCreditsCurrent_B8103AE0FAF55007819D8BA036CA814D" xlink:to="lab_us-gaap_OtherDeferredCreditsCurrent_B8103AE0FAF55007819D8BA036CA814D" xlink:type="arc" />
    <link:label id="lab_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750_terseLabel_en-US" xlink:label="lab_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750_label_en-US" xlink:label="lab_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Warranties [Table]</link:label>
    <link:label id="lab_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750_documentation_en-US" xlink:label="lab_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Schedule of Warranties [Table]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfWarrantiesTable" xlink:label="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:to="lab_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:type="arc" />
    <link:label id="lab_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1_terseLabel_en-US" xlink:label="lab_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Product Warranty [Line Items]</link:label>
    <link:label id="lab_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1_label_en-US" xlink:label="lab_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty [Line Items]</link:label>
    <link:label id="lab_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1_documentation_en-US" xlink:label="lab_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Schedule of Product Warranty [Line Items]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfProductWarrantyLineItems" xlink:label="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:to="lab_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:type="arc" />
    <link:label id="lab_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02_terseLabel_en-US" xlink:label="lab_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Standard product warranty, period</link:label>
    <link:label id="lab_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02_label_en-US" xlink:label="lab_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty, Period</link:label>
    <link:label id="lab_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02_documentation_en-US" xlink:label="lab_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Standard Product Warranty, Period</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_StandardProductWarrantyPeriod" xlink:label="loc_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:to="lab_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:type="arc" />
    <link:label id="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313_terseLabel_en-US" xlink:label="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Movement in Standard Product Warranty Accrual [Roll Forward]</link:label>
    <link:label id="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313_label_en-US" xlink:label="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Movement in Standard Product Warranty Accrual [Roll Forward]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MovementInStandardProductWarrantyAccrualRollForward" xlink:label="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="lab_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F_periodStartLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:type="resource" xml:lang="en-US">Warranty beginning balance</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty Accrual</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrual" xlink:label="loc_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:to="lab_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD_terseLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Additions for warranties issued during the period</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty Accrual, Warranties Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualWarrantiesIssued" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:to="lab_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100_negatedLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:type="resource" xml:lang="en-US">Reductions in the liability for payments made under the warranty</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty Accrual, Payments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPayments" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:to="lab_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7_terseLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Changes related to pre-existing warranties</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty Accrual, Preexisting, Increase (Decrease)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:to="lab_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4_terseLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Currency translation adjustment</link:label>
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4_label_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Standard Product Warranty Accrual, Currency Translation, Increase (Decrease)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:to="lab_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:type="arc" />
    <link:label id="lab_us-gaap_StandardProductWarrantyAccrual_FEAF8DFB1A490D63CF590F3284AFFE4E_periodEndLabel_en-US" xlink:label="lab_us-gaap_StandardProductWarrantyAccrual_FEAF8DFB1A490D63CF590F3284AFFE4E" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:type="resource" xml:lang="en-US">Warranty ending balance</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrual" xlink:label="loc_us-gaap_StandardProductWarrantyAccrual_FEAF8DFB1A490D63CF590F3284AFFE4E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StandardProductWarrantyAccrual_FEAF8DFB1A490D63CF590F3284AFFE4E" xlink:to="lab_us-gaap_StandardProductWarrantyAccrual_FEAF8DFB1A490D63CF590F3284AFFE4E" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Related Party Transactions, by Related Party [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A_label_en-US" xlink:label="lab_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Related Party Transactions, by Related Party [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable" xlink:label="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="lab_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Axis]</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:to="lab_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Domain]</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:to="lab_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:type="arc" />
    <link:label id="lab_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB_terseLabel_en-US" xlink:label="lab_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">TNO Technostarters B.V. Loans</link:label>
    <link:label id="lab_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB_label_en-US" xlink:label="lab_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">TNO Technostarters B.V. Loans [Member]</link:label>
    <link:label id="lab_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB_documentation_en-US" xlink:label="lab_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">TNO Technostarters B.V. Loans [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_TNOTechnostartersB.V.LoansMember" xlink:label="loc_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:to="lab_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:type="arc" />
    <link:label id="lab_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC_terseLabel_en-US" xlink:label="lab_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Balance Sheet Location [Axis]</link:label>
    <link:label id="lab_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC_label_en-US" xlink:label="lab_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Balance Sheet Location [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:to="lab_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:type="arc" />
    <link:label id="lab_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40_terseLabel_en-US" xlink:label="lab_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Balance Sheet Location [Domain]</link:label>
    <link:label id="lab_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40_label_en-US" xlink:label="lab_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Balance Sheet Location [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:to="lab_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investment, Name [Axis]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF_label_en-US" xlink:label="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Investment, Name [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:to="lab_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7_terseLabel_en-US" xlink:label="lab_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Investment, Name [Domain]</link:label>
    <link:label id="lab_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Investment, Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:to="lab_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:type="arc" />
    <link:label id="lab_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42_terseLabel_en-US" xlink:label="lab_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Kingstone Holding Company</link:label>
    <link:label id="lab_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42_label_en-US" xlink:label="lab_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Kingstone Holding Company [Member]</link:label>
    <link:label id="lab_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42_documentation_en-US" xlink:label="lab_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Kingstone Holding Company [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:to="lab_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party [Axis]</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsByRelatedPartyAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:to="lab_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party [Domain]</link:label>
    <link:label id="lab_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF_label_en-US" xlink:label="lab_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyDomain" xlink:label="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:to="lab_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:type="arc" />
    <link:label id="lab_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C_terseLabel_en-US" xlink:label="lab_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Kingstone Hong Kong</link:label>
    <link:label id="lab_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C_label_en-US" xlink:label="lab_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Kingstone Hong Kong [Member]</link:label>
    <link:label id="lab_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C_documentation_en-US" xlink:label="lab_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Kingstone Hong Kong</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHongKongMember" xlink:label="loc_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:to="lab_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:type="arc" />
    <link:label id="lab_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F_terseLabel_en-US" xlink:label="lab_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">TNO Technostarters B.V.</link:label>
    <link:label id="lab_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F_label_en-US" xlink:label="lab_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">TNO Technostarters B.V. [Member]</link:label>
    <link:label id="lab_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F_documentation_en-US" xlink:label="lab_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">TNO Technostarters B.V. [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_TNOTechnostartersB.V.Member" xlink:label="loc_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:to="lab_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Line Items]</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transaction [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionLineItems" xlink:label="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="lab_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:type="arc" />
    <link:label id="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76_terseLabel_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Equity method investment, ownership percentage</link:label>
    <link:label id="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76_label_en-US" xlink:label="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Equity Method Investment, Ownership Percentage</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:to="lab_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:type="arc" />
    <link:label id="lab_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A_terseLabel_en-US" xlink:label="lab_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Due from related parties</link:label>
    <link:label id="lab_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A_label_en-US" xlink:label="lab_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Due from Related Parties</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DueFromRelatedParties" xlink:label="loc_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:to="lab_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437_terseLabel_en-US" xlink:label="lab_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Borrowings from related party</link:label>
    <link:label id="lab_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437_label_en-US" xlink:label="lab_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Proceeds from Related Party Debt</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromRelatedPartyDebt" xlink:label="loc_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:to="lab_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:type="arc" />
    <link:label id="lab_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834_terseLabel_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Related party debt interest rate</link:label>
    <link:label id="lab_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834_label_en-US" xlink:label="lab_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Related Party Transaction, Rate</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionRate" xlink:label="loc_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:to="lab_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenues by Geographic Region</link:label>
    <link:label id="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A_label_en-US" xlink:label="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Revenue from External Customers Attributed to Foreign Countries by Geographic Area [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock" xlink:label="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A" xlink:to="lab_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A" xlink:type="arc" />
    <link:label id="lab_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2_terseLabel_en-US" xlink:label="lab_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Current Assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2" xlink:to="lab_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2" xlink:type="arc" />
    <link:label id="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B_terseLabel_en-US" xlink:label="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Allowance for doubtful accounts</link:label>
    <link:label id="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B_label_en-US" xlink:label="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Allowance for Doubtful Accounts Receivable, Current</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B" xlink:to="lab_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B" xlink:type="arc" />
    <link:label id="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69_terseLabel_en-US" xlink:label="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Stockholders' Equity</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:to="lab_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:type="arc" />
    <link:label id="lab_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138_terseLabel_en-US" xlink:label="lab_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Preferred stock, shares authorized</link:label>
    <link:label id="lab_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138_label_en-US" xlink:label="lab_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Preferred Stock, Shares Authorized</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="loc_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138" xlink:to="lab_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138" xlink:type="arc" />
    <link:label id="lab_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434_terseLabel_en-US" xlink:label="lab_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Preferred stock, shares issued</link:label>
    <link:label id="lab_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434_label_en-US" xlink:label="lab_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Preferred Stock, Shares Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="loc_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434" xlink:to="lab_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, shares authorized</link:label>
    <link:label id="lab_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B_label_en-US" xlink:label="lab_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Shares Authorized</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="loc_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B" xlink:to="lab_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, shares issued</link:label>
    <link:label id="lab_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420_label_en-US" xlink:label="lab_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Shares, Issued</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="loc_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420" xlink:to="lab_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4_terseLabel_en-US" xlink:label="lab_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Common stock, shares outstanding</link:label>
    <link:label id="lab_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4_label_en-US" xlink:label="lab_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Common Stock, Shares, Outstanding</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="loc_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4" xlink:to="lab_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E_label_en-US" xlink:label="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Antidilutive Securities Excluded from Computation of Earnings Per Share [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:to="lab_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive Securities [Axis]</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:to="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive Securities, Name [Domain]</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities, Name [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:to="lab_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:to="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:type="arc" />
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D_terseLabel_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Antidilutive securities excluded from computation of earnings per share (in shares)</link:label>
    <link:label id="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D_label_en-US" xlink:label="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:to="lab_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9_terseLabel_en-US" xlink:label="lab_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net income (loss) attributable to Amtech Systems, Inc.</link:label>
    <link:label id="lab_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9_label_en-US" xlink:label="lab_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Income (Loss) Attributable to Parent</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9" xlink:to="lab_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9" xlink:type="arc" />
    <link:label id="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38_terseLabel_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Weighted average shares outstanding (in shares)</link:label>
    <link:label id="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38_label_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Weighted Average Number of Shares Outstanding, Basic</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38" xlink:to="lab_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Basic loss per share attributable to Amtech shareholders (USD per share)</link:label>
    <link:label id="lab_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share, Basic</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD" xlink:to="lab_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD" xlink:type="arc" />
    <link:label id="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242_verboseLabel_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Diluted shares (in shares)</link:label>
    <link:label id="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242_label_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Weighted Average Number of Shares Outstanding, Diluted</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242" xlink:to="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Diluted loss per share attributable to Amtech shareholders (USD per share)</link:label>
    <link:label id="lab_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1_label_en-US" xlink:label="lab_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Earnings Per Share, Diluted</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1" xlink:to="lab_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Business Segment Information</link:label>
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026_label_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Segment Reporting Information, by Segment [Table Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026" xlink:to="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8_verboseLabel_en-US" xlink:label="lab_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Investment income (loss)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:to="lab_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:type="arc" />
    <link:label id="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_F83F94F693DBFB2CFB681F2C5E5B9549_terseLabel_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_36A220A2E19A536EB6DCA4A446D36D58" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies</link:label>
    <link:label id="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_F83F94F693DBFB2CFB681F2C5E5B9549_label_en-US" xlink:label="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_36A220A2E19A536EB6DCA4A446D36D58" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Commitments and Contingencies Disclosure [Text Block]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_36A220A2E19A536EB6DCA4A446D36D58" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_36A220A2E19A536EB6DCA4A446D36D58" xlink:to="lab_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_36A220A2E19A536EB6DCA4A446D36D58" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575_label_en-US" xlink:label="lab_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Statement [Abstract]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="lab_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9_terseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenues, net of returns and allowances</link:label>
    <link:label id="lab_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9_label_en-US" xlink:label="lab_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue, Net</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9" xlink:to="lab_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9" xlink:type="arc" />
    <link:label id="lab_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654_terseLabel_en-US" xlink:label="lab_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Cost of sales</link:label>
    <link:label id="lab_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654_label_en-US" xlink:label="lab_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Cost of Goods and Services Sold</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654" xlink:to="lab_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654" xlink:type="arc" />
    <link:label id="lab_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70_totalLabel_en-US" xlink:label="lab_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Gross profit</link:label>
    <link:label id="lab_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70_label_en-US" xlink:label="lab_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Gross Profit</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70" xlink:to="lab_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70" xlink:type="arc" />
    <link:label id="lab_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55_terseLabel_en-US" xlink:label="lab_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Selling, general and administrative</link:label>
    <link:label id="lab_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55_label_en-US" xlink:label="lab_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Selling, General and Administrative Expense</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55" xlink:to="lab_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55" xlink:type="arc" />
    <link:label id="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_281C89A72DDED8F2C6260EE1E136A915_terseLabel_en-US" xlink:label="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_281C89A72DDED8F2C6260EE1E136A915" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Research, development and engineering</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_281C89A72DDED8F2C6260EE1E136A915" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_281C89A72DDED8F2C6260EE1E136A915" xlink:to="lab_asys_ResearchAndDevelopmentNetOfGrantsEarned_281C89A72DDED8F2C6260EE1E136A915" xlink:type="arc" />
    <link:label id="lab_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4_totalLabel_en-US" xlink:label="lab_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Operating loss</link:label>
    <link:label id="lab_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4_label_en-US" xlink:label="lab_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Operating Income (Loss)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4" xlink:to="lab_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeLossFromEquityMethodInvestments_411589BFA4F3DEBAD1440EE1E13BB1D8_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeLossFromEquityMethodInvestments_411589BFA4F3DEBAD1440EE1E13BB1D8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss from equity method investment</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_411589BFA4F3DEBAD1440EE1E13BB1D8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeLossFromEquityMethodInvestments_411589BFA4F3DEBAD1440EE1E13BB1D8" xlink:to="lab_us-gaap_IncomeLossFromEquityMethodInvestments_411589BFA4F3DEBAD1440EE1E13BB1D8" xlink:type="arc" />
    <link:label id="lab_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C_terseLabel_en-US" xlink:label="lab_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Interest expense and other income, net</link:label>
    <link:label id="lab_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C_label_en-US" xlink:label="lab_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Other Nonoperating Income (Expense)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C" xlink:to="lab_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424_totalLabel_en-US" xlink:label="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Loss before income taxes</link:label>
    <link:label id="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424_label_en-US" xlink:label="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income (Loss) from Continuing Operations before Equity Method Investments, Income Taxes, Extraordinary Items, Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424" xlink:to="lab_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424" xlink:type="arc" />
    <link:label id="lab_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838_terseLabel_en-US" xlink:label="lab_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Income tax provision</link:label>
    <link:label id="lab_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838_label_en-US" xlink:label="lab_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Income Tax Expense (Benefit)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838" xlink:to="lab_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProfitLoss_B5E04807521349F5914D0EE1E13C9335_totalLabel_en-US" xlink:label="lab_us-gaap_ProfitLoss_B5E04807521349F5914D0EE1E13C9335" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net loss</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_B5E04807521349F5914D0EE1E13C9335" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProfitLoss_B5E04807521349F5914D0EE1E13C9335" xlink:to="lab_us-gaap_ProfitLoss_B5E04807521349F5914D0EE1E13C9335" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532_negatedTerseLabel_en-US" xlink:label="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:type="resource" xml:lang="en-US">Add: net loss attributable to noncontrolling interest</link:label>
    <link:label id="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532_label_en-US" xlink:label="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Net Income (Loss) Attributable to Noncontrolling Interest</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLossAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532" xlink:to="lab_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532" xlink:type="arc" />
    <link:label id="lab_us-gaap_NetIncomeLoss_7FA236EF26C9938FFE2D0EE1E13CAA75_totalLabel_en-US" xlink:label="lab_us-gaap_NetIncomeLoss_7FA236EF26C9938FFE2D0EE1E13CAA75" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:type="resource" xml:lang="en-US">Net loss attributable to Amtech Systems, Inc.</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_7FA236EF26C9938FFE2D0EE1E13CAA75" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NetIncomeLoss_7FA236EF26C9938FFE2D0EE1E13CAA75" xlink:to="lab_us-gaap_NetIncomeLoss_7FA236EF26C9938FFE2D0EE1E13CAA75" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240_terseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Loss Per Share:</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:to="lab_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareBasic_8F3A58DCF369F8DCBED10EE1E13CDA68_verboseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareBasic_8F3A58DCF369F8DCBED10EE1E13CDA68" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Basic loss per share attributable to Amtech shareholders (USD per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_8F3A58DCF369F8DCBED10EE1E13CDA68" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareBasic_8F3A58DCF369F8DCBED10EE1E13CDA68" xlink:to="lab_us-gaap_EarningsPerShareBasic_8F3A58DCF369F8DCBED10EE1E13CDA68" xlink:type="arc" />
    <link:label id="lab_us-gaap_EarningsPerShareDiluted_16758BCAEC211D7085A60EE1E13C99A9_verboseLabel_en-US" xlink:label="lab_us-gaap_EarningsPerShareDiluted_16758BCAEC211D7085A60EE1E13C99A9" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Diluted loss per share attributable to Amtech shareholders (dollars per share)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_16758BCAEC211D7085A60EE1E13C99A9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EarningsPerShareDiluted_16758BCAEC211D7085A60EE1E13C99A9" xlink:to="lab_us-gaap_EarningsPerShareDiluted_16758BCAEC211D7085A60EE1E13C99A9" xlink:type="arc" />
    <link:label id="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_DF7995C42948FCE04DFF0EE1E13CF89A_terseLabel_en-US" xlink:label="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_DF7995C42948FCE04DFF0EE1E13CF89A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Weighted average shares outstanding (in shares)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_DF7995C42948FCE04DFF0EE1E13CF89A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_DF7995C42948FCE04DFF0EE1E13CF89A" xlink:to="lab_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_DF7995C42948FCE04DFF0EE1E13CF89A" xlink:type="arc" />
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808_terseLabel_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Schedule of Segment Reporting Information, by Segment [Table]</link:label>
    <link:label id="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808_label_en-US" xlink:label="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Schedule of Segment Reporting Information, by Segment [Table]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="lab_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C_terseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Net Revenues</link:label>
    <link:label id="lab_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C_label_en-US" xlink:label="lab_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Sales Revenue, Net [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="loc_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:to="lab_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:type="arc" />
    <link:label id="lab_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F_terseLabel_en-US" xlink:label="lab_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Geographic Concentration Risk</link:label>
    <link:label id="lab_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F_label_en-US" xlink:label="lab_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Geographic Concentration Risk [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GeographicConcentrationRiskMember" xlink:label="loc_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:to="lab_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:type="arc" />
    <link:label id="lab_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C_terseLabel_en-US" xlink:label="lab_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer [Axis]</link:label>
    <link:label id="lab_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C_label_en-US" xlink:label="lab_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:to="lab_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:type="arc" />
    <link:label id="lab_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157_terseLabel_en-US" xlink:label="lab_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer [Domain]</link:label>
    <link:label id="lab_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157_label_en-US" xlink:label="lab_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:to="lab_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:type="arc" />
    <link:label id="lab_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8_terseLabel_en-US" xlink:label="lab_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Customer Number One</link:label>
    <link:label id="lab_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8_label_en-US" xlink:label="lab_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Customer Number One [Member]</link:label>
    <link:label id="lab_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8_documentation_en-US" xlink:label="lab_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Customer Number One [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_CustomerNumberOneMember" xlink:label="loc_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:to="lab_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:type="arc" />
    <link:label id="lab_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6_terseLabel_en-US" xlink:label="lab_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Geographical [Axis]</link:label>
    <link:label id="lab_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6_label_en-US" xlink:label="lab_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Geographical [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:to="lab_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Geographical [Domain]</link:label>
    <link:label id="lab_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50_label_en-US" xlink:label="lab_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Geographical [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="lab_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:type="arc" />
    <link:label id="lab_country_US_9E0585A63F16E0F4197A0F4EFFA2127A_terseLabel_en-US" xlink:label="lab_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">United States</link:label>
    <link:label id="lab_country_US_9E0585A63F16E0F4197A0F4EFFA2127A_label_en-US" xlink:label="lab_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">UNITED STATES</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:to="lab_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:type="arc" />
    <link:label id="lab_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9_terseLabel_en-US" xlink:label="lab_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other North America</link:label>
    <link:label id="lab_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9_label_en-US" xlink:label="lab_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Americas, Other [Member]</link:label>
    <link:label id="lab_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9_documentation_en-US" xlink:label="lab_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Americas, Other</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_AmericasOtherMember" xlink:label="loc_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:to="lab_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:type="arc" />
    <link:label id="lab_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464_terseLabel_en-US" xlink:label="lab_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Total North America</link:label>
    <link:label id="lab_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464_label_en-US" xlink:label="lab_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">North America [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NorthAmericaMember" xlink:label="loc_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:to="lab_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:type="arc" />
    <link:label id="lab_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A_terseLabel_en-US" xlink:label="lab_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">China</link:label>
    <link:label id="lab_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A_label_en-US" xlink:label="lab_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">CHINA</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_CN" xlink:label="loc_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:to="lab_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:type="arc" />
    <link:label id="lab_country_MY_68B340368EA65FAE66330F4EFFA28150_terseLabel_en-US" xlink:label="lab_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Malaysia</link:label>
    <link:label id="lab_country_MY_68B340368EA65FAE66330F4EFFA28150_label_en-US" xlink:label="lab_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">MALAYSIA</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_MY" xlink:label="loc_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:to="lab_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:type="arc" />
    <link:label id="lab_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525_terseLabel_en-US" xlink:label="lab_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Taiwan</link:label>
    <link:label id="lab_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525_label_en-US" xlink:label="lab_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">TAIWAN, PROVINCE OF CHINA</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_TW" xlink:label="loc_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:to="lab_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:type="arc" />
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7_terseLabel_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Asia</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7_label_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group One [Member]</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7_documentation_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group One [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:to="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:type="arc" />
    <link:label id="lab_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467_terseLabel_en-US" xlink:label="lab_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Total Asia</link:label>
    <link:label id="lab_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467_label_en-US" xlink:label="lab_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Asia [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AsiaMember" xlink:label="loc_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:to="lab_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:type="arc" />
    <link:label id="lab_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E_terseLabel_en-US" xlink:label="lab_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Germany</link:label>
    <link:label id="lab_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E_label_en-US" xlink:label="lab_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">GERMANY</link:label>
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_DE" xlink:label="loc_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:to="lab_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:type="arc" />
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8_terseLabel_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Other Europe</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8_label_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group Two [Member]</link:label>
    <link:label id="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8_documentation_en-US" xlink:label="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:type="resource" xml:lang="en-US">Segment, Geographical, Groups of Countries, Other Immaterial Locations, Group Two [Member]</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:to="lab_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:type="arc" />
    <link:label id="lab_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932_terseLabel_en-US" xlink:label="lab_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Total Europe</link:label>
    <link:label id="lab_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932_label_en-US" xlink:label="lab_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Europe [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EuropeMember" xlink:label="loc_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:to="lab_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:type="arc" />
    <link:label id="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844_terseLabel_en-US" xlink:label="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Revenue, Major Customer [Line Items]</link:label>
    <link:label id="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844_label_en-US" xlink:label="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Revenue, Major Customer [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:to="lab_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB_terseLabel_en-US" xlink:label="lab_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Consolidation Items [Axis]</link:label>
    <link:label id="lab_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB_label_en-US" xlink:label="lab_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Consolidation Items [Axis]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationItemsAxis" xlink:label="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:to="lab_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B_terseLabel_en-US" xlink:label="lab_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Consolidation Items [Domain]</link:label>
    <link:label id="lab_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B_label_en-US" xlink:label="lab_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Consolidation Items [Domain]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationItemsDomain" xlink:label="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:to="lab_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:type="arc" />
    <link:label id="lab_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406_terseLabel_en-US" xlink:label="lab_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Operating Segments</link:label>
    <link:label id="lab_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406_label_en-US" xlink:label="lab_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Operating Segments [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingSegmentsMember" xlink:label="loc_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:to="lab_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:type="arc" />
    <link:label id="lab_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995_terseLabel_en-US" xlink:label="lab_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Non-Segment</link:label>
    <link:label id="lab_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995_label_en-US" xlink:label="lab_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Corporate, Non-Segment [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CorporateNonSegmentMember" xlink:label="loc_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:to="lab_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:type="arc" />
    <link:label id="lab_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4_terseLabel_en-US" xlink:label="lab_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Product Concentration Risk</link:label>
    <link:label id="lab_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4_label_en-US" xlink:label="lab_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Product Concentration Risk [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductConcentrationRiskMember" xlink:label="loc_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:to="lab_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633_terseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Sales Revenue, Product Line</link:label>
    <link:label id="lab_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633_label_en-US" xlink:label="lab_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Sales Revenue, Product Line [Member]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueProductLineMember" xlink:label="loc_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:to="lab_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:type="arc" />
    <link:label id="lab_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84_terseLabel_en-US" xlink:label="lab_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Solar</link:label>
    <link:loc xlink:href="asys-20161231.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:to="lab_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:type="arc" />
    <link:label id="lab_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4_terseLabel_en-US" xlink:label="lab_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Segment Reporting Information [Line Items]</link:label>
    <link:label id="lab_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4_label_en-US" xlink:label="lab_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Segment Reporting Information [Line Items]</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="lab_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:type="arc" />
    <link:label id="lab_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E_terseLabel_en-US" xlink:label="lab_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Number of business segments</link:label>
    <link:label id="lab_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E_label_en-US" xlink:label="lab_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Number of Operating Segments</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="loc_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:to="lab_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:type="arc" />
    <link:label id="lab_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71_verboseLabel_en-US" xlink:label="lab_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Net revenues</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:to="lab_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:type="arc" />
    <link:label id="lab_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B_terseLabel_en-US" xlink:label="lab_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Operating income (Loss)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:to="lab_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:type="arc" />
    <link:label id="lab_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB_verboseLabel_en-US" xlink:label="lab_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:type="resource" xml:lang="en-US">Concentration risk, percentage (less than)</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:to="lab_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:type="arc" />
    <link:label id="lab_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224_terseLabel_en-US" xlink:label="lab_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Identifiable assets</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:to="lab_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:type="arc" />
    <link:label id="lab_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939_terseLabel_en-US" xlink:label="lab_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:type="resource" xml:lang="en-US">Shipping expenses</link:label>
    <link:label id="lab_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939_label_en-US" xlink:label="lab_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939" xlink:role="http://www.xbrl.org/2003/role/label" xlink:type="resource" xml:lang="en-US">Shipping, Handling and Transportation Costs</link:label>
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingHandlingAndTransportationCosts" xlink:label="loc_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939" xlink:type="locator" />
    <link:labelArc order="1" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="loc_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939" xlink:to="lab_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939" xlink:type="arc" />
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>11
<FILENAME>asys-20161231_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!--XBRL Document Created with Wdesk from Workiva-->
<!-- -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:href="asys-20161231.xsd#BusinessSegmentInformation" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:href="asys-20161231.xsd#BusinessSegmentInformationDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:href="asys-20161231.xsd#BusinessSegmentInformationTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:href="asys-20161231.xsd#CommitmentsAndContingencies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:href="asys-20161231.xsd#CommitmentsAndContingenciesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:href="asys-20161231.xsd#CondensedConsolidatedBalanceSheets" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:href="asys-20161231.xsd#CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfCashFlows" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations" xlink:href="asys-20161231.xsd#CondensedConsolidatedStatementsOfOperations" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:href="asys-20161231.xsd#DocumentAndEntityInformation" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShare" xlink:href="asys-20161231.xsd#EarningsPerShare" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:href="asys-20161231.xsd#EarningsPerShareDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:href="asys-20161231.xsd#EarningsPerShareTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxes" xlink:href="asys-20161231.xsd#IncomeTaxes" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:href="asys-20161231.xsd#IncomeTaxesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/Investments" xlink:href="asys-20161231.xsd#Investments" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/InvestmentsDetails" xlink:href="asys-20161231.xsd#InvestmentsDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebt" xlink:href="asys-20161231.xsd#LongTermDebt" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:href="asys-20161231.xsd#LongTermDebtDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSales" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSalesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:href="asys-20161231.xsd#MajorCustomersAndForeignSalesTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactions" xlink:href="asys-20161231.xsd#RelatedPartyTransactions" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails" xlink:href="asys-20161231.xsd#RelatedPartyTransactionsDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquity" xlink:href="asys-20161231.xsd#StockholdersEquity" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:href="asys-20161231.xsd#StockholdersEquityDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEvent" xlink:href="asys-20161231.xsd#SubsequentEvent" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:href="asys-20161231.xsd#SubsequentEventDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPolicies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesPolicies" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesTables" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:href="asys-20161231.xsd#SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/netLabel" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" xlink:type="simple" />
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformation" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_360BF005800C58C3A0DD8BFEA9767F2F" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingDisclosureTextBlock" xlink:label="loc_us-gaap_SegmentReportingDisclosureTextBlock_3534D6C205595F33A1F7A271C629E8B2" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingAbstract_360BF005800C58C3A0DD8BFEA9767F2F" xlink:to="loc_us-gaap_SegmentReportingDisclosureTextBlock_3534D6C205595F33A1F7A271C629E8B2" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_9AB72687B124A85A11D60F4EFFAD8FB3" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingAbstract_9AB72687B124A85A11D60F4EFFAD8FB3" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationItemsAxis" xlink:label="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationItemsDomain" xlink:label="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConsolidationItemsAxis_9255F6FCCD2086A04E8E0F4EFFAEE7FB" xlink:to="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingSegmentsMember" xlink:label="loc_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:to="loc_us-gaap_OperatingSegmentsMember_2D6801D9DD200F0BD9830F4EFFAE9406" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CorporateNonSegmentMember" xlink:label="loc_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConsolidationItemsDomain_F69D97AA21B479E3A1E00F4EFFAEB24B" xlink:to="loc_us-gaap_CorporateNonSegmentMember_AB86009E09D67AF8D2990F4EFFAE3995" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_10C58CB8F9CE80595C430F4EFFAE2C8B" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_10C58CB8F9CE80595C430F4EFFAE2C8B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_10C58CB8F9CE80595C430F4EFFAE2C8B" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductConcentrationRiskMember" xlink:label="loc_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_11DB130E04060B01061A0F4EFFAE459F" xlink:to="loc_us-gaap_ProductConcentrationRiskMember_9B59064B22F7908620050F4EFFAEFDA4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_456F1470C177DA0655620F4EFFAFE798" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_456F1470C177DA0655620F4EFFAFE798" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_456F1470C177DA0655620F4EFFAFE798" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueProductLineMember" xlink:label="loc_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_12911E427601C8F20D890F4EFFAFD7A0" xlink:to="loc_us-gaap_SalesRevenueProductLineMember_D93B1C052EA189B9638D0F4EFFAFC633" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_7688F56E344B683358610F4EFFAF21C6" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_7688F56E344B683358610F4EFFAF21C6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_7688F56E344B683358610F4EFFAF21C6" xlink:to="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:to="loc_asys_SolarEquipmentMember_56168663141C88B0F4160F4EFFAFEB84" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_C7CC6282B10A35E068110F4EFFAFBEE5" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:to="loc_asys_SemiconductorEquipmentMember_C7CC6282B10A35E068110F4EFFAFBEE5" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_D8EB7BB505FA0668AE3E0F4EFFAF4A23" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_38C8EC0B5EE05BBB5A040F4EFFAF334A" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_D8EB7BB505FA0668AE3E0F4EFFAF4A23" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingInformationLineItems" xlink:label="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_439B9BBB70F4B4D7B0280F4EFFAEBD6D" xlink:to="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NumberOfOperatingSegments" xlink:label="loc_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_NumberOfOperatingSegments_73780F99EA352DE3CDCA0F4EFFAFFB0E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_SalesRevenueNet_F9206E0D2491D619C0EA0F4EFFAF2B71" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_OperatingIncomeLoss_631DF8D7D8CD058EE3FA0F4EFFAF6D7B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_993FB9996F54A5F000F20F4EFFAF4AEB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingInformationLineItems_7EC0646A1611DC1E35E70F4EFFAF65C4" xlink:to="loc_us-gaap_Assets_6E751AAEFAE3D0F5DE890F4EFFAF3224" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/BusinessSegmentInformationTables" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentReportingAbstract" xlink:label="loc_us-gaap_SegmentReportingAbstract_A1DD9C909E16308043F50F4EFFB2196D" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentReportingAbstract_A1DD9C909E16308043F50F4EFFB2196D" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock_EDA0F96A531771CC81850F4EFFB29026" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingencies" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_14E1C053598E5E21AFE1AE97B70D769A" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_36A220A2E19A536EB6DCA4A446D36D58" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_14E1C053598E5E21AFE1AE97B70D769A" xlink:to="loc_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_36A220A2E19A536EB6DCA4A446D36D58" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_5981BAB16AFF577D91B91907E9605DA6" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_CommitmentsAndContingenciesDisclosureAbstract_5981BAB16AFF577D91B91907E9605DA6" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationCaseAxis" xlink:label="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationCaseTypeDomain" xlink:label="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LitigationCaseAxis_D604EAF7E66D5F0D95949ECB67B4C6D3" xlink:to="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_StockholderActionsPutativeStockholderClassActionComplaintsMember" xlink:label="loc_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LitigationCaseTypeDomain_552E82FD1E715539ADACB543B2094FA9" xlink:to="loc_asys_StockholderActionsPutativeStockholderClassActionComplaintsMember_7319C2B8B0025F0193E1D7AD86EB81E1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationStatusAxis" xlink:label="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LitigationStatusDomain" xlink:label="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LitigationStatusAxis_C1D08E5692B0555A90A8A93E10BE8713" xlink:to="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SettledLitigationMember" xlink:label="loc_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LitigationStatusDomain_B37F9EE751C45BA59B550FBAB492472A" xlink:to="loc_us-gaap_SettledLitigationMember_32763E55ADB7596199987DC4643D0849" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingenciesByNatureOfContingencyAxis" xlink:label="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyNatureDomain" xlink:label="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LossContingenciesByNatureOfContingencyAxis_8935140F4BA35B44B27503FB3AE753F4" xlink:to="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossFromCatastrophesMember" xlink:label="loc_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LossContingencyNatureDomain_A91A52DBD06E524081C3737F1C464C8B" xlink:to="loc_us-gaap_LossFromCatastrophesMember_609DE77DB5455B2895972013C4973FE1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAxis" xlink:label="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BusinessAcquisitionAcquireeDomain" xlink:label="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAxis_79DB47BB298E5980A15635AC5132C8F0" xlink:to="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_BTUInternationalIncBTUMergerMember" xlink:label="loc_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BusinessAcquisitionAcquireeDomain_FB2520DA7EDC53698192394586689ACC" xlink:to="loc_asys_BTUInternationalIncBTUMergerMember_1C6FFF7AA6525BB3BC134E4E19CB0579" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis_E0C8DEB99322514F89DA639745AD626E" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_TempressSystemsandEnergyResearchCentreAgreementMember" xlink:label="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersTypeDomain_4CB3178069E850F9B36E773E4C3C2ADE" xlink:to="loc_asys_TempressSystemsandEnergyResearchCentreAgreementMember_DD77277809CF5056A5CEFD785C9B7B3F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_4FBBD3D42528553BB10443C4792F7D7A" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PurchaseObligation" xlink:label="loc_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_PurchaseObligation_A7C03C389BC35EFFB1DE652FFA9A0DC7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_4608963682B450748CA6E9E0D53D1A82" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties" xlink:label="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties_1365B602D99F5E6989FD0A03F077252E" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentAgreementTerm" xlink:label="loc_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentAgreementTerm_676751D3956553A7BE0F7BC16603BB0F" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentRequiredContributionLaborandAssets" xlink:label="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentRequiredContributionLaborandAssets_C849A9A467695EBEB2E72532FCABBBE3" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance" xlink:label="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance_F2EC05080752578B91A2350B2CC7D86B" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchandDevelopmentRequiredContribution" xlink:label="loc_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_asys_ResearchandDevelopmentRequiredContribution_C114E4A7E8A15966AC44E0AF1B66F556" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyAccrualAtCarryingValue" xlink:label="loc_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_LossContingencyAccrualAtCarryingValue_E38CF3C4E7DE5336A043FABEEA653B77" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="loc_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_LettersOfCreditOutstandingAmount_D91BC4F474C6541093999CADFFA042FF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LossContingencyClaimsSettledNumber" xlink:label="loc_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:type="locator" />
    <link:presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_LossContingencyClaimsSettledNumber_621EF75D1A4F52E0BD47732AF5536224" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsForLegalSettlements" xlink:label="loc_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:type="locator" />
    <link:presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_78ABAC82976650C39D1C6C2F1D4EB24D" xlink:to="loc_us-gaap_PaymentsForLegalSettlements_E74D4C34188757A5B5F0C350E242A814" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6" xlink:to="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_0DCC79F671B71503DB9C245162379A39" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_0DCC79F671B71503DB9C245162379A39" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_3FE942D801B9CC173CC724516237FD90" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_3FE942D801B9CC173CC724516237FD90" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrentAbstract" xlink:label="loc_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="loc_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="loc_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:to="loc_us-gaap_AccountsReceivableNetCurrent_A94978414EA53FD8D5C824516237FCD2" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_UnbilledAndOther" xlink:label="loc_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AccountsReceivableNetCurrentAbstract_CE04458648E0EEC564F624516237650C" xlink:to="loc_asys_UnbilledAndOther_93D46250EDFB57E31CA024516238E756" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_814DFA0BB718784F869C24516238FA36" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="loc_us-gaap_InventoryNet_814DFA0BB718784F869C24516238FA36" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesReceivable" xlink:label="loc_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="loc_us-gaap_IncomeTaxesReceivable_FE74771032B5A616EEEE2451623866FE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsCurrent" xlink:label="loc_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="loc_us-gaap_OtherAssetsCurrent_CF8453202CEABEE2E8B924516238D89E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="loc_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_8552736FA9C13A96989E245162378D49" xlink:to="loc_us-gaap_AssetsCurrent_5DD96ED8E4EE2DC27FB8245162388CA3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_3F8AA51A2215374728FF24516238A59C" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_3F8AA51A2215374728FF24516238A59C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredTaxAssetsNetNoncurrent" xlink:label="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_DeferredTaxAssetsNetNoncurrent_450A360679520AD5D2EE24516238CE40" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="loc_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_OtherAssetsNoncurrent_8DBF94401D572CA24E81245162386802" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestments" xlink:label="loc_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_EquityMethodInvestments_D5370F3BBD70CB06D36C24516238B421" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IntangibleAssetsNetExcludingGoodwill" xlink:label="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_IntangibleAssetsNetExcludingGoodwill_719A8516688B9D80053324516239E0A2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_B096FBD1F81C0FF120BD24516239C594" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_Goodwill_B096FBD1F81C0FF120BD24516239C594" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Assets" xlink:label="loc_us-gaap_Assets_300BD239B9683BF944B624516239813C" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsAbstract_00CBB958C7264145595A24516237E66F" xlink:to="loc_us-gaap_Assets_300BD239B9683BF944B624516239813C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_855559D118A7BAB6F01324516237BBB6" xlink:to="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="loc_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_AccountsPayableCurrent_F6BDE628D0C46C6829FE245162396378" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtCurrent" xlink:label="loc_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_LongTermDebtCurrent_10F6F21F9379CCD3BB452451623956ED" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_EmployeeRelatedLiabilitiesCurrent_D589438183EDAB1CB45C245162397E74" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_ProductWarrantyAccrualClassifiedCurrent_7D2BF5B732E2C58E95C82451623963D4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_OtherDeferredCreditsCurrent_0D81688D023138F473D7245162398ED1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerAdvancesCurrent" xlink:label="loc_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_CustomerAdvancesCurrent_C5677195AA5C72B4530C24516239F7ED" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedLiabilitiesCurrent" xlink:label="loc_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_AccruedLiabilitiesCurrent_6A61EAAEC29D03B4FDD8245162391360" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="loc_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_AccruedIncomeTaxesCurrent_8260507BA5DB13C3C089245162390A57" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="loc_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesCurrentAbstract_6685D4A363C1FC07DE9024516239FD8D" xlink:to="loc_us-gaap_LiabilitiesCurrent_99825D3F85F008AD01B22451623A4F5D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtNoncurrent" xlink:label="loc_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="loc_us-gaap_LongTermDebtNoncurrent_61CE5D52B302311DC5922451623A360E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilityForUncertainTaxPositionsNoncurrent" xlink:label="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="loc_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent_9B6D5B48A3BB5066CFAD2451623AAE13" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Liabilities" xlink:label="loc_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="loc_us-gaap_Liabilities_C790870DE6756CC094AD2451623A2C48" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="loc_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="loc_us-gaap_CommitmentsAndContingencies_BEE69DD6E0B3D8B12DAF2451623A7325" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockValue" xlink:label="loc_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_PreferredStockValue_E4647751F2667A99E8EE2451623AF106" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockValue" xlink:label="loc_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_CommonStockValue_8935B6C645AEA889F9162451623A5239" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="loc_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_AdditionalPaidInCapital_72DBB22D77BE87E96C922451623AB8BD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_50CBEB3B7B238802E9D02451623AA766" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="loc_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_RetainedEarningsAccumulatedDeficit_804DD306DBA09477CF2B2451623AC8C0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="loc_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_StockholdersEquity_E5EF92726E53524977352451623A1E16" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinorityInterest" xlink:label="loc_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_MinorityInterest_A97165CF00698B1B2A292451623AD06E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_765BFD03575E5071B8EE2451623A1C00" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest_0584E4F5E931DBF372442451623A0D6A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="loc_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LiabilitiesAndStockholdersEquityAbstract_EA4F1F4B31FCBB86059C245162397B6B" xlink:to="loc_us-gaap_LiabilitiesAndStockholdersEquity_83AE2D9334B4E33360AF2451623B60EC" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="loc_us-gaap_StatementOfFinancialPositionAbstract_0582CA9C86A1AE6C4A190EE1E14B6ABA" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="loc_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_0582CA9C86A1AE6C4A190EE1E14B6ABA" xlink:to="loc_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AssetsCurrentAbstract_685CCD04A48B0B2BECE90EE1E14B98B2" xlink:to="loc_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_953795141A35A7445D250EE1E14BF34B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract" xlink:label="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfFinancialPositionAbstract_0582CA9C86A1AE6C4A190EE1E14B6ABA" xlink:to="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesAuthorized" xlink:label="loc_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:to="loc_us-gaap_PreferredStockSharesAuthorized_797ED71BBE0769883B370EE1E14B2138" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PreferredStockSharesIssued" xlink:label="loc_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:to="loc_us-gaap_PreferredStockSharesIssued_E6A2251A6A8AC57609650EE1E14B9434" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_58BE189FB581F9453AAA0EE1E150C005" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_58BE189FB581F9453AAA0EE1E150C005" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="loc_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:to="loc_us-gaap_CommonStockSharesAuthorized_8259C7E566128D9B89010EE1E150033B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="loc_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:to="loc_us-gaap_CommonStockSharesIssued_BE25CD2DB26A7F2A71280EE1E1504420" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="loc_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract_737B37D16AABC10D36670EE1E14BCD69" xlink:to="loc_us-gaap_CommonStockSharesOutstanding_5B968671B9698C2CA41E0EE1E15038F4" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:to="loc_us-gaap_ProfitLoss_AB5B88FDF55DFC096491245AD9A0CB9E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:to="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="loc_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="loc_us-gaap_DepreciationDepletionAndAmortization_1C5D822572C96E904D04245AD9A1EA6F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="loc_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="loc_us-gaap_InventoryWriteDown_85016F98C8A449C3DCA4245AD9A12B99" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InterestCostsCapitalized" xlink:label="loc_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="loc_us-gaap_InterestCostsCapitalized_86FC1D6657DF60C18C31245AD9A16CFF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInDeferredIncomeTaxes" xlink:label="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="loc_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes_0B9A648E3BD1AFB18BB8245AD9A1A5EE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="loc_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="loc_us-gaap_ShareBasedCompensation_E2160A47DB8194EF5384245AD9A2B419" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="loc_us-gaap_IncomeLossFromEquityMethodInvestments_45759706975F9FAE802E245AD9A2CFE8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProvisionForDoubtfulAccounts" xlink:label="loc_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_3D43CBB622261BDD085D245AD9A1EFFC" xlink:to="loc_us-gaap_ProvisionForDoubtfulAccounts_BB92F28A4AAE39793A59245AD9A2F0AD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_3C558F74EFB799A36CA8245AD99DA8B9" xlink:to="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities" xlink:label="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities_F3BA41B69318402F9DDE245AD9A21B32" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsReceivable_C2027D481C7352535490245AD9A25665" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="loc_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_us-gaap_IncreaseDecreaseInInventories_2EB527F4016D66CC024D245AD9A2D1E0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_FFD8E9E4A4CE9BE553C7245AD9A21A2A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_A378282DEE35E28AA100245AD9A20417" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayable" xlink:label="loc_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_us-gaap_IncreaseDecreaseInAccountsPayable_A947BCBADB35999A092C245AD9A2A646" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits" xlink:label="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits_25C1C2740DC32F391677245AD9A3D546" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_IncreaseDecreaseInDeferredProfit" xlink:label="loc_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_asys_IncreaseDecreaseInDeferredProfit_8E1CA89B9572FAD07051245AD9A3C460" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_315CA46D4CCCD4FA1809245AD9A251FE" xlink:to="loc_us-gaap_NetCashProvidedByUsedInOperatingActivities_CB960E07FC5B032ADE44245AD9A32635" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:to="loc_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_9AEEDF89E9EE78CEFD1C245AD9A306F1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment" xlink:label="loc_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:to="loc_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment_5ADE00AE0E5A8877AA61245AD9A383B0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries" xlink:label="loc_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:to="loc_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries_D244A6F9E361161A9D48245AD9A388D6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_EAC46052AADF21FE8F0E245AD9A30EB3" xlink:to="loc_us-gaap_NetCashProvidedByUsedInInvestingActivities_4645B3A71933AC3CBD21245AD9A312D0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfCommonStock" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfCommonStock_518D6F82FBDE4821E118245AD9A3011F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RepaymentsOfLongTermDebt" xlink:label="loc_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:to="loc_us-gaap_RepaymentsOfLongTermDebt_9F42919023561552BE22245AD9A351B5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfLongTermDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfLongTermDebt_A90F872B8CE660D13196245AD9A3D6CD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_8287AC3D2150EC4B2AB6245AD9A3C2E4" xlink:to="loc_us-gaap_NetCashProvidedByUsedInFinancingActivities_4D98794F63C2CAEF8276245AD9A4153D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents" xlink:label="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents_7830581ADDABFA87ACA1245AD9A4BC4C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease" xlink:label="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease_C15B2F1CA76C1DE5BBD9245AD9A4BDCC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_37BED4A4612C9CB348C8245AD9A463C0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_00CBA59BB7894401BA52245AD9A4E95A" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_CashAndCashEquivalentsAtCarryingValue_00CBA59BB7894401BA52245AD9A4E95A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SupplementalCashFlowInformationAbstract" xlink:label="loc_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfCashFlowsAbstract_0DCA62897D6E1D73FC45245AD99A7B9C" xlink:to="loc_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InterestPaid" xlink:label="loc_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:to="loc_us-gaap_InterestPaid_E9EBF11FCA5ADD80CC3D245AD9A45711" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIncomeTaxRefunds" xlink:label="loc_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:to="loc_us-gaap_ProceedsFromIncomeTaxRefunds_60D10F417E3E85419285245AD9A4CFE9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxesPaid" xlink:label="loc_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SupplementalCashFlowInformationAbstract_AA092E5562D4A28B53BC245AD9A4CA85" xlink:to="loc_us-gaap_IncomeTaxesPaid_6F5867C5DB847330F75A245BB94658D2" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_F62175137F7F550757D00EE1E1218027" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:to="loc_us-gaap_ProfitLoss_F62175137F7F550757D00EE1E1218027" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax" xlink:label="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:to="loc_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax_62A868B10A8D1A9E98030EE1E12100CF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest_6606E62547CDDA90D6330EE1E12130A9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest_006B7E55041529E02CC70EE1E121BB24" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="loc_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_23E33D09B15CB21CB0010EE1E120E45D" xlink:to="loc_us-gaap_ComprehensiveIncomeNetOfTax_23EC8BDEF52A29A9BB310EE1E1226642" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNet" xlink:label="loc_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_SalesRevenueNet_C6FA69C18C5A0307DD680EE1E13636D9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="loc_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_CostOfGoodsAndServicesSold_02958E59292A923066200EE1E136E654" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GrossProfit" xlink:label="loc_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_GrossProfit_5F1B2B1C292230656D1D0EE1E1366C70" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SellingGeneralAndAdministrativeExpense" xlink:label="loc_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_SellingGeneralAndAdministrativeExpense_6A2E3B85192DB03C01EE0EE1E1360C55" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_281C89A72DDED8F2C6260EE1E136A915" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_281C89A72DDED8F2C6260EE1E136A915" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="loc_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_OperatingIncomeLoss_13EFCCB00E40F92EE1FB0EE1E13698C4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_411589BFA4F3DEBAD1440EE1E13BB1D8" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_IncomeLossFromEquityMethodInvestments_411589BFA4F3DEBAD1440EE1E13BB1D8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="loc_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_OtherNonoperatingIncomeExpense_726186CDE6C0D106C6120EE1E13B853C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments_AF5437D23AC0A4EFA92F0EE1E13B6424" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="loc_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838" xlink:type="locator" />
    <link:presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_IncomeTaxExpenseBenefit_6513256A3A478B1569EC0EE1E13C9838" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProfitLoss" xlink:label="loc_us-gaap_ProfitLoss_B5E04807521349F5914D0EE1E13C9335" xlink:type="locator" />
    <link:presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_ProfitLoss_B5E04807521349F5914D0EE1E13C9335" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLossAttributableToNoncontrollingInterest" xlink:label="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532" xlink:type="locator" />
    <link:presentationArc order="12" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest_963AFB6A2159CA56353A0EE1E13C0532" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_7FA236EF26C9938FFE2D0EE1E13CAA75" xlink:type="locator" />
    <link:presentationArc order="13" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_NetIncomeLoss_7FA236EF26C9938FFE2D0EE1E13CAA75" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:type="locator" />
    <link:presentationArc order="14" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeStatementAbstract_8D8E7B9D7CDCBA92BAD50EE1E135A575" xlink:to="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_8F3A58DCF369F8DCBED10EE1E13CDA68" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:to="loc_us-gaap_EarningsPerShareBasic_8F3A58DCF369F8DCBED10EE1E13CDA68" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_27ACCDB115BEE2D413A90EE1E13CB56E" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_27ACCDB115BEE2D413A90EE1E13CB56E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_16758BCAEC211D7085A60EE1E13C99A9" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:to="loc_us-gaap_EarningsPerShareDiluted_16758BCAEC211D7085A60EE1E13C99A9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_DF7995C42948FCE04DFF0EE1E13CF89A" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_7DBF323CAAFF25C46CAD0EE1E13CE240" xlink:to="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_DF7995C42948FCE04DFF0EE1E13CF89A" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/DocumentAndEntityInformation" xlink:type="extended">
    <link:loc xlink:href="asys-20161231.xsd#asys_DocumentAndEntityInformationAbstract" xlink:label="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityRegistrantName" xlink:label="loc_dei_EntityRegistrantName_2074D62616315C17AAB0C07301650B8E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_EntityRegistrantName_2074D62616315C17AAB0C07301650B8E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="loc_dei_EntityCentralIndexKey_2968AD6C99525DB59EC385ACACB702DE" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_EntityCentralIndexKey_2968AD6C99525DB59EC385ACACB702DE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="loc_dei_CurrentFiscalYearEndDate_45C3F2AD52B650FB98CE6D78BAF6C525" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_CurrentFiscalYearEndDate_45C3F2AD52B650FB98CE6D78BAF6C525" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityFilerCategory" xlink:label="loc_dei_EntityFilerCategory_E128C0F1C9A35FE1A859AF2B3C53AD96" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_EntityFilerCategory_E128C0F1C9A35FE1A859AF2B3C53AD96" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentType" xlink:label="loc_dei_DocumentType_14A55DB3A6C953628879E069A28F6210" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_DocumentType_14A55DB3A6C953628879E069A28F6210" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="loc_dei_DocumentPeriodEndDate_CC465AE00D215E8A9F531FCA235DA34C" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_DocumentPeriodEndDate_CC465AE00D215E8A9F531FCA235DA34C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="loc_dei_DocumentFiscalYearFocus_BF6AF0CBA59F578790C15C886C6AA4BB" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_DocumentFiscalYearFocus_BF6AF0CBA59F578790C15C886C6AA4BB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="loc_dei_DocumentFiscalPeriodFocus_C15D4842479C5AAD8680D0A334B41454" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_DocumentFiscalPeriodFocus_C15D4842479C5AAD8680D0A334B41454" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_AmendmentFlag" xlink:label="loc_dei_AmendmentFlag_AED28ADE54C254DBA9682A5F856A3EC6" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_AmendmentFlag_AED28ADE54C254DBA9682A5F856A3EC6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="loc_dei_EntityCommonStockSharesOutstanding_2D40984FAC21568E9D6BD876B6A3322B" xlink:type="locator" />
    <link:presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_DocumentAndEntityInformationAbstract_0F968EC7737E50C993D663D91361D86B" xlink:to="loc_dei_EntityCommonStockSharesOutstanding_2D40984FAC21568E9D6BD876B6A3322B" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShare" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_A76B178FA42D58DB8BEA878651CA5ECF" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="loc_us-gaap_EarningsPerShareTextBlock_D07737EAA100580C863E9E63699DAD87" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_A76B178FA42D58DB8BEA878651CA5ECF" xlink:to="loc_us-gaap_EarningsPerShareTextBlock_D07737EAA100580C863E9E63699DAD87" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_F465D6A8FABA66C22FD00FB4DA31EE35" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable" xlink:label="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_F465D6A8FABA66C22FD00FB4DA31EE35" xlink:to="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesNameDomain" xlink:label="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis_EE61DA872926E4BFB0A10FB4DA3129F8" xlink:to="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_59BBE650196964C1AB2F0FB4DA3146A5" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AntidilutiveSecuritiesNameDomain_4BB998630519266B666D0FB4DA31AEBB" xlink:to="loc_us-gaap_EmployeeStockOptionMember_59BBE650196964C1AB2F0FB4DA3146A5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfAntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareTable_19F792617F86A9A0F1360FB4DA317A0E" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems_03A2614B7E76A75412890FB4DA317F9C" xlink:to="loc_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_6579DF2B15636DE5AA9D0FB4DA32623D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NetIncomeLoss" xlink:label="loc_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_F465D6A8FABA66C22FD00FB4DA31EE35" xlink:to="loc_us-gaap_NetIncomeLoss_463531EBB4362E3154950FB4DA3207E9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_F465D6A8FABA66C22FD00FB4DA31EE35" xlink:to="loc_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_F118196E99F74C931F8B0FB4DA326D38" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="loc_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_F465D6A8FABA66C22FD00FB4DA31EE35" xlink:to="loc_us-gaap_EarningsPerShareBasic_08AA47675A4EA004DC8C0FB4DA3266BD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_F465D6A8FABA66C22FD00FB4DA31EE35" xlink:to="loc_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_5A6D14906028FBF8F3340FB4DA328242" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="loc_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_F465D6A8FABA66C22FD00FB4DA31EE35" xlink:to="loc_us-gaap_EarningsPerShareDiluted_4A17B61EEC7633A6118F0FB4DA322CE1" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/EarningsPerShareTables" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="loc_us-gaap_EarningsPerShareAbstract_7A288B092F0CC2867CAB0F4EFFC112DB" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EarningsPerShareAbstract_7A288B092F0CC2867CAB0F4EFFC112DB" xlink:to="loc_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_6365194BD49B66FE3F940F4EFFC17B12" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxes" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_AAA143FAA96C57F693E6134AD3C126D9" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="loc_us-gaap_IncomeTaxDisclosureTextBlock_04E9BF8D13A05808992F1E6D54AC5688" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_AAA143FAA96C57F693E6134AD3C126D9" xlink:to="loc_us-gaap_IncomeTaxDisclosureTextBlock_04E9BF8D13A05808992F1E6D54AC5688" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/IncomeTaxesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="loc_us-gaap_IncomeTaxDisclosureAbstract_A5C7FE88BDE73D8191470F4EFFC7B3FF" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyTable" xlink:label="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxDisclosureAbstract_A5C7FE88BDE73D8191470F4EFFC7B3FF" xlink:to="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:to="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_973A1C616054F0D181F90F4EFFC7E26F" xlink:to="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:to="loc_us-gaap_MinimumMember_1D328067976D8B23DAD60F4EFFC7B6D8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_AA3753358BB6FAA47C000F4EFFC75CAB" xlink:to="loc_us-gaap_MaximumMember_FAD8036037E40BE13A400F4EFFC823C3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeTaxContingencyLineItems" xlink:label="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyTable_AC57B1FA1834B84834980F4EFFC78CDD" xlink:to="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate_A96E6C66778EED6CEE450F4EFFC86512" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued" xlink:label="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="loc_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued_1FD25D7C0129F764ED010F4EFFC84C7E" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations" xlink:label="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_IncomeTaxContingencyLineItems_A0965044F1E18E7F776C0F4EFFC88A99" xlink:to="loc_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations_543990D4E42CDA6ED1FD0F4EFFC827D4" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/Investments" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract" xlink:label="loc_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_3F43B562FF275EF5A35A582C5DE2C411" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentsDisclosureTextBlock" xlink:label="loc_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_010D5D7BAD505DCC8D138377EAB8106C" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_3F43B562FF275EF5A35A582C5DE2C411" xlink:to="loc_us-gaap_EquityMethodInvestmentsDisclosureTextBlock_010D5D7BAD505DCC8D138377EAB8106C" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/InvestmentsDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract" xlink:label="loc_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_5B6C9E46D62076E5C80B0FB4DA0286E9" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsTable" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_FC2C18675D8B68517C9F0FB4DA02082F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract_5B6C9E46D62076E5C80B0FB4DA0286E9" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_FC2C18675D8B68517C9F0FB4DA02082F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_9C50A28C34BBDA5250550FB4DA02539F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_FC2C18675D8B68517C9F0FB4DA02082F" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_9C50A28C34BBDA5250550FB4DA02539F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_9C50A28C34BBDA5250550FB4DA02539F" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_1024BDD97F74D5DBFF410FB4DA0293FC" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_31743A3C6DE9F008527D0FB4DA029B26" xlink:to="loc_asys_KingstoneHoldingCompanyMember_1024BDD97F74D5DBFF410FB4DA0293FC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentsLineItems" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsTable_FC2C18675D8B68517C9F0FB4DA02082F" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_11A517265F63AF23E69D0FB4DA02AE25" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_11A517265F63AF23E69D0FB4DA02AE25" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestments" xlink:label="loc_us-gaap_EquityMethodInvestments_90961F01037BD267C3720FB4DA021FDE" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:to="loc_us-gaap_EquityMethodInvestments_90961F01037BD267C3720FB4DA021FDE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_IncomeLossFromEquityMethodInvestments" xlink:label="loc_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems_E6FFC60A3B7E74F8B4730FB4DA023B76" xlink:to="loc_us-gaap_IncomeLossFromEquityMethodInvestments_666C556B92536879DEB40FB4DA023FE8" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebt" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_8F79B7B53444505AA9E851E493D51D56" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebtTextBlock" xlink:label="loc_us-gaap_LongTermDebtTextBlock_D0EC27BA970E564EBF2CD815B7233737" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_8F79B7B53444505AA9E851E493D51D56" xlink:to="loc_us-gaap_LongTermDebtTextBlock_D0EC27BA970E564EBF2CD815B7233737" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/LongTermDebtDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="loc_us-gaap_DebtDisclosureAbstract_E5D397AE564A7BA2C1981E5B370BB1D5" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtDisclosureAbstract_E5D397AE564A7BA2C1981E5B370BB1D5" xlink:to="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_LegalEntityAxis_4AD669CC2D8CF6CB36CE1E5B371056A8" xlink:to="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_EntityDomain_2412D44CB26417DC40761E5B37106E38" xlink:to="loc_asys_SoLayTecB.V.Member_E9C4ACB9D9794488C7FD1E5B371020D4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_VariableRateAxis" xlink:label="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_VariableRateDomain" xlink:label="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_VariableRateAxis_821DCB39BA98E95D9C651E5B3710933D" xlink:to="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember" xlink:label="loc_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_VariableRateDomain_89146E621416E9E2AAE71E5B3710F4D1" xlink:to="loc_asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember_F7513726778A133ED7EF1E5B3710231A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongtermDebtTypeAxis_411D3FDFFEBA2636B7E01E5B37112C8D" xlink:to="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_MortgageNoteMember" xlink:label="loc_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_LongtermDebtTypeDomain_C652B791515986EC76121E5B371118AE" xlink:to="loc_asys_MortgageNoteMember_D7A3E81771DE7481545C1E5B37114ACF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_D09263FFD312617A643B1E5B3711048D" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_us-gaap_RangeAxis_D09263FFD312617A643B1E5B3711048D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_D09263FFD312617A643B1E5B3711048D" xlink:to="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_13A5CA4038C9CB8CE1E61E5B37114498" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:to="loc_us-gaap_MinimumMember_13A5CA4038C9CB8CE1E61E5B37114498" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_CAB6599000D84B2E8A001E5B3711FB05" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_971EAC655D98D8F730941E5B371125F0" xlink:to="loc_us-gaap_MaximumMember_CAB6599000D84B2E8A001E5B3711FB05" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentTable_7D2B4CF45D7DF2215D001E5B370B8817" xlink:to="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LongTermDebt" xlink:label="loc_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_LongTermDebt_999076FD4BF9D123CA021E5B3711A4B6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentInterestRateStatedPercentage" xlink:label="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_DebtInstrumentInterestRateStatedPercentage_A37DB964161EBFA1E2351E5B3711ECCF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DebtInstrumentBasisSpreadOnVariableRate1" xlink:label="loc_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1_6F004A4FCAB0EAD4415A1E5B3711834E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromIssuanceOfDebt" xlink:label="loc_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_DebtInstrumentLineItems_4FDBB9A597DCBA52E26A1E5B3711A71F" xlink:to="loc_us-gaap_ProceedsFromIssuanceOfDebt_0333B30C7EB04E1EFE2C1E5B3711315D" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSales" xlink:type="extended">
    <link:loc xlink:href="asys-20161231.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_0467D02FC725516A8D1296A042469478" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:label="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_B5FB906E2EE654978F9D3AF95802D84A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_0467D02FC725516A8D1296A042469478" xlink:to="loc_us-gaap_ConcentrationRiskDisclosureTextBlock_B5FB906E2EE654978F9D3AF95802D84A" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails" xlink:type="extended">
    <link:loc xlink:href="asys-20161231.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_A5A05D93F45DAC28AC8C0F4EFFA1DAD0" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable" xlink:label="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_A5A05D93F45DAC28AC8C0F4EFFA1DAD0" xlink:to="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_545A1EB1A54476C19C900F4EFFA13A6D" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_545A1EB1A54476C19C900F4EFFA13A6D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_545A1EB1A54476C19C900F4EFFA13A6D" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="loc_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_1DB25B926446758477F50F4EFFA1FA19" xlink:to="loc_us-gaap_SalesRevenueNetMember_6CA690BD28207F6993820F4EFFA1F74C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_3D8AC74D7F4853A5633D0F4EFFA18547" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_3D8AC74D7F4853A5633D0F4EFFA18547" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_3D8AC74D7F4853A5633D0F4EFFA18547" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_F128DB47A90AB82548D10F4EFFA12330" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:to="loc_us-gaap_CustomerConcentrationRiskMember_F128DB47A90AB82548D10F4EFFA12330" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GeographicConcentrationRiskMember" xlink:label="loc_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_0862F1DE15F415D7A9BD0F4EFFA1BEF0" xlink:to="loc_us-gaap_GeographicConcentrationRiskMember_2DF144C57BBF31C4AFB40F9AFDE86F4F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MajorCustomersAxis" xlink:label="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NameOfMajorCustomerDomain" xlink:label="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MajorCustomersAxis_212AEAD58F0693E314E90F4EFFA11E8C" xlink:to="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CustomerNumberOneMember" xlink:label="loc_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_NameOfMajorCustomerDomain_328765266D0C4B26B9600F4EFFA1A157" xlink:to="loc_asys_CustomerNumberOneMember_43292903C412E5E69AAB0F4EFFA180A8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementGeographicalAxis" xlink:label="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentGeographicalDomain" xlink:label="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementGeographicalAxis_30936469C50E72AF0F910F4EFFA2ECC6" xlink:to="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_US" xlink:label="loc_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_US_9E0585A63F16E0F4197A0F4EFFA2127A" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_AmericasOtherMember" xlink:label="loc_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_asys_AmericasOtherMember_4E45AFC05E8BCE2FE7260F4EFFA261B9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NorthAmericaMember" xlink:label="loc_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_us-gaap_NorthAmericaMember_32457E0B12A5F583DD8C0F4EFFA23464" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_CN" xlink:label="loc_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_CN_AD8C08B662AADAA2438A0F4EFFA2D94A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_MY" xlink:label="loc_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_MY_68B340368EA65FAE66330F4EFFA28150" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_TW" xlink:label="loc_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_TW_4DB2D23EF570BC2FDFB90F4EFFA2E525" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember_2D44E14A23A038DC832B0F4EFFA2F8E7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AsiaMember" xlink:label="loc_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_us-gaap_AsiaMember_2DC7C0B90AEF99E963240F4EFFA2C467" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/country/2013/country-2013-01-31.xsd#country_DE" xlink:label="loc_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_country_DE_6001F32C2A41569A4F2C0F4EFFA2D84E" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember" xlink:label="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:type="locator" />
    <link:presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember_9B894B8C571070315B5C0F4EFFA2A0C8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EuropeMember" xlink:label="loc_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:type="locator" />
    <link:presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentGeographicalDomain_736D3107FC4DD59F33EE0F4EFFA27A50" xlink:to="loc_us-gaap_EuropeMember_81A1C525D8BCBF406AF00F4EFFA23932" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EntityWideRevenueMajorCustomerLineItems" xlink:label="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTable_C44013423F8442C203210F4EFFA16808" xlink:to="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_FE1E75A2AAE4C22317330F4EFFA3F357" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EntityWideRevenueMajorCustomerLineItems_49A8EB57A8E5AB90ECBB0F4EFFA28844" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_FE1E75A2AAE4C22317330F4EFFA3F357" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables" xlink:type="extended">
    <link:loc xlink:href="asys-20161231.xsd#asys_MajorCustomersAndForeignSalesAbstract" xlink:label="loc_asys_MajorCustomersAndForeignSalesAbstract_3F8FAC1A723142E7871D0F4EFFA570AE" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock" xlink:label="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_MajorCustomersAndForeignSalesAbstract_3F8FAC1A723142E7871D0F4EFFA570AE" xlink:to="loc_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock_3BCCBDAD7E7CDB8665BB0F4EFFA5548A" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/RelatedPartyTransactions" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsAbstract" xlink:label="loc_us-gaap_RelatedPartyTransactionsAbstract_C71D609E68885C66903DF75B571F1E1C" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsDisclosureTextBlock" xlink:label="loc_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_8E61AC5117625108B006EF7E7C675320" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionsAbstract_C71D609E68885C66903DF75B571F1E1C" xlink:to="loc_us-gaap_RelatedPartyTransactionsDisclosureTextBlock_8E61AC5117625108B006EF7E7C675320" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsAbstract" xlink:label="loc_us-gaap_RelatedPartyTransactionsAbstract_2BDDDBDFAB2C08AFE3900FB4D9F25783" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable" xlink:label="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionsAbstract_2BDDDBDFAB2C08AFE3900FB4D9F25783" xlink:to="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_BE7CC9AC63C8594221700FC8F7EADEBE" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_RangeAxis_BE7CC9AC63C8594221700FC8F7EADEBE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_BE7CC9AC63C8594221700FC8F7EADEBE" xlink:to="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_7A3E39928ADE363438100FC92ACF8AA2" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:to="loc_us-gaap_MinimumMember_7A3E39928ADE363438100FC92ACF8AA2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_E1E4A7CA85C6B239D79D0FC94D6141AE" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_CA654932C3D61E2C9B700FC8F7EAEC9D" xlink:to="loc_us-gaap_MaximumMember_E1E4A7CA85C6B239D79D0FC94D6141AE" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_LegalEntityAxis" xlink:label="loc_dei_LegalEntityAxis_F38574436AE4217DFE860FC7F46495A3" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_dei_LegalEntityAxis_F38574436AE4217DFE860FC7F46495A3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.sec.gov/dei/2014/dei-2014-01-31.xsd#dei_EntityDomain" xlink:label="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_LegalEntityAxis_F38574436AE4217DFE860FC7F46495A3" xlink:to="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SoLayTecB.V.Member" xlink:label="loc_asys_SoLayTecB.V.Member_75B3C6DF1CFE47783E610FC7F4B00542" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_dei_EntityDomain_C8933CB7D57B70E3D5870FC7F468CEF0" xlink:to="loc_asys_SoLayTecB.V.Member_75B3C6DF1CFE47783E610FC7F4B00542" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionDomain" xlink:label="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionAxis_9D730196BCC65AA6E95B0FC0B2C17CB1" xlink:to="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_TNOTechnostartersB.V.LoansMember" xlink:label="loc_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionDomain_9D5BB0225D5CC60DF38C0FC0B2C322F5" xlink:to="loc_asys_TNOTechnostartersB.V.LoansMember_3263A6CB6DA32534658B0FC0EC3AEABB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BalanceSheetLocationAxis" xlink:label="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BalanceSheetLocationDomain" xlink:label="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationAxis_B93BB0BD76810664983A0FB4D9F2D2FC" xlink:to="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_1E5CA029FC341446C15F0FB4D9F2B1C5" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_BalanceSheetLocationDomain_AF4B1FA55861E58C64D20FB4D9F29A40" xlink:to="loc_us-gaap_AccountsReceivableMember_1E5CA029FC341446C15F0FB4D9F2B1C5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis" xlink:label="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvesteeNameDomain" xlink:label="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis_18EE3A7021BC34EDA66B0FB4D9F281FF" xlink:to="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHoldingCompanyMember" xlink:label="loc_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EquityMethodInvesteeNameDomain_6FF84357642C227B2B830FB4D9F204B7" xlink:to="loc_asys_KingstoneHoldingCompanyMember_98FB572D7F4CD17CE7950FB4D9F23E42" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionsByRelatedPartyAxis" xlink:label="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyDomain" xlink:label="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis_A43D908ACB58527E71430FB4D9F21612" xlink:to="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_KingstoneHongKongMember" xlink:label="loc_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:to="loc_asys_KingstoneHongKongMember_9CC9D32F8DA148028E560FB4D9F3AF6C" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_TNOTechnostartersB.V.Member" xlink:label="loc_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyDomain_BE2AA1FF7B9DA0C2C2AC0FB4D9F3CADF" xlink:to="loc_asys_TNOTechnostartersB.V.Member_4AD9F6F479A6687EDE770FBF6571A78F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionLineItems" xlink:label="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfRelatedPartyTransactionsByRelatedPartyTable_9FBBA90E5B6B3F175A690FB4D9F2155A" xlink:to="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EquityMethodInvestmentOwnershipPercentage" xlink:label="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_EquityMethodInvestmentOwnershipPercentage_285941D1609F8AA0BD8F0FB4D9F37E76" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DueFromRelatedParties" xlink:label="loc_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_DueFromRelatedParties_EC9A9370C11F2FB98E800FB4D9F3C21A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ProceedsFromRelatedPartyDebt" xlink:label="loc_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_ProceedsFromRelatedPartyDebt_1A6547ADA44412D703010FBB66136437" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RelatedPartyTransactionRate" xlink:label="loc_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RelatedPartyTransactionLineItems_A54E16A2862053FA1CCF0FB4D9F39FEC" xlink:to="loc_us-gaap_RelatedPartyTransactionRate_7A5DCD1A806D6F9D63760FC023903834" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquity" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="loc_us-gaap_StockholdersEquityNoteAbstract_182525E2AC7A59F89E66515D23E27350" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_6652101179C955FBA002CBDF9A7CD1D5" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityNoteAbstract_182525E2AC7A59F89E66515D23E27350" xlink:to="loc_us-gaap_StockholdersEquityNoteDisclosureTextBlock_6652101179C955FBA002CBDF9A7CD1D5" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/StockholdersEquityDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="loc_us-gaap_StockholdersEquityNoteAbstract_93752AA36BF29AC619890F4EFFB82441" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfStockByClassTable" xlink:label="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StockholdersEquityNoteAbstract_93752AA36BF29AC619890F4EFFB82441" xlink:to="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementClassOfStockAxis" xlink:label="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:to="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockDomain" xlink:label="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementClassOfStockAxis_D439F43C1FCAEFF8E6070F4EFFB89DE0" xlink:to="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SeriesAPreferredStockMember" xlink:label="loc_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockDomain_A1EF1244CCF6D0F0F0EE0F4EFFB825F9" xlink:to="loc_us-gaap_SeriesAPreferredStockMember_603F0AF255917EA4A90E0F4EFFB8F152" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfStockLineItems" xlink:label="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfStockByClassTable_FD41A108125ED057DFC90F4EFFB812F8" xlink:to="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="loc_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_us-gaap_CommonStockParOrStatedValuePerShare_925C3C421A90C289BADE0F4EFFB8AD95" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights" xlink:label="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights_E1001F3676D17ECEAE890F8A6A42FC8E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1" xlink:label="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1_B2FD2345B2141FE82C9E0F4EFFB881B3" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ClassOfWarrantOrRightExpirationPeriod" xlink:label="loc_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_asys_ClassOfWarrantOrRightExpirationPeriod_535F238D1B1DCA2C81D10F4EFFB885C8" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CommonStockMinimumPercentOwnershipForExerciseOfRights" xlink:label="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights_C1D85F512102FF7B688A0F4EFFB80046" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CommonStockCollectiveOwnershipThresholdForJointFilers" xlink:label="loc_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ClassOfStockLineItems_9B2CEB9963AB9D85E06B0F4EFFB8E878" xlink:to="loc_asys_CommonStockCollectiveOwnershipThresholdForJointFilers_FAC6FEC6E0D77EB261A10F4EFFB80842" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEvent" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_49D09F4F5136074450CD18EE2192711C" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsTextBlock" xlink:label="loc_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventsAbstract_49D09F4F5136074450CD18EE2192711C" xlink:to="loc_us-gaap_SubsequentEventsTextBlock_F61747E1BF2F0135456318EE8A310088" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SubsequentEventDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventsAbstract" xlink:label="loc_us-gaap_SubsequentEventsAbstract_8ECBE3C68121656030C3244F48675A1B" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTable" xlink:label="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventsAbstract_8ECBE3C68121656030C3244F48675A1B" xlink:to="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeAxis" xlink:label="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:to="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventTypeDomain" xlink:label="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeAxis_4576842859948385C102244F486A7ACB" xlink:to="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventMember" xlink:label="loc_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTypeDomain_50644C5BAE3604B8525B244F486AEF3B" xlink:to="loc_us-gaap_SubsequentEventMember_3261BC2C51060464A085244F486BE879" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SubsequentEventLineItems" xlink:label="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventTable_AE3854FC7FC5C12F8A10244F48699827" xlink:to="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CashCashEquivalentsAndRestrictedCash" xlink:label="loc_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SubsequentEventLineItems_9835CDCC6685E289C05F244F486BAAFE" xlink:to="loc_asys_CashCashEquivalentsAndRestrictedCash_4AC626B5CABAF9DAA39624508E77D909" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_2E7993BB569C58DBA6A9E29531D8B2E9" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock" xlink:label="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_98B527F0CE7D51F9B63F7BAA9CE9E494" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_2E7993BB569C58DBA6A9E29531D8B2E9" xlink:to="loc_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock_98B527F0CE7D51F9B63F7BAA9CE9E494" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_B61100E9D7F95CC579460F4EFFFBB8A8" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_B61100E9D7F95CC579460F4EFFFBB8A8" xlink:to="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InvestmentTypeAxis" xlink:label="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InvestmentTypeCategorizationMember" xlink:label="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InvestmentTypeAxis_E0BF55C1E7F917214CFA0F4EFFFB20FD" xlink:to="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_USTreasuriesandFDICInsuredMember" xlink:label="loc_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InvestmentTypeCategorizationMember_1BD90DA20FB10ECAA53A0F4EFFFBE0CA" xlink:to="loc_asys_USTreasuriesandFDICInsuredMember_DB25DFB6BD31430D72410F4EFFFB4A7B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByBenchmarkAxis_38A3B89AAAD3C56DE3890F4EFFFC3112" xlink:to="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_CashAndCashEquivalentsAndRestrictedCashMember" xlink:label="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:to="loc_asys_CashAndCashEquivalentsAndRestrictedCashMember_413DD3771492A39E6F8E0F4EFFFCCD7F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="loc_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskBenchmarkDomain_B9FD94C31F619C4E53980F4EFFFC4CFF" xlink:to="loc_us-gaap_AccountsReceivableMember_F55CA0427D97DEFEF5CB0F4EFFFC381B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskByTypeAxis_8A3C94C1FA1E25E1B0720F4EFFFC9E39" xlink:to="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="loc_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTypeDomain_85319B70CA14D807D2870F4EFFFC4648" xlink:to="loc_us-gaap_CustomerConcentrationRiskMember_04C5D5DADE5E8D461D160F4EFFFC5E54" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskTable_F7B9A42764EE234D32A70F4EFFFB6BEB" xlink:to="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="loc_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:to="loc_us-gaap_ConcentrationRiskPercentage1_618082085962F24FCE140F4EFFFCAABA" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_NumberOfCustomers" xlink:label="loc_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ConcentrationRiskLineItems_AF8B2C1BB0CD3369E0E30F4EFFFC3700" xlink:to="loc_asys_NumberOfCustomers_AA07F7B7E3AFA40926FC0F4EFFFC20E4" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_FAE4ACE413745808803FD8FA2FC345C7" xlink:type="locator" />
    <link:loc xlink:href="asys-20161231.xsd#asys_NumberOfSimilarlyConfiguredSystemsAndProcesses" xlink:label="loc_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_FAE4ACE413745808803FD8FA2FC345C7" xlink:to="loc_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses_A35977D77B505FEE82FCE34E5F07252E" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_NumberOfSimilarlyConfiguredItemsOfEquipment" xlink:label="loc_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_FAE4ACE413745808803FD8FA2FC345C7" xlink:to="loc_asys_NumberOfSimilarlyConfiguredItemsOfEquipment_C581F921D3ED5928B8ADF1FA94241F9A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenue" xlink:label="loc_us-gaap_DeferredRevenue_8A765BB0D43B51F1A16E8A25D18B571F" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_FAE4ACE413745808803FD8FA2FC345C7" xlink:to="loc_us-gaap_DeferredRevenue_8A765BB0D43B51F1A16E8A25D18B571F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredCostsCurrent" xlink:label="loc_us-gaap_DeferredCostsCurrent_FE6EEF2B29FD5E9BBC4A5BA181D8B587" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_FAE4ACE413745808803FD8FA2FC345C7" xlink:to="loc_us-gaap_DeferredCostsCurrent_FE6EEF2B29FD5E9BBC4A5BA181D8B587" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherDeferredCreditsCurrent" xlink:label="loc_us-gaap_OtherDeferredCreditsCurrent_B8103AE0FAF55007819D8BA036CA814D" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_FAE4ACE413745808803FD8FA2FC345C7" xlink:to="loc_us-gaap_OtherDeferredCreditsCurrent_B8103AE0FAF55007819D8BA036CA814D" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_8B113EFAAAB24B0798740F3284D14113" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTable" xlink:label="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_8B113EFAAAB24B0798740F3284D14113" xlink:to="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StatementBusinessSegmentsAxis" xlink:label="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:to="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SegmentDomain" xlink:label="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_StatementBusinessSegmentsAxis_DE7C26A38D5999252BE90F3284D17098" xlink:to="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SolarEquipmentMember" xlink:label="loc_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:to="loc_asys_SolarEquipmentMember_A0CE68C58C475D2BDA0C0F3284D193F1" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SemiconductorEquipmentMember" xlink:label="loc_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:to="loc_asys_SemiconductorEquipmentMember_EB928FF358CB1A2A2BC30F3284D1B86D" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_PolishingSuppliesAndEquipmentMember" xlink:label="loc_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_SegmentDomain_956C2C40F98F9E1D30560F3284D12F19" xlink:to="loc_asys_PolishingSuppliesAndEquipmentMember_FDB85E4FD8CC643339B60F3284D1D614" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillLineItems" xlink:label="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfGoodwillTable_DD3944AE573E45883F0A0F3284D16B77" xlink:to="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillRollForward" xlink:label="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillLineItems_B99290118ED3CFE3B59E0F3284D1EE94" xlink:to="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillGross_084EAA69A222938D738F0F3284D286C2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_BA23C259748278EF281C0F3284D2A5AC" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_Goodwill_369045EDD5942D6B023E0F3284D26CC0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillTranslationAdjustments" xlink:label="loc_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillTranslationAdjustments_D6C635B445DE4E2EFBC90F3284D2D1B4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillGross" xlink:label="loc_us-gaap_GoodwillGross_35A2882F8295D57EDDCE0F3284D24151" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillGross_35A2882F8295D57EDDCE0F3284D24151" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillImpairedAccumulatedImpairmentLoss" xlink:label="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_90DB16412F5396ACF7720F3284D24C9C" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss_90DB16412F5396ACF7720F3284D24C9C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_Goodwill" xlink:label="loc_us-gaap_Goodwill_1A5443839BF8393DCA9C0F3284D2A577" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_GoodwillRollForward_507D04FB723DBFC9B4C90F3284D2E9E4" xlink:to="loc_us-gaap_Goodwill_1A5443839BF8393DCA9C0F3284D2A577" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_F2E3BC2ED4775B04386F18E6DE0D13D1" xlink:type="locator" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable" xlink:label="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_F2E3BC2ED4775B04386F18E6DE0D13D1" xlink:to="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis_BD0B4AD18006BC5E1C0218E6DE0E6BC0" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CustomerListsMember" xlink:label="loc_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_CustomerListsMember_DA1A4D0E57086359202518E6DE0E1028" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PatentedTechnologyMember" xlink:label="loc_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_PatentedTechnologyMember_0443D8C37A84AD2A841A18E6DE0E7D3D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_TradeNamesMember" xlink:label="loc_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_TradeNamesMember_14C07F34ACA3D4A6EC6118E6DE0E3682" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherIntangibleAssetsMember" xlink:label="loc_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_FiniteLivedIntangibleAssetsMajorClassNameDomain_764AE9510F597888F4B518E6DE0EC563" xlink:to="loc_us-gaap_OtherIntangibleAssetsMember_48CEEA984D6215D1342218E6DE0E5220" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_15A73C3A94BBF734B1BA18E6DE0E2AD3" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:to="loc_us-gaap_RangeAxis_15A73C3A94BBF734B1BA18E6DE0E2AD3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_15A73C3A94BBF734B1BA18E6DE0E2AD3" xlink:to="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_6F961D35C7D0B29722F418E6DE0FE126" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:to="loc_us-gaap_MinimumMember_6F961D35C7D0B29722F418E6DE0FE126" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_C946A204B988825D84C418E6DE0F8BD5" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_D25EE61B11D2B4148D4918E6DE0E9C89" xlink:to="loc_us-gaap_MaximumMember_C946A204B988825D84C418E6DE0F8BD5" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems" xlink:label="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfAcquiredFiniteAndIndefiniteLivedIntangibleAssetByMajorClassTable_5EE91BE95B16BD6DC27B18E6DE0E2983" xlink:to="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsGross" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsGross_8136FDB097CFFB11C5E018E6DE0F09B0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization_AB3C8113B916D1D4B9C618E6DE0F0C0B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetsNet" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetsNet_72D112482C37F64B971C18E6DE0F1011" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FiniteLivedIntangibleAssetUsefulLife" xlink:label="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems_489EA499937374EACD5618E6DE0FAFDB" xlink:to="loc_us-gaap_FiniteLivedIntangibleAssetUsefulLife_D59D043B432400FAA66218E6DE0F5373" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_5FA063C5F3A252C5B8B36E5DF102BEDB" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PercentageOfWeightedAverageCostInventory" xlink:label="loc_us-gaap_PercentageOfWeightedAverageCostInventory_C0F2D6B3BD825E2D9C6DD823DC08BBCA" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_5FA063C5F3A252C5B8B36E5DF102BEDB" xlink:to="loc_us-gaap_PercentageOfWeightedAverageCostInventory_C0F2D6B3BD825E2D9C6DD823DC08BBCA" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNetAbstract" xlink:label="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_5FA063C5F3A252C5B8B36E5DF102BEDB" xlink:to="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves" xlink:label="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2ABA76ECE1105B41BE7F9D68F7D41A4E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:to="loc_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves_2ABA76ECE1105B41BE7F9D68F7D41A4E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="loc_us-gaap_InventoryWorkInProcessNetOfReserves_6F6E54E2C2325CFAA57B99927698AD44" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:to="loc_us-gaap_InventoryWorkInProcessNetOfReserves_6F6E54E2C2325CFAA57B99927698AD44" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_5AE27788288B522A9F938AD884887DE4" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:to="loc_us-gaap_InventoryFinishedGoodsNetOfReserves_5AE27788288B522A9F938AD884887DE4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryNet" xlink:label="loc_us-gaap_InventoryNet_25FA88BE8E995C0C9847FDF6532E7665" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_InventoryNetAbstract_369ADC2F59445B27B99689CB4B0D50F7" xlink:to="loc_us-gaap_InventoryNet_25FA88BE8E995C0C9847FDF6532E7665" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BasisOfAccountingPolicyPolicyTextBlock" xlink:label="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_BasisOfAccountingPolicyPolicyTextBlock_37BF6A7DEFABD81BE0820EE1E0C7F532" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConsolidationPolicyTextBlock" xlink:label="loc_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_ConsolidationPolicyTextBlock_F6F748ED9DFF8C02E0360EE1E0C7C222" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_UseOfEstimates" xlink:label="loc_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_UseOfEstimates_8E0E7C033E5FAF437E140EE1E0C760B3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionPolicyTextBlock" xlink:label="loc_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_RevenueRecognitionPolicyTextBlock_9D132E93BAFD4A7E8B660EE1E0C70445" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RevenueRecognitionDeferredRevenue" xlink:label="loc_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_RevenueRecognitionDeferredRevenue_BA45DC56F91B2016B4330EE1E0C79E55" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsPolicyTextBlock" xlink:label="loc_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_CashAndCashEquivalentsPolicyTextBlock_00BD56786CDB4EBC51D40EE1E0C743B1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy" xlink:label="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy_D81135EB8F2BA72C16C10EE1E0C70400" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ReceivablesPolicyTextBlock" xlink:label="loc_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_ReceivablesPolicyTextBlock_E3CE497E4A82A5E823BB0EE1E0C70250" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ConcentrationRiskCreditRisk" xlink:label="loc_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_ConcentrationRiskCreditRisk_58B1E1DD452D1821B8720EE1E0C7A55C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_InventoryPolicyTextBlock" xlink:label="loc_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5" xlink:type="locator" />
    <link:presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_InventoryPolicyTextBlock_C230004F6EA78D63CB9E0EE1E0C7E5C5" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentPolicyTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00" xlink:type="locator" />
    <link:presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock_AA4D878909DD986B1D800EE1E0C7CE00" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726" xlink:type="locator" />
    <link:presentationArc order="12" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy_FB6187C3DF052AEEADBF0EE1E0C75726" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy" xlink:label="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F" xlink:type="locator" />
    <link:presentationArc order="13" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy_3C11FAA6180B3CA6AE000EE1E0C79D5F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock" xlink:label="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E" xlink:type="locator" />
    <link:presentationArc order="14" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock_76345665B5206019163D0EE1E0CC6B6E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyPolicy" xlink:label="loc_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3" xlink:type="locator" />
    <link:presentationArc order="15" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_StandardProductWarrantyPolicy_EDDBD5DA8109DC3E5FCF0EE1E0CDEEA3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy" xlink:label="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B" xlink:type="locator" />
    <link:presentationArc order="16" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy_163D69583036FF10D24B0EE1E0CDEC5B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FairValueOfFinancialInstrumentsPolicy" xlink:label="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053" xlink:type="locator" />
    <link:presentationArc order="17" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_FairValueOfFinancialInstrumentsPolicy_B4085AB1EE1C7F70F0AE0EE1E0CD6053" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy" xlink:label="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18" xlink:type="locator" />
    <link:presentationArc order="18" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy_4BCC17D2968C679BDF050EE1E0CD8B18" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingAndHandlingCostPolicyTextBlock" xlink:label="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E" xlink:type="locator" />
    <link:presentationArc order="19" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_ShippingAndHandlingCostPolicyTextBlock_1F64A9678D2BB95D282A0EE1E0CD212E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpensePolicy" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D" xlink:type="locator" />
    <link:presentationArc order="20" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpensePolicy_4AB6B0378F1EE81ED1C30EE1E0CDB90D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock" xlink:label="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0" xlink:type="locator" />
    <link:presentationArc order="21" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_9AAFC11D6623B55A6CD80EE1E0C6A79A" xlink:to="loc_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock_CCC908521267584D5D1A0EE1E0CD19F0" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_3D600741BFB1DDCDF33C0F2E8B239EC9" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfPropertyPlantAndEquipmentTable" xlink:label="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_3D600741BFB1DDCDF33C0F2E8B239EC9" xlink:to="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentByTypeAxis_CA652E9CE70F6FFE2B420F2E8B2317A1" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LandBuildingsAndImprovementsMember" xlink:label="loc_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_LandBuildingsAndImprovementsMember_CFD292EDD3DFE39C2D310F2E8B24EEEA" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MachineryAndEquipmentMember" xlink:label="loc_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_MachineryAndEquipmentMember_B6942D53F5C5AD44EFB60F2E8B281C57" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_LeaseholdImprovementsMember" xlink:label="loc_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_LeaseholdImprovementsMember_D106FCA18805107E39A50F2E8B23ED93" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_FurnitureAndFixturesMember" xlink:label="loc_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_FurnitureAndFixturesMember_930A2B17FC9A206F6D5E0F2E8B28D549" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_BuildingAndBuildingImprovementsMember" xlink:label="loc_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentTypeDomain_0342DA90F86F921570140F2E8B23859A" xlink:to="loc_us-gaap_BuildingAndBuildingImprovementsMember_441E837CFC98D0D91F010F2E8B24C62C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_BEAD48B4F764DE83B0560F2E8B281F8D" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:to="loc_us-gaap_RangeAxis_BEAD48B4F764DE83B0560F2E8B281F8D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_BEAD48B4F764DE83B0560F2E8B281F8D" xlink:to="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_990BCA0A6E13E6A921820F2E8B288205" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:to="loc_us-gaap_MinimumMember_990BCA0A6E13E6A921820F2E8B288205" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_E6872FDC172E68B0D17F0F2E8B28D173" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_0B26DF683E206F8DA2DB0F2E8B281B4F" xlink:to="loc_us-gaap_MaximumMember_E6872FDC172E68B0D17F0F2E8B28D173" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentLineItems" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfPropertyPlantAndEquipmentTable_D4DB5EFF206C666E84010F2E8B233374" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentUsefulLife" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentUsefulLife_894EC300345E07C7E5DC0F2E8B291453" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentGross" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentGross_EA500E72B5912FFBE89D0F2E8B29CB34" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment" xlink:label="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment_EC9C41B9FD757D87D1D80F2E8B290045" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_PropertyPlantAndEquipmentLineItems_FCC8F443C9D31EB7A77F0F2E8B297B40" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentNet_95D48E094B7818E64F590F2E8B297CDF" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_0CEF2409956E59FFA99899FAC7188C34" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="loc_us-gaap_ResearchAndDevelopmentExpense_61EDD09F0F4658969EFD9D9CD68CFE72" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_0CEF2409956E59FFA99899FAC7188C34" xlink:to="loc_us-gaap_ResearchAndDevelopmentExpense_61EDD09F0F4658969EFD9D9CD68CFE72" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred" xlink:label="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_9BADC91635745BDEBC6BDAA8C69A521B" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_0CEF2409956E59FFA99899FAC7188C34" xlink:to="loc_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred_9BADC91635745BDEBC6BDAA8C69A521B" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentNetOfGrantsEarned" xlink:label="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_0CEF2409956E59FFA99899FAC7188C34" xlink:to="loc_asys_ResearchAndDevelopmentNetOfGrantsEarned_F526EE78E47F56038A06553912E09D5F" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_442FF182AA43655BE2450EE1E0896DC5" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsTable" xlink:label="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_442FF182AA43655BE2450EE1E0896DC5" xlink:to="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsAxis" xlink:label="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:to="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsDomain" xlink:label="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherCommitmentsAxis_BAC3F7C7978451FA847E0EE1E089F07E" xlink:to="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRestorationCostsMember" xlink:label="loc_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherCommitmentsDomain_B6286AAFBB6ABD1A52F40EE1E08954F3" xlink:to="loc_us-gaap_EnvironmentalRestorationCostsMember_D685B3EC52ADC9E832CE0EE1E089B7D7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRemediationSiteAxis" xlink:label="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:to="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EnvironmentalRemediationSiteDomain" xlink:label="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EnvironmentalRemediationSiteAxis_C68A2E35FAAA3335EA4C0EE1E0897892" xlink:to="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_SuperfundSiteMember" xlink:label="loc_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_EnvironmentalRemediationSiteDomain_A1150BADDB5B744D47D70EE1E08957D8" xlink:to="loc_asys_SuperfundSiteMember_D89D032F3D2E04775C530EE1E08A9C04" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OtherCommitmentsLineItems" xlink:label="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherCommitmentsTable_33772E60E9201DDBACB90EE1E089007C" xlink:to="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue" xlink:label="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OtherCommitmentsLineItems_CF1963EC3A62CD7BF7BD0EE1E08AC431" xlink:to="loc_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue_F36C878B0438E9FE9BA30EE1E08A8B3E" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_1377E82D0511E4A7CBD30F4EFFCFFDA8" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShippingHandlingAndTransportationCosts" xlink:label="loc_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_1377E82D0511E4A7CBD30F4EFFCFFDA8" xlink:to="loc_us-gaap_ShippingHandlingAndTransportationCosts_6C026841CBC8FEDD784E0F4EFFCF1939" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_886DC7E26A283A2CC3B00F32848E3B63" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_886DC7E26A283A2CC3B00F32848E3B63" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:to="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_AwardTypeAxis_8898805A49D80B9E7C1C0F32848E7D4C" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeStockOptionMember" xlink:label="loc_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:to="loc_us-gaap_EmployeeStockOptionMember_DDD3F8FF8B00FA618C500F32848E2F8D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RestrictedStockMember" xlink:label="loc_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_DBA18A3B1E7EEDFAD3EC0F32848EFCB2" xlink:to="loc_us-gaap_RestrictedStockMember_C90E7142BA20E1EA30740F328493EE24" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_0A7975AA23B210D427280F328493915D" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:to="loc_us-gaap_RangeAxis_0A7975AA23B210D427280F328493915D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_0A7975AA23B210D427280F328493915D" xlink:to="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_1EBF1AC99763182510EC0F328494065C" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:to="loc_us-gaap_MaximumMember_1EBF1AC99763182510EC0F328494065C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_23FFEB594F680582F1F60F328494B8F3" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_34B1B0153C3195F893970F3284949AD7" xlink:to="loc_us-gaap_MinimumMember_23FFEB594F680582F1F60F328494B8F3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_27304479777AD08AB9250F32848ECE52" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpense_AA43F79700E38F8D6F4E0F328494E97C" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense" xlink:label="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense_BBEE5F0AF9BE3DF826D00F32849465E8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax" xlink:label="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax_2FD44DACE6808685BA590F328494957D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_D790C80E62615496F3B00F3284947343" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1_6635747BC7D07862A28F0F328494EB67" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_C0E4428022A2C4927CB60F3284943978" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross_335EC2121EAB0496C3260F3284946EF4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_FE5A91B11709A75FC0540F328494E0B0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod_1C486D2DF4EB478830440F328494E010" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_D454DC25A967AD6424690F3284959EFD" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward_CF969302842D9EFCD1C70F32849460F1" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber_D454DC25A967AD6424690F3284959EFD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber_9BE9096B70368D70B0620F328495D823" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue_9C8A33ABA332A7775F070F32849529AF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_BD15E45EDC0C2748C53E0F3284959353" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice_B0986ABD9DA52A8978870F3284951758" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice_D68CF3275656B04104FA0F328495FDA2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice_8F0C3B1B73C3374293990F3284958C53" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_D25FC93B9E4CAFAE5EC80F32849514C7" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward_7AADE82FC89BA1E6F75E0F3284958BD9" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice_D25FC93B9E4CAFAE5EC80F32849514C7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:type="locator" />
    <link:presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice_F40DA04E5F46526F4A7B0F3284955CFA" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:type="locator" />
    <link:presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate_4F2BAC8188E7E25D6D990F328495270D" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1" xlink:label="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1_70AD216855F40AD8E0AF0F328495A882" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate_402238B5C8B6C6B8813F0F32849522A0" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract_7E62AA02A260186E4A080F3284956F3A" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate_67F18433D2CFD585975C0F328495D13B" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:type="locator" />
    <link:presentationArc order="12" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_60500C8F2C9E0BA890E70F3284960299" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod_AF7E67EA7E7E2DFF27240F328496F2E4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_F79DF9BDBC3F3FF948960F3284962E58" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward_B9BA6F547DE98E4CD6D70F3284960A13" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber_F79DF9BDBC3F3FF948960F3284962E58" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:type="locator" />
    <link:presentationArc order="13" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_211A5FD414B8A4F52B890F328494CAEF" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_16C6AAFF38690E8664770F32849BC6A2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue_569FB264C1FB60FD423E0F32849BA4DF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue" xlink:label="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_00946E16086CC08325E20F32849B82C5" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward_0894EACF01486F9B3F010F32849B6997" xlink:to="loc_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue_00946E16086CC08325E20F32849B82C5" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:type="locator" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_DeferredRevenueByArrangementDisclosureTextBlock" xlink:label="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock_F5472BCBE1402AB0DA830EE1E0ABB427" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfInventoryCurrentTableTextBlock_9B0D5B85DADC990C88100EE1E0ABCEB2" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTextBlock" xlink:label="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_PropertyPlantAndEquipmentTextBlock_BE9FAC691443230668D90EE1E0AC3291" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfGoodwillTextBlock" xlink:label="loc_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfGoodwillTextBlock_3B73F4CC0E7C7D25A90A0EE1E0AC87AA" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock_A2CA05AD63EB520D74940EE1E0ACCC6E" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_5299A9E35B114B1CBB520EE1E0AC8CB3" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669" xlink:type="locator" />
    <link:presentationArc order="7" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock_CACFA9E26350C1F92A690EE1E0AC2669" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484" xlink:type="locator" />
    <link:presentationArc order="8" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock_46E2D0D8BD989058BFC70EE1E0ACC484" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF" xlink:type="locator" />
    <link:presentationArc order="9" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock_7E2CBA5F4C31482969500EE1E0AC5BDF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock" xlink:label="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8" xlink:type="locator" />
    <link:presentationArc order="10" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock_710F68CDE0B35929E71E0EE1E0AC77E8" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ResearchAndDevelopmentExpenseTableTextBlock" xlink:label="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:type="locator" />
    <link:presentationArc order="11" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_57B08946BF04525C3AC40EE1E0AB972A" xlink:to="loc_asys_ResearchAndDevelopmentExpenseTableTextBlock_B5B6CCD9A7E74D73B12B0EE1E0AC9DE8" xlink:type="arc" />
  </link:presentationLink>
  <link:presentationLink xlink:role="http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails" xlink:type="extended">
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_2B0620A7F6C4A87A8C1C0F3284A93F17" xlink:type="locator" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfWarrantiesTable" xlink:label="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_2B0620A7F6C4A87A8C1C0F3284A93F17" xlink:to="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeAxis" xlink:label="loc_us-gaap_RangeAxis_015473520B14F10CE81D0F3284A99BC8" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:to="loc_us-gaap_RangeAxis_015473520B14F10CE81D0F3284A99BC8" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_RangeMember" xlink:label="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeAxis_015473520B14F10CE81D0F3284A99BC8" xlink:to="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MinimumMember" xlink:label="loc_us-gaap_MinimumMember_78E9624157D1EE959DAB0F3284A9FEAF" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:to="loc_us-gaap_MinimumMember_78E9624157D1EE959DAB0F3284A9FEAF" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MaximumMember" xlink:label="loc_us-gaap_MaximumMember_6E067F644FBF0DAF6BFD0F3284AACD79" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_RangeMember_32C37D9A8AB1268E0B730F3284A9EB20" xlink:to="loc_us-gaap_MaximumMember_6E067F644FBF0DAF6BFD0F3284AACD79" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_ScheduleOfProductWarrantyLineItems" xlink:label="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfWarrantiesTable_33E91FD839430178F0D30F3284A94750" xlink:to="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:type="arc" />
    <link:loc xlink:href="asys-20161231.xsd#asys_StandardProductWarrantyPeriod" xlink:label="loc_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:to="loc_asys_StandardProductWarrantyPeriod_46975CDF8DF87C5253100F3284AA7B02" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_MovementInStandardProductWarrantyAccrualRollForward" xlink:label="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_asys_ScheduleOfProductWarrantyLineItems_7832C5930E4AB8A981EC0F3284AA2BE1" xlink:to="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrual" xlink:label="loc_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:type="locator" />
    <link:presentationArc order="1" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrual_85EAFB82191860B332F60F3284AA0D9F" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualWarrantiesIssued" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:type="locator" />
    <link:presentationArc order="2" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued_FA695EA34DE52ABB8CA50F3284AAF0AD" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPayments" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:type="locator" />
    <link:presentationArc order="3" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPayments_EEF266713F617D969A0C0F3284AAB100" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:type="locator" />
    <link:presentationArc order="4" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease_473C2BF6AD3C8E5C26C70F3284AA29D7" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease" xlink:label="loc_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:type="locator" />
    <link:presentationArc order="5" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease_9161FA593E83E09549BF0F3284AAB5D4" xlink:type="arc" />
    <link:loc xlink:href="http://xbrl.fasb.org/us-gaap/2015/elts/us-gaap-2015-01-31.xsd#us-gaap_StandardProductWarrantyAccrual" xlink:label="loc_us-gaap_StandardProductWarrantyAccrual_FEAF8DFB1A490D63CF590F3284AFFE4E" xlink:type="locator" />
    <link:presentationArc order="6" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_us-gaap_MovementInStandardProductWarrantyAccrualRollForward_C9802D065EB55F93BF370F3284AA1313" xlink:to="loc_us-gaap_StandardProductWarrantyAccrual_FEAF8DFB1A490D63CF590F3284AFFE4E" xlink:type="arc" />
  </link:presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>12
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825082096">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Document and Entity Information - shares<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Jan. 30, 2017</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_DocumentAndEntityInformationAbstract', window );"><strong>Document and Entity Information [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">AMTECH SYSTEMS INC<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0000720500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CurrentFiscalYearEndDate', window );">Current Fiscal Year End Date</a></td>
<td class="text">--09-30<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityFilerCategory', window );">Entity Filer Category</a></td>
<td class="text">Accelerated Filer<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">10-Q<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Dec. 31,  2016<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentFiscalYearFocus', window );">Document Fiscal Year Focus</a></td>
<td class="text">2017<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentFiscalPeriodFocus', window );">Document Fiscal Period Focus</a></td>
<td class="text">Q1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCommonStockSharesOutstanding', window );">Entity Common Stock, Shares Outstanding</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13,179,535<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_DocumentAndEntityInformationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Document and Entity Information [Abstract]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_DocumentAndEntityInformationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>If the value is true, then the document is an amendment to previously-filed/accepted document.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CurrentFiscalYearEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>End date of current fiscal year in the format --MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CurrentFiscalYearEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gMonthDayItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalPeriodFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal period of the document report. For a first quarter 2006 quarterly report, which may also provide financial information from prior periods, the first fiscal quarter should be given as the fiscal period focus. Values: FY, Q1, Q2, Q3, Q4, H1, H2, M9, T1, T2, T3, M8, CY.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalPeriodFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fiscalPeriodItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalYearFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal year of the document report in CCYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalYearFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gYearItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is CCYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word "Other".</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12b<br> -Subsection 1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFilerCategory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate whether the registrant is one of the following: (1) Large Accelerated Filer, (2) Accelerated Filer, (3) Non-accelerated Filer, (4) Smaller Reporting Company (Non-accelerated) or (5) Smaller Reporting Accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFilerCategory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:filerCategoryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12b<br> -Subsection 1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>13
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825894320">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Condensed Consolidated Balance Sheets - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 23,638<span></span>
</td>
<td class="nump">$ 27,655<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
<td class="nump">3,250<span></span>
</td>
<td class="nump">893<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrentAbstract', window );"><strong>Accounts receivable</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrent', window );">Trade (less allowance for doubtful accounts of $1,787 and $3,730 at December 31, 2016, and September 30, 2016, respectively)</a></td>
<td class="nump">23,146<span></span>
</td>
<td class="nump">17,642<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_UnbilledAndOther', window );">Unbilled and other</a></td>
<td class="nump">7,094<span></span>
</td>
<td class="nump">8,634<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories</a></td>
<td class="nump">20,853<span></span>
</td>
<td class="nump">23,223<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxesReceivable', window );">Refundable income taxes</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">260<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherAssetsCurrent', window );">Other</a></td>
<td class="nump">3,804<span></span>
</td>
<td class="nump">4,617<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrent', window );">Total current assets</a></td>
<td class="nump">81,785<span></span>
</td>
<td class="nump">82,924<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, Plant and Equipment - Net</a></td>
<td class="nump">15,290<span></span>
</td>
<td class="nump">15,960<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsNetNoncurrent', window );">Deferred Income Taxes - Long Term</a></td>
<td class="nump">200<span></span>
</td>
<td class="nump">200<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherAssetsNoncurrent', window );">Other Assets - Long Term</a></td>
<td class="nump">1,049<span></span>
</td>
<td class="nump">1,095<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestments', window );">Investments</a></td>
<td class="nump">2,890<span></span>
</td>
<td class="nump">3,032<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IntangibleAssetsNetExcludingGoodwill', window );">Intangible Assets - Net</a></td>
<td class="nump">3,915<span></span>
</td>
<td class="nump">4,100<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill</a></td>
<td class="nump">10,789<span></span>
</td>
<td class="nump">11,119<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Total Assets</a></td>
<td class="nump">115,918<span></span>
</td>
<td class="nump">118,430<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrentAbstract', window );"><strong>Current Liabilities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsPayableCurrent', window );">Accounts payable</a></td>
<td class="nump">14,986<span></span>
</td>
<td class="nump">15,397<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtCurrent', window );">Current maturities of long-term debt</a></td>
<td class="nump">1,010<span></span>
</td>
<td class="nump">1,134<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeRelatedLiabilitiesCurrent', window );">Accrued compensation and related taxes</a></td>
<td class="nump">6,232<span></span>
</td>
<td class="nump">5,710<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Accrued warranty expense</a></td>
<td class="nump">879<span></span>
</td>
<td class="nump">795<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherDeferredCreditsCurrent', window );">Deferred profit</a></td>
<td class="nump">3,812<span></span>
</td>
<td class="nump">4,709<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CustomerAdvancesCurrent', window );">Customer deposits</a></td>
<td class="nump">6,920<span></span>
</td>
<td class="nump">7,055<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedLiabilitiesCurrent', window );">Other accrued liabilities</a></td>
<td class="nump">1,577<span></span>
</td>
<td class="nump">2,164<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesCurrent', window );">Income taxes payable</a></td>
<td class="nump">960<span></span>
</td>
<td class="nump">1,100<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrent', window );">Total current liabilities</a></td>
<td class="nump">36,376<span></span>
</td>
<td class="nump">38,064<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtNoncurrent', window );">Long-term Debt</a></td>
<td class="nump">9,105<span></span>
</td>
<td class="nump">9,097<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent', window );">Income Taxes Payable - Long Term</a></td>
<td class="nump">6,050<span></span>
</td>
<td class="nump">5,930<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Liabilities', window );">Total liabilities</a></td>
<td class="nump">51,531<span></span>
</td>
<td class="nump">53,091<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingencies', window );">Commitments and Contingencies</a></td>
<td class="text"> <span></span>
</td>
<td class="text"> <span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockValue', window );">Preferred stock; 100,000,000 shares authorized; none issued</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockValue', window );">Common stock; $0.01 par value; 100,000,000 shares authorized; shares issued and outstanding: 13,150,222 and 9,848,253 at June 30, 2015, and September 30, 2014, respectively</a></td>
<td class="nump">132<span></span>
</td>
<td class="nump">132<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapital', window );">Additional paid-in capital</a></td>
<td class="nump">111,952<span></span>
</td>
<td class="nump">111,631<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Accumulated other comprehensive loss</a></td>
<td class="num">(9,721)<span></span>
</td>
<td class="num">(8,876)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Retained deficit</a></td>
<td class="num">(35,883)<span></span>
</td>
<td class="num">(35,830)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Total stockholders' equity</a></td>
<td class="nump">66,480<span></span>
</td>
<td class="nump">67,057<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MinorityInterest', window );">Noncontrolling interest</a></td>
<td class="num">(2,093)<span></span>
</td>
<td class="num">(1,718)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest', window );">Total equity</a></td>
<td class="nump">64,387<span></span>
</td>
<td class="nump">65,339<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesAndStockholdersEquity', window );">Total Liabilities and Stockholders' Equity</a></td>
<td class="nump">$ 115,918<span></span>
</td>
<td class="nump">$ 118,430<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_UnbilledAndOther">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Primarily the contingent portion of the sales price that is not billable until acceptance of the product.  The majority of these amounts are offset by balances included in deferred profit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_UnbilledAndOther</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount due from customers or clients, within one year of the balance sheet date (or the normal operating cycle, whichever is longer), for goods or services (including trade receivables) that have been delivered or sold in the normal course of business, reduced to the estimated net realizable fair value by an allowance established by the entity of the amount it deems uncertain of collection.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.3-4)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 3<br> -Subparagraph a(1)<br> -Article 5<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 4<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 15<br> -Article 9<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 15<br> -Subparagraph b(1)<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedIncomeTaxesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred and payable, pertaining to costs that are statutory in nature, are incurred on contractual obligations, or accumulate over time and for which invoices have not yet been received or will not be rendered. Examples include taxes, interest, rent and utilities. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=d3e637-108580<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=d3e681-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=SL7669686-108580<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 31<br> -Article 5<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Article 3<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapital">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders. Includes adjustments to additional paid in capital. Some examples of such adjustments include recording the issuance of debt with a beneficial conversion feature and certain tax consequences of equity instruments awarded to employees. Use this element for the aggregate amount of additional paid-in capital associated with common and preferred stock. For additional paid-in capital associated with only common stock, use the element additional paid in capital, common stock. For additional paid-in capital associated with only preferred stock, use the element additional paid in capital, preferred stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.30(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 31<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdditionalPaidInCapital</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.18)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 12<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Assets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.9)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6801-107765<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Cash<br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3044-108585<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Cash Equivalents<br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingencies">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the caption on the face of the balance sheet to indicate that the entity has entered into (1) purchase or supply arrangements that will require expending a portion of its resources to meet the terms thereof, and (2) is exposed to potential losses or, less frequently, gains, arising from (a) possible claims against a company's resources due to future performance under contract terms, and (b) possible losses or likely gains from uncertainties that will ultimately be resolved when one or more future events that are deemed likely to occur do occur or fail to occur.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03.(a),19)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=25496072&amp;loc=d3e14326-108349<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.17)<br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.25)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingencies</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable common stock (or common stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable common shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 30<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CustomerAdvancesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The current portion of prepayments received from customers for goods or services to be provided in the future.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CustomerAdvancesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsNetNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after allocation of valuation allowances of noncurrent deferred tax asset attributable to deductible temporary differences and carryforwards. Noncurrent assets are expected to be realized or consumed after one year (or the normal operating cycle, if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31931-109318<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31928-109318<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31958-109318<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=37586315&amp;loc=d3e31917-109318<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsNetNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeRelatedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeRelatedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This item represents the carrying amount on the entity's balance sheet of its investment in common stock of an equity method investee. This is not an indicator of the fair value of the investment, rather it is the initial cost adjusted for the entity's share of earnings and losses of the investee, adjusted for any distributions (dividends) and other than temporary impairment (OTTI) losses recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35755396&amp;loc=d3e33749-111570<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.12)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6388280&amp;loc=d3e13770-109266<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxesReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount due within one year of the balance sheet date (or one operating cycle, if longer) from tax authorities as of the balance sheet date representing refunds of overpayments or recoveries based on agreed-upon resolutions of disputes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03.5(c))<br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.3(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.10)<br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxesReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IntangibleAssetsNetExcludingGoodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts of all intangible assets, excluding goodwill, as of the balance sheet date, net of accumulated amortization and impairment charges.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6388964&amp;loc=d3e16212-109274<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph ((a)(1),(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IntangibleAssetsNetExcludingGoodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 35<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=51655945&amp;loc=d3e3927-108312<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Liabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19-26)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Liabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesAndStockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.32)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 25<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesAndStockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilityForUncertainTaxPositionsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The noncurrent portion of the amount recognized for uncertain tax positions as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.24)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilityForUncertainTaxPositionsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of long-term debt, after unamortized discount or premium, scheduled to be repaid within one year or the normal operating cycle, if longer. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19,20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount of long-term debt, net of unamortized discount or premium, excluding amounts to be repaid within one year or the normal operating cycle, if longer (current maturities). Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MinorityInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which is directly or indirectly attributable to that ownership interest in subsidiary equity which is not attributable to the parent (that is, noncontrolling interest, previously referred to as minority interest).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.31)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 27<br> -Article 5<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 20<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MinorityInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate carrying amount, as of the balance sheet date, of current assets not separately disclosed in the balance sheet. Current assets are expected to be realized or consumed within one year (or the normal operating cycle, if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.8)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate carrying amount, as of the balance sheet date, of noncurrent assets not separately disclosed in the balance sheet. Noncurrent assets are expected to be realized or consumed after one year (or the normal operating cycle, if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.17)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherDeferredCreditsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of unearned revenue or income not otherwise specified in the taxonomy which is expected to be taken into income within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherDeferredCreditsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate par or stated value of issued nonredeemable preferred stock (or preferred stock redeemable solely at the option of the issuer). This item includes treasury stock repurchased by the entity. Note: elements for number of nonredeemable preferred shares, par value and other disclosure concepts are in another section within stockholders' equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.28)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 29<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 25<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=51667650&amp;loc=d3e11281-110244<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12524-110249<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.13)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 13<br> -Subparagraph a<br> -Article 5<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 8<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The carrying amounts of cash and cash equivalent items which are restricted as to withdrawal or usage. Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or entity statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits. Excludes compensating balance arrangements that are not agreements which legally restrict the use of cash amounts shown on the balance sheet. For a classified balance sheet represents the current portion only (the noncurrent portion has a separate concept); there is a separate and distinct element for unclassified presentations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RetainedEarningsAccumulatedDeficit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of the reporting entity's undistributed earnings or deficit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.31(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Article 3<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RetainedEarningsAccumulatedDeficit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB TOPIC 4.E)<br> -URI http://asc.fasb.org/extlink&amp;oid=27010918&amp;loc=d3e74512-122707<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29-31)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 4<br> -Section E<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of stockholders' equity (deficit), net of receivables from officers, directors, owners, and affiliates of the entity, attributable to both the parent and noncontrolling interests. Amount excludes temporary equity. Alternate caption for the concept is permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4I<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4590271-111686<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4568740-111683<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4568447-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>R3.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825121024">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Condensed Consolidated Balance Sheets (Parenthetical) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current Assets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent', window );">Allowance for doubtful accounts</a></td>
<td class="nump">$ 1,787<span></span>
</td>
<td class="nump">$ 3,730<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract', window );"><strong>Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesAuthorized', window );">Preferred stock, shares authorized</a></td>
<td class="nump">100,000,000<span></span>
</td>
<td class="nump">100,000,000<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PreferredStockSharesIssued', window );">Preferred stock, shares issued</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (USD per share)</a></td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesAuthorized', window );">Common stock, shares authorized</a></td>
<td class="nump">100,000,000<span></span>
</td>
<td class="nump">100,000,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesIssued', window );">Common stock, shares issued</a></td>
<td class="nump">13,179,535<span></span>
</td>
<td class="nump">13,179,355<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesOutstanding', window );">Common stock, shares outstanding</a></td>
<td class="nump">13,179,535<span></span>
</td>
<td class="nump">13,179,355<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A valuation allowance for trade and other receivables due to an Entity within one year (or the normal operating cycle, whichever is longer) that are expected to be uncollectible.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.4)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=49124121&amp;loc=d3e5074-111524<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 30<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 30<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 30<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 30<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The maximum number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.28)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 29<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PreferredStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of nonredeemable preferred shares (or preferred stock redeemable solely at the option of the issuer) issued to shareholders (includes related preferred shares that were issued, repurchased, and remain in the treasury). May be all or portion of the number of preferred shares authorized. Excludes preferred shares that are classified as debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.28)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 29<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PreferredStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityIncludingPortionAttributableToNoncontrollingInterestAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>15
<FILENAME>R4.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6826036848">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Condensed Consolidated Statements of Operations - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementAbstract', window );"><strong>Income Statement [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Revenues, net of returns and allowances</a></td>
<td class="nump">$ 29,135<span></span>
</td>
<td class="nump">$ 22,074<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Cost of sales</a></td>
<td class="nump">20,692<span></span>
</td>
<td class="nump">16,119<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
<td class="nump">8,443<span></span>
</td>
<td class="nump">5,955<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SellingGeneralAndAdministrativeExpense', window );">Selling, general and administrative</a></td>
<td class="nump">6,996<span></span>
</td>
<td class="nump">7,596<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchAndDevelopmentNetOfGrantsEarned', window );">Research, development and engineering</a></td>
<td class="nump">1,627<span></span>
</td>
<td class="nump">2,288<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating loss</a></td>
<td class="num">(180)<span></span>
</td>
<td class="num">(3,929)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromEquityMethodInvestments', window );">Loss from equity method investment</a></td>
<td class="num">(143)<span></span>
</td>
<td class="num">(17)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherNonoperatingIncomeExpense', window );">Interest expense and other income, net</a></td>
<td class="nump">81<span></span>
</td>
<td class="num">(202)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments', window );">Loss before income taxes</a></td>
<td class="num">(242)<span></span>
</td>
<td class="num">(4,148)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax provision</a></td>
<td class="nump">90<span></span>
</td>
<td class="nump">300<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net loss</a></td>
<td class="num">(332)<span></span>
</td>
<td class="num">(4,448)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest', window );">Add: net loss attributable to noncontrolling interest</a></td>
<td class="nump">279<span></span>
</td>
<td class="nump">433<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net loss attributable to Amtech Systems, Inc.</a></td>
<td class="num">$ (53)<span></span>
</td>
<td class="num">$ (4,015)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Loss Per Share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic loss per share attributable to Amtech shareholders (USD per share)</a></td>
<td class="nump">$ 0.00<span></span>
</td>
<td class="num">$ (0.31)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Weighted average shares outstanding (in shares)</a></td>
<td class="nump">13,179<span></span>
</td>
<td class="nump">13,152<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted loss per share attributable to Amtech shareholders (dollars per share)</a></td>
<td class="nump">$ 0.00<span></span>
</td>
<td class="num">$ (0.31)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Weighted average shares outstanding (in shares)</a></td>
<td class="nump">13,179<span></span>
</td>
<td class="nump">13,152<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchAndDevelopmentNetOfGrantsEarned">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research And Development, Net Of Grants</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchAndDevelopmentNetOfGrantsEarned</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfGoodsAndServicesSold">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.2(a),(d))<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfGoodsAndServicesSold</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=32703322&amp;loc=d3e4984-109258<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04.19)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04.23)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879574&amp;loc=d3e536633-122882<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 18<br> -Article 7<br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 20<br> -Article 5<br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 21<br> -Article 9<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 18<br> -Article 7<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 20<br> -Article 5<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 21<br> -Article 9<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1,2)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GrossProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of operating profit and nonoperating income or expense before Income or Loss from equity method investments, income taxes, extraordinary items, and noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(h)(1)(i))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesMinorityInterestAndIncomeLossFromEquityMethodInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromEquityMethodInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This item represents the entity's proportionate share for the period of the net income (loss) of its investee (such as unconsolidated subsidiaries and joint ventures) to which the equity method of accounting is applied. This item includes income or expense related to stock-based compensation based on the investor's grant of stock to employees of an equity method investee.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35755396&amp;loc=d3e33749-111570<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.12)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 9<br> -Article 5<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 11<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromEquityMethodInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (a),(b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Income Tax Expense (or Benefit)<br> -URI http://asc.fasb.org/extlink&amp;oid=6515339<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Net Income<br> -URI http://asc.fasb.org/extlink&amp;oid=51831255<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04.19)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.18)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04.22)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Other Comprehensive Income<br> -URI http://asc.fasb.org/extlink&amp;oid=51831270<br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 19<br> -Article 5<br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 20<br> -Article 9<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of Net Income (Loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4J<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherNonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net amount of other income and expense amounts, the components of which are not separately disclosed on the income statement, resulting from ancillary business-related activities (that is, excluding major activities considered part of the normal operations of the business) also known as other nonoperating income (expense) recognized for the period. Such amounts may include: (a) dividends, (b) interest on securities, (c) net gains or losses on securities, (d) unusual costs, (e) gains or losses on foreign exchange transactions, and (f) miscellaneous other income and expense items.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.9)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherNonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4K<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (a),(c)<br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4J<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SalesRevenueNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SellingGeneralAndAdministrativeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate total costs related to selling a firm's product and services, as well as all other general and administrative expenses. Direct selling expenses (for example, credit, warranty, and advertising) are expenses that can be directly linked to the sale of specific products. Indirect selling expenses are expenses that cannot be directly linked to the sale of specific products, for example telephone expenses, Internet, and postal charges. General and administrative expenses include salaries of non-sales personnel, rent, utilities, communication, etc.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.4)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 30<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=51677171&amp;loc=d3e3636-108311<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SellingGeneralAndAdministrativeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1505-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1448-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Weighted-Average Number of Common Shares Outstanding<br> -URI http://asc.fasb.org/extlink&amp;oid=6528421<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>16
<FILENAME>R5.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6813619488">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Condensed Consolidated Statements of Comprehensive Loss - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract', window );"><strong>Statement of Comprehensive Income [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net loss</a></td>
<td class="num">$ (332)<span></span>
</td>
<td class="num">$ (4,448)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax', window );">Foreign currency translation adjustment</a></td>
<td class="num">(941)<span></span>
</td>
<td class="num">(535)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest', window );">Comprehensive loss</a></td>
<td class="num">(1,273)<span></span>
</td>
<td class="num">(4,983)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest', window );">Comprehensive loss attributable to noncontrolling interest</a></td>
<td class="nump">375<span></span>
</td>
<td class="nump">433<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTax', window );">Comprehensive loss attributable to Amtech Systems, Inc.</a></td>
<td class="num">$ (898)<span></span>
</td>
<td class="num">$ (4,550)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Other Comprehensive Income<br> -URI http://asc.fasb.org/extlink&amp;oid=51831270<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Comprehensive Income<br> -URI http://asc.fasb.org/extlink&amp;oid=51831223<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=d3e557-108580<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Net Income<br> -URI http://asc.fasb.org/extlink&amp;oid=51831255<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income (loss) and other comprehensive income (loss), attributable to noncontrolling interests. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 21<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4613674-111683<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569643-111683<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4K<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTaxAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4K<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTaxIncludingPortionAttributableToNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 20<br> -Subparagraph (b,c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6915805&amp;loc=d3e32211-110900<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=36458714&amp;loc=SL7669646-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossForeignCurrencyTransactionAndTranslationAdjustmentNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4K<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (a),(c)<br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4J<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>17
<FILENAME>R6.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825362064">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Condensed Consolidated Statements of Cash Flows - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="3">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
<th class="th"><div>Dec. 31, 2014</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Operating Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net loss</a></td>
<td class="num">$ (332)<span></span>
</td>
<td class="num">$ (4,448)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Adjustments to reconcile net loss to net cash provided by (used in) operating activities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepreciationDepletionAndAmortization', window );">Depreciation and amortization</a></td>
<td class="nump">654<span></span>
</td>
<td class="nump">783<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWriteDown', window );">Write-down of inventory</a></td>
<td class="nump">33<span></span>
</td>
<td class="nump">39<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestCostsCapitalized', window );">Capitalized interest</a></td>
<td class="nump">190<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes', window );">Deferred income taxes</a></td>
<td class="nump">31<span></span>
</td>
<td class="nump">9<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensation', window );">Non-cash share based compensation expense</a></td>
<td class="nump">319<span></span>
</td>
<td class="nump">342<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromEquityMethodInvestments', window );">Loss from equity method investment</a></td>
<td class="nump">143<span></span>
</td>
<td class="nump">17<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProvisionForDoubtfulAccounts', window );">Reversal of allowance for doubtful accounts</a></td>
<td class="num">(1,178)<span></span>
</td>
<td class="num">(158)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract', window );"><strong>Changes in operating assets and liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities', window );">Restricted cash</a></td>
<td class="num">(2,425)<span></span>
</td>
<td class="num">(220)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsReceivable', window );">Accounts receivable</a></td>
<td class="num">(3,600)<span></span>
</td>
<td class="num">(309)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInInventories', window );">Inventories</a></td>
<td class="nump">1,621<span></span>
</td>
<td class="nump">1,412<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable', window );">Accrued income taxes</a></td>
<td class="nump">239<span></span>
</td>
<td class="nump">212<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets', window );">Other assets</a></td>
<td class="nump">725<span></span>
</td>
<td class="num">(167)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsPayable', window );">Accounts payable</a></td>
<td class="nump">78<span></span>
</td>
<td class="num">(4,861)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits', window );">Accrued liabilities and customer deposits</a></td>
<td class="nump">584<span></span>
</td>
<td class="num">(3,354)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncreaseDecreaseInDeferredProfit', window );">Deferred profit</a></td>
<td class="num">(619)<span></span>
</td>
<td class="num">(50)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivities', window );">Net cash used in operating activities</a></td>
<td class="num">(3,537)<span></span>
</td>
<td class="num">(10,753)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract', window );"><strong>Investing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Purchases of property, plant and equipment</a></td>
<td class="num">(86)<span></span>
</td>
<td class="num">(108)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment', window );">Proceeds from sale of property, plant and equipment</a></td>
<td class="nump">1<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries', window );">Proceeds from partial sale of subsidiary</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">7,012<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivities', window );">Net cash (used in) provided by investing activities</a></td>
<td class="num">(85)<span></span>
</td>
<td class="nump">6,904<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract', window );"><strong>Financing Activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOfCommonStock', window );">Proceeds from the exercise of stock options</a></td>
<td class="nump">1<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RepaymentsOfLongTermDebt', window );">Payments on long-term debt</a></td>
<td class="num">(160)<span></span>
</td>
<td class="num">(180)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOfLongTermDebt', window );">Borrowings on long-term debt</a></td>
<td class="nump">21<span></span>
</td>
<td class="nump">830<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivities', window );">Net cash (used in) provided by financing activities</a></td>
<td class="num">(138)<span></span>
</td>
<td class="nump">650<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents', window );">Effect of Exchange Rate Changes on Cash</a></td>
<td class="num">(257)<span></span>
</td>
<td class="num">(36)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease', window );">Net Decrease in Cash and Cash Equivalents</a></td>
<td class="num">(4,017)<span></span>
</td>
<td class="num">(3,235)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and Cash Equivalents, Beginning of Period</a></td>
<td class="nump">27,655<span></span>
</td>
<td class="nump">25,852<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and Cash Equivalents, End of Period</a></td>
<td class="nump">23,638<span></span>
</td>
<td class="nump">22,617<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SupplementalCashFlowInformationAbstract', window );"><strong>Supplemental Cash Flow Information:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestPaid', window );">Cash paid for interest</a></td>
<td class="nump">66<span></span>
</td>
<td class="nump">89<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIncomeTaxRefunds', window );">Income tax payments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">262<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxesPaid', window );">Income tax payments</a></td>
<td class="nump">$ 67<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Increase (Decrease) In Accrued Liabilities And Customer Deposits</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_IncreaseDecreaseInAccruedLiabilitiesAndCustomerDeposits</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_IncreaseDecreaseInDeferredProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Increase (Decrease) In Deferred Profit</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_IncreaseDecreaseInDeferredProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Cash<br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3044-108585<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Cash Equivalents<br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in cash and cash equivalents. Cash and cash equivalents are the amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Includes effect from exchange rate changes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=49171198&amp;loc=d3e33268-110906<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsPeriodIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepreciationDepletionAndAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepreciationDepletionAndAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from the effect of exchange rate changes on cash and cash equivalent balances held in foreign currencies.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=49171198&amp;loc=d3e33268-110906<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectOfExchangeRateOnCashAndCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromEquityMethodInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This item represents the entity's proportionate share for the period of the net income (loss) of its investee (such as unconsolidated subsidiaries and joint ventures) to which the equity method of accounting is applied. This item includes income or expense related to stock-based compensation based on the investor's grant of stock to employees of an equity method investee.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35755396&amp;loc=d3e33749-111570<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.12)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 9<br> -Article 5<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 11<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromEquityMethodInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxesPaid">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of cash paid during the current period to foreign, federal, state, and local authorities as taxes on income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4297-108586<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxesPaid</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsPayable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate amount of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsPayable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInDeferredIncomeTaxes">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the account that represents the temporary difference that results from Income or Loss that is recognized for accounting purposes but not for tax purposes and vice versa.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInDeferredIncomeTaxes</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInInventories">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInInventories</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOperatingCapitalAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the value of prepaid expenses and other assets not separately disclosed in the statement of cash flows, for example, deferred expenses, intangible assets, or income taxes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net cash inflow or outflow for the increase (decrease) associated with funds that are not available for withdrawal or use (such as funds held in escrow) and are associated with underlying transactions that are classified as operating activities. This may include cash restricted for regulatory purposes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInRestrictedCashForOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestCostsCapitalized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of interest capitalized during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Allowance for Funds Used during Construction<br> -URI http://asc.fasb.org/extlink&amp;oid=6504829<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6450988&amp;loc=d3e26243-108391<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestCostsCapitalized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestPaid">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of cash paid for interest during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4297-108586<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestPaid</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWriteDown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Charge to cost of goods sold that represents the reduction of the carrying amount of inventory, generally attributable to obsolescence or market conditions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=28360613&amp;loc=d3e4542-108314<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWriteDown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 26<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3574-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 26<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3574-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3521-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Investing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3213-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow associated with the deconsolidation of a previously consolidated subsidiary or the sale of investment in consolidated subsidiaries (generally greater than 50 percent).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3179-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Investing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromDivestitureOfInterestInConsolidatedSubsidiaries</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIncomeTaxRefunds">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of cash received during the period as refunds for the overpayment of taxes.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4297-108586<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIncomeTaxRefunds</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOfCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the additional capital contribution to the entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Financing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOfCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOfLongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from a debt initially having maturity due after one year or beyond the operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3255-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Financing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOfLongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the sale of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3179-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Investing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleOfPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=51664549&amp;loc=SL4569616-111683<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4K<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591552-111686<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (a),(c)<br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=SL4573702-111684<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4J<br> -URI http://asc.fasb.org/extlink&amp;oid=35736750&amp;loc=SL4591551-111686<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProvisionForDoubtfulAccounts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of expense related to write-down of receivables to the amount expected to be collected. Includes, but is not limited to, accounts receivable and notes receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.5)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProvisionForDoubtfulAccounts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RepaymentsOfLongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow for debt initially having maturity due after one year or beyond the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3291-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Financing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RepaymentsOfLongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate amount of noncash, equity-based employee remuneration. This may include the value of stock or unit options, amortization of restricted stock or units, and adjustment for officers' compensation. As noncash, this element is an add back when calculating net cash generated by operating activities using the indirect method.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SupplementalCashFlowInformationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SupplementalCashFlowInformationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>18
<FILENAME>R7.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6815654656">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock', window );">Summary of Significant Accounting Policies</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Summary of Significant Accounting Policies</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nature of Operations and Basis of Presentation </font><font style="font-family:inherit;font-size:10pt;">-&#160;Amtech Systems, Inc. (the &#8220;Company&#8221;, &#8220;Amtech&#8221;, &#8220;we&#8221;, &#8220;us&#8221; or &#8220;our&#8221;) is a global manufacturer of capital equipment, atomic layer deposition (&#8220;ALD&#8221;) including thermal processing, silicon wafer handling automation, and related consumables used in fabricating solar cells, LED and semiconductor devices. The Company sells these products to solar cell and semiconductor manufacturers worldwide, particularly in Asia, the United States and Europe. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &#8220;SEC&#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K, as amended, for the fiscal year ended September&#160;30, 2016.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The consolidated results of operations for the three months ended December 31, 2016, are not necessarily indicative of the results to be expected for the full fiscal year.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Principles of Consolidation &#8211;</font><font style="font-family:inherit;font-size:10pt;"> The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&#8217;s equity. The equity method of accounting is used for investments over which the Company has a significant influence but not a controlling financial interest. All material intercompany accounts and transactions have been eliminated in consolidation.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Use of Estimates</font><font style="font-family:inherit;font-size:10pt;"> - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Revenue Recognition</font><font style="font-family:inherit;font-size:10pt;"> - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer&#8217;s defined specifications have been met with at least </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;"> similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Where there have been installation and acceptance of more than </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;"> similarly configured items of equipment, but installation and acceptance have not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in&#160;one&#160;period will be lower and the gross margin reported in a subsequent period will improve.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For products where the customer&#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Deferred Profit</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Revenue deferred pursuant to the Company&#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities. The components of deferred profit are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:72%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred revenues</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,164</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,029</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred costs</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,352</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,320</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:30px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,812</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,709</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Cash Equivalents &#8211;</font><font style="font-family:inherit;font-size:10pt;"> The Company considers all highly liquid investments with a maturity of three months or less when purchased to be cash equivalents. Cash and cash equivalents consist of amounts invested in U.S.&#160;money market funds and various U.S.&#160;and foreign bank operating and time deposit accounts.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Restricted Cash</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Restricted cash of </font><font style="font-family:inherit;font-size:10pt;">$3.3 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">$0.9 million</font><font style="font-family:inherit;font-size:10pt;"> as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, and September 30, 2016, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment. Restricted cash as of </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">September&#160;30, 2016</font><font style="font-family:inherit;font-size:10pt;"> includes </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;"> million relating the Company's proportional responsibility, assumed in connection with the BTU International Inc. (&#8220;BTU&#8221;) acquisition, for clean-up costs at a Superfund site. Refer to Note 8 to Condensed Consolidated Financial Statements, Commitments and Contingencies, for more detail regarding our proportional liability related to the Superfund site.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable and Allowance for Doubtful Accounts &#8211;</font><font style="font-family:inherit;font-size:10pt;"> Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable - Unbilled and Other</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Unbilled and other accounts receivable consist mainly of  a contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance. Accounts receivable also includes Value-added tax  (&#8220;VAT&#8221;) receivable.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Concentrations of Credit Risk &#8211;</font><font style="font-family:inherit;font-size:10pt;"> Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company&#8217;s customers consist of solar cell and semiconductor manufacturers worldwide, as well as the lapping and polishing marketplace. Credit risk is managed by performing ongoing credit evaluations of our customers&#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Approximately </font><font style="font-family:inherit;font-size:10pt;">65%</font><font style="font-family:inherit;font-size:10pt;"> of the Company's total cash balances are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&#8217;s cash is maintained with financial institutions with reputable credit ratings in The Netherlands, France and China.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;"> customer individually represented </font><font style="font-family:inherit;font-size:10pt;">12%</font><font style="font-family:inherit;font-size:10pt;"> of accounts receivable.  As of September 30, 2016, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;"> customer individually represented </font><font style="font-family:inherit;font-size:10pt;">11%</font><font style="font-family:inherit;font-size:10pt;"> of accounts receivable.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Refer to Note 6 to Condensed Consolidated Financial Statements, Major Customers and Foreign Sales, for information regarding revenue and assets in other countries subject to fluctuation in foreign currency exchange rates.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Inventories</font><font style="font-family:inherit;font-size:10pt;"> &#8211; We value our inventory at the lower of cost or net realizable value.  Costs for approximately </font><font style="font-family:inherit;font-size:10pt;">50%</font><font style="font-family:inherit;font-size:10pt;"> of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis. The components of inventories are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:72%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchased parts and raw materials</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,148</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,435</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Work-in-process</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,832</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,044</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Finished goods</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,873</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,744</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,853</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">23,223</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Property, Plant and Equipment</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation and amortization is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings from </font><font style="font-family:inherit;font-size:10pt;">20-30</font><font style="font-family:inherit;font-size:10pt;"> years.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of property, plant and equipment:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:72%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Land, building and leasehold improvements</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17,799</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,255</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Equipment and machinery</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,749</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,056</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Furniture and fixtures</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,199</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,426</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31,747</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32,737</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accumulated depreciation and amortization</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(16,457</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(16,777</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,290</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,960</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Goodwill </font><font style="font-family:inherit;font-size:10pt;">&#8211; Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in goodwill:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td style="width:49%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Semiconductor</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Polishing</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,597</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,388</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,269</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,269</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at September 30, 2016</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,328</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,119</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net foreign exchange differences</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at December 31, 2016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,998</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,789</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,177</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,968</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,179</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,179</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at December 31, 2016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,998</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,789</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Intangibles</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Intangible assets are capitalized and amortized on a straight-line basis over their useful lives if the life is determinable. If the life is not determinable, amortization is not recorded.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of intangibles:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="22" rowspan="1"></td></tr><tr><td style="width:22%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:4%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Useful Life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">December&#160;31, 2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September&#160;30, 2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Customer lists</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6-10 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,387</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,172</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,215</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,432</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,164</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,268</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Technology</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5-10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,014</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,576</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,438</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,214</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,678</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,536</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Trade names</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10-15 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,441</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,241</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,455</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(219</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,236</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2-10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">260</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(239</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">277</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(217</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">60</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,102</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,187</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,915</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,378</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,278</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,100</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-lived assets </font><font style="font-family:inherit;font-size:10pt;">&#8211;</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;"> </font><font style="font-family:inherit;font-size:10pt;">Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.    </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Warranty &#8211;</font><font style="font-family:inherit;font-size:10pt;"> A limited warranty is provided free of charge, generally for periods of </font><font style="font-family:inherit;font-size:10pt;">12</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">24</font><font style="font-family:inherit;font-size:10pt;"> months, for all purchases of the Company&#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. Estimates are based on past experience and take into account the nature of the products under warranty. The following is a summary of activity in accrued warranty expense:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:73%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning balance</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">795</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">793</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Additions for warranties issued during the period</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">383</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">146</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Reductions in the liability for payments made under the warranty</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(109</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Changes related to pre-existing warranties</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(245</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(54</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Currency translation adjustment</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending balance</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">879</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">766</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stock-Based Compensation -</font><font style="font-family:inherit;font-size:10pt;"> The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9" rowspan="1"></td></tr><tr><td style="width:68%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(319</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(342</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">48</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(284</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(294</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock options issued under the terms of the Company's option plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the NASDAQ the trading day prior to the date of the option grant and expire no later than </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">10 years</font><font style="font-family:inherit;font-size:10pt;"> from the date of grant, with the most recent option grant expiring in 2026. Options issued by the Company generally vest over </font><font style="font-family:inherit;font-size:10pt;">six months</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">four</font><font style="font-family:inherit;font-size:10pt;"> years, subject to the Company's board of directors' (the &#8220;Board&#8221;) discretion pursuant to the Company's share-based compensation plans.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td style="width:49%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,841,567</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627,477</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.11</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100,000</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.99</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">344,075</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.25</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.80</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(55,446</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13.34</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(33,642</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.90</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,885,941</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.84</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,937,910</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.34</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,375,174</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.26</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,189,855</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.21</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2.88</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.03</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td style="width:65%;" rowspan="1" colspan="1"></td><td style="width:17%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:17%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company awards restricted shares under its existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two to four year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &#8220;service period&#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted stock transactions and awards outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="14" rowspan="1"></td></tr><tr><td style="width:49%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning Outstanding</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,540</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Released</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(13,540</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending Outstanding</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value of Financial Instruments </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board (&#8220;FASB&#8221;) Accounting Standards Codification (&#8220;ASC&#8221;), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 2 - Valuation is based upon quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.&#160;<br clear="none"/>        <br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Cash, Cash Equivalents and Restricted Cash</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets are money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC) and foreign bank operating and time deposit accounts. The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Receivables and Payables</font><font style="font-family:inherit;font-size:10pt;"> &#8211; The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments. If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Debt </font><font style="font-family:inherit;font-size:10pt;">&#8211;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;"> </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Pensions </font><font style="font-family:inherit;font-size:10pt;">&#8211; The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches certain employee funds on a discretionary basis while certain subsidiaries require a minimum match to maintain their safe harbor status.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shipping expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$0.4 million</font><font style="font-family:inherit;font-size:10pt;"> for each of the three months ended </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">2015</font><font style="font-family:inherit;font-size:10pt;">, are included in selling, general and administrative expenses. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Research, development and engineering expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met. The table below shows gross research and development expenses and grants earned:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9" rowspan="1"></td></tr><tr><td style="width:70%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,830</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,615</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Grants earned</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(203</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(327</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;&#160;Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,288</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In November 2016, the FASB issued Accounting Standards Update ("ASU") No. 2016-18,&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;">Statement of Cash Flows: Restricted Cash</font><font style="font-family:inherit;font-size:10pt;">. The amendments address diversity in practice that exists in the classification and presentation of changes in restricted cash and require that a statement of cash flows explain the change during the period in the total of cash, cash equivalents, and amounts generally described as restricted cash or restricted cash equivalents. This ASU is effective retrospectively for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In October 2016, the FASB issued ASU No. 2016-16,&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;">Income Taxes: Intra-Entity Transfers of Assets Other than Inventory</font><font style="font-family:inherit;font-size:10pt;">. The amendments in this ASU remove the prohibition against the recognition of current and deferred income tax effects of intra-entity transfers of assets other than inventory until the asset has been sold to an outside party. The ASU is effective for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In August 2016, the FASB issued ASU 2016-15, &#8220;Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments&#8221;. These amendments provide cash flow statement classification guidance for: 1. Debt Prepayment or Debt Extinguishment Costs; 2. Settlement of Zero-Coupon Debt Instruments or Other Debt Instruments with Coupon Interest Rates That Are Insignificant in Relation to the Effective Interest Rate of the Borrowing; 3. Contingent Consideration Payments Made after a Business Combination; 4. Proceeds from the Settlement of Insurance Claims; 5. Proceeds from the Settlement of Corporate-Owned Life Insurance Policies, including Bank-Owned Life Insurance Policies; 6. Distributions Received from Equity Method Investees; 7. Beneficial Interests in Securitization Transactions; and 8. Separately Identifiable Cash Flows and Application of the Predominance Principle. The amendments in this ASU are effective for public business entities for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. Early application is permitted, including adoption in an interim period. The Company is currently in the process of evaluating the impact of the adoption on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2016, the FASB issued ASU 2016-13, &#8220;Financial Instruments - Credit Losses: Measurement of Credit Losses on Financial Instruments&#8221;. ASU 2016-13 amends the impairment model to utilize an expected loss methodology in place of the currently used incurred loss methodology, which will result in the more timely recognition of losses. The new standard applies to financial assets measured at amortized cost basis, including receivables that result from revenue transactions and held-to-maturity debt securities.&#160;The new guidance will be effective for the Company starting in the first quarter of fiscal 2021. Early adoption is permitted starting in the first quarter of fiscal 2020. The Company is in the process of determining the effects the adoption will have on its consolidated financial&#160;statements as well as whether to adopt the new guidance early.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May 2014, the FASB issued ASU No. 2014-09 regarding ASC Topic 606, &#8220;Revenue from Contracts with Customers.&#8221; ASU 2014-09 provides principles for recognizing revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for those goods or services. In August 2015, the FASB issued ASU 2015-14 to defer the effective date by one year with early adoption permitted as of the original effective date. ASU 2014-09 will be effective for Amtech&#8217;s fiscal year beginning October 1, 2018 unless we elect the earlier date of October 1, 2017. In addition, the FASB issued ASU 2016-08, ASU 2016-10, ASU 2016-12 and ASU 2016-20 in March 2016, April 2016, May 2016 and December 2016, respectively, to help provide interpretive clarifications on the new guidance in ASC Topic 606. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In March 2016, the FASB issued ASU No. 2016-09,&#160;Compensation - &#8220;Stock Compensation (Topic 718)&#8221;. ASU 2016-09 identifies areas for simplification involving several aspects of accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, an option to recognize gross stock compensation expense with actual forfeitures recognized as they occur, as well as certain classifications on the statement of cash flows. The amendments in this ASU are effective for annual periods beginning after December 15, 2016 and for the interim periods therein. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In March 2016, the FASB issued ASU 2016-07,&#160;&#8220;Equity Method and Joint Ventures&#8221;&#160;affecting all entities that have an investment that becomes qualified for the equity method of accounting as a result of an increase in the level of ownership or degree of influence. ASU 2016-07 is effective for the Company beginning on&#160;</font><font style="font-family:inherit;font-size:10pt;color:#222222;">January 1, 2017</font><font style="font-family:inherit;font-size:10pt;">, early adoption is permitted.  The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In February 2016, the FASB issued ASU No. 2016-02, &#8220;Leases (Topic 842)&#8221;, which requires companies to generally recognize on the balance sheet operating and financing lease liabilities and corresponding right-of-use-assets. ASU 2016-02 also requires improved disclosures to help users of financial statements better understand the amount, timing and uncertainty of cash flows arising from leases. This ASU is effective for fiscal years beginning after December 15, 2018 and early application is permitted. The Company is currently in the process of evaluating the impact of this standard on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2016, the FASB issued ASU No. 2016-01, &#8220;Financial Instruments - Overall (Subtopic 825-10), Recognition and Measurement of Financial Assets and Financial Liabilities&#8221;, which addresses certain aspects of recognition, measurement, presentation, and disclosure of financial instruments. This ASU is effective for fiscal years beginning after December 15, 2017 and early adoption is not permitted. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In November 2015, the FASB issued ASU No. 2015-17, &#8220;Balance Sheet Classification of Deferred Taxes&#8221;. This ASU requires entities to classify deferred tax liabilities and assets as noncurrent in a classified statement of financial position. This ASU is effective for fiscal years beginning after December 15, 2016, and interim periods within those annual periods. Early adoption is permitted for all entities as of the beginning of an interim or annual reporting period. The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued ASU No. 2015-16,&#160;&#8220;Business Combinations (Topic 805): Simplifying the Accounting for Measurement-Period Adjustments&#8221;, which simplifies the accounting for measurement-period adjustments to provisional amounts recognized in a business combination. ASU 2015-16 is effective for fiscal years (and interim reporting periods within those years) beginning after December 15, 2016. The provisions of ASU 2015-16 are not expected to have a material effect on the Company's financial condition, results of operations, or cash flows.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued ASU No. 2015-11, &#8220;Simplifying the Measurement of Inventory&#8221;. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. The Company does not expect adoption of this ASU to have a material impact on the Company's consolidated financial position and results of operations.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for the general note to the financial statements for the reporting entity which may include, descriptions of the basis of presentation, business description, significant accounting policies, consolidations, reclassifications, new pronouncements not yet adopted and changes in accounting principles.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationBasisOfPresentationBusinessDescriptionAndAccountingPoliciesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>19
<FILENAME>R8.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811105792">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Tax Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureTextBlock', window );">Income Taxes</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Income Taxes</font></div><div style="line-height:120%;text-align:justify;padding-left:24px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The quarterly income tax provision is calculated using an estimated annual effective tax rate, based upon expected annual income, permanent items, statutory rates and planned tax strategies in the various jurisdictions in which the Company operates. However, losses in certain jurisdictions and discrete items are treated separately. </font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred tax assets and liabilities reflect the tax effects of temporary differences between the carrying value of assets and liabilities for financial reporting purposes and the amounts used for income tax purposes. The Company records a valuation allowance if, based on the weight of available evidence, it is more likely than not that some portion or all of a deferred tax asset will not be realized. Our expectations regarding realization of our deferred tax assets is based upon the weight of all available evidence, including such factors as our recent earnings history, expected future taxable income and available tax planning strategies. The Company maintains a valuation allowance with respect to certain state, federal and foreign deferred tax assets that may not be recovered.  We have established valuation allowances on substantially all net deferred tax assets, after considering all of the available objective evidence, both positive and negative, historical and prospective, with greater weight given to historical evidence, and determined it is not more likely than not that these assets will be realized</font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies all of our uncertain tax positions as non-current income taxes payable.  At December 31, 2016 and September 30, 2016, the total amount of unrecognized tax benefits was approximately </font><font style="font-family:inherit;font-size:10pt;">$3.9</font><font style="font-family:inherit;font-size:10pt;"> million. If recognized, these amounts would favorably impact the effective tax rate.  Income taxes payable long-term primarily includes, among other items, withholding taxes that are not due until the related intercompany service fees are paid.</font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company classifies interest and penalties related to unrecognized tax benefits as income tax expense. As of December 31, 2016 and September 30, 2016, the Company had an accrual for potential interest and penalties of approximately </font><font style="font-family:inherit;font-size:10pt;">$2.4</font><font style="font-family:inherit;font-size:10pt;"> million and </font><font style="font-family:inherit;font-size:10pt;">$2.3</font><font style="font-family:inherit;font-size:10pt;"> million, respectively, classified with non-current income taxes payable.   </font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company and one or more of its subsidiaries file income tax returns in The Netherlands, France, China, Singapore, Malaysia, Hong Kong, and Germany, as well as the U.S. and various states in the U.S. The Company and its subsidiaries have a number of open tax years dictated by statute in each of their respective taxing jurisdictions, but generally it is from </font><font style="font-family:inherit;font-size:10pt;">3</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">5</font><font style="font-family:inherit;font-size:10pt;"> years in the jurisdictions in which the Company files tax returns.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32559-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32718-109319<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32639-109319<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>20
<FILENAME>R9.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6815644432">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Earnings Per Share<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Earnings Per Share [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareTextBlock', window );">Earnings Per Share</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Earnings Per Share</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic earnings per share ("EPS") is computed by dividing net income (loss) by the weighted average number of common shares outstanding for the period. Diluted EPS is computed similarly to basic EPS except that the denominator is increased to include the number of additional common shares that would have been outstanding if potentially dilutive common shares had been issued. In the case of a net loss, diluted earnings per share is calculated in the same manner as basic EPS.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,886,000</font><font style="font-family:inherit;font-size:10pt;"> shares are excluded from the diluted EPS calculations because they are anti-dilutive. For the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2015</font><font style="font-family:inherit;font-size:10pt;">, options for </font><font style="font-family:inherit;font-size:10pt;">1,938,000</font><font style="font-family:inherit;font-size:10pt;"> shares were excluded from the diluted EPS calculations because they were anti-dilutive.  </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table outlines basic and diluted EPS:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:73%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basic Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(53</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,015</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Diluted Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,015</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted shares</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</font></div></td></tr></table></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for earnings per share.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1278-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=32703322&amp;loc=d3e4984-109258<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>21
<FILENAME>R10.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811076768">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stockholders' Equity<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Stockholders' Equity Note [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock', window );">Stockholders' Equity</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stockholders' Equity</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:10px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shareholder Rights Plan</font><font style="font-family:inherit;font-size:10pt;"> &#8211; On December 15, 2008, the Company and Computershare Trust Company, N.A., as Rights Agent (the &#8220;Rights Agent&#8221;), entered into an Amended and Restated Rights Agreement (the &#8220;Restated Rights Agreement&#8221;) which amended and restated the terms governing the previously authorized shareholder rights (each a &#8220;Right&#8221;) to purchase fractional shares of the Company&#8217;s Series A Participating Preferred Stock (&#8220;Series A Preferred&#8221;) currently attached to each of the Company&#8217;s outstanding Common Shares, par value  </font><font style="font-family:inherit;font-size:10pt;">$0.01</font><font style="font-family:inherit;font-size:10pt;">  per share (&#8220;Common Shares&#8221;). As amended, each Right entitles the registered holder to purchase from the Company </font><font style="font-family:inherit;font-size:10pt;">one one-thousandth</font><font style="font-family:inherit;font-size:10pt;"> of a share of Series A Preferred at an exercise price of </font><font style="font-family:inherit;font-size:10pt;">$51.60</font><font style="font-family:inherit;font-size:10pt;"> (the &#8220;Exercise Price&#8221;), subject to adjustment. The Rights will expire </font><font style="font-family:inherit;font-size:10pt;">10</font><font style="font-family:inherit;font-size:10pt;"> years after issuance and will be exercisable if (a) a person or group becomes the beneficial owner of </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;"> or more of the Company&#8217;s common stock or (b) a person or group commences a tender or exchange offer that would result in the offeror beneficially owning </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;"> or more of the Company&#8217;s common stock.&#160; The Final Expiration Date (as defined in the Restated Rights Agreement) is December 14, 2018.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On October 1, 2015, the Company entered into a Second Amended and Restated Rights Agreement (the &#8220;Second Restated Rights Agreement&#8221;) with the Rights Agent, which expands the definition of Exempted Person to include any person that the Board, in its sole and absolute discretion, exempts from becoming an Acquiring Person under the Second Restated Rights Agreement. A Person deemed an Exempted Person under the Second Restated Rights Agreement cannot trigger any of the Rights provided therein so long as such Exempted Person complies with the terms and conditions by which the Board approved such exemption from the Restated Rights Agreement.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As previously disclosed, on October 8, 2015, the Company entered into a Letter Agreement (the &#8220;Agreement&#8221;) by and between the Company and certain shareholders of the Company who jointly file (the &#8220;Joint Filers&#8221;) under Section 13 of the Securities Exchange Act of 1934, as amended (the &#8220;Exchange Act&#8221;). One of the Joint Filers became a member of our Board after the Agreement was approved by the Board.&#160;The Agreement permits the Joint Filers, pursuant to the Second Restated Rights Agreement, to individually acquire shares of common stock of the Company that would, in the aggregate, bring the Joint Filers&#8217; collective ownership to no more than </font><font style="font-family:inherit;font-size:10pt;">19.9%</font><font style="font-family:inherit;font-size:10pt;"> of the Company&#8217;s issued and outstanding common stock at any time. In the event the Joint Filers&#8217; collective ownership at any time exceeds </font><font style="font-family:inherit;font-size:10pt;">19.9%</font><font style="font-family:inherit;font-size:10pt;"> of the Company&#8217;s issued and outstanding shares of common stock, the Company is entitled to specific performance and all other remedies entitled to the Company at law or equity, among others. The Company&#8217;s board of directors approved the Agreement and transactions contemplated thereunder, and has the sole authority to terminate the Agreement at any time.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(d),(e))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21484-112644<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB TOPIC 4.E)<br> -URI http://asc.fasb.org/extlink&amp;oid=27010918&amp;loc=d3e74512-122707<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21488-112644<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29-31)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 4<br> -Subparagraph (SAB TOPIC 4.C)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187143-122770<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21506-112644<br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6405834&amp;loc=d3e23285-112656<br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21475-112644<br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Preferred Stock<br> -URI http://asc.fasb.org/extlink&amp;oid=6521494<br><br>Reference 12: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br>Reference 13: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21564-112644<br><br>Reference 14: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 4<br> -Section E<br><br>Reference 15: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 4<br> -Section C<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>22
<FILENAME>R11.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6618407440">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment Information<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingDisclosureTextBlock', window );">Business Segment Information</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Business Segment Information</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company&#8217;s </font><font style="font-family:inherit;font-size:10pt;">three</font><font style="font-family:inherit;font-size:10pt;"> reportable segments are as follows:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Solar - </font><font style="font-family:inherit;font-size:10pt;">The Company is a leading supplier of thermal processing systems, ALD, related automation, parts and services, to the solar/photovoltaic industry and also offers PECVD (plasma-enhanced chemical vapor deposition) equipment to the global solar market. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Semiconductor - </font><font style="font-family:inherit;font-size:10pt;">In the Company&#8217;s Semiconductor segment, it designs, manufactures, sells and services thermal processing equipment and related controls and parts for use by leading semiconductor manufacturers, and in electronics, automotive and other industries. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;font-weight:bold;">Polishing - </font><font style="font-family:inherit;font-size:10pt;">In the Company's Polishing segment, the Company produces consumables and machinery for lapping (fine abrading) and polishing of materials, such as sapphire substrates, optical components, silicon wafers, numerous types of crystal materials, ceramics and metal components.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Information concerning our business segments is as follows:</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.6328125%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:69%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net Revenues:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,424</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,543</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,703</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,700</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,008</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,831</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,135</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">22,074</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating income (loss):</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,023</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,361</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(160</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">464</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">169</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related </font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,982</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(2,074</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,929</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*  The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than </font><font style="font-family:inherit;font-size:10pt;">25%</font><font style="font-family:inherit;font-size:10pt;"> of the Solar segment revenue.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:70%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable Assets:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">43,334</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">42,962</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">51,898</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">51,985</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,906</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,819</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,780</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,664</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">115,918</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">118,430</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for reporting segments including data and tables. Reportable segments include those that meet any of the following quantitative thresholds a) it's reported revenue, including sales to external customers and intersegment sales or transfers is 10 percent or more of the combined revenue, internal and external, of all operating segments b) the absolute amount of its reported profit or loss is 10 percent or more of the greater, in absolute amount of 1) the combined reported profit of all operating segments that did not report a loss or 2) the combined reported loss of all operating segments that did report a loss c) its assets are 10 percent or more of the combined assets of all operating segments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 34<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8981-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9038-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 33<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8971-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8595-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8380-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8933-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 26<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8844-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 35<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8984-108599<br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9031-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9054-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8538-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 29<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8864-108599<br><br>Reference 13: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8924-108599<br><br>Reference 14: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8906-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>23
<FILENAME>R12.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811076768">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Major Customers and Foreign Sales<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_MajorCustomersAndForeignSalesAbstract', window );"><strong>Major Customers and Foreign Sales [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskDisclosureTextBlock', window );">Major Customers And Foreign Sales</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Major Customers and Foreign Sales</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">During the three months ended </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, there were no customers who individually represented greater than </font><font style="font-family:inherit;font-size:10pt;">10%</font><font style="font-family:inherit;font-size:10pt;"> of net revenues.  During the three months ended December 31, 2015, </font><font style="font-family:inherit;font-size:10pt;">one</font><font style="font-family:inherit;font-size:10pt;"> customer represented </font><font style="font-family:inherit;font-size:10pt;">14%</font><font style="font-family:inherit;font-size:10pt;"> of net revenues. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company has operations in The Netherlands, United States, France, and China. Our net revenues were to customers in the following geographic regions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="6" rowspan="1"></td></tr><tr><td style="width:66%;" rowspan="1" colspan="1"></td><td style="width:15%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:2%;" rowspan="1" colspan="1"></td><td style="width:15%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">United States</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">28</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total North America</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">20</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">China</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Malaysia</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taiwan</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Asia</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">61</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">54</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Germany</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Europe</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_MajorCustomersAndForeignSalesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Major Customers and Foreign Sales [Abstract]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_MajorCustomersAndForeignSalesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for any concentrations existing at the date of the financial statements that make an entity vulnerable to a reasonably possible, near-term, severe impact. This disclosure informs financial statement users about the general nature of the risk associated with the concentration, and may indicate the percentage of concentration risk as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6327-108592<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6442-108592<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>24
<FILENAME>R13.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811092560">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Long-term Debt<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtDisclosureAbstract', window );"><strong>Debt Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebtTextBlock', window );">Long-term Debt</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-term Debt</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company holds debt in the form of a mortgage note secured by its real property in Billerica, Massachusetts that has a remaining balance of </font><font style="font-family:inherit;font-size:10pt;">$6.5</font><font style="font-family:inherit;font-size:10pt;"> million as of December 31, 2016. The debt has an interest rate of </font><font style="font-family:inherit;font-size:10pt;">4.11%</font><font style="font-family:inherit;font-size:10pt;"> through September 26, 2021, at which time the interest rate will be adjusted to a per annum fixed rate equal to the aggregate of the Federal Home Loan Board Five Year Classic Advance Rate plus </font><font style="font-family:inherit;font-size:10pt;">two hundred forty</font><font style="font-family:inherit;font-size:10pt;"> basis points. The maturity date of the debt is September 26, 2023. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">SoLayTec B.V. ("SoLayTec"), a division of the Company's solar segment, holds long-term debt with a remaining balance of </font><font style="font-family:inherit;font-size:10pt;">$3.6 million</font><font style="font-family:inherit;font-size:10pt;">. During the quarter ended December 31, 2016, SoLayTec borrowed less than </font><font style="font-family:inherit;font-size:10pt;">$0.1 million</font><font style="font-family:inherit;font-size:10pt;">. The debt has interest rates ranging from </font><font style="font-family:inherit;font-size:10pt;">4.5%</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">12.5%</font><font style="font-family:inherit;font-size:10pt;"> and maturity dates ranging from fiscal 2017 to fiscal 2021.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebtTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for long-term debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebtTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>25
<FILENAME>R14.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811076768">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Commitments and Contingencies Disclosure [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock', window );">Commitments and Contingencies</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Commitments and Contingencies</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Purchase Obligations</font><font style="font-family:inherit;font-size:10pt;"> &#8211; As of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, the Company had purchase obligations in the amount of </font><font style="font-family:inherit;font-size:10pt;">$14.2 million</font><font style="font-family:inherit;font-size:10pt;"> compared to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">$11.3 million</font><font style="font-family:inherit;font-size:10pt;"> as of September 30, 2016. These purchase obligations consist of outstanding purchase orders for goods and services. While the amount represents purchase agreements, the actual amounts to be paid may be less if any agreements are renegotiated, canceled or terminated.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Development projects</font><font style="font-family:inherit;font-size:10pt;"> &#8211;  In fiscal 2014, our wholly owned subsidiary, Tempress Systems, Inc. ("Tempress"), entered into an agreement with the Energy Research Centre of the Netherlands ("ECN"), a Netherlands government sponsored research institute, for a joint research and development project.  Under the terms of the agreement, Tempress sold an ion implanter ("Equipment") to ECN for </font><font style="font-family:inherit;font-size:10pt;">$1.4</font><font style="font-family:inherit;font-size:10pt;"> million.  Both Tempress and ECN are performing research and development projects utilizing the Equipment at the ECN facilities. Each party to the agreement will have </font><font style="font-family:inherit;font-size:10pt;">100%</font><font style="font-family:inherit;font-size:10pt;"> rights to the results of the projects developed separately by the individual parties.  Any results co-developed will be jointly owned.  Over the </font><font style="font-family:inherit;font-size:10pt;">four</font><font style="font-family:inherit;font-size:10pt;">-year period of the agreement, Tempress is required to contribute </font><font style="font-family:inherit;font-size:10pt;">$1.4 million</font><font style="font-family:inherit;font-size:10pt;">  to the project in the form of  installation of the equipment, acceptance testing, project meeting attendance, training, parts, and service, including keeping the equipment in good condition and repair for the first </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;"> years of the agreement. As of December 31, 2016, Tempress has contributed all of the required </font><font style="font-family:inherit;font-size:10pt;">$1.4</font><font style="font-family:inherit;font-size:10pt;"> million to the project.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">EPA Accrual</font><font style="font-family:inherit;font-size:10pt;"> - As a result of the BTU acquisition, the Company assumed BTU&#8217;s proportional responsibility for clean-up costs at a Superfund site.  As an equipment manufacturer, BTU generated and disposed of small quantities of solid waste that were considered hazardous under Environment Protection Agency (&#8220;EPA&#8221;) regulations. Because BTU historically used a waste disposal firm that disposed of the solid waste at a site that the EPA designated as a Superfund site, BTU was named by the EPA as one of the entities responsible for a portion of the expected clean-up costs. Based on the Company's proportional responsibility, as negotiated with and agreed to by the EPA, the Company's liability related to this matter is less than </font><font style="font-family:inherit;font-size:10pt;">$0.1</font><font style="font-family:inherit;font-size:10pt;"> million, which is included in Other Accrued Liabilities on the Condensed Consolidated Balance Sheets as of December 31, 2016 and September 30, 2016.  In accordance with the agreement, the Company established a letter of credit for </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;"> million to the benefit of the EPA for potential cash payments as settlements for the Company&#8217;s proportional liability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Legal Proceedings &#8211;</font><font style="font-family:inherit;font-size:10pt;"> The Company and its subsidiaries are defendants from time to time in actions for matters arising out of their business operations. The Company does not believe that any matters or proceedings presently pending will have a material adverse effect on its consolidated financial position, results of operations or liquidity. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As previously disclosed in the Company&#8217;s filings with the SEC, shortly after the Company entered into the merger agreement with BTU, </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;"> separate putative stockholder class action complaints (together, the "Stockholder Actions") were filed in the Court of Chancery of the State of Delaware (the "Delaware Court"). The first was filed on November 4, 2014 and the second on November 17, 2014, on behalf of BTU&#8217;s public stockholders, against BTU, members of the BTU board, Amtech and the special purpose merger subsidiary. The Stockholder Actions were consolidated on December 4, 2014. The complaints generally alleged that, in connection with entering into the merger agreement, the BTU board of directors breached certain fiduciary duties owed to BTU's stockholders. The complaints sought various forms of declaratory and injunctive relief, as well as compensatory damages.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">On February 18, 2016, the Delaware Court entered the Order approving the Amended Stipulation of Settlement. As a result, the Released Claims were dismissed with prejudice and without any admission of wrongdoing by any of the parties to the Stockholder Actions. Pursuant to the Amended Stipulation of Settlement, BTU, its insurer(s), or its successor(s) in interest are responsible for payment of fees and expenses in the amount of </font><font style="font-family:inherit;font-size:10pt;">$325,000</font><font style="font-family:inherit;font-size:10pt;"> which were paid in full on April 1, 2016.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As described above, the Released Claims are limited solely to claims related to any disclosures (or lack thereof) to BTU&#8217;s stockholders concerning the merger and any fiduciary claims concerning the decision to enter into the merger. While we are currently unaware of any other pending or threatened litigation related to additional claims arising from the Stockholder Actions, any future claims are uncertain, so additional harm could potentially result to the Company from this litigation, which may cause the Company to incur substantial costs and divert management&#8217;s attention from operational matters.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for commitments and contingencies.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6449706&amp;loc=d3e16207-108621<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=25496072&amp;loc=d3e14435-108349<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.25)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 440<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6394976&amp;loc=d3e25287-109308<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>26
<FILENAME>R15.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811026208">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract', window );"><strong>Equity Method Investments and Joint Ventures [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentsDisclosureTextBlock', window );">Investments</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Investments</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company&#8217;s equity method investments include a </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;"> interest in Kingstone Technology Hong Kong Limited (&#8220;Kingstone&#8221;). The Company recognizes its portion of net income or losses on a one-quarter lag.  The carrying value of the equity method investment in Kingstone was </font><font style="font-family:inherit;font-size:10pt;">$2.9</font><font style="font-family:inherit;font-size:10pt;"> million and </font><font style="font-family:inherit;font-size:10pt;">$3.0</font><font style="font-family:inherit;font-size:10pt;"> million as of December 31, 2016 and September 30, 2016, respectively.  For the three months ended December 31, 2016 we recognized investment loss of </font><font style="font-family:inherit;font-size:10pt;">$0.1 million</font><font style="font-family:inherit;font-size:10pt;">. For the three months ended December 31, 2015, the investment loss was not material to our consolidated statement of operations.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestmentsAndJointVenturesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestmentsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for equity method investments and joint ventures. Equity method investments are investments that give the investor the ability to exercise significant influence over the operating and financial policies of an investee. Joint ventures are entities owned and operated by a small group of businesses as a separate and specific business or project for the mutual benefit of the members of the group.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=6382943&amp;loc=d3e33918-111571<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 35<br> -Paragraph 35<br> -URI http://asc.fasb.org/extlink&amp;oid=49116238&amp;loc=d3e32847-111569<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.12)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 35<br> -Paragraph 32<br> -URI http://asc.fasb.org/extlink&amp;oid=49116238&amp;loc=d3e32787-111569<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestmentsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>27
<FILENAME>R16.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811030576">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Related Party Transactions<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionsAbstract', window );"><strong>Related Party Transactions [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionsDisclosureTextBlock', window );">Related Party Transactions</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Related Party Transactions</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In the fourth quarter of 2015, the Company deconsolidated Kingstone, reducing its ownership to </font><font style="font-family:inherit;font-size:10pt;">15%</font><font style="font-family:inherit;font-size:10pt;"> of Kingstone Hong Kong, the Hong Kong holding company. Upon the deconsolidation, Kingstone became a related party of the Company.  At December 31, 2016, and September 30, 2016, the Company's accounts receivable due from Kingstone were </font><font style="font-family:inherit;font-size:10pt;">$0.3 million</font><font style="font-family:inherit;font-size:10pt;">, which are included in Accounts Receivable on the Condensed Consolidated Balance Sheet.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As of December 31, 2016, SoLayTec has borrowed approximately </font><font style="font-family:inherit;font-size:10pt;">$1.2</font><font style="font-family:inherit;font-size:10pt;"> million from its shareholder, TNO Technostarters B.V.  The loans have varying interest rates from </font><font style="font-family:inherit;font-size:10pt;">9.5%</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">12.5%</font><font style="font-family:inherit;font-size:10pt;"> and mature in 2021.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for related party transactions. Examples of related party transactions include transactions between (a) a parent company and its subsidiary; (b) subsidiaries of a common parent; (c) and entity and its principal owners; and (d) affiliates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 850<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=6457730&amp;loc=d3e39603-107864<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 850<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=6457730&amp;loc=d3e39622-107864<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 850<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6457730&amp;loc=d3e39549-107864<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 850<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=6457730&amp;loc=d3e39678-107864<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 850<br> -SubTopic 10<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=6457730&amp;loc=d3e39691-107864<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(k))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph b<br> -Article 3A<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>28
<FILENAME>R17.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6815647120">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Subsequent Event<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventsAbstract', window );"><strong>Subsequent Events [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventsTextBlock', window );">Subsequent Event</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Subsequent Event</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">As a result of customer deposits received after the end of the quarter, cash, cash equivalents, and restricted cash increased to </font><font style="font-family:inherit;font-size:10pt;">$45.8 million</font><font style="font-family:inherit;font-size:10pt;"> as of January 31, 2017, compared to cash, cash equivalents, and restricted cash of </font><font style="font-family:inherit;font-size:10pt;">$26.9 million</font><font style="font-family:inherit;font-size:10pt;">, as of December 31, 2016.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for significant events or transactions that occurred after the balance sheet date through the date the financial statements were issued or the date the financial statements were available to be issued. Examples include: the sale of a capital stock issue, purchase of a business, settlement of litigation, catastrophic loss, significant foreign exchange rate changes, loans to insiders or affiliates, and transactions not in the ordinary course of business.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventsTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>29
<FILENAME>R18.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6826562880">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies (Policies)<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BasisOfAccountingPolicyPolicyTextBlock', window );">Nature of Operations and Basis of Presentation</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Nature of Operations and Basis of Presentation </font><font style="font-family:inherit;font-size:10pt;">-&#160;Amtech Systems, Inc. (the &#8220;Company&#8221;, &#8220;Amtech&#8221;, &#8220;we&#8221;, &#8220;us&#8221; or &#8220;our&#8221;) is a global manufacturer of capital equipment, atomic layer deposition (&#8220;ALD&#8221;) including thermal processing, silicon wafer handling automation, and related consumables used in fabricating solar cells, LED and semiconductor devices. The Company sells these products to solar cell and semiconductor manufacturers worldwide, particularly in Asia, the United States and Europe. </font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company serves niche markets in industries that are experiencing rapid technological advances and which historically have been very cyclical. Therefore, future profitability and growth depend on the Company&#8217;s ability to develop or acquire and market profitable new products and on its ability to adapt to cyclical trends.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The accompanying unaudited condensed consolidated financial statements have been prepared pursuant to the rules and regulations of the Securities and Exchange Commission (the &#8220;SEC&#8221;), and consequently do not include all disclosures normally required by accounting principles generally accepted in the United States of America. In the opinion of management, the accompanying unaudited interim condensed consolidated financial statements contain all adjustments necessary, all of which are of a normal and recurring nature, to present fairly our financial position, results of operations and cash flows. Certain information and note disclosures normally included in financial statements have been condensed or omitted pursuant to the rules and regulations of the SEC. These condensed consolidated financial statements should be read in conjunction with the audited consolidated financial statements and notes thereto included in our Annual Report on Form 10-K, as amended, for the fiscal year ended September&#160;30, 2016.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The consolidated results of operations for the three months ended December 31, 2016, are not necessarily indicative of the results to be expected for the full fiscal year.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationPolicyTextBlock', window );">Principles of Consolidation</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Principles of Consolidation &#8211;</font><font style="font-family:inherit;font-size:10pt;"> The consolidated financial statements include the accounts of the Company and its wholly owned subsidiaries and subsidiaries in which it has a controlling interest. The Company reports noncontrolling interests in consolidated entities as a component of equity separate from the Company&#8217;s equity. The equity method of accounting is used for investments over which the Company has a significant influence but not a controlling financial interest. All material intercompany accounts and transactions have been eliminated in consolidation.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UseOfEstimates', window );">Use of Estimates</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Use of Estimates</font><font style="font-family:inherit;font-size:10pt;"> - The preparation of consolidated financial statements in conformity with accounting principles generally accepted in the United States of America requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the consolidated financial statements and the reported amounts of revenue and expenses during the reporting period. Actual results could differ from those estimates.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRecognitionPolicyTextBlock', window );">Revenue Recognition</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Revenue Recognition</font><font style="font-family:inherit;font-size:10pt;"> - We review product and service sales contracts with multiple deliverables to determine if separate units of accounting are present. Where separate units of accounting exist, revenue allocated to delivered items is the lower of the relative selling price of the delivered items in the sales arrangement or the portion of the selling price that is not contingent upon performance of the service. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">We recognize revenue when persuasive evidence of an arrangement exists; the product has been delivered and title has transferred, or services have been rendered; and the seller&#8217;s price to the buyer is fixed or determinable and collectability is reasonably assured. For us, this policy generally results in revenue recognition at the following points:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">1.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For the Company's equipment business, transactions where legal title passes to the customer upon shipment, revenue is recognized upon shipment for those products where the customer&#8217;s defined specifications have been met with at least </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;"> similarly configured systems and processes for a comparably situated customer. Selling prices may include both equipment and services, i.e., installation and start-up services performed by our service technicians. The equipment and services are multiple deliverables. Certain equipment that has a positive track record of successful installation and customer acceptance are considered to be routine systems.  Revenue recognition upon delivery of such equipment that has been routinely installed and accepted is equal to the total selling price minus the relative selling price of the undelivered services.  </font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Where there have been installation and acceptance of more than </font><font style="font-family:inherit;font-size:10pt;">two</font><font style="font-family:inherit;font-size:10pt;"> similarly configured items of equipment, but installation and acceptance have not become routine, recognition of revenue upon delivery of equipment is limited to the lesser of (i) the total selling price minus the relative selling price of the undelivered services or (ii) the non-contingent amount. Since we defer only those costs directly related to installation, or other unit of accounting not yet delivered, and the portion of the contract price is often considerably greater than the relative selling price of those items, our policy at times will result in deferral of profit that is disproportionate in relation to the deferred revenue. When this is the case, the gross margin recognized in&#160;one&#160;period will be lower and the gross margin reported in a subsequent period will improve.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">2.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">For products where the customer&#8217;s defined specifications have not been met with at least two similarly configured systems and processes, the revenue and directly related costs are deferred at the time of shipment and later recognized at the time of customer acceptance or when this criterion has been met. On occasion, the Company has experienced longer than expected delays in receiving cash from certain customers pending final installation or system acceptance. If some customers refuse to pay the final payment, or otherwise delay final acceptance or installation, the deferred revenue would not be recognized, adversely affecting future cash flows and operating results.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">3.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Sales of certain equipment, spare parts and consumables are recognized upon shipment, as there are no post shipment obligations other than standard warranties.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:10pt;padding-left:24px;"><font style="font-family:inherit;font-size:10pt;">4.</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Service revenue is recognized upon performance of the services requested by the customer. Revenue related to service contracts is recognized ratably over the period of the contract or in accordance with the terms of the contract, which generally coincides with the performance of the services requested by the customer.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueRecognitionDeferredRevenue', window );">Deferred Profit</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Deferred Profit</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Revenue deferred pursuant to the Company&#8217;s revenue recognition policy, net of the related deferred costs, if any, is recorded as deferred profit in current liabilities.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsPolicyTextBlock', window );">Cash Equivalents</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Cash Equivalents &#8211;</font><font style="font-family:inherit;font-size:10pt;"> The Company considers all highly liquid investments with a maturity of three months or less when purchased to be cash equivalents. Cash and cash equivalents consist of amounts invested in U.S.&#160;money market funds and various U.S.&#160;and foreign bank operating and time deposit accounts.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy', window );">Restricted Cash</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Restricted Cash</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Restricted cash of </font><font style="font-family:inherit;font-size:10pt;">$3.3 million</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">$0.9 million</font><font style="font-family:inherit;font-size:10pt;"> as of </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;">, and September 30, 2016, includes collateral for bank guarantees required by certain customers from whom deposits have been received in advance of shipment. Restricted cash as of </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">September&#160;30, 2016</font><font style="font-family:inherit;font-size:10pt;"> includes </font><font style="font-family:inherit;font-size:10pt;">$0.2</font><font style="font-family:inherit;font-size:10pt;"> million relating the Company's proportional responsibility, assumed in connection with the BTU International Inc. (&#8220;BTU&#8221;) acquisition, for clean-up costs at a Superfund site.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ReceivablesPolicyTextBlock', window );">Accounts Receivable and Allowance for Doubtful Accounts</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable and Allowance for Doubtful Accounts &#8211;</font><font style="font-family:inherit;font-size:10pt;"> Accounts receivable are recorded at the gross sales price of products sold to customers on trade credit terms. Accounts receivable are considered past due when payment has not been received from the customer within the normal credit terms extended to that customer. A valuation allowance is established for accounts when collection is no longer probable. Accounts are written off against the allowance when the probability of collection is remote.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Accounts Receivable - Unbilled and Other</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Unbilled and other accounts receivable consist mainly of  a contingent portion of the sales price that is not collectible until successful installation of the product. These amounts are generally billed upon final customer acceptance.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskCreditRisk', window );">Concentrations of Credit Risk</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Concentrations of Credit Risk &#8211;</font><font style="font-family:inherit;font-size:10pt;"> Financial instruments that potentially subject the Company to significant concentrations of credit risk consist principally of cash and trade accounts receivable. The Company&#8217;s customers consist of solar cell and semiconductor manufacturers worldwide, as well as the lapping and polishing marketplace. Credit risk is managed by performing ongoing credit evaluations of our customers&#8217; financial condition, by requiring significant deposits where appropriate, and by actively monitoring collections. Letters of credit are required of certain customers depending on the size of the order, type of customer or its creditworthiness, and country of domicile. Reserves for potentially uncollectible receivables are maintained based on an assessment of collectability.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company maintains its cash, cash equivalents and restricted cash in multiple financial institutions. Approximately </font><font style="font-family:inherit;font-size:10pt;">65%</font><font style="font-family:inherit;font-size:10pt;"> of the Company's total cash balances are primarily invested in US Treasuries or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC). The remainder of the Company&#8217;s cash is maintained with financial institutions with reputable credit ratings in The Netherlands, France and China.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryPolicyTextBlock', window );">Inventories</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Inventories</font><font style="font-family:inherit;font-size:10pt;"> &#8211; We value our inventory at the lower of cost or net realizable value.  Costs for approximately </font><font style="font-family:inherit;font-size:10pt;">50%</font><font style="font-family:inherit;font-size:10pt;"> of inventory is valued on an average cost basis with the remainder determined on a first-in, first-out (FIFO) basis.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock', window );">Property, Plant and Equipment</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Property, Plant and Equipment</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Property, plant and equipment are recorded at cost. Maintenance and repairs are charged to expense as incurred. The cost of property retired or sold and the related accumulated depreciation are removed from the applicable accounts when disposition occurs and any gain or loss is recognized. Depreciation and amortization is computed using the straight-line method. Useful lives for equipment, machinery and leasehold improvements range from three to seven years; for furniture and fixtures from five to ten years; and for buildings from </font><font style="font-family:inherit;font-size:10pt;">20-30</font><font style="font-family:inherit;font-size:10pt;"> years.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy', window );">Goodwill</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Goodwill </font><font style="font-family:inherit;font-size:10pt;">&#8211; Goodwill and intangible assets with indefinite lives are not subject to amortization, but are tested for impairment when it is determined that it is more likely than not that the fair value of a reporting unit or the indefinite-lived intangible asset is less than its carrying amount, typically at the end of the fiscal year, or more frequently if circumstances dictate.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy', window );">Intangibles</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Intangibles</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Intangible assets are capitalized and amortized on a straight-line basis over their useful lives if the life is determinable. If the life is not determinable, amortization is not recorded.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock', window );">Long-lived Assets</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Long-lived assets </font><font style="font-family:inherit;font-size:10pt;">&#8211;</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;"> </font><font style="font-family:inherit;font-size:10pt;">Long-lived assets are reviewed for impairment when events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyPolicy', window );">Warranty</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Warranty &#8211;</font><font style="font-family:inherit;font-size:10pt;"> A limited warranty is provided free of charge, generally for periods of </font><font style="font-family:inherit;font-size:10pt;">12</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;">24</font><font style="font-family:inherit;font-size:10pt;"> months, for all purchases of the Company&#8217;s new products and systems. Accruals are recorded for estimated warranty costs at the time revenue is recognized. Estimates are based on past experience and take into account the nature of the products under warranty.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy', window );">Stock-Based Compensation</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Stock-Based Compensation -</font><font style="font-family:inherit;font-size:10pt;"> The Company measures compensation costs relating to share-based payment transactions based upon the grant date fair value of the award. Those costs are recognized as expense over the requisite service period, which is generally the vesting period. The benefits of tax deductions in excess of recognized compensation cost are credited to additional paid-in capital and reported as cash flow from financing activities. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9" rowspan="1"></td></tr><tr><td style="width:68%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(319</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(342</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">48</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(284</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(294</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock options issued under the terms of the Company's option plans have, or will have, an exercise price equal to the fair market value of the common stock at the close of trading on the NASDAQ the trading day prior to the date of the option grant and expire no later than </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">10 years</font><font style="font-family:inherit;font-size:10pt;"> from the date of grant, with the most recent option grant expiring in 2026. Options issued by the Company generally vest over </font><font style="font-family:inherit;font-size:10pt;">six months</font><font style="font-family:inherit;font-size:10pt;"> to </font><font style="font-family:inherit;font-size:10pt;color:#000000;text-decoration:none;">four</font><font style="font-family:inherit;font-size:10pt;"> years, subject to the Company's board of directors' (the &#8220;Board&#8221;) discretion pursuant to the Company's share-based compensation plans.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td style="width:49%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,841,567</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627,477</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.11</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100,000</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.99</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">344,075</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.25</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.80</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(55,446</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13.34</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(33,642</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.90</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,885,941</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.84</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,937,910</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.34</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,375,174</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.26</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,189,855</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.21</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2.88</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.03</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td style="width:65%;" rowspan="1" colspan="1"></td><td style="width:17%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:17%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td></tr></table></div><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">To estimate expected lives for this valuation, it was assumed that options will be exercised at varying schedules after becoming fully vested. Forfeitures have been estimated at the time of grant and will be revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. Forfeitures were estimated based upon historical experience. Fair value computations are highly sensitive to the volatility factor assumed; the greater the volatility, the higher the computed fair value of the options granted. The Company uses historical stock prices to determine the volatility factor.</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The Company awards restricted shares under its existing share-based compensation plans. The Company's restricted share awards vest in equal annual installments over a two to four year period. The total value of these awards is expensed on a ratable basis over the service period of the employees receiving the grants. The &#8220;service period&#8221; is the time during which the employees receiving grants must remain employees for the shares granted to fully vest.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueOfFinancialInstrumentsPolicy', window );">Fair Value of Financial Instruments</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"></font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value of Financial Instruments </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the Financial Accounting Standards Board (&#8220;FASB&#8221;) Accounting Standards Codification (&#8220;ASC&#8221;), the Company groups its financial assets and liabilities measured at fair value on a recurring basis in three levels, based on the markets in which the assets and liabilities are traded and the reliability of the assumptions used to determine fair value. These levels are:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;text-indent:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 1 - Valuation is based upon quoted market price for identical instruments traded in active markets.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 2 - Valuation is based upon quoted market prices for similar instruments in active markets, quoted prices for identical or similar instruments in markets that are not active, and model-based valuation techniques for which all significant assumptions are observable in the market.</font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;padding-left:48px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Level 3 - Valuation is generated from model-based techniques that use significant assumptions not observable in the market. Valuation techniques include use of discounted cash flow models and similar techniques.&#160;<br clear="none"/>        <br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In accordance with the requirements of the Fair Value Measurements and Disclosures Topic of the FASB ASC, it is the Company's policy to use observable inputs whenever reasonably practicable in order to minimize the use of unobservable inputs when developing fair value measurements. When available, the Company uses quoted market prices to measure fair value. If market prices are not available, the fair value measurement is based on models that use primarily market based parameters including interest rate yield curves, option volatilities and currency rates. In certain cases, where market rate assumptions are not available, the Company is required to make judgments about assumptions market participants would use to estimate the fair value of a financial instrument. Changes in the underlying assumptions used, including discount rates and estimates of future cash flows, could significantly affect the results of current or future values.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Cash, Cash Equivalents and Restricted Cash</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Included in Cash and Cash Equivalents in the Condensed Consolidated Balance Sheets are money market funds invested in treasury bills, notes and other direct obligations of the U.S. Treasury or are in financial institutions insured by the Federal Deposit Insurance Corporation (FDIC) and foreign bank operating and time deposit accounts. The fair value of this cash equivalent is based on Level 1 inputs in the fair value hierarchy.</font><font style="font-family:inherit;font-size:10pt;font-weight:bold;">&#160;</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Receivables and Payables</font><font style="font-family:inherit;font-size:10pt;"> &#8211; The recorded amounts of these financial instruments, including accounts receivable and accounts payable, approximate their fair value because of the short maturities of these instruments. If measured at fair value in the financial statements, these financial instruments would be classified as Level 3 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-style:italic;">Debt </font><font style="font-family:inherit;font-size:10pt;">&#8211;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;"> </font><font style="font-family:inherit;font-size:10pt;">The recorded amounts of these financial instruments, including long-term debt and current maturities of long-term debt, approximate fair value and are considered Level 2 in the fair value hierarchy.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;"></font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy', window );">Pensions</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Pensions </font><font style="font-family:inherit;font-size:10pt;">&#8211; The Company has retirement plans covering substantially all employees. The principal plans are the multiemployer defined benefit pension plans of the Company&#8217;s operations in The Netherlands and France and the plan for hourly union employees in Pennsylvania. The multiemployer plans in the United States and France are insignificant to the Company's results of operations and financial condition.  The Company's defined contribution plans cover substantially all of the employees in the United States. The Company matches certain employee funds on a discretionary basis while certain subsidiaries require a minimum match to maintain their safe harbor status.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShippingAndHandlingCostPolicyTextBlock', window );">Shipping Expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Shipping expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Shipping expenses of </font><font style="font-family:inherit;font-size:10pt;">$0.4 million</font><font style="font-family:inherit;font-size:10pt;"> for each of the three months ended </font><font style="font-family:inherit;font-size:10pt;">December&#160;31, 2016</font><font style="font-family:inherit;font-size:10pt;"> and </font><font style="font-family:inherit;font-size:10pt;">2015</font><font style="font-family:inherit;font-size:10pt;">, are included in selling, general and administrative expenses.</font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpensePolicy', window );">Research, Development and Engineering Expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Research, development and engineering expense</font><font style="font-family:inherit;font-size:10pt;"> &#8211; Research, development and engineering expenses consist of the cost of employees, consultants and contractors who design, engineer and develop new products and processes; materials and supplies used in those activities; and product prototyping. The Company receives reimbursements through governmental research and development grants which are netted against these expenses when certain conditions have been met.</font></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock', window );">Impact of Recently Issued Accounting Pronouncements</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Impact of Recently Issued Accounting Pronouncements&#160;</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In November 2016, the FASB issued Accounting Standards Update ("ASU") No. 2016-18,&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;">Statement of Cash Flows: Restricted Cash</font><font style="font-family:inherit;font-size:10pt;">. The amendments address diversity in practice that exists in the classification and presentation of changes in restricted cash and require that a statement of cash flows explain the change during the period in the total of cash, cash equivalents, and amounts generally described as restricted cash or restricted cash equivalents. This ASU is effective retrospectively for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In October 2016, the FASB issued ASU No. 2016-16,&#160;</font><font style="font-family:inherit;font-size:10pt;font-style:italic;">Income Taxes: Intra-Entity Transfers of Assets Other than Inventory</font><font style="font-family:inherit;font-size:10pt;">. The amendments in this ASU remove the prohibition against the recognition of current and deferred income tax effects of intra-entity transfers of assets other than inventory until the asset has been sold to an outside party. The ASU is effective for fiscal years and interim periods within those years beginning after December 15, 2017. The Company does not expect the adoption of this ASU to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In August 2016, the FASB issued ASU 2016-15, &#8220;Statement of Cash Flows (Topic 230): Classification of Certain Cash Receipts and Cash Payments&#8221;. These amendments provide cash flow statement classification guidance for: 1. Debt Prepayment or Debt Extinguishment Costs; 2. Settlement of Zero-Coupon Debt Instruments or Other Debt Instruments with Coupon Interest Rates That Are Insignificant in Relation to the Effective Interest Rate of the Borrowing; 3. Contingent Consideration Payments Made after a Business Combination; 4. Proceeds from the Settlement of Insurance Claims; 5. Proceeds from the Settlement of Corporate-Owned Life Insurance Policies, including Bank-Owned Life Insurance Policies; 6. Distributions Received from Equity Method Investees; 7. Beneficial Interests in Securitization Transactions; and 8. Separately Identifiable Cash Flows and Application of the Predominance Principle. The amendments in this ASU are effective for public business entities for fiscal years beginning after December 15, 2017, and interim periods within those fiscal years. Early application is permitted, including adoption in an interim period. The Company is currently in the process of evaluating the impact of the adoption on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In June 2016, the FASB issued ASU 2016-13, &#8220;Financial Instruments - Credit Losses: Measurement of Credit Losses on Financial Instruments&#8221;. ASU 2016-13 amends the impairment model to utilize an expected loss methodology in place of the currently used incurred loss methodology, which will result in the more timely recognition of losses. The new standard applies to financial assets measured at amortized cost basis, including receivables that result from revenue transactions and held-to-maturity debt securities.&#160;The new guidance will be effective for the Company starting in the first quarter of fiscal 2021. Early adoption is permitted starting in the first quarter of fiscal 2020. The Company is in the process of determining the effects the adoption will have on its consolidated financial&#160;statements as well as whether to adopt the new guidance early.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In May 2014, the FASB issued ASU No. 2014-09 regarding ASC Topic 606, &#8220;Revenue from Contracts with Customers.&#8221; ASU 2014-09 provides principles for recognizing revenue to depict the transfer of promised goods or services to customers in an amount that reflects the consideration to which the entity expects to be entitled in exchange for those goods or services. In August 2015, the FASB issued ASU 2015-14 to defer the effective date by one year with early adoption permitted as of the original effective date. ASU 2014-09 will be effective for Amtech&#8217;s fiscal year beginning October 1, 2018 unless we elect the earlier date of October 1, 2017. In addition, the FASB issued ASU 2016-08, ASU 2016-10, ASU 2016-12 and ASU 2016-20 in March 2016, April 2016, May 2016 and December 2016, respectively, to help provide interpretive clarifications on the new guidance in ASC Topic 606. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In March 2016, the FASB issued ASU No. 2016-09,&#160;Compensation - &#8220;Stock Compensation (Topic 718)&#8221;. ASU 2016-09 identifies areas for simplification involving several aspects of accounting for share-based payment transactions, including the income tax consequences, classification of awards as either equity or liabilities, an option to recognize gross stock compensation expense with actual forfeitures recognized as they occur, as well as certain classifications on the statement of cash flows. The amendments in this ASU are effective for annual periods beginning after December 15, 2016 and for the interim periods therein. The Company is currently assessing the impact that adopting this new accounting standard will have on its consolidated financial statements. </font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In March 2016, the FASB issued ASU 2016-07,&#160;&#8220;Equity Method and Joint Ventures&#8221;&#160;affecting all entities that have an investment that becomes qualified for the equity method of accounting as a result of an increase in the level of ownership or degree of influence. ASU 2016-07 is effective for the Company beginning on&#160;</font><font style="font-family:inherit;font-size:10pt;color:#222222;">January 1, 2017</font><font style="font-family:inherit;font-size:10pt;">, early adoption is permitted.  The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In February 2016, the FASB issued ASU No. 2016-02, &#8220;Leases (Topic 842)&#8221;, which requires companies to generally recognize on the balance sheet operating and financing lease liabilities and corresponding right-of-use-assets. ASU 2016-02 also requires improved disclosures to help users of financial statements better understand the amount, timing and uncertainty of cash flows arising from leases. This ASU is effective for fiscal years beginning after December 15, 2018 and early application is permitted. The Company is currently in the process of evaluating the impact of this standard on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In January 2016, the FASB issued ASU No. 2016-01, &#8220;Financial Instruments - Overall (Subtopic 825-10), Recognition and Measurement of Financial Assets and Financial Liabilities&#8221;, which addresses certain aspects of recognition, measurement, presentation, and disclosure of financial instruments. This ASU is effective for fiscal years beginning after December 15, 2017 and early adoption is not permitted. The Company is currently evaluating the impact that the standard will have on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In November 2015, the FASB issued ASU No. 2015-17, &#8220;Balance Sheet Classification of Deferred Taxes&#8221;. This ASU requires entities to classify deferred tax liabilities and assets as noncurrent in a classified statement of financial position. This ASU is effective for fiscal years beginning after December 15, 2016, and interim periods within those annual periods. Early adoption is permitted for all entities as of the beginning of an interim or annual reporting period. The adoption of this guidance by the Company is not expected to have a material impact on its consolidated financial statements.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued ASU No. 2015-16,&#160;&#8220;Business Combinations (Topic 805): Simplifying the Accounting for Measurement-Period Adjustments&#8221;, which simplifies the accounting for measurement-period adjustments to provisional amounts recognized in a business combination. ASU 2015-16 is effective for fiscal years (and interim reporting periods within those years) beginning after December 15, 2016. The provisions of ASU 2015-16 are not expected to have a material effect on the Company's financial condition, results of operations, or cash flows.</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">In July 2015, the FASB issued ASU No. 2015-11, &#8220;Simplifying the Measurement of Inventory&#8221;. This ASU simplifies the measurement of inventory by requiring certain inventory to be measured at the lower of cost or net realizable value. The amendments in this ASU are effective for fiscal years beginning after December 15, 2016 and for interim periods therein. The Company does not expect adoption of this ASU to have a material impact on the Company's consolidated financial position and results of operations.</font></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BasisOfAccountingPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for basis of accounting, or basis of presentation, used to prepare the financial statements (for example, US Generally Accepted Accounting Principles, Other Comprehensive Basis of Accounting, IFRS).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BasisOfAccountingPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for cash and cash equivalents, including the policy for determining which items are treated as cash equivalents. Other information that may be disclosed includes (1) the nature of any restrictions on the entity's use of its cash and cash equivalents, (2) whether the entity's cash and cash equivalents are insured or expose the entity to credit risk, (3) the classification of any negative balance accounts (overdrafts), and (4) the carrying basis of cash equivalents (for example, at cost) and whether the carrying amount of cash equivalents approximates fair value.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 305<br> -SubTopic 10<br> -Section 05<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6375392&amp;loc=d3e26790-107797<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4273-108586<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Cash<br> -URI http://asc.fasb.org/extlink&amp;oid=6506951<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Cash Equivalents<br> -URI http://asc.fasb.org/extlink&amp;oid=6507016<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Financial Reporting Release (FRR)<br> -Number 203<br> -Paragraph 02-03<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 1<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Entity's cash and cash equivalents accounting policy with respect to restricted balances.  Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or company statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.1(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 305<br> -SubTopic 10<br> -Section 05<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6375392&amp;loc=d3e26790-107797<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6367179&amp;loc=d3e4273-108586<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 1<br> -Article 5<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Financial Reporting Release (FRR)<br> -Number 203<br> -Paragraph 02-03<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsRestrictedCashAndCashEquivalentsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskCreditRisk">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for credit risk.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 55<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6875567&amp;loc=d3e14489-108613<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 825<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=51676700&amp;loc=d3e61082-112788<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 825<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=28088331&amp;loc=SL29635902-196195<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 825<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=51676700&amp;loc=d3e61044-112788<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskCreditRisk</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConsolidationPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy regarding (1) the principles it follows in consolidating or combining the separate financial statements, including the principles followed in determining the inclusion or exclusion of subsidiaries or other entities in the consolidated or combined financial statements and (2) its treatment of interests (for example, common stock, a partnership interest or other means of exerting influence) in other entities, for example consolidation or use of the equity or cost methods of accounting.  The accounting policy may also address the accounting treatment for intercompany accounts and transactions, noncontrolling interest, and the income statement treatment in consolidation for issuances of stock by a subsidiary.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=18733093&amp;loc=d3e5614-111684<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.3A-02)<br> -URI http://asc.fasb.org/extlink&amp;oid=27015204&amp;loc=d3e355033-122828<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph k<br> -Article 1<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02, 03<br> -Article 3A<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConsolidationPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueOfFinancialInstrumentsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for determining the fair value of financial instruments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13279-108611<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 60<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=7493716&amp;loc=d3e21868-110260<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueOfFinancialInstrumentsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for goodwill. This accounting policy also may address how an entity assesses and measures impairment of goodwill, how reporting units are determined, how goodwill is allocated to such units, and how the fair values of the reporting units are determined.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAndIntangibleAssetsGoodwillPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for intangible assets. This accounting policy may address both intangible assets subject to amortization and those that are not. The following also may be disclosed: (1) a description of intangible assets (2) the estimated useful lives of those assets (3) the amortization method used (4) how the entity assesses and measures impairment of such assets (5) how future cash flows are estimated (6) how the fair values of such asset are determined.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16265-109275<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillAndIntangibleAssetsIntangibleAssetsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for recognizing and measuring the impairment of long-lived assets. An entity also may disclose its accounting policy for long-lived assets to be sold. This policy excludes goodwill and intangible assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 05<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=51717228&amp;loc=d3e202-110218<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 5<br> -Section CC<br> -Subsection 3<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ImpairmentOrDisposalOfLongLivedAssetsPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for major classes of inventories, bases of stating inventories (for example, lower of cost or market), methods by which amounts are added and removed from inventory classes (for example, FIFO, LIFO, or average cost), loss recognition on impairment of inventories, and situations in which inventories are stated above cost. If inventory is carried at cost, this disclosure includes the nature of the cost elements included in inventory.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=28360613&amp;loc=d3e4492-108314<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=28360613&amp;loc=d3e4556-108314<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Financial Reporting Release (FRR)<br> -Number 206<br> -Paragraph b<br> -Subparagraph i, ii<br> -Chapter 2<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 6<br> -Subparagraph a<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy pertaining to new accounting pronouncements that may impact the entity's financial reporting. Includes, but is not limited to, quantification of the expected or actual impact.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NewAccountingPronouncementsPolicyPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for pension plans. This accounting policy may address (1) the types of plans sponsored by the entity (2) groups that participate in (or are covered by) each plan (3) how plan assets, liabilities and expenses are measured, including the use of any actuaries and (4) significant assumptions used by the entity to value plan assets and liabilities and how such assumptions are derived.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6412939&amp;loc=d3e15145-114933<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=58740216&amp;loc=d3e1928-114920<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 80<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=49170332&amp;loc=d3e29149-114947<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 715<br> -SubTopic 70<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=49170846&amp;loc=d3e28014-114942<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PensionAndOtherPostretirementPlansPensionsPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for long-lived, physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, basis of assets, depreciation and depletion methods used, including composite deprecation, estimated useful lives, capitalization policy, accounting treatment for costs incurred for repairs and maintenance, capitalized interest and the method it is calculated, disposals and impairments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.13(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ReceivablesPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for trade and other accounts receivable, and finance, loan and lease receivables, including those classified as held for investment and held for sale. This disclosure may include (1) the basis at which such receivables are carried in the entity's statements of financial position (2) how the level of the valuation allowance for receivables is determined (3) when impairments, charge-offs or recoveries are recognized for such receivables (4) the treatment of origination fees and costs, including the amortization method for net deferred fees or costs (5) the treatment of any premiums or discounts or unearned income (6) the entity's income recognition policies for such receivables, including those that are impaired, past due or placed on nonaccrual status and (7) the treatment of foreclosures or repossessions (8) the nature and amount of any guarantees to repurchase receivables.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6378556&amp;loc=d3e10133-111534<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=49124121&amp;loc=d3e4975-111524<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 3-5<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ReceivablesPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpensePolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for costs it has incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 730<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Research and Development<br> -URI http://asc.fasb.org/extlink&amp;oid=6523717<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpensePolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRecognitionDeferredRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for recognizing unearned income or deferred revenue related to transactions involving the sale of a product or performance of services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 13.B.Q1)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 13<br> -Section B<br> -Paragraph Question 1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRecognitionDeferredRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueRecognitionPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for revenue recognition. If the entity has different policies for different types of revenue transactions, the policy for each material type of transaction is generally disclosed. If a sales transaction has multiple element arrangements (for example, delivery of multiple products, services or the rights to use assets) the disclosure may indicate the accounting policy for each unit of accounting as well as how units of accounting are determined and valued. The disclosure may encompass important judgment as to appropriateness of principles related to recognition of revenue. The disclosure also may indicate the entity's treatment of any unearned or deferred revenue that arises from the transaction.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18823-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18726-107790<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 13.B.Q1)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 13<br> -Section B<br> -Paragraph Question 1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueRecognitionPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for stock option and stock incentive plans. This disclosure may include (1) the types of stock option or incentive plans sponsored by the entity (2) the groups that participate in (or are covered by) each plan (3) significant plan provisions and (4) how stock compensation is measured, and the methodologies and significant assumptions used to determine that measurement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5047-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b),(f)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationOptionAndIncentivePlansPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShippingAndHandlingCostPolicyTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the classification of shipping and handling costs, including whether the costs are included in cost of sales or included in other income statement accounts. If shipping and handling fees are significant and are not included in cost of sales, disclosure includes both the amounts of such costs and the line item on the income statement which includes such costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Shipping Costs<br> -URI http://asc.fasb.org/extlink&amp;oid=51575562<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 45<br> -Section S99<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6408413&amp;loc=d3e221937-122793<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 45<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=51671805&amp;loc=d3e60635-111653<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 45<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=51667946&amp;loc=d3e61069-111654<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Handling Costs<br> -URI http://asc.fasb.org/extlink&amp;oid=51575068<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18726-107790<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShippingAndHandlingCostPolicyTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyPolicy">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for standard warranties including the methodology for measuring the liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyPolicy</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UseOfEstimates">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of accounting policy for the use of estimates in the preparation of financial statements in conformity with generally accepted accounting principles.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6061-108592<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6143-108592<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6132-108592<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UseOfEstimates</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>30
<FILENAME>R19.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6813862048">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies (Tables)<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock', window );">Components of Deferred Profit</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The components of deferred profit are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:72%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred revenues</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,164</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,029</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred costs</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,352</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,320</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:30px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Deferred profit</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,812</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,709</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock', window );">Schedule of Inventory</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The components of inventories are as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:72%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Purchased parts and raw materials</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,148</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,435</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Work-in-process</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,832</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,044</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Finished goods</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,873</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,744</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20,853</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">23,223</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentTextBlock', window );">Property, Plant and Equipment</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of property, plant and equipment:</font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:72%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Land, building and leasehold improvements</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17,799</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,255</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Equipment and machinery</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8,749</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,056</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Furniture and fixtures</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,199</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,426</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">31,747</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">32,737</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Accumulated depreciation and amortization</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(16,457</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(16,777</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,290</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,960</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfGoodwillTextBlock', window );">Activity in Goodwill</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in goodwill:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td style="width:49%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Semiconductor</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Polishing</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Total</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,597</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12,388</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,269</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,269</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at September 30, 2016</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,328</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,119</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net foreign exchange differences</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(330</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at December 31, 2016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,998</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,789</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Goodwill</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6,177</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,968</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;Accumulated impairment losses</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,179</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,179</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Carrying value at December 31, 2016</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,998</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5,063</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">728</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,789</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock', window );">Summary of Intangibles</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of intangibles:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="22" rowspan="1"></td></tr><tr><td style="width:22%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:4%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:8%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Useful Life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Gross Carrying Amount</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Accumulated Amortization</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Net Carrying Amount</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">December&#160;31, 2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="9" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">September&#160;30, 2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="19" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Customer lists</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6-10 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,387</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,172</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,215</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,432</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,164</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,268</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Technology</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5-10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,014</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,576</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,438</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,214</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,678</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,536</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Trade names</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10-15 years</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,441</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(200</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,241</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,455</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(219</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,236</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2-10 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">260</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(239</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">21</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">277</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(217</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">60</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,102</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,187</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3,915</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7,378</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,278</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,100</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;"></font></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock', window );">Summary of Activity in Accrued Warranty Expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following is a summary of activity in accrued warranty expense:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:73%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning balance</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">795</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">793</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Additions for warranties issued during the period</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">383</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">146</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Reductions in the liability for payments made under the warranty</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(109</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Changes related to pre-existing warranties</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(245</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(54</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Currency translation adjustment</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(27</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(10</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending balance</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">879</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">766</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock', window );">Effects of Share-based Compensation Expense</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock-based compensation expense reduced the Company&#8217;s results of operations by the following amounts:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9" rowspan="1"></td></tr><tr><td style="width:68%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income before income taxes (1)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(319</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(342</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on income taxes</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">35</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">48</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Effect on net income</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(284</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(294</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">Stock-based compensation expense is included in selling, general and administrative expenses.</font></div></td></tr></table></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock', window );">Stock Option Transactions and Options Outstanding</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Stock option transactions and the options outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="16" rowspan="1"></td></tr><tr><td style="width:49%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="15" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Options</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Exercise</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Price</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at beginning of period</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,841,567</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627,477</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.11</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Granted</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">100,000</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4.99</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">344,075</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5.25</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercised</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.80</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Forfeited</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(55,446</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13.34</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(33,642</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14.90</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Outstanding at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,885,941</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.84</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,937,910</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.34</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:20px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Exercisable at end of period</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,375,174</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">8.26</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,189,855</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9.21</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted average fair value of options </font></div><div style="font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">granted during the period</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2.88</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3.03</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock', window );">Options Fair Value Assumptions</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The fair value of options was estimated at the applicable grant date using the Black-Scholes option pricing model with the following assumptions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:99.8046875%;border-collapse:collapse;text-align:left;"><tr><td colspan="4" rowspan="1"></td></tr><tr><td style="width:65%;" rowspan="1" colspan="1"></td><td style="width:17%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:17%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Risk free interest rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Expected life</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6 years</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Dividend rate</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">0%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Volatility</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">62%</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock', window );">Restricted Stock Transactions and Awards Outstanding</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Restricted stock transactions and awards outstanding are summarized as follows:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="14" rowspan="1"></td></tr><tr><td style="width:49%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:10%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="13" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="6" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Awards</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Weighted</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Average</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Grant Date</font></div><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Fair Value</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Beginning Outstanding</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,540</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Released</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(13,540</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">7.98</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Ending Outstanding</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#8212;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchAndDevelopmentExpenseTableTextBlock', window );">Research and Development Expense and Grants Earned</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The table below shows gross research and development expenses and grants earned:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="9" rowspan="1"></td></tr><tr><td style="width:70%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Research, development and engineering</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,830</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,615</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Grants earned</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(203</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(327</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;&#160;&#160;&#160;Net research, development and engineering</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,627</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,288</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchAndDevelopmentExpenseTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development Expense [Table Text Block]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchAndDevelopmentExpenseTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredRevenueByArrangementDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the type of arrangements and the corresponding amounts that comprise the current and noncurrent balance of deferred revenue as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 13.A.4(a).Q1)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 8<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6935-107765<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 13<br> -Section A<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredRevenueByArrangementDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of physical assets used in the normal conduct of business and not intended for resale. Includes, but is not limited to, balances by class of assets, depreciation and depletion expense and method used, including composite depreciation, and accumulated deprecation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.13)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 13<br> -Subparagraph b<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the amount of total share-based compensation cost, including the amounts attributable to each share-based compensation plan and any related tax benefits.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfCompensationCostForShareBasedPaymentArrangementsAllocationOfShareBasedCompensationCostsByPlanTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets, excluding financial assets and goodwill, lacking physical substance with a finite life, by either major class or business segment.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16265-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfFiniteLivedIntangibleAssetsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfGoodwillTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of goodwill by reportable segment and in total which includes a rollforward schedule.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13854-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfGoodwillTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 2<br> -Paragraph 6<br> -Subparagraph a,b,c<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfInventoryCurrentTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the number and weighted-average exercise prices (or conversion ratios) for share options (or share units) that were outstanding at the beginning and end of the year, vested and expected to vest, exercisable or convertible at the end of the year, and the number of share options or share units that were granted, exercised or converted, forfeited, and expired during the year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedCompensationStockOptionsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the significant assumptions used during the year to estimate the fair value of stock options, including, but not limited to: (a) expected term of share options and similar instruments, (b) expected volatility of the entity's shares, (c) expected dividends, (d) risk-free rate(s), and (e) discount for post-vesting restrictions.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfShareBasedPaymentAwardStockOptionsValuationAssumptionsTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Disclosure of the number and weighted-average grant date fair value for restricted stock and restricted stock units that were outstanding at the beginning and end of the year, and the number of restricted stock and restricted stock units that were granted, vested, or forfeited during the year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfSharebasedCompensationRestrictedStockAndRestrictedStockUnitsActivityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>31
<FILENAME>R20.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6627107024">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Earnings Per Share (Tables)<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Earnings Per Share [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock', window );">Basic and Diluted Earnings Per Share</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">The following table outlines basic and diluted EPS:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:73%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:11%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;font-weight:bold;">(in thousands, except per share amounts)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Basic Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(53</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,015</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Basic loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Diluted Loss Per Share Computation</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net loss attributable to Amtech Systems, Inc.</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(53</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(4,015</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Weighted Average Shares Outstanding:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Common stock</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:28px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted shares</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,179</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13,152</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Diluted loss per share attributable to Amtech shareholders</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.00</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(0.31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:3px double #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman; font-size:10pt;"><tr><td style="width:48px;" rowspan="1" colspan="1"></td><td rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:top" rowspan="1" colspan="1"><div style="line-height:120%;font-size:8pt;padding-left:24px;"><font style="font-family:inherit;font-size:8pt;">(1)</font></div></td><td style="vertical-align:top;" rowspan="1" colspan="1"><div style="line-height:120%;text-align:justify;font-size:8pt;"><font style="font-family:inherit;font-size:8pt;">The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.</font></div></td></tr></table></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>32
<FILENAME>R21.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811058480">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment Information (Tables)<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingAbstract', window );"><strong>Segment Reporting [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock', window );">Business Segment Information</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Information concerning our business segments is as follows:</font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:98.6328125%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:69%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Net Revenues:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">11,424</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">9,543</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,703</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">10,700</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,008</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">1,831</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">29,135</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">22,074</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Operating income (loss):</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar *</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,023</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,864</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2,361</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(160</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">464</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">169</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related </font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(1,982</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(2,074</font></div></td><td style="vertical-align:middle;border-bottom:1px solid #000000;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(180</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;background-color:#cceeff;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">(3,929</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">)</font></div></td></tr></table></div></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;padding-bottom:6px;padding-top:6px;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">*  The financial statement of business units included in the Solar segment include some sales of equipment and parts to the semiconductor, silicon wafer and MEMS industries, comprising less than </font><font style="font-family:inherit;font-size:10pt;">25%</font><font style="font-family:inherit;font-size:10pt;"> of the Solar segment revenue.</font></div><div style="line-height:120%;text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div><div style="line-height:120%;text-align:center;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;margin-left:auto;margin-right:auto;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="8" rowspan="1"></td></tr><tr><td style="width:70%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:12%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:13%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:middle;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">December&#160;31, <br clear="none"/>2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;border-bottom:1px solid #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">September&#160;30, <br clear="none"/>2016</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="7" style="vertical-align:middle;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:center;font-size:9pt;"><font style="font-family:inherit;font-size:9pt;font-weight:bold;">(dollars in thousands)</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Identifiable Assets:</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="3" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Solar</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">43,334</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">42,962</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Semiconductor</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">51,898</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">51,985</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Polishing</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,906</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">4,819</font></div></td><td style="vertical-align:bottom;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Non-segment related</font></div></td><td colspan="2" style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">15,780</font></div></td><td style="vertical-align:bottom;border-bottom:1px solid #000000;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18,664</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">115,918</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">$</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">118,430</font></div></td><td style="vertical-align:bottom;border-bottom:3px double #000000;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;"><br clear="none"/></font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the profit or loss and total assets for each reportable segment. An entity discloses certain information on each reportable segment if the amounts (a) are included in the measure of segment profit or loss reviewed by the chief operating decision maker or (b) are otherwise regularly provided to the chief operating decision maker, even if not included in that measure of segment profit or loss.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8906-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 25<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8813-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8721-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e8736-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfSegmentReportingInformationBySegmentTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>33
<FILENAME>R22.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6816312944">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Major Customers and Foreign Sales (Tables)<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th"><div>Dec. 31, 2016</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_MajorCustomersAndForeignSalesAbstract', window );"><strong>Major Customers and Foreign Sales [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock', window );">Revenues by Geographic Region</a></td>
<td class="text"><div style="font-family:Times New Roman;font-size:10pt;"><div style="line-height:120%;text-align:justify;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Our net revenues were to customers in the following geographic regions:</font></div><div style="line-height:120%;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div><div style="line-height:120%;font-size:10pt;"><div style="padding-left:0px;text-indent:0px;line-height:normal;padding-top:10px;"><table cellpadding="0" cellspacing="0" style="font-family:Times New Roman;font-size:10pt;width:100%;border-collapse:collapse;text-align:left;"><tr><td colspan="6" rowspan="1"></td></tr><tr><td style="width:66%;" rowspan="1" colspan="1"></td><td style="width:15%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td><td style="width:2%;" rowspan="1" colspan="1"></td><td style="width:15%;" rowspan="1" colspan="1"></td><td style="width:1%;" rowspan="1" colspan="1"></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="5" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Three Months Ended December 31,</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2016</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1"><div style="text-align:center;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">2015</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">United States</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">28</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total North America</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">20</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">31</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td colspan="2" style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1"><div style="overflow:hidden;height:10px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">China</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">26</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">20</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Malaysia</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">17</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">18</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Taiwan</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">12</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">6</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">3</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Asia</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">61</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">54</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Germany</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">5</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">2</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;text-indent:18px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">Other</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">14</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">13</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">%</font></div></td></tr><tr><td style="vertical-align:bottom;background-color:#cceeff;padding-left:20px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;padding-left:18px;text-indent:0px;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">Total Europe</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">19</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">15</font></div></td><td style="vertical-align:bottom;background-color:#cceeff;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:1px solid #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr><tr><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;padding-right:2px;" rowspan="1" colspan="1"><div style="overflow:hidden;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;">&#160;</font></div></td><td style="vertical-align:bottom;padding-left:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:right;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">100</font></div></td><td style="vertical-align:bottom;padding-right:2px;padding-top:2px;padding-bottom:2px;border-top:1px solid #000000;border-bottom:3px double #000000;" rowspan="1" colspan="1"><div style="text-align:left;font-size:10pt;"><font style="font-family:inherit;font-size:10pt;font-weight:bold;">%</font></div></td></tr></table></div></div></div><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_MajorCustomersAndForeignSalesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Major Customers and Foreign Sales [Abstract]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_MajorCustomersAndForeignSalesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the names of foreign countries from which revenue is material and the amount of revenue from external customers attributed to those countries. An entity may also provide subtotals of geographic information about groups of countries.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=51669610&amp;loc=d3e9038-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfRevenueFromExternalCustomersAttributedToForeignCountriesByGeographicAreaTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>34
<FILENAME>R23.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6813688384">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Deferred Profit (Details)<br> $ in Thousands</strong></div></th>
<th class="th">
<div>Dec. 31, 2016 </div>
<div>USD ($) </div>
<div>systems </div>
<div>equipment</div>
</th>
<th class="th">
<div>Sep. 30, 2016 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses', window );">Number of similarly configured systems and processes | systems</a></td>
<td class="nump">2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_NumberOfSimilarlyConfiguredItemsOfEquipment', window );">Number of similarly configured items of equipment | equipment</a></td>
<td class="nump">2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredRevenue', window );">Deferred revenues</a></td>
<td class="nump">$ 8,164<span></span>
</td>
<td class="nump">$ 7,029<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredCostsCurrent', window );">Deferred costs</a></td>
<td class="nump">4,352<span></span>
</td>
<td class="nump">2,320<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherDeferredCreditsCurrent', window );">Deferred profit</a></td>
<td class="nump">$ 3,812<span></span>
</td>
<td class="nump">$ 4,709<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_NumberOfSimilarlyConfiguredItemsOfEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number Of Similarly Configured Items Of Equipment</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_NumberOfSimilarlyConfiguredItemsOfEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_NumberOfSimilarlyConfiguredSystemsAndProcesses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number Of Similarly Configured Systems And Processes</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_NumberOfSimilarlyConfiguredSystemsAndProcesses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredCostsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of deferred costs capitalized at the end of the reporting period that are expected to be charged against earnings within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.8)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredCostsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred revenue as of balance sheet date. Deferred revenue represents collections of cash or other assets related to a revenue producing activity for which revenue has not yet been recognized. Generally, an entity records deferred revenue when it receives consideration from a customer before achieving certain criteria that must be met for revenue to be recognized in conformity with GAAP.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 13.A.4(a).Q1 Response)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012821&amp;loc=d3e214044-122780<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 13<br> -Section A<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherDeferredCreditsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of unearned revenue or income not otherwise specified in the taxonomy which is expected to be taken into income within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherDeferredCreditsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>35
<FILENAME>R24.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814094960">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Restricted Cash (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherCommitmentsLineItems', window );"><strong>Other Commitments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
<td class="nump">$ 3,250<span></span>
</td>
<td class="nump">$ 893<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherCommitmentsAxis=us-gaap_EnvironmentalRestorationCostsMember', window );">Environmental Restoration Costs | Superfund Site</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherCommitmentsLineItems', window );"><strong>Other Commitments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue', window );">Restricted cash</a></td>
<td class="nump">$ 200<span></span>
</td>
<td class="nump">$ 200<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherCommitmentsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherCommitmentsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The carrying amounts of cash and cash equivalent items which are restricted as to withdrawal or usage. Restrictions may include legally restricted deposits held as compensating balances against short-term borrowing arrangements, contracts entered into with others, or entity statements of intention with regard to particular deposits; however, time deposits and short-term certificates of deposit are not generally included in legally restricted deposits. Excludes compensating balance arrangements that are not agreements which legally restrict the use of cash amounts shown on the balance sheet. For a classified balance sheet represents the current portion only (the noncurrent portion has a separate concept); there is a separate and distinct element for unclassified presentations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherCommitmentsAxis=us-gaap_EnvironmentalRestorationCostsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherCommitmentsAxis=us-gaap_EnvironmentalRestorationCostsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EnvironmentalRemediationSiteAxis=asys_SuperfundSiteMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EnvironmentalRemediationSiteAxis=asys_SuperfundSiteMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>36
<FILENAME>R25.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6813644256">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Concentrations of Credit Risk (Details) - Customer<br></strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1">9 Months Ended</th>
<th class="th" colspan="2">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Jun. 30, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
<th class="th"><div>Sep. 30, 2015</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Customer Concentration Risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration Risk [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">12.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_NumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentTypeAxis=asys_USTreasuriesandFDICInsuredMember', window );">US Treasuries and FDIC Insured | Cash and Cash Equivalents and Restricted Cash</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration Risk [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">65.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_NumberOfCustomers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number Of Customers</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_NumberOfCustomers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentTypeAxis=asys_USTreasuriesandFDICInsuredMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentTypeAxis=asys_USTreasuriesandFDICInsuredMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=asys_CashAndCashEquivalentsAndRestrictedCashMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=asys_CashAndCashEquivalentsAndRestrictedCashMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>37
<FILENAME>R26.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825225648">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Inventories (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
<th class="th"><div>Jun. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PercentageOfWeightedAverageCostInventory', window );">Percentage of average cost inventory</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">50.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNetAbstract', window );"><strong>Inventory, Net [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves', window );">Purchased parts and raw materials</a></td>
<td class="nump">$ 12,148<span></span>
</td>
<td class="nump">$ 12,435<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWorkInProcessNetOfReserves', window );">Work-in-process</a></td>
<td class="nump">5,832<span></span>
</td>
<td class="nump">7,044<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryFinishedGoodsNetOfReserves', window );">Finished goods</a></td>
<td class="nump">2,873<span></span>
</td>
<td class="nump">3,744<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventory</a></td>
<td class="nump">$ 20,853<span></span>
</td>
<td class="nump">$ 23,223<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryFinishedGoodsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB TOPIC 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 5<br> -Section BB<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryFinishedGoodsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 35<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=51655945&amp;loc=d3e3927-108312<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=28358313&amp;loc=d3e6676-107765<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregated amount of unprocessed materials to be used in manufacturing or production process and supplies that will be consumed. This amount is net of valuation reserves and adjustments.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a)(4),(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB TOPIC 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 5<br> -Section BB<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryRawMaterialsAndSuppliesNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWorkInProcessNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB TOPIC 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 5<br> -Section BB<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWorkInProcessNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PercentageOfWeightedAverageCostInventory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The percentage of weighted average cost inventory present at the reporting date when inventory is valued using different valuation methods.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PercentageOfWeightedAverageCostInventory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>38
<FILENAME>R27.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6826171024">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Property, Plant and Equipment (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">$ 31,747<span></span>
</td>
<td class="nump">$ 32,737<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment', window );">Accumulated depreciation and amortization</a></td>
<td class="num">(16,457)<span></span>
</td>
<td class="num">(16,777)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, plant and equipment - net</a></td>
<td class="nump">15,290<span></span>
</td>
<td class="nump">15,960<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandBuildingsAndImprovementsMember', window );">Land, building and leasehold improvements</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">17,799<span></span>
</td>
<td class="nump">18,255<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Equipment and machinery</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">$ 8,749<span></span>
</td>
<td class="nump">9,056<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Equipment and machinery | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember', window );">Equipment and machinery | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">7 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leasehold improvements | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember', window );">Leasehold improvements | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">7 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember', window );">Furniture and fixtures</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentGross', window );">Property, plant and equipment, gross</a></td>
<td class="nump">$ 5,199<span></span>
</td>
<td class="nump">$ 5,426<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember', window );">Furniture and fixtures | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember', window );">Furniture and fixtures | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Buildings | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">20 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember', window );">Buildings | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentLineItems', window );"><strong>Property, Plant and Equipment [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentUsefulLife', window );">Property, plant and equipment, useful life</a></td>
<td class="text">30 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated depreciation, depletion and amortization for physical assets used in the normal conduct of business to produce goods and services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.14)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.13)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.13)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 13<br> -Subparagraph a<br> -Article 5<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 8<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Useful life of long lived, physical assets used in the normal conduct of business and not intended for resale, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. Examples include, but not limited to, land, buildings, machinery and equipment, office equipment, furniture and fixtures, and computer equipment.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandBuildingsAndImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LandBuildingsAndImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_MachineryAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_LeaseholdImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_FurnitureAndFixturesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingAndBuildingImprovementsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>39
<FILENAME>R28.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6826317184">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Goodwill (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">$ 12,388<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="num">(1,269)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">10,789<span></span>
</td>
<td class="nump">$ 11,119<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Net foreign exchange differences</a></td>
<td class="num">(330)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">11,968<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="num">(1,179)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">10,789<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember', window );">Solar</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">6,597<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="num">(1,269)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">4,998<span></span>
</td>
<td class="nump">5,328<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Net foreign exchange differences</a></td>
<td class="num">(330)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">6,177<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="num">(1,179)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">4,998<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember', window );">Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">5,063<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">5,063<span></span>
</td>
<td class="nump">5,063<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Net foreign exchange differences</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">5,063<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">5,063<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember', window );">Polishing</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillRollForward', window );"><strong>Goodwill [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, beginning of year</a></td>
<td class="nump">728<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, beginning of year</a></td>
<td class="nump">728<span></span>
</td>
<td class="nump">$ 728<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillTranslationAdjustments', window );">Net foreign exchange differences</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillGross', window );">Goodwill, gross, end of quarter</a></td>
<td class="nump">728<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss', window );">Accumulated impairment losses</a></td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Goodwill', window );">Goodwill, net, end of quarter</a></td>
<td class="nump">$ 728<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Goodwill">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6388280&amp;loc=d3e13770-109266<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Goodwill</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a,h)<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillImpairedAccumulatedImpairmentLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a,h)<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillImpairedAccumulatedImpairmentLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GoodwillTranslationAdjustments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from foreign currency translation adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=35741047&amp;loc=d3e13816-109267<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GoodwillTranslationAdjustments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>40
<FILENAME>R29.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6813523568">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Intangibles (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 7,102<span></span>
</td>
<td class="nump">$ 7,378<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(3,187)<span></span>
</td>
<td class="num">(3,278)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">3,915<span></span>
</td>
<td class="nump">4,100<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember', window );">Customer lists</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">2,387<span></span>
</td>
<td class="nump">2,432<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(1,172)<span></span>
</td>
<td class="num">(1,164)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 1,215<span></span>
</td>
<td class="nump">1,268<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember', window );">Customer lists | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">6 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember', window );">Customer lists | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember', window );">Technology</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 3,014<span></span>
</td>
<td class="nump">3,214<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(1,576)<span></span>
</td>
<td class="num">(1,678)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 1,438<span></span>
</td>
<td class="nump">1,536<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember', window );">Technology | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember', window );">Technology | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember', window );">Trade names</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 1,441<span></span>
</td>
<td class="nump">1,455<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(200)<span></span>
</td>
<td class="num">(219)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 1,241<span></span>
</td>
<td class="nump">1,236<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember', window );">Trade names | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember', window );">Trade names | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">15 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsGross', window );">Gross Carrying Amount</a></td>
<td class="nump">$ 260<span></span>
</td>
<td class="nump">277<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization', window );">Accumulated Amortization</a></td>
<td class="num">(239)<span></span>
</td>
<td class="num">(217)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsNet', window );">Net Carrying Amount</a></td>
<td class="nump">$ 21<span></span>
</td>
<td class="nump">$ 60<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember', window );">Other | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems', window );"><strong>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife', window );">Useful Life</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Acquired Finite and Indefinite-Lived Intangible Assets [Line Items]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_AcquiredFiniteAndIndefiniteLivedIntangibleAssetsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetUsefulLife">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetUsefulLife</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated amount of amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsAccumulatedAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after amortization of assets, excluding financial assets and goodwill, lacking physical substance with a finite life.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 350<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=26713463&amp;loc=d3e16323-109275<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_CustomerListsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_PatentedTechnologyMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_TradeNamesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FiniteLivedIntangibleAssetsByMajorClassAxis=us-gaap_OtherIntangibleAssetsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>41
<FILENAME>R30.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814327136">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Warranty (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MovementInStandardProductWarrantyAccrualRollForward', window );"><strong>Movement in Standard Product Warranty Accrual [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrual', window );">Warranty beginning balance</a></td>
<td class="nump">$ 795<span></span>
</td>
<td class="nump">$ 793<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued', window );">Additions for warranties issued during the period</a></td>
<td class="nump">383<span></span>
</td>
<td class="nump">146<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrualPayments', window );">Reductions in the liability for payments made under the warranty</a></td>
<td class="num">(27)<span></span>
</td>
<td class="num">(109)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease', window );">Changes related to pre-existing warranties</a></td>
<td class="num">(245)<span></span>
</td>
<td class="num">(54)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease', window );">Currency translation adjustment</a></td>
<td class="num">(27)<span></span>
</td>
<td class="num">(10)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StandardProductWarrantyAccrual', window );">Warranty ending balance</a></td>
<td class="nump">$ 879<span></span>
</td>
<td class="nump">$ 766<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ScheduleOfProductWarrantyLineItems', window );"><strong>Product Warranty [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_StandardProductWarrantyPeriod', window );">Standard product warranty, period</a></td>
<td class="text">12 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ScheduleOfProductWarrantyLineItems', window );"><strong>Product Warranty [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_StandardProductWarrantyPeriod', window );">Standard product warranty, period</a></td>
<td class="text">24 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ScheduleOfProductWarrantyLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Schedule of Product Warranty [Line Items]</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ScheduleOfProductWarrantyLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_StandardProductWarrantyPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Standard Product Warranty, Period</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_StandardProductWarrantyPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MovementInStandardProductWarrantyAccrualRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MovementInStandardProductWarrantyAccrualRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyAccrual">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount as of the balance sheet date of the aggregate standard product warranty liability. Does not include the balance for the extended product warranty liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1),(c)(5)<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyAccrual</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Increase or Decrease in standard product warranty liability due to currency translation. Does not include any Increase or Decrease in an extended product warranty liability due to currency translation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyAccrualCurrencyTranslationIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyAccrualPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the aggregate decrease in the liability for payments made (in cash or in kind) to satisfy claims under the terms of the standard product warranty. Does not include any Increase or Decrease in the liability for payments related to extended product warranties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyAccrualPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the aggregate Increase or Decrease in the liability during the reporting period for accruals related to preexisting standard product warranties (including adjustments related to changes in estimates). Does not include any Increase or Decrease in the liability for accruals related to extended product warranties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyAccrualPreexistingIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StandardProductWarrantyAccrualWarrantiesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the aggregate increase in the liability for accruals related to standard product warranties issued during the reporting period. Does not include any increase in the liability for accruals related to extended product warranties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=51674963&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StandardProductWarrantyAccrualWarrantiesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>42
<FILENAME>R31.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825856400">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Stock-Based Compensation (Details) - USD ($)<br> $ / shares in Units, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Effect on income before income taxes</a></td>
<td class="num">$ (319)<span></span>
</td>
<td class="num">$ (342)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense', window );">Effect on income taxes</a></td>
<td class="nump">35<span></span>
</td>
<td class="nump">48<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax', window );">Effect on net income</a></td>
<td class="num">$ (284)<span></span>
</td>
<td class="num">$ (294)<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at beginning of period (in shares)</a></td>
<td class="nump">1,841,567<span></span>
</td>
<td class="nump">1,627,477<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross', window );">Granted (in shares)</a></td>
<td class="nump">100,000<span></span>
</td>
<td class="nump">344,075<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercised (in shares)</a></td>
<td class="num">(180)<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod', window );">Forfeited (in shares)</a></td>
<td class="num">(55,446)<span></span>
</td>
<td class="num">(33,642)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber', window );">Outstanding at end of period (in shares)</a></td>
<td class="nump">1,885,941<span></span>
</td>
<td class="nump">1,937,910<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber', window );">Exercisable at end of period (in shares)</a></td>
<td class="nump">1,375,174<span></span>
</td>
<td class="nump">1,189,855<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue', window );">Weighted average fair value of options granted during the period (usd per share)</a></td>
<td class="nump">$ 2.88<span></span>
</td>
<td class="nump">$ 3.03<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Exercise Price [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at beginning of period, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">8.15<span></span>
</td>
<td class="nump">9.11<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice', window );">Granted, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">4.99<span></span>
</td>
<td class="nump">5.25<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice', window );">Exercised, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">3.80<span></span>
</td>
<td class="nump">0.00<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice', window );">Forfeited, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">13.34<span></span>
</td>
<td class="nump">14.90<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice', window );">Outstanding at end of period, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">7.84<span></span>
</td>
<td class="nump">8.34<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice', window );">Exercisable at end of period, Weighted Average Exercise Price (usd per share)</a></td>
<td class="nump">$ 8.26<span></span>
</td>
<td class="nump">$ 9.21<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Fair Value Assumptions and Methodology [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate', window );">Risk free interest rate</a></td>
<td class="nump">2.00%<span></span>
</td>
<td class="nump">2.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1', window );">Expected life</a></td>
<td class="text">6 years<span></span>
</td>
<td class="text">6 years<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate', window );">Dividend rate</a></td>
<td class="nump">0.00%<span></span>
</td>
<td class="nump">0.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate', window );">Volatility</a></td>
<td class="nump">62.00%<span></span>
</td>
<td class="nump">62.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Option expiration period</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period</a></td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period</a></td>
<td class="text">6 months<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember', window );">Restricted Stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Number of Shares [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Beginning Outstanding (in shares)</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">13,540<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod', window );">Released (in shares)</a></td>
<td class="nump">0<span></span>
</td>
<td class="num">(13,540)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber', window );">Ending Outstanding (in shares)</a></td>
<td class="nump">0<span></span>
</td>
<td class="nump">0<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Nonvested, Weighted Average Grant Date Fair Value [Roll Forward]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Beginning Outstanding, Weighted Average Grant Date Fair Value (usd per share)</a></td>
<td class="nump">$ 0.00<span></span>
</td>
<td class="nump">$ 7.98<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue', window );">Released, Weighted Average Grant Date Fair Value (usd per share)</a></td>
<td class="nump">0.00<span></span>
</td>
<td class="nump">7.98<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue', window );">Ending Outstanding, Weighted Average Grant Date Fair Value (usd per share)</a></td>
<td class="nump">$ 0.00<span></span>
</td>
<td class="nump">$ 0.00<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember', window );">Restricted Stock | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period</a></td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember', window );">Restricted Stock | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1', window );">Option vesting period</a></td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the expense recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 14.F)<br> -URI http://asc.fasb.org/extlink&amp;oid=27013229&amp;loc=d3e301413-122809<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5047-113901<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 14<br> -Section F<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of expense, net of income tax, recognized during the period arising from equity-based compensation arrangements (for example, shares of stock, unit, stock options or other equity instruments) with employees, directors and certain consultants qualifying for treatment as employees.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpenseNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total recognized tax benefit related to compensation cost for equity-based payment arrangements recognized in income during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeServiceShareBasedCompensationTaxBenefitFromCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period which an employee's right to exercise an award is no longer contingent on satisfaction of either a service condition, market condition or a performance condition, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardAwardVestingPeriod1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of non-vested equity-based payment instruments, excluding stock (or unit) options, that validly exist and are outstanding as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value of nonvested awards on equity-based plans excluding option plans (for example, phantom stock or unit plan, stock or unit appreciation rights plan, revenue or profit achievement stock award plan) for which the employer is contingently obligated to issue equity instruments or transfer assets to an employee who has not yet satisfied service or performance criteria necessary to gain title to proceeds from the sale of the award or underlying shares or units.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsNonvestedWeightedAverageGrantDateFairValueRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of equity-based payment instruments, excluding stock (or unit) options, that vested during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average fair value as of grant date pertaining to an equity-based award plan other than a stock (or unit) option plan for which the grantee gained the right during the reporting period, by satisfying service and performance requirements, to receive or retain shares or units, other instruments, or cash in accordance with the terms of the arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(2)(iii)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardEquityInstrumentsOtherThanOptionsVestedInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsAndMethodologyAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The estimated dividend rate (a percentage of the share price) to be paid (expected dividends) to holders of the underlying shares over the option's term.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedDividendRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The estimated measure of the percentage by which a share price is expected to fluctuate during a period. Volatility also may be defined as a probability-weighted measure of the dispersion of returns about the mean. The volatility of a share price is the standard deviation of the continuously compounded rates of return on the share over a specified period. That is the same as the standard deviation of the differences in the natural logarithms of the stock prices plus dividends, if any, over the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsExpectedVolatilityRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The risk-free interest rate assumption that is used in valuing an option on its own shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(iv)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardFairValueAssumptionsRiskFreeInterestRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares into which fully or partially vested stock options outstanding as of the balance sheet date can be currently converted under the option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted-average price as of the balance sheet date at which grantees can acquire the shares reserved for issuance on vested portions of options outstanding and currently exercisable under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsExercisableWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The number of shares under options that were cancelled during the reporting period as a result of occurrence of a terminating event specified in contractual agreements pertaining to the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsForfeituresInPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Gross number of share options (or share units) granted during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The weighted average grant-date fair value of options granted during the reporting period as calculated by applying the disclosed option pricing methodology.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (d)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageGrantDateFairValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of options outstanding, including both vested and non-vested options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)-(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which grantees can acquire the shares reserved for issuance under the stock option plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardOptionsOutstandingWeightedAverageExercisePriceRollforward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which option holders acquired shares when converting their stock options into shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsExercisesInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average price at which grantees could have acquired the underlying shares with respect to stock options that were terminated.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsForfeituresInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average per share amount at which grantees can acquire shares of common stock by exercise of options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardOptionsGrantsInPeriodWeightedAverageExercisePrice</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Expected term of share-based compensation awards, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 14.D.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=27013229&amp;loc=d3e301413-122809<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (f)(2)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Staff Accounting Bulletin (SAB)<br> -Number Topic 14<br> -Section D<br> -Subsection 2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardFairValueAssumptionsExpectedTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6928386&amp;loc=d3e21463-112644<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=27012166&amp;loc=d3e187085-122770<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=6415400&amp;loc=d3e5070-113901<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.28,29)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 29, 30<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_EmployeeStockOptionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_RestrictedStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>43
<FILENAME>R32.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6815770048">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Shipping Expense (Details)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2015 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShippingHandlingAndTransportationCosts', window );">Shipping expenses</a></td>
<td class="nump">$ 0.4<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShippingHandlingAndTransportationCosts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cost incurred during the reporting period in transporting goods and services to customers. Includes freight-out costs.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18780-107790<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 45<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=51667946&amp;loc=d3e61069-111654<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Handling Costs<br> -URI http://asc.fasb.org/extlink&amp;oid=51575068<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 45<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=51671805&amp;loc=d3e60635-111653<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=51655414&amp;loc=d3e18726-107790<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 605<br> -SubTopic 45<br> -Section S99<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6408413&amp;loc=d3e221937-122793<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Shipping Costs<br> -URI http://asc.fasb.org/extlink&amp;oid=51575562<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShippingHandlingAndTransportationCosts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>44
<FILENAME>R33.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814573328">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Summary of Significant Accounting Policies - Research and Development Expense (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Organization, Consolidation and Presentation of Financial Statements [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpense', window );">Research, development and engineering</a></td>
<td class="nump">$ 1,830<span></span>
</td>
<td class="nump">$ 2,615<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred', window );">Grants earned</a></td>
<td class="num">(203)<span></span>
</td>
<td class="num">(327)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchAndDevelopmentNetOfGrantsEarned', window );">Net research, development and engineering</a></td>
<td class="nump">$ 1,627<span></span>
</td>
<td class="nump">$ 2,288<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchAndDevelopmentNetOfGrantsEarned">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research And Development, Net Of Grants</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchAndDevelopmentNetOfGrantsEarned</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of customer funding recorded as an offset to costs incurred for a fixed-price, best-efforts research and development cost-sharing arrangement with the Federal Government.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 912<br> -SubTopic 730<br> -Section 25<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6472174&amp;loc=d3e58812-109433<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentArrangementWithFederalGovernmentCustomerFundingToOffsetCostsIncurred</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 730<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 985<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6501960&amp;loc=d3e128462-111756<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>45
<FILENAME>R34.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6811197088">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
<th class="th"><div>Jun. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxContingencyLineItems', window );"><strong>Income Tax Contingency [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate', window );">Unrecognized tax benefits that would impact effective tax rate</a></td>
<td class="nump">$ 3.9<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1.8<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued', window );">Unrecognized tax benefits, income tax penalties and interest accrued</a></td>
<td class="nump">$ 2.4<span></span>
</td>
<td class="nump">$ 2.3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxContingencyLineItems', window );"><strong>Income Tax Contingency [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations', window );">Number of years open for tax examinations</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxContingencyLineItems', window );"><strong>Income Tax Contingency [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations', window );">Number of years open for tax examinations</a></td>
<td class="text">5 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Income Tax Examination, Number of Years Generally Open For Tax Examinations</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_IncomeTaxExaminationNumberofYearsGenerallyOpenForTaxExaminations</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxContingencyLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxContingencyLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount accrued for interest on an underpayment of income taxes and penalties related to a tax position claimed or expected to be claimed in the tax return.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=d3e32718-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsIncomeTaxPenaltiesAndInterestAccrued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15A<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=6907707&amp;loc=SL6600010-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>46
<FILENAME>R35.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814187648">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Earnings Per Share (Details) - USD ($)<br> $ / shares in Units, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems', window );"><strong>Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLoss', window );">Net income (loss) attributable to Amtech Systems, Inc.</a></td>
<td class="num">$ (53)<span></span>
</td>
<td class="num">$ (4,015)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Weighted average shares outstanding (in shares)</a></td>
<td class="nump">13,179,000<span></span>
</td>
<td class="nump">13,152,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic loss per share attributable to Amtech shareholders (USD per share)</a></td>
<td class="nump">$ 0.00<span></span>
</td>
<td class="num">$ (0.31)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted shares (in shares)</a></td>
<td class="nump">13,179,000<span></span>
</td>
<td class="nump">13,152,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted loss per share attributable to Amtech shareholders (USD per share)</a></td>
<td class="nump">$ 0.00<span></span>
</td>
<td class="num">$ (0.31)<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_EmployeeStockOptionMember', window );">Stock Options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems', window );"><strong>Antidilutive Securities Excluded from Computation of Earnings Per Share [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Antidilutive securities excluded from computation of earnings per share (in shares)</a></td>
<td class="nump">1,886,000<span></span>
</td>
<td class="nump">1,938,000<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Antidilution<br> -URI http://asc.fasb.org/extlink&amp;oid=6505113<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Diluted Earnings Per Share<br> -URI http://asc.fasb.org/extlink&amp;oid=6510752<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Contingent Stock Agreement<br> -URI http://asc.fasb.org/extlink&amp;oid=6508534<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=32703322&amp;loc=d3e4984-109258<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04.19)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04.23)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879574&amp;loc=d3e536633-122882<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 18<br> -Article 7<br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 20<br> -Article 5<br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 21<br> -Article 9<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1252-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 18<br> -Article 7<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 20<br> -Article 5<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 21<br> -Article 9<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The portion of profit or loss for the period, net of income taxes, which is attributable to the parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Net Income<br> -URI http://asc.fasb.org/extlink&amp;oid=51831255<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04.19)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.18)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 6: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 225<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04.22)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879464&amp;loc=d3e573970-122913<br><br>Reference 7: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Other Comprehensive Income<br> -URI http://asc.fasb.org/extlink&amp;oid=51831270<br><br>Reference 8: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 19<br> -Article 5<br><br>Reference 9: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 20<br> -Article 9<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1505-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=7655603&amp;loc=d3e1448-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Weighted-Average Number of Common Shares Outstanding<br> -URI http://asc.fasb.org/extlink&amp;oid=6528421<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_EmployeeStockOptionMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareByAntidilutiveSecuritiesAxis=us-gaap_EmployeeStockOptionMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>47
<FILENAME>R36.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814137840">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Stockholders' Equity (Details) - $ / shares<br></strong></div></th>
<th class="th"><div>Oct. 08, 2015</div></th>
<th class="th"><div>Dec. 15, 2008</div></th>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfStockLineItems', window );"><strong>Class of Stock [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (USD per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights', window );">Minimum percent ownership of common stock for exercise of rights</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementClassOfStockAxis=us-gaap_SeriesAPreferredStockMember', window );">Series A Preferred Stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfStockLineItems', window );"><strong>Class of Stock [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (USD per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0.01<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights', window );">Number of securities called by warrants or rights (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0.001<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1', window );">Exercise price of rights (USD per share)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 51.60<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ClassOfWarrantOrRightExpirationPeriod', window );">Rights expiration period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_CommonStockCollectiveOwnershipThresholdForJointFilers', window );">Collective ownership threshold for joint filers</a></td>
<td class="nump">19.90%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ClassOfWarrantOrRightExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Class Of Warrant Or Right, Expiration Period</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ClassOfWarrantOrRightExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_CommonStockCollectiveOwnershipThresholdForJointFilers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Common Stock, Collective Ownership Threshold For Joint Filers</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_CommonStockCollectiveOwnershipThresholdForJointFilers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_CommonStockMinimumPercentOwnershipForExerciseOfRights">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Common Stock, Minimum Percent Ownership For Exercise Of Rights</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_CommonStockMinimumPercentOwnershipForExerciseOfRights</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ClassOfStockLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ClassOfStockLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Exercise price per share or per unit of warrants or rights outstanding.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(i)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ClassOfWarrantOrRightExercisePriceOfWarrantsOrRights1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of securities into which the class of warrant or right may be converted. For example, but not limited to, 500,000 warrants may be converted into 1,000,000 shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(i)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ClassOfWarrantOrRightNumberOfSecuritiesCalledByWarrantsOrRights</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 30<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementClassOfStockAxis=us-gaap_SeriesAPreferredStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementClassOfStockAxis=us-gaap_SeriesAPreferredStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>48
<FILENAME>R37.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825468256">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Business Segment Information (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th">
<div>Dec. 31, 2016 </div>
<div>USD ($) </div>
<div>segment</div>
</th>
<th class="th">
<div>Dec. 31, 2015 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Sep. 30, 2016 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NumberOfOperatingSegments', window );">Number of business segments | segment</a></td>
<td class="nump">3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net revenues</a></td>
<td class="nump">$ 29,135<span></span>
</td>
<td class="nump">$ 22,074<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating income (Loss)</a></td>
<td class="num">(180)<span></span>
</td>
<td class="num">(3,929)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable assets</a></td>
<td class="nump">$ 115,918<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 118,430<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_ProductConcentrationRiskMember', window );">Product Concentration Risk | Sales Revenue, Product Line | Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage (less than)</a></td>
<td class="nump">25.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationItemsAxis=us-gaap_OperatingSegmentsMember', window );">Operating Segments | Solar</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net revenues</a></td>
<td class="nump">$ 11,424<span></span>
</td>
<td class="nump">9,543<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating income (Loss)</a></td>
<td class="num">(1,023)<span></span>
</td>
<td class="num">(1,864)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable assets</a></td>
<td class="nump">43,334<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">42,962<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationItemsAxis=us-gaap_OperatingSegmentsMember', window );">Operating Segments | Semiconductor</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net revenues</a></td>
<td class="nump">15,703<span></span>
</td>
<td class="nump">10,700<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating income (Loss)</a></td>
<td class="nump">2,361<span></span>
</td>
<td class="num">(160)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable assets</a></td>
<td class="nump">51,898<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">51,985<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationItemsAxis=us-gaap_OperatingSegmentsMember', window );">Operating Segments | Polishing</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SalesRevenueNet', window );">Net revenues</a></td>
<td class="nump">2,008<span></span>
</td>
<td class="nump">1,831<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating income (Loss)</a></td>
<td class="nump">464<span></span>
</td>
<td class="nump">169<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable assets</a></td>
<td class="nump">4,906<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">4,819<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConsolidationItemsAxis=us-gaap_CorporateNonSegmentMember', window );">Non-Segment</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SegmentReportingInformationLineItems', window );"><strong>Segment Reporting Information [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Operating income (Loss)</a></td>
<td class="num">(1,982)<span></span>
</td>
<td class="num">$ (2,074)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Identifiable assets</a></td>
<td class="nump">$ 15,780<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 18,664<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.18)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 12<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Assets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NumberOfOperatingSegments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of operating segments. An operating segment is a component of an enterprise: (a) that engages in business activities from which it may earn revenues and incur expenses (including revenues and expenses relating to transactions with other components of the same enterprise), (b) whose operating results are regularly reviewed by the enterprise's chief operating decision maker to make decisions about resources to be allocated to the segment and assess its performance, and (c) for which discrete financial information is available. An operating segment may engage in business activities for which it has yet to earn revenues, for example, start-up operations may be operating segments before earning revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NumberOfOperatingSegments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SalesRevenueNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SalesRevenueNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SegmentReportingInformationLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SegmentReportingInformationLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_ProductConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_ProductConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueProductLineMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueProductLineMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SemiconductorEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConsolidationItemsAxis=us-gaap_OperatingSegmentsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConsolidationItemsAxis=us-gaap_OperatingSegmentsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_SolarEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementBusinessSegmentsAxis=asys_PolishingSuppliesAndEquipmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConsolidationItemsAxis=us-gaap_CorporateNonSegmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConsolidationItemsAxis=us-gaap_CorporateNonSegmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>49
<FILENAME>R38.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825480448">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Major Customers and Foreign Sales (Details) - Net Revenues<br></strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Customer Concentration Risk | Customer Number One</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">14.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">100.00%<span></span>
</td>
<td class="nump">100.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | United States</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">18.00%<span></span>
</td>
<td class="nump">28.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Other North America</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">2.00%<span></span>
</td>
<td class="nump">3.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Total North America</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">20.00%<span></span>
</td>
<td class="nump">31.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | China</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">26.00%<span></span>
</td>
<td class="nump">20.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Malaysia</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">17.00%<span></span>
</td>
<td class="nump">18.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Taiwan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">12.00%<span></span>
</td>
<td class="nump">13.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Other Asia</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">6.00%<span></span>
</td>
<td class="nump">3.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Total Asia</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">61.00%<span></span>
</td>
<td class="nump">54.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Germany</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">5.00%<span></span>
</td>
<td class="nump">2.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Other Europe</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">14.00%<span></span>
</td>
<td class="nump">13.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Geographic Concentration Risk | Total Europe</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EntityWideRevenueMajorCustomerLineItems', window );"><strong>Revenue, Major Customer [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Concentration risk, percentage</a></td>
<td class="nump">19.00%<span></span>
</td>
<td class="nump">15.00%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6351-108592<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13531-108611<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=51801978&amp;loc=d3e6404-108592<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=49121117&amp;loc=d3e13537-108611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EntityWideRevenueMajorCustomerLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EntityWideRevenueMajorCustomerLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MajorCustomersAxis=asys_CustomerNumberOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MajorCustomersAxis=asys_CustomerNumberOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_GeographicConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_GeographicConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_US">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_US</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=asys_AmericasOtherMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=asys_AmericasOtherMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=us-gaap_NorthAmericaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=us-gaap_NorthAmericaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_CN">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_CN</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_MY">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_MY</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_TW">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_TW</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupOneMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=us-gaap_AsiaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=us-gaap_AsiaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=country_DE">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=country_DE</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=asys_SegmentGeographicalGroupsOfCountriesOtherImmaterialLocationsGroupTwoMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementGeographicalAxis=us-gaap_EuropeMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementGeographicalAxis=us-gaap_EuropeMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>50
<FILENAME>R39.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814755184">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Long-term Debt (Details)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
</tr>
<tr><th class="th">
<div>Dec. 31, 2016 </div>
<div>USD ($)</div>
</th></tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongtermDebtTypeAxis=asys_MortgageNoteMember', window );">Mortgage Note</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Long-term debt</a></td>
<td class="nump">$ 6.5<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate</a></td>
<td class="nump">4.11%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_VariableRateAxis=asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember', window );">Federal Home Loan Board Five Year Classic Advance Rate | Mortgage Note</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1', window );">Basis spread on variable rate</a></td>
<td class="nump">240.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LegalEntityAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongTermDebt', window );">Long-term debt</a></td>
<td class="nump">$ 3.6<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromIssuanceOfDebt', window );">Proceeds from issuance of debt, less than</a></td>
<td class="nump">$ 0.1<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LegalEntityAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V. | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate</a></td>
<td class="nump">4.50%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LegalEntityAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V. | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Debt Instrument [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentInterestRateStatedPercentage', window );">Interest rate</a></td>
<td class="nump">12.50%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentBasisSpreadOnVariableRate1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage points added to the reference rate to compute the variable rate on the debt instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentBasisSpreadOnVariableRate1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentInterestRateStatedPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Contractual interest rate for funds borrowed, under the debt agreement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentInterestRateStatedPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongTermDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount of long-term debt, net of unamortized discount or premium, including current and noncurrent amounts. Includes, but not limited to, notes payable, bonds payable, debentures, mortgage loans and commercial paper. Excludes capital lease obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.16)<br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.22)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03.16)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 02<br> -Paragraph 20, 22<br> -Article 5<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongTermDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromIssuanceOfDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow during the period from additional borrowings in aggregate debt. Includes proceeds from short-term and long-term debt.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromIssuanceOfDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongtermDebtTypeAxis=asys_MortgageNoteMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongtermDebtTypeAxis=asys_MortgageNoteMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_VariableRateAxis=asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_VariableRateAxis=asys_FederalHomeLoanBoardFiveYearClassicAdvanceRateMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LegalEntityAxis=asys_SoLayTecB.V.Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LegalEntityAxis=asys_SoLayTecB.V.Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>51
<FILENAME>R40.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814254432">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Commitments and Contingencies (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="1">12 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th">
<div>Apr. 01, 2016 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Dec. 31, 2016 </div>
<div>USD ($) </div>
<div>claims</div>
</th>
<th class="th">
<div>Dec. 31, 2015 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Sep. 30, 2014 </div>
<div>USD ($)</div>
</th>
<th class="th">
<div>Sep. 30, 2016 </div>
<div>USD ($)</div>
</th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PurchaseObligation', window );">Purchase obligation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 14,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 11,300<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Price of an ion implanter</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">86<span></span>
</td>
<td class="nump">$ 108<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis=asys_TempressSystemsandEnergyResearchCentreAgreementMember', window );">Tempress Systems and Energy Research Centre Agreement</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Price of an ion implanter</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties', window );">Ownership rights to results of projects developed separately by individual parties</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">100.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchandDevelopmentAgreementTerm', window );">R&amp;D agreement term</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">4 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchandDevelopmentRequiredContributionLaborandAssets', window );">Required contribution in form of labor and assets</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance', window );">Period from agreement start for contribution for project support</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">2 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_ResearchandDevelopmentRequiredContribution', window );">R&amp;D, required contribution</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingenciesByNatureOfContingencyAxis=us-gaap_LossFromCatastrophesMember', window );">Environmental Clean-up | BTU International, Inc (BTU) Merger</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingencyAccrualAtCarryingValue', window );">Loss contingency accrual</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LettersOfCreditOutstandingAmount', window );">Letter of credit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LitigationCaseAxis=asys_StockholderActionsPutativeStockholderClassActionComplaintsMember', window );">Stockholder Actions (Putative Stockholder Class Action Complaints) | Settled Litigation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LossContingencyClaimsSettledNumber', window );">Number of settled claims | claims</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsForLegalSettlements', window );">Legal settlement, payment of fees and expenses</a></td>
<td class="nump">$ 325<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Ownership Rights, Results of Projects Developed Separately By Individual Parties</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_OwnershipRightsResultsofProjectsDevelopedSeparatelyByIndividualParties</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchandDevelopmentAgreementTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development Agreement Term</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchandDevelopmentAgreementTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development, Period Required for Equipment Repairs and Maintenance</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchandDevelopmentPeriodRequiredforEquipmentRepairsandMaintenance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchandDevelopmentRequiredContribution">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development, Required Contribution</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchandDevelopmentRequiredContribution</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_ResearchandDevelopmentRequiredContributionLaborandAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Research and Development, Required Contribution, Labor and Assets</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_ResearchandDevelopmentRequiredContributionLaborandAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LettersOfCreditOutstandingAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LettersOfCreditOutstandingAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingencyAccrualAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of loss contingency liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=25496072&amp;loc=d3e14326-108349<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingencyAccrualAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingencyClaimsSettledNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of claims settled.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingencyClaimsSettledNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsForLegalSettlements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of cash paid for the settlement of litigation or for other legal issues during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (g)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3536-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsForLegalSettlements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Investing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6516133<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3213-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PurchaseObligation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Minimum amount of purchase arrangement in which the entity has agreed to expend funds to procure goods or services from a supplier.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PurchaseObligation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis=asys_TempressSystemsandEnergyResearchCentreAgreementMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentArrangementContractToPerformForOthersByTypeAxis=asys_TempressSystemsandEnergyResearchCentreAgreementMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LossContingenciesByNatureOfContingencyAxis=us-gaap_LossFromCatastrophesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LossContingenciesByNatureOfContingencyAxis=us-gaap_LossFromCatastrophesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BusinessAcquisitionAxis=asys_BTUInternationalIncBTUMergerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LitigationCaseAxis=asys_StockholderActionsPutativeStockholderClassActionComplaintsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LitigationCaseAxis=asys_StockholderActionsPutativeStockholderClassActionComplaintsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LitigationStatusAxis=us-gaap_SettledLitigationMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LitigationStatusAxis=us-gaap_SettledLitigationMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>52
<FILENAME>R41.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814828448">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Investments (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Dec. 31, 2015</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
<th class="th"><div>Sep. 30, 2015</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestments', window );">Investments</a></td>
<td class="nump">$ 2,890<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,032<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromEquityMethodInvestments', window );">Investment income (loss)</a></td>
<td class="num">$ (143)<span></span>
</td>
<td class="num">$ (17)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember', window );">Kingstone Holding Company</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems', window );"><strong>Schedule of Equity Method Investments [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15.00%<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestments', window );">Investments</a></td>
<td class="nump">$ 2,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromEquityMethodInvestments', window );">Investment income (loss)</a></td>
<td class="num">$ (100)<span></span>
</td>
<td class="nump">$ 0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestmentOwnershipPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The percentage of ownership of common stock or equity participation in the investee accounted for under the equity method of accounting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6382943&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestmentOwnershipPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This item represents the carrying amount on the entity's balance sheet of its investment in common stock of an equity method investee. This is not an indicator of the fair value of the investment, rather it is the initial cost adjusted for the entity's share of earnings and losses of the investee, adjusted for any distributions (dividends) and other than temporary impairment (OTTI) losses recognized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35755396&amp;loc=d3e33749-111570<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.12)<br> -URI http://asc.fasb.org/extlink&amp;oid=6877327&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromEquityMethodInvestments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This item represents the entity's proportionate share for the period of the net income (loss) of its investee (such as unconsolidated subsidiaries and joint ventures) to which the equity method of accounting is applied. This item includes income or expense related to stock-based compensation based on the investor's grant of stock to employees of an equity method investee.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3602-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=35755396&amp;loc=d3e33749-111570<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 225<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.12)<br> -URI http://asc.fasb.org/extlink&amp;oid=26872669&amp;loc=d3e20235-122688<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 03<br> -Paragraph 9<br> -Article 5<br><br>Reference 5: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-X (SX)<br> -Number 210<br> -Section 04<br> -Paragraph 11<br> -Article 7<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromEquityMethodInvestments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentsLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentsLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>53
<FILENAME>R42.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6825251968">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Related Party Transactions (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Dec. 31, 2016</div></th>
<th class="th"><div>Sep. 30, 2016</div></th>
<th class="th"><div>Sep. 30, 2015</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember', window );">Kingstone Holding Company</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionLineItems', window );"><strong>Related Party Transaction [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EquityMethodInvestmentOwnershipPercentage', window );">Equity method investment, ownership percentage</a></td>
<td class="nump">15.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">15.00%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_BalanceSheetLocationAxis=us-gaap_AccountsReceivableMember', window );">Accounts Receivable | Kingstone Hong Kong</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionLineItems', window );"><strong>Related Party Transaction [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DueFromRelatedParties', window );">Due from related parties</a></td>
<td class="nump">$ 0.3<span></span>
</td>
<td class="nump">$ 0.3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LegalEntityAxis=asys_SoLayTecB.V.Member', window );">SoLayTec, B.V. | TNO Technostarters B.V. Loans | TNO Technostarters B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionLineItems', window );"><strong>Related Party Transaction [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromRelatedPartyDebt', window );">Borrowings from related party</a></td>
<td class="nump">$ 1.2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MinimumMember', window );">Minimum | TNO Technostarters B.V. Loans | TNO Technostarters B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionLineItems', window );"><strong>Related Party Transaction [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionRate', window );">Related party debt interest rate</a></td>
<td class="nump">9.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RangeAxis=us-gaap_MaximumMember', window );">Maximum | TNO Technostarters B.V. Loans | TNO Technostarters B.V.</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionLineItems', window );"><strong>Related Party Transaction [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RelatedPartyTransactionRate', window );">Related party debt interest rate</a></td>
<td class="nump">12.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DueFromRelatedParties">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an unclassified balance sheet, amounts due from related parties including affiliates, employees, joint ventures, officers and stockholders, immediate families thereof, and pension funds.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 850<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=6457730&amp;loc=d3e39549-107864<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03.3)<br> -URI http://asc.fasb.org/extlink&amp;oid=6879938&amp;loc=d3e572229-122910<br><br>Reference 3: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08.(k)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=26873400&amp;loc=d3e23780-122690<br><br>Reference 4: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.10(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=6876686&amp;loc=d3e534808-122878<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DueFromRelatedParties</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EquityMethodInvestmentOwnershipPercentage">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The percentage of ownership of common stock or equity participation in the investee accounted for under the equity method of accounting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=6382943&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EquityMethodInvestmentOwnershipPercentage</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromRelatedPartyDebt">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from a long-term borrowing made from related parties where one party can exercise control or significant influence over another party; including affiliates, owners or officers and their immediate families, pension trusts, and so forth. Alternate caption: Proceeds from Advances from Affiliates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=56944662&amp;loc=d3e3255-108585<br><br>Reference 2: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Glossary Financing Activities<br> -URI http://asc.fasb.org/extlink&amp;oid=6513228<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromRelatedPartyDebt</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Identify the stated interest rate per the agreement, for example, leasing and debt arrangements between related parties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEquityMethodInvestmentEquityMethodInvesteeNameAxis=asys_KingstoneHoldingCompanyMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_BalanceSheetLocationAxis=us-gaap_AccountsReceivableMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_BalanceSheetLocationAxis=us-gaap_AccountsReceivableMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis=asys_KingstoneHongKongMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionsByRelatedPartyAxis=asys_KingstoneHongKongMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LegalEntityAxis=asys_SoLayTecB.V.Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LegalEntityAxis=asys_SoLayTecB.V.Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionAxis=asys_TNOTechnostartersB.V.LoansMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionAxis=asys_TNOTechnostartersB.V.LoansMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RelatedPartyTransactionsByRelatedPartyAxis=asys_TNOTechnostartersB.V.Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RelatedPartyTransactionsByRelatedPartyAxis=asys_TNOTechnostartersB.V.Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RangeAxis=us-gaap_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RangeAxis=us-gaap_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>54
<FILENAME>R43.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.6.0.2</span><table class="report" border="0" cellspacing="2" id="idp6814573328">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Subsequent Event (Details) - USD ($)<br> $ in Millions</strong></div></th>
<th class="th"><div>Jan. 31, 2017</div></th>
<th class="th"><div>Dec. 31, 2016</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_CashCashEquivalentsAndRestrictedCash', window );">Cash, cash equivalents, and restricted cash</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 26.9<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember', window );">Subsequent Event</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SubsequentEventLineItems', window );"><strong>Subsequent Event [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_asys_CashCashEquivalentsAndRestrictedCash', window );">Cash, cash equivalents, and restricted cash</a></td>
<td class="nump">$ 45.8<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_asys_CashCashEquivalentsAndRestrictedCash">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cash, Cash Equivalents, And Restricted Cash</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">asys_CashCashEquivalentsAndRestrictedCash</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>asys_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Detail information of subsequent event by type. User is expected to use existing line items from elsewhere in the taxonomy as the primary line items for this disclosure, which is further associated with dimension and member elements pertaining to a subsequent event.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SubsequentEventTypeAxis=us-gaap_SubsequentEventMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>55
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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MMWF\81AU8\K(XK%T-8943OTJDH\ Q:X831F:3LTXXFBD(3^ G/,6+V2?$9/
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M_>%W%_:==4?WCXUO@JJ&7W>AO@!02P,$%     @ /(%)2IE<G",0!@  G"<
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M.AQG0GS/]O:1I24RS^_Y"NM./&<?5I:P7<_/Y)Z,<B.[W?98??9/1VXCUZG
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MIP4E5ZFGJ9KSH8,,"\FZL3L&4XLN_@)02P,$%     @ /(%)2NL!"H3+!
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MAYJ=[LR8!%4U6*AZI3K\Q@F%L]3#5(UY?P+T$\G:X71#XQ%;_ -02P,$%
M  @ /(%)2G:+RK5& P  ;PT  !@   !X;"]W;W)K<VAE971S+W-H965T-"YX
M;6R-5VUOFS 0_BN([RV<S9NK)%*3:=JD3:HZ;?M,$R=!!9R!DW3_?L902GU'
MM2_!=IZ[>^Y\/-B+JVJ>VZ.4VGNIRKI=^D>M3W=!T&Z/LLK;6W62M?EGKYHJ
MUV;:'(+VU,A\9XVJ,F!AF 157M3^:F'7'IK50IUU6=3RH?':<U7ES=^U+-5U
MZ8/_NO!8'(ZZ6PA6BU-^D#^D_GEZ:,PL&+WLBDK6;:%JKY'[I7\/=QMF#2SB
M5R&O[63L=:D\*?7<3;[NEG[8,9*EW.K.16X>%[F19=EY,CS^#$[],69G.!V_
M>O]LDS?)/.6MW*CR=['3QZ6?^=Y.[O-SJ1_5]8L<$HI];\C^F[S(TL [)B;&
M5I6M_?6VYU:K:O!BJ%3Y2_\L:ON\#OY?S6@#-ABPT<#$_LB #P;\S2"RR??,
M;*J?<IVO%HVZ>DV_6Z>\:PJXXZ:8VV[1UL[^9[)MS>IEE4:+X-+Y&2#K'L(F
M$!@1@7$^1F!4A#5#YNQ]@ U&I#$=@9,Y<&O/I_8);1^1]I&UCZ;VJ5.#'I):
M2-TG(8#'3B($BH63>K[C$I-<8LPE<[CTD'@:)4R$6U2,@@1 T%P2DDN"N0B'
M2X*B9%'$'2H8%(MX9H=3DDF*F&2APR1%01(A$H<)!J6QF.F5C&2282;@,,F(
MRC.GH388Q%B6T4P$R41@)DX/K 4*<@-NX38$B LVTR@0TBH28C+<E9&08(-Z
MA42E,V1F) TP&:1I@!L77"H8<\-"-L.%%+][8)A+[')A1)S(?9\I5 313,L
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M#..&PEF99:+7HI^/_4;Q=AC]P?C]*?X"4$L#!!0    ( #R!24KGZ1N8D@0
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M4'4F "BCZXZE%Z/?C95S!(G2@!4(L@=#8%SFT@NI;F;&I)ET@V1)@ (&(\T
MIIG A#,8:D93C>3$'S4W5LE2(C-",@K9P6 SB;8C"V#4W/3#3BY::RB+0X6
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M\=WNEFDA.UID,7:R168&KV0')TO<H+6POX^@S)C3/;T&'F73^A!@1=:+!GZ
M_]F?+'IL8:FDALY)TQ$+=4[O]H=C&O)CPB\)HUO9)'1R-N8Y.%^KG.Z"(%!0
M^L @\+C /2@5B%#&R\Q)EY(!N+:O[%]B[]C+63BX-^I)5K[-Z2=**JC%H/RC
M&1]@[N<#)7/SW^ ""M.#$JQ1&N7BEY2#\T;/+"A%B]?IE%T\QYG_"ML&\!G
MWP'85"@J_RR\*#)K1F*GV?<B7/'^P'$V90C&4<1_*-YA]%+L$YZQ2R":<XY3
M#E_G+!D,V9<2?*O$D?\#Y]OP9%-A$N')7PJ3;8)TDR"-!.E_6]S*2=\58:N9
M:K!-W"9'2C-T<9-7T65A[WB\D[?T:=N_"]O(SI&S\7BS<?ZU,1Y0RNX&5ZC%
M![8X"FH?S(]HVVG-)L>;?GY!;'G&Q1]02P,$%     @ /(%)2@1L%MJT 0
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M@"^;^E];&P"E;&YPA%K\8+.AH [Q>(]G-X[9: 3;33^(S=^X^ 502P,$%
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M_RM$!SZ5Y,J/4.,_V&PHJ%PX?O%G,X[9:#CLIA_$YF^<_P502P,$%     @
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M TSU7%,R%?\#+J 0'C+!&(51+JZDZ)TW>E+!5+1X&W?9QGT8;Y+]1%LG\(G
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MW+!N6]52&D ]_P:#-7C1S 6'VMCI+<[5>-S&PLA^NDGH?)WE_P!02P,$%
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MB-4C(B+D'K/&,$F/";3+WFJ$65U&CP(#&PB"C <V$,P@WPTF,\&=QNBFQE:
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MRZ2[KJ\GA=>;5I_&4]#@=A2[_@]02P,$%     @ /8%)2A(EN'.) @  [@@
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M%06H*$)EP*A1*Q2R<2$RP31B2",&-&)"(W:3Y0GIM@T"I1)3T9"*!E0T#I#
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M!HUQYM[:*FQ:<(P<YD=$EI=<_@502P,$%     @ /8%)2JYAH-4. @  >04
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M]5ZX:> .BG?#H$/CM,W_ %!+ P04    "  ]@4E*6_=X/#<"    !P  &0
M 'AL+W=O<FMS:&5E=',O<VAE970S-"YX;6R-5>V.HC 4?17" U@HB&B09-1,
M=I/=Q,QF=W]7O J9EC)ME=FWW[8PC&*=^(=^<,ZYY][";=9R\2I+ .6],UK+
MI5\JU2P0DD4)C,@);Z#6;PY<,*+T4AR1; 20O24QBG 0)(B1JO;SS.YM19[Q
MDZ)5#5OAR1-C1/Q; >7MT@_]CXV7ZE@JLX'RK"%'^ 7J=[,5>H4&E7W%H)85
MKST!AZ7_%"XVH258Q)\*6GDQ]TPJ.\Y?S>+[?ND'QA%0*)21('HXPQHH-4K:
MQULOZ@\Q#?%R_J'^;)/7R>R(A#6G?ZN]*I=^ZGM[.) 352^\_09]0E/?Z[/_
M 6>@&FZ<Z!@%I](^O>(D%6>]BK;"R'LW5K4=V^Y-,N]I;@+N"7@@Z-A?$:*>
M$'T2XB\)<4^(1P34I6)KLR&*Y)G@K2>ZXVV(^8K"1:RK7YA-6VS[3I='ZMUS
M'J5QALY&J,>L.@R^P(0# FGU(01VA5CA&SJ^#K!V(*)KR,8!B1.WB\B9:&0%
MHJM$IVZ!V"D06X'X2B 95:K#A($%U1UH,A^EX@"%D]1M9>JT,G58F8VL3&^C
MX,GH9-=.4.2VDCBM)+=6\)USF3D%9H^?2^H42!W%2$?%N,7@V9TTY\X@\]L@
M4> 6,-5T_6C!XXF&=_[5\(%4'2"<CJVBB_; 0!QMZY5>P4^U[?L7NT-[?\*V
MO7S"N[OA)Q''JI;>CBO=I&PK.7"N0'L))OK[*O5U-"PH')29SO1<=#VY6RC>
M]/<-&BZ]_#]02P,$%     @ /8%)2C9UOJ1@ @  M <  !D   !X;"]W;W)K
M<VAE971S+W-H965T,S4N>&ULE57!CILP$/T5Q+W!QA @(DA+JJJ56FFU5=NS
M0YR UF!J.V'[][4-80DXV^TEMH<W;]Z,G9FT8_Q9E(1(YZ6FC=BZI93MQO-$
M49(:BQ5K2:.^'!FOL51'?O)$RPD^&*>:>CX :Z_&5>-FJ;$]\BQE9TFKACQR
M1YSK&O,_.:&LV[K0O1J>JE,IM<'+TA:?R'<B?[2/7)V\D>50U:01%6L<3HY;
M]P%N=M X&,3/BG1BLG=T*GO&GO7ARV'K JV(4%)(38'5<B$[0JEF4CI^#Z3N
M&%,[3O=7]D\F>97,'@NR8_17=9#EUHU=YT".^$SE$^L^DR&AT'6&[+^2"Z$*
MKI6H& 6CPOPZQ5E(5@\L2DJ-7_JU:LS:#?Q7-[N#/SCXHX.*_98#&AS0JT-@
MDN^5F50_8HFSE+/.X?UMM5@_"KA!JIB%-IK:F6\J6Z&LEPS%2>I=--& R7N,
M/\' $>$I]C&$;PN1^PMW_S; ;HF(0GL$9$T"&7\T32(!=H+ 2A 8@N"& ,ZJ
MT&,B@VD,YD.(9HE8, & =W()K5+"A91D5JZ\AX23*!#!* $ S.18@:$_!=XH
M6EL5K9>*YK59+_*>2^D1\;0R8(7NO*/(JB.R7-*\--%[2V,%OE&:V"HIMDB:
MO8D\_F=MXO^I36(5DBR%H,A. (&]$8#W_XG@G5X"+>4(YLT$+BL?Q^OE#=F
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MRU8(R967_IW*ZUY-O^=%P;>R?8W5>]V/@/U"BL,PWGKG&7OQ'U!+ P04
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M#5DKY*LJ +3W5O%:+?U"ZV81!"HOH&)J(AJHS9N#D!739BN/@6HDL+T+JGA
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MG#[SKJ T#+KJO_(C+PW<9F(TUJ)4[C=8'Y065<=B4JG86_LL:O<\=?SO87
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M!1,2<"-A[Q/IPJV$?<!%.$X7 DUT+(8[#@.M$D43$G"OX. 3V<+=@L-'L@5
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M<8;C,,PQ)U2@JO"UG:H*>32,"MBI0!\Y)^IM TP.)8K0>^&)'CKC"K@J>G*
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M@-=+JG^$J64^',V#U[!JTD3DI:7<I@0$2=\/"K_$-CY1O/!FQ*##)\)I66M
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M'LR"BQF^-"$Q+-KR<785']8$)3V7B';6P#P:=&TP%:ENU,K=1J>](4]W(6%
MGMI)Q45,Y36+L;S*:4C%GH039S7-B^R60'C"MCK!?C2?+E]]BNRMMC"'O\-4
MX6&CV12D>T:<@\:6*B[C,#,T\XJ<%'XS8;_R7/%?6GE_%Q1ZSX^[]A]<A-O]
MN]_%S?E 5AB^4,Z!TI;R=SD!;.!SMR\_LS6YJ:@,\*J-$W7IOMR@P?.>%/["
M(+9*,$APZK XE#TZ!VY8QFNI7*=L":#MI0<9ISX9V%\/E_ED!B+<P*_106VU
M>Q97$UV<_H%17<$S43TFO>F+^DT*]):)@,:>[<3%A,"EY'0&4!CS)06A8:8^
MV5C+C6J>9@7HTR/I,_;*HN7UZJRKPD1 Y[.:FB3!:1C\FQ&/E;HC"'K@XWHH
MW4"#T'.?WJ+ ;+1$C:D34H2C%E8:9NM SWO&7@C@FYRA,ABVH\46"](3)5N)
M@U0Y])CX.G;("+S2H12+2YAFZ__S#@*3[L1=?J$:@U/^"Y8JB'Z&%G$#]=KS
M@+SD'5.M0,#@[]-(;".2?D:_,P8ZAHPD2W9/ZG(>*GI#./@B?W%>)Y"Y*TF)
M7U.8&+F<0(,K$&"2ZSS<2L:FJWIC3^ND;G6Q8I?)4@ )/@%2*?;*V*.X>D-9
M.4O(L&I*<<RSDJ*262L,1W]\#W/+V_2FH#$_A@?VW?:_3RD_51C==-A71J>"
MNBN'PT6 1-BVA3"41<AAU2S#$B,F*G$%/H^-XD?K!7+S@K$Z62BGK/A\<0HJ
MQ2D+]79#^PRSYP8HP"#SH*J9WGS0!%OT&D70&T)3XP@8.H LU"K^1+;2":"1
MGUC5=A_R(N W&1UV$B)I=JTFY"=KTE-V4QS4CK^7TIN5G@4]3>N5,_,8^NL=
M57X_T56YC$ZN=C=;ILT^)M._B(/R0;@N%<78!.[ZT%7_XWM/<A5*%T^)\12;
MB]HHI+&-48L#YT@LF/2VF%-C^,1W(XV))0W#G9#%/(8VFBG!Y=E_ZVUD_6 M
M"H-0!6RNOY2"J*L&FZ\#IR:'@S'M.F^!\ 1_3^4J7.R]-P#EIBH+TGAGK@@G
M/@0JEF"B; *!I%Z;\;OM[O@1)K10K#EL$5!@ K<L7K\*LO2,2<T+3O428/\5
M[KV_[);[1U&7U_>;K-/^"NR.7KR,KEB&W^NY. _E=,-R3KDT=73N*X!6^(KJ
M ZF82L*F#"\Y%9^G+29*< "@M)6<-ZXNSK $2.+-M3,_I8[1Q\='"/'$DEEU
MHYN\3R^.TZX&3LGHV?]G1J01LH<H(G7)W6'842/@:F,L$J536YWA*33C[ZDJ
M050N'>?%K/.BRO:OP@^].S& BYVYJJWZF&TVUJ9)DO#CD!>?I"<]C4,Y+>E1
M&E+5"?ET!V1(!RT\PL'\"=QKG2PZ+27?Z4)I?V9"_@^48+=MT?3%YLK%=5UE
M>3T9=",GRYE@'7'6;1+D?S(']ON$WQ<$&&RR5-Q!<AE_V%=,_#^A&J52W(@"
MT8BJ? PWAMVMY4ZDT"_8>!]>I\4/?MV!F(L0:AJN6"]"RFN,TN^?@3CO$518
M8+DR'Y$4MJ-"4Y%NI0"3Y!>E-/O2><1,^0\<9TMNDEA%V<X:>OJA;705PLPM
MK!F(_P^IP*'/0F2PO+5L)Q\5I3C#,W<%D%_J\_:59YM*KIX&Y.5:Q%A.QIIF
MK/A%)6_K@5+]:*B:;.#J-,9'L?RH#) #6B\TRC()Q20.<2 IT&$K,:19)_JT
M*X3VY"JU8+7$BO2(8YYIO=FRDFU5F1.:B)KFY2QA5)]N(0& *-'L"@63P&@P
MPK3D9-Y];.H<<WX!C$+R9&A32 1TO=$6X<%@RXR>BC;<Z>;]$J3D<B-0$RZB
M=$L'>"%Q^S8DOVF-:+/JV%:X ;](W3E;0J!A)&1/JX?4KJG:6JW#6#B^NA74
M]*.N4;=(.8%HV.*@,5=A=+4,<6KK]#;AS#635RWQDVJJ%D003>X6&KC-$. 4
M+P637NYZXO >!U^9N:( !]$K2P.MJ1GT@M!GM]:)_*5.'6G+&0&8/N2N49WA
MU"L-!JM&4@M )FO"JDM:JK;XT#>/<[9;&^$/!^"PB@BB($!6?C[P16,H!<$6
MV]H&M0\XF6"1W.=<.,]I@FG#M=/1@*]@<B:^WV*><Q4$0A]$[8*,SW(1X78C
MJ"M)5=14D.N(Y3E\E)4B9 4EJ34_?)$JVGJ25?1=LXDN$8P(+P6)6BX,A[W5
MOKH,8^RBQ]CLW8YA?FA+?4["G#QZC/46XN6WC14Y8KC'?1,?CN_"#ZYT4-41
M9'18.FK'Z=6N)"4QK5.'LXKRZ[8,0^,7V3+P2\"=OBL:4QL4$3YF./@8"TO>
M)G 3I>C:POIW&?SX9R2:O^88HX[=_XEDF7VM^(.KRJ222LG9#)H>0*E5E:G4
MQBY2YWI'>\;R(A]R%H8%.Y92KEB&(I.T"<C/"K/@^"52=B#L,"JOMY\RPR*K
MX0 )4,$>9>"/$+APQ4N[UC79]E)O0=!5HROT,1U_XX!XV_#RZZ0$W=G=MIM4
M?%G1R;/+SU?/7@0PV3<H?0$#Q[4QF%TG*":^4+/!0Q4/Q^^*(ELQ7(.%6U"C
MOAHHWF1+ZA'&$(S 5YQ$M8K&CJ\@KMO&6+_@BJ%X*H0?86BP(M7"8YJ%3+Y2
M-S0#\1:.DMID'NM#\.W0LT50*V..(R?O;- ,<@RN;DOJ*FFS++66DNJ)"XH+
M&7,3Z;QI5T*%(]-JXRM,9P4M ,%6_++XBM6/RC:)';0*[@;B)HT)P$EF0/KF
M[Y*!XH'!S$;IR!B03I+MR'%($">P0J>Z.D\:VJ@VM+/!U Z-@6V^<FST<65P
MR' \&A+G6<">(\ZOKB^K/JZ#)^'LV:R)6(G7;[+<["_D<&*DF#FQ%QZ)A](C
M*% KV7*X(PN_N41.1%>,2AIS';3GT<EHP-!ZPQ@'\J(.-G+%*VJ /UY2V3('
M2-<;$!(S_C'JRPAI"&;\S8.AAR@TI 30>]+M$!XN_6W0@[_IH?^O/&$=HU!>
M\\/OM!Z(?'A]U\1 :6"V.DZ3(8*CE20IF3]9>6<QJP*\!@$01RV5HW8K4;R%
M#/Q'#:>EBBKM5T_C-U=^!:(ON"\EE;QP"6B?UE6S%4;@;"O2 -,'NI-QL:\+
M#'.2YW'TL7/>(9E#VC^G4&@+"6@?>%"7E(0XDEDI'^!\Q;Q)T]9IG=VG</)7
MM7;;WG)X,^*],BT7^@WM'>%.<I*9VQ'$"P/.@1K@#O:2T8D,);'OM8Q.2+9)
M@DFZCM$V+0C'P"TY1 4-]'(O-V>[7J4D:IU'GQ7*0%*H5 /E,!R%R/&OZPNN
M>Q-JL=TF"+1&. @F.[*6:6ON6SF<?&YC3- 0B\]S.$ ]*\'(2((/=! D_\O2
MQ]PWK9$&UVD=]EM078D09'G#I9.+QEG04,1>IZ?*W+=W?+7S>/)%5%\4BG&M
M 85B]NBHUT'\;T-1(5JCIU5;1L)Y(/@2$]HC75F@/AVX)UL)4!YQ2<H52#RV
MKRRBD^0%S )6MF1+$Z$<N2 1=D*YN'D*[2!T;:RUY16.IGT-^!E6L+]IZ@C?
M8GM?$E%Y1BINYB(?\P5'*SHY+8Q.IL=8)L4-$>O@/="1>N(0>4W?4C3C):XF
M7TH$S762^+1HZ;F5 Y!4[3G;D&,%J/1X&)DX"KE=R)0P*2''H,,GLR;Y\!$<
M2@%V+)-4]QC04Z+AZ%(K1*R%0*BK#3;\F7?22-TX#=E?)ZT3)!=A'I)BERNZ
MPPW\%34UG^.-PA(V+7J7 V5$!CU3%XQTZ@%\CTT7:WO*1W/\A73[ZAP>WQS<
MQ&LR60$KOJ4D9@>K):\ZI'IQM<"<R02#]Q391*N=H_Y#X?*5\MV21*TYPJ"!
M>2V3@<[(Y("Q-=0NKQ[EHROO.K0JI;UO)#@"V67NZ73Z"#KEDH<MM%@GNAN^
MUJUMWU[WS@IKQ:?P\%(R^:\8#;=D+3OHD</DWL+/A;L.9'NOI(!J;Z M7KF<
M -@483CG''+3.QL,2;30&SSDU?YE?^=\6CL^8T=!"LF*_&:ILV#L"MW"A0)F
M^A5T%L/[U.'(T-N2JNA>Y!""LM9E7$,\/D;6,1]C4W6/:B@7J9$;0GX>[HEG
MT+$RR.3V%CT.Y US0F=U>[!,IY:?Q"@6%SD(PUGGDGQ"J-5GG;-J=4?'QL5+
M3(8P(TQ4L;9IH-DJ=?HY%;EXVKA,,Z3;80+<UXRM>5EK:%0N&P!1_#?I#.-M
MM"JJN]C)"$X&7/1@S[,T_"XX8Z!A)0]1KH'&@?TW]*"X&=1AMSUUAH1+JH=-
MQT$,"(2(4+&W2.DHLM'P3HR$?">PP+O=<QTTJHXCL%FF?;.'51W$A8]<I037
M!7OLZC36]!5YY8MS#[;K-H?:;5PNMGFPYY%DK#)5_+!*Z4*N6W5:#0-+,%!1
M7&B42*7%0:FBM<0+TF/5A\_?OXE]6;[=-E])W)LO<*CI(K%2!!7W_</F+M_F
M]_D2F.X,SS_(EU+KCJ(X2;P"O>WRXN<WT0GL8[G"C.P[)#U@UG=8<HO0:#<4
MZ:M.EQ>F6*%T=[O,;U +H2DKD&!8LNM4CV5=.;&OR7*2"Y4Q1<K85B-&3WJZ
M7(;3;EJ^-*A)I\M'L"6Y?,[KAV8IM"@!*W8[TUX+68/#.$.ER-?9#'_#7<F=
MWTW\+;S@Y+OT!<NJZ_!C:1ZZV=M3S6 G@M*R6WFL+E]H#^>@I9A/4) %"8QK
M"C#LF"_-G"\\XDK,D@5*+O#M'=T'NQMVN0I*WXR-JE*M$S[(EK@R<(DM:#'6
MNQ5(Z+N2:AA+9>0]8A[;7N#:3V!!9=#I-FBS$QPY*HO-.C/>HB[$RIVRK&P'
M]&VSCAZJD(%6*<E%<V?V7[CFV;"/R/%G\6@XJ! I"$V3[H"*DG6[9OOZ<;<[
M)8@4A*SOG\6] 16M@M\GP^B3"\L.C.^VUY->W.V+V0N:H0I78=?]>##N89U#
MM#?YGH?P:F]\%GW,UZ>R5H[FH:6S*4+NG_ XN/6I&*P&\5D?"W_\"UM.ZR%_
MN*EN'[#,8%BO@^0/FH#VJ_H"!3EP^7@,?P[.(Q\]959VAA4:XVCCRP]7YCC%
M1#X2^^WK&/9]@>AP0)(-V/F*JIA!-CC'-NM^/8^&@W@P0!H9]N.S<;^R4R/8
MP+,I_G$V'=FMBL^Z8_COM->\74A<L#F]:3P>#XD21_%9C^OP3>/AH%N]PXY6
M-G[R!P<NS.JWY]_>V1MOM7RDLX-D#;;^KVVR)NH.K<6E/7P]E4DA6N'(/3[]
MG2<.9%2I:AT4LAXV-&\% 92.#F+0Q2&ZFO?;DMF42WEC#)#M@E>DFKZZ#1PB
MMVE^6R3 [&=D(7MBE8@0M0Z(\H>HC_^1^G?PMT'T@]3D_(AUZ]'"@=$C\#D^
M[,%_:/!1?XS?XH_J=HYZ$_@7M7F=9 ^X2=A@;^#:'P?MG^,W8VQQ-(3_B),Z
M&F&[[I/>4)O@CRYW6#<79'K\&5_%TGKRWRKE$@3(HV(/W[L8#/HFV&C0<DO.
M47=[ >^1;1'SXV_)S9I3Y:R90HMF%&W,\@Q7:X9O7V>@L.!:HJ>^!"'\#J26
M[=:E@W$&%P9&,?8X1_.C.7+<&?E@A>;0":9.&B:UM(Y"_%[X9MC!\NP*H.:Y
M9W\<4UY\C *\V#!0?\*YAHVHB9(MG:R^D,F0@B>QXM;OJ101"<HM.5U3V;O"
MKOX9;YCW.8R6U>VW*(#]!^88<_K"+#J?W],R$,K*9HF"RD,>W8&>4G!@X%:1
M!S>H(\HI]=@"IE/>P[(^\P&(NOG[9'^=SJ+7G9\[T<DS_?>S%S$!'4K,::A$
M_EB*P.RD/B:6"K0G)WFV;.V@,W9;&S P11QH8:*Q'_(-@<Z@Z\O=I,^[G9YI
M-B"-8$NY.K9+P1IVX J&3>OU\2\LHIJ5K+SMD!#@X!.6A(=8J!XP] -D6P\"
M[J!Q$#7F<6?T<!-:-3[Z9"""7<W*EG"C>F"1\R]8I&&UF+AHLN>]8:?OUI>B
MJ@22^GFOY^.(Y*S6 YH43ZFQ-P/E:"T2_MV"K&ZH,3#:@%6D$(H<;6YFO.Y:
M*WT;B>KL#):K*<@:UL9A\Q@41K&3-RF3%I; 02.%^U@J"Z[36U"=$D*;F2%E
MHV4#0PS43D#UX#U\(##%7RFVV&-.&UH:QJ0Y@"@@S@(RH$K T3Z.KM/5AL#Y
M0G_SR3-]\*S!A9AXZYU:<2]!\;K=.]S$Z *>>E>$19,]>79Y\9$Y@?W90U!&
MF'U9YMBAPW]4U.E4*INR3;0='U(6I0-7=&/QN\3; MT*$&8:LGH,AU]1'7GX
M%(:KHOHS\C?"Z&D,SWL^Z*T#'!<6PC6%P\'W*!J0#5@<BGQXN*4 WRC7,H7D
MV7)'?2<SB?_&1"MHC(#=_.7@MT;3Y> Z_T&]J?*:24A@9ZST+X,*(M[5*NM%
M2<: QP&<4Z@XMS7+3_WG>KFI[9HHKT,YE7+M U6>FH(_AW:F@E3OL'K38!-T
M;C*9JH AQ8<"N"JGA<48 0F<A6Z2+5?CC%U+JS3E_.$M.NU8\,2*V6M^"Y6W
MV#(.&QG^6YIN'%R-V\^,2[I[EX>891 *R860,5@.WM#LYJRN4&ODIUDZO*/\
M>LUM^+1;T@.+""3V^5PK 4>GY&HVB?%DK+_^B>WGI0$=<298*5<&+SD+%TIQ
M'.O/8+-XVC-3O':V3)/U*7E+I:9P$EWM\!CMJ);&ED->D[593VN4BFE(OCB(
MI'9@D@-16;G"1?@;>@P<+#AE\* O0BL\D^Y@T+_ODK^#2(6F'?:O7*[OLR)G
M?O6Y (&5W2WH5ISMG<,>%L_Y94!FT[ M1&?CN"T<J8\I5^BJ1$;"H\:PW*Q8
M\;CL1,2RZ0;.4*>9+5*-N\=VPT2P;*IKR:N%7ABL]NU<,/@A7KC>S>,2-MV6
M+074PJ=NR)N:WQ#N9"=Z;5-&3#&2=H(@KY2_$47Z0XLM'@+B!G[ <:5=7PO(
M1%=3BM<JV7+$0(N49PKU6N,.*U'G4B_:I''[.3VJ@L.3XK5;2\483AFX+$T&
M!EK7MX*TQ66 ^>KJ&H%+#KSBQ<L>XOZ'P>"4P.@*2Z.5U"$@^OIE56MVL+5N
M/["BSRW\(*B*%!G:!)C?&"&-=RKFBB C5O<Y:U@Y_RG%CS3&DO?:HR-@61,7
M*>TL>28MKSE;\"9=9NF](@HSICNUBXMDYB'B(=;+25G6]!>QR29,YHB%G)KL
MT@/YQNIJ:,DO90 =X(5S6ML69[?>A]4M6F1+&KBCJZO+BYA+2E"-%'79-KK$
M\<$*)#]46D.A$+A*3'>7"A(1AS[>I^S]DR@DR@:0_>+@ $QE BEQF]^2=,C$
M_<Q$W:$C&J<-XAAQ:72+F]GM"@8G)+]-X0(6R$C#YVZ)0$3B27_F_DE?/GLA
M(;-T]2)7Y-9S@R/ 02Y#%WM8LKO9OH(X B)\KX%R[I+E KL.;D$&N31K@3*$
M8 G3XK$'O;3W[ W'ETC8I1L ^DJ13#B33S?$B_D\IX8E]-><H[K<1"K*3/ES
MLSD^=0#^D]ZF7(Z4G.'0UEKN0H95HY1<+H#43"YQ.+O0]WI3I!Q6I[$2"Q!
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M SJ^A[G%U>M\# _LN^U_GU):GS"ZZ;"OC$X%=0<^S@CM(FQ;$&%E$7)8!>
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M8+?$AO\=X(A>.W%1S8 P_S-:A;,!Z$@:MTNYIJZHA K?]?#/P700]8;CZ$N
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M10Q'^Q/.2,.N;<&QZ4^^ U!+ P04    "  ]@4E*RUSY:TH#  !/'   #P
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M<U!+ 0(4 Q0    ( #R!24IF\PM@@@   +$    0              "  >D
M  !D;V-0<F]P<R]A<' N>&UL4$L! A0#%     @ /(%)2K7\CHWO    *P(
M !$              ( !F0$  &1O8U!R;W!S+V-O<F4N>&UL4$L! A0#%
M  @ /(%)2IE<G",0!@  G"<  !,              ( !MP(  'AL+W1H96UE
M+W1H96UE,2YX;6Q02P$"% ,4    "  \@4E*;\E1J%8"  "N!P  &
M        @ 'X"   >&PO=V]R:W-H965T<R]S:&5E=#$N>&UL4$L! A0#%
M  @ /(%)2NL!"H3+!   C!@  !@              ( !A L  'AL+W=O<FMS
M:&5E=',O<VAE970R+GAM;%!+ 0(4 Q0    ( #R!24HW>+GD.@(  &X'   8
M              "  840  !X;"]W;W)K<VAE971S+W-H965T,RYX;6Q02P$"
M% ,4    "  \@4E*=HO*M48#  !O#0  &               @ 'U$@  >&PO
M=V]R:W-H965T<R]S:&5E=#0N>&UL4$L! A0#%     @ /(%)2FTP;,XZ @
MBP8  !@              ( !<18  'AL+W=O<FMS:&5E=',O<VAE970U+GAM
M;%!+ 0(4 Q0    ( #R!24KGZ1N8D@0  !(7   8              "  >$8
M  !X;"]W;W)K<VAE971S+W-H965T-BYX;6Q02P$"% ,4    "  \@4E*?I.9
M.Z\!  #2 P  &               @ &I'0  >&PO=V]R:W-H965T<R]S:&5E
M=#<N>&UL4$L! A0#%     @ /(%)2@1L%MJT 0  T@,  !@
M ( !CA\  'AL+W=O<FMS:&5E=',O<VAE970X+GAM;%!+ 0(4 Q0    ( #R!
M24JI.J3DM $  -(#   8              "  7@A  !X;"]W;W)K<VAE971S
M+W-H965T.2YX;6Q02P$"% ,4    "  \@4E*1-%4QK4!  #0 P  &0
M        @ %B(P  >&PO=V]R:W-H965T<R]S:&5E=#$P+GAM;%!+ 0(4 Q0
M   ( #R!24IQ=;=UM $  -(#   9              "  4XE  !X;"]W;W)K
M<VAE971S+W-H965T,3$N>&UL4$L! A0#%     @ /(%)2K WK&*W 0  T@,
M !D              ( !.2<  'AL+W=O<FMS:&5E=',O<VAE970Q,BYX;6Q0
M2P$"% ,4    "  \@4E*K[-9CK0!  #0 P  &0              @ $G*0
M>&PO=V]R:W-H965T<R]S:&5E=#$S+GAM;%!+ 0(4 Q0    ( #V!24J"HSB)
MM0$  - #   9              "  1(K  !X;"]W;W)K<VAE971S+W-H965T
M,30N>&UL4$L! A0#%     @ /8%)2JX@(!RV 0  T ,  !D
M ( !_BP  'AL+W=O<FMS:&5E=',O<VAE970Q-2YX;6Q02P$"% ,4    "  ]
M@4E*UGIH@[4!  #2 P  &0              @ 'K+@  >&PO=V]R:W-H965T
M<R]S:&5E=#$V+GAM;%!+ 0(4 Q0    ( #V!24IV!FN$M0$  -(#   9
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M970R,2YX;6Q02P$"% ,4    "  ]@4E*X)4UF[8!  #2 P  &0
M    @ $0/   >&PO=V]R:W-H965T<R]S:&5E=#(R+GAM;%!+ 0(4 Q0    (
M #V!24I1QV6H_P$  + %   9              "  ?T]  !X;"]W;W)K<VAE
M971S+W-H965T,C,N>&UL4$L! A0#%     @ /8%)2LG+ 7/4 0  V@0  !D
M             ( !,T   'AL+W=O<FMS:&5E=',O<VAE970R-"YX;6Q02P$"
M% ,4    "  ]@4E*XIU8F#<"   C!P  &0              @ $^0@  >&PO
M=V]R:W-H965T<R]S:&5E=#(U+GAM;%!+ 0(4 Q0    ( #V!24KBD"&$( (
M '(&   9              "  :Q$  !X;"]W;W)K<VAE971S+W-H965T,C8N
M>&UL4$L! A0#%     @ /8%)2L[A[')8 P  %!   !D              ( !
M T<  'AL+W=O<FMS:&5E=',O<VAE970R-RYX;6Q02P$"% ,4    "  ]@4E*
M4-7AKHX#  !'$0  &0              @ &22@  >&PO=V]R:W-H965T<R]S
M:&5E=#(X+GAM;%!+ 0(4 Q0    ( #V!24IKA%SM) 0  )85   9
M      "  5=.  !X;"]W;W)K<VAE971S+W-H965T,CDN>&UL4$L! A0#%
M  @ /8%)2A(EN'.) @  [@@  !D              ( !LE(  'AL+W=O<FMS
M:&5E=',O<VAE970S,"YX;6Q02P$"% ,4    "  ]@4E*=>I!5[\$  !.&
M&0              @ %R50  >&PO=V]R:W-H965T<R]S:&5E=#,Q+GAM;%!+
M 0(4 Q0    ( #V!24K1C/VAO@$  -4#   9              "  6A:  !X
M;"]W;W)K<VAE971S+W-H965T,S(N>&UL4$L! A0#%     @ /8%)2JYAH-4.
M @  >04  !D              ( !75P  'AL+W=O<FMS:&5E=',O<VAE970S
M,RYX;6Q02P$"% ,4    "  ]@4E*6_=X/#<"    !P  &0
M@ &B7@  >&PO=V]R:W-H965T<R]S:&5E=#,T+GAM;%!+ 0(4 Q0    ( #V!
M24HV=;ZD8 (  +0'   9              "  1!A  !X;"]W;W)K<VAE971S
M+W-H965T,S4N>&UL4$L! A0#%     @ /8%)2N8 T5TS @  9@<  !D
M         ( !IV,  'AL+W=O<FMS:&5E=',O<VAE970S-BYX;6Q02P$"% ,4
M    "  ]@4E*(; \]8(#  !O#P  &0              @ $19@  >&PO=V]R
M:W-H965T<R]S:&5E=#,W+GAM;%!+ 0(4 Q0    ( #V!24H4D4A<< ,  %H1
M   9              "  <II  !X;"]W;W)K<VAE971S+W-H965T,S@N>&UL
M4$L! A0#%     @ /8%)2@1'9T5? @  EP@  !D              ( !<6T
M 'AL+W=O<FMS:&5E=',O<VAE970S.2YX;6Q02P$"% ,4    "  ]@4E*PK V
M/[L"  #U"@  &0              @ $'<   >&PO=V]R:W-H965T<R]S:&5E
M=#0P+GAM;%!+ 0(4 Q0    ( #V!24I)+]'U70(  +@'   9
M  "  ?ER  !X;"]W;W)K<VAE971S+W-H965T-#$N>&UL4$L! A0#%     @
M/8%)2O<D".%M @  MP@  !D              ( !C74  'AL+W=O<FMS:&5E
M=',O<VAE970T,BYX;6Q02P$"% ,4    "  ]@4E*T!P*OLT!  "8!   &0
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9>&UL4$L%!@     T #0 '@X  /_T      $!

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>56
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/**
 * Rivet Software Inc.
 *
 * @copyright Copyright (c) 2006-2011 Rivet Software, Inc. All rights reserved.
 * Version 2.4.0.3
 *
 */

var Show = {};
Show.LastAR = null,

Show.hideAR = function(){
	Show.LastAR.style.display = 'none';
};

Show.showAR = function ( link, id, win ){
	if( Show.LastAR ){
		Show.hideAR();
	}

	var ref = link;
	do {
		ref = ref.nextSibling;
	} while (ref && ref.nodeName != 'TABLE');

	if (!ref || ref.nodeName != 'TABLE') {
		var tmp = win ?
			win.document.getElementById(id) :
			document.getElementById(id);

		if( tmp ){
			ref = tmp.cloneNode(true);
			ref.id = '';
			link.parentNode.appendChild(ref);
		}
	}

	if( ref ){
		ref.style.display = 'block';
		Show.LastAR = ref;
	}
};

Show.toggleNext = function( link ){
	var ref = link;

	do{
		ref = ref.nextSibling;
	}while( ref.nodeName != 'DIV' );

	if( ref.style &&
		ref.style.display &&
		ref.style.display == 'none' ){
		ref.style.display = 'block';

		if( link.textContent ){
			link.textContent = link.textContent.replace( '+', '-' );
		}else{
			link.innerText = link.innerText.replace( '+', '-' );
		}
	}else{
		ref.style.display = 'none';

		if( link.textContent ){
			link.textContent = link.textContent.replace( '-', '+' );
		}else{
			link.innerText = link.innerText.replace( '-', '+' );
		}
	}
};
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>57
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>59
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='UTF-8'?>
<FilingSummary>
  <Version>3.6.0.2</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>143</ContextCount>
  <ElementCount>231</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>56</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>9</UnitCount>
  <MyReports>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>0001000 - Document - Document and Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/DocumentAndEntityInformation</Role>
      <ShortName>Document and Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R2.htm</HtmlFileName>
      <LongName>1001000 - Statement - Condensed Consolidated Balance Sheets</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheets</Role>
      <ShortName>Condensed Consolidated Balance Sheets</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>2</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R3.htm</HtmlFileName>
      <LongName>1001501 - Statement - Condensed Consolidated Balance Sheets (Parenthetical)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedBalanceSheetsParenthetical</Role>
      <ShortName>Condensed Consolidated Balance Sheets (Parenthetical)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>3</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R4.htm</HtmlFileName>
      <LongName>1002000 - Statement - Condensed Consolidated Statements of Operations</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfOperations</Role>
      <ShortName>Condensed Consolidated Statements of Operations</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>4</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R5.htm</HtmlFileName>
      <LongName>1003000 - Statement - Condensed Consolidated Statements of Comprehensive Loss</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfComprehensiveLoss</Role>
      <ShortName>Condensed Consolidated Statements of Comprehensive Loss</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>5</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R6.htm</HtmlFileName>
      <LongName>1004000 - Statement - Condensed Consolidated Statements of Cash Flows</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CondensedConsolidatedStatementsOfCashFlows</Role>
      <ShortName>Condensed Consolidated Statements of Cash Flows</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>6</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R7.htm</HtmlFileName>
      <LongName>2101100 - Disclosure - Summary of Significant Accounting Policies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies</Role>
      <ShortName>Summary of Significant Accounting Policies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>7</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R8.htm</HtmlFileName>
      <LongName>2102100 - Disclosure - Income Taxes</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/IncomeTaxes</Role>
      <ShortName>Income Taxes</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>8</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R9.htm</HtmlFileName>
      <LongName>2103100 - Disclosure - Earnings Per Share</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/EarningsPerShare</Role>
      <ShortName>Earnings Per Share</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>9</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R10.htm</HtmlFileName>
      <LongName>2105100 - Disclosure - Stockholders' Equity</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/StockholdersEquity</Role>
      <ShortName>Stockholders' Equity</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>10</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R11.htm</HtmlFileName>
      <LongName>2107100 - Disclosure - Business Segment Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BusinessSegmentInformation</Role>
      <ShortName>Business Segment Information</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>11</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R12.htm</HtmlFileName>
      <LongName>2108100 - Disclosure - Major Customers and Foreign Sales</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/MajorCustomersAndForeignSales</Role>
      <ShortName>Major Customers and Foreign Sales</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>12</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R13.htm</HtmlFileName>
      <LongName>2110100 - Disclosure - Long-term Debt</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/LongTermDebt</Role>
      <ShortName>Long-term Debt</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>13</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R14.htm</HtmlFileName>
      <LongName>2111100 - Disclosure - Commitments and Contingencies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CommitmentsAndContingencies</Role>
      <ShortName>Commitments and Contingencies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>14</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R15.htm</HtmlFileName>
      <LongName>2112100 - Disclosure - Investments</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/Investments</Role>
      <ShortName>Investments</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>15</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R16.htm</HtmlFileName>
      <LongName>2114100 - Disclosure - Related Party Transactions</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/RelatedPartyTransactions</Role>
      <ShortName>Related Party Transactions</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>16</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R17.htm</HtmlFileName>
      <LongName>2115100 - Disclosure - Subsequent Event</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SubsequentEvent</Role>
      <ShortName>Subsequent Event</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>17</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R18.htm</HtmlFileName>
      <LongName>2201201 - Disclosure - Summary of Significant Accounting Policies (Policies)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPolicies</Role>
      <ShortName>Summary of Significant Accounting Policies (Policies)</ShortName>
      <MenuCategory>Policies</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies</ParentRole>
      <Position>18</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R19.htm</HtmlFileName>
      <LongName>2301302 - Disclosure - Summary of Significant Accounting Policies (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesTables</Role>
      <ShortName>Summary of Significant Accounting Policies (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPolicies</ParentRole>
      <Position>19</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R20.htm</HtmlFileName>
      <LongName>2303301 - Disclosure - Earnings Per Share (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/EarningsPerShareTables</Role>
      <ShortName>Earnings Per Share (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/EarningsPerShare</ParentRole>
      <Position>20</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R21.htm</HtmlFileName>
      <LongName>2307301 - Disclosure - Business Segment Information (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BusinessSegmentInformationTables</Role>
      <ShortName>Business Segment Information (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/BusinessSegmentInformation</ParentRole>
      <Position>21</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R22.htm</HtmlFileName>
      <LongName>2308301 - Disclosure - Major Customers and Foreign Sales (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables</Role>
      <ShortName>Major Customers and Foreign Sales (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/MajorCustomersAndForeignSales</ParentRole>
      <Position>22</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R23.htm</HtmlFileName>
      <LongName>2401403 - Disclosure - Summary of Significant Accounting Policies - Deferred Profit (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesDeferredProfitDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Deferred Profit (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>23</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R24.htm</HtmlFileName>
      <LongName>2401404 - Disclosure - Summary of Significant Accounting Policies - Restricted Cash (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesRestrictedCashDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Restricted Cash (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>24</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R25.htm</HtmlFileName>
      <LongName>2401405 - Disclosure - Summary of Significant Accounting Policies - Concentrations of Credit Risk (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesConcentrationsOfCreditRiskDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Concentrations of Credit Risk (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>25</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R26.htm</HtmlFileName>
      <LongName>2401406 - Disclosure - Summary of Significant Accounting Policies - Inventories (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesInventoriesDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Inventories (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>26</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R27.htm</HtmlFileName>
      <LongName>2401407 - Disclosure - Summary of Significant Accounting Policies - Property, Plant and Equipment (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesPropertyPlantAndEquipmentDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Property, Plant and Equipment (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>27</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R28.htm</HtmlFileName>
      <LongName>2401408 - Disclosure - Summary of Significant Accounting Policies - Goodwill (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesGoodwillDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Goodwill (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>28</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R29.htm</HtmlFileName>
      <LongName>2401409 - Disclosure - Summary of Significant Accounting Policies - Intangibles (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesIntangiblesDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Intangibles (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>29</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R30.htm</HtmlFileName>
      <LongName>2401410 - Disclosure - Summary of Significant Accounting Policies - Warranty (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesWarrantyDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Warranty (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>30</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R31.htm</HtmlFileName>
      <LongName>2401411 - Disclosure - Summary of Significant Accounting Policies - Stock-Based Compensation (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesStockBasedCompensationDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Stock-Based Compensation (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>31</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R32.htm</HtmlFileName>
      <LongName>2401412 - Disclosure - Summary of Significant Accounting Policies - Shipping Expense (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesShippingExpenseDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Shipping Expense (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>32</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R33.htm</HtmlFileName>
      <LongName>2401413 - Disclosure - Summary of Significant Accounting Policies - Research and Development Expense (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SummaryOfSignificantAccountingPoliciesResearchAndDevelopmentExpenseDetails</Role>
      <ShortName>Summary of Significant Accounting Policies - Research and Development Expense (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>33</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R34.htm</HtmlFileName>
      <LongName>2402401 - Disclosure - Income Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/IncomeTaxesDetails</Role>
      <ShortName>Income Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/IncomeTaxes</ParentRole>
      <Position>34</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R35.htm</HtmlFileName>
      <LongName>2403402 - Disclosure - Earnings Per Share (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/EarningsPerShareDetails</Role>
      <ShortName>Earnings Per Share (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/EarningsPerShareTables</ParentRole>
      <Position>35</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R36.htm</HtmlFileName>
      <LongName>2405401 - Disclosure - Stockholders' Equity (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/StockholdersEquityDetails</Role>
      <ShortName>Stockholders' Equity (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/StockholdersEquity</ParentRole>
      <Position>36</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R37.htm</HtmlFileName>
      <LongName>2407402 - Disclosure - Business Segment Information (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/BusinessSegmentInformationDetails</Role>
      <ShortName>Business Segment Information (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/BusinessSegmentInformationTables</ParentRole>
      <Position>37</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R38.htm</HtmlFileName>
      <LongName>2408402 - Disclosure - Major Customers and Foreign Sales (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesDetails</Role>
      <ShortName>Major Customers and Foreign Sales (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/MajorCustomersAndForeignSalesTables</ParentRole>
      <Position>38</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R39.htm</HtmlFileName>
      <LongName>2410401 - Disclosure - Long-term Debt (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/LongTermDebtDetails</Role>
      <ShortName>Long-term Debt (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/LongTermDebt</ParentRole>
      <Position>39</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R40.htm</HtmlFileName>
      <LongName>2411401 - Disclosure - Commitments and Contingencies (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/CommitmentsAndContingenciesDetails</Role>
      <ShortName>Commitments and Contingencies (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/CommitmentsAndContingencies</ParentRole>
      <Position>40</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R41.htm</HtmlFileName>
      <LongName>2412401 - Disclosure - Investments (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/InvestmentsDetails</Role>
      <ShortName>Investments (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/Investments</ParentRole>
      <Position>41</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R42.htm</HtmlFileName>
      <LongName>2414401 - Disclosure - Related Party Transactions (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/RelatedPartyTransactionsDetails</Role>
      <ShortName>Related Party Transactions (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/RelatedPartyTransactions</ParentRole>
      <Position>42</Position>
    </Report>
    <Report instance="asys-20161231.xml">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R43.htm</HtmlFileName>
      <LongName>2415401 - Disclosure - Subsequent Event (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/role/SubsequentEventDetails</Role>
      <ShortName>Subsequent Event (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.amtechsystems.com/role/SubsequentEvent</ParentRole>
      <Position>43</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File>asys-20161231.xml</File>
    <File>asys-20161231.xsd</File>
    <File>asys-20161231_cal.xml</File>
    <File>asys-20161231_def.xml</File>
    <File>asys-20161231_lab.xml</File>
    <File>asys-20161231_pre.xml</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies/>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>true</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>61
<FILENAME>0000720500-17-000017-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0000720500-17-000017-xbrl.zip
M4$L#!!0    ( #V!24I)@'@<*2 ! !O>#P 1    87-Y<RTR,#$V,3(S,2YX
M;6SLO5EW&T>2*/Q\[Z_PI^=/=FZ1BT^W[\FU1]/:6I*[;S_U@8 B6=,@P"D
MLCB__D86"!) %5:""RC8Q[:,VB(B8\_(B#_]G^^7_9^^%=6H' [^_(K^3%[]
M5 RZPUXY./_SJ]\_O[:?_9LWK_[/;__[3__?Z]?_UWUZ^U,8=B>7Q6#\DZ^*
MSKCH_?1'.;[XZ1^]8O3OG\ZJX>5/_QA6_RZ_=5Z_GCYT]6N/@3@3DBI2?!4$
MOG8XZ4C\<V%T<4;/R/___5=YI@HJNU][HB"B6^A.YRNC5&HEN)1G1;=^V?>O
M5;_\-?_[)X1Z,/JU,[H>_?G5Q7A\]>LOO_SQQQ\_=R['1?<"?QT7EZ.?N\/+
M7QBADC).7]T\TAU.!N/J^O:I_+:?1T7WY_/AMU]N+N:'^&M"7\\]-JDJI,NJ
MYVZNY@?%XH.]HFQ_!B^TW%Y\[UZTWY^OY =@\8%R\*T8C=L?F5YKP:8<#06C
M:H%T]9/#ZAQO)_R7FSMF#_3+P;_7W)TO?^V,BMGM@T[9';7#5%_*(-%%D ;#
MP6!RV?Z-WKCZ97Q]5?R"-[W&NXJJ[-X^M_FAQ0>JXFPE)O(7O#J[<51VVU'
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MK1(B8G1J>$+K9WA#P,5\3G%[\NQ!T;>=KT.D3\^BZ5R./9]=<Z"5]*48Z=)
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M[#60+>)0;UAY7-#S8;4-(876#B&*SDB2MY0U448J%:)-1@F+#KKM=HM^K@S
MV*E^^SQ@"Y];A.13<5Z.QMDVY.->6X BP1G*N$DV"-2JVD6)/.PC=S8J!6A
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MY&_DW34SK V<MGAE/51K]X42.);+V"T-Z,P8FVT5\,0E!E-!-:'"**O-4+5
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MJ1,Z2L8YZ0/J:1XD2=I**^HHKR410WXFN6G8@<BP0-'AY64YGCI'@[J>^'8
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MMO<M=Q+<K_6'L#[W&N+>:0VH-UVPSN4R+(GPBM XK:#(<J>$=BCV G3=69R
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M%*+0C"JMG*)*FN",-=RLZP-$[@%KR#W'MQO!OI#88O@WU=XQBE;+:/2 )?K
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ML<=(Y8L3S&7UO#J)KG0>I24)1N@8HJ,@2@H*>8NP9&1+0<Y2D>O3DVKM)+=
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M+D#5Z';EEN$HF^B&YCE-S=2L6:JMF_OXUC!MT!F&F^1%R"D AJ$-2DTPVHG
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MZH:,4<68FM7(*R%L%%MM!=HZ!U7&1//XHD Q>I A&5QK#+T<>('AN6BHNUU
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MIX.^#K)H.)W:?4N?;'=GLK>"H(<LJ[81M"]A][MG-.]T_>WM+34U/',\]'3
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MY3?&IX[\,W_&OE_OV+Y?\E3Z18L3^;<X3Z0?/V@ "E^[">-K/]3@:/,%( O
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MI<#V84V ^?-8B^),\''8)O#">9#.PCC%MM :+W*$ZQ)&6#K7KN\)%EQC@9W
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ML+JB$=[:#D/HE1EK[:AWDTAQ0AE5M*UBJFCC1U24$&A8.8 'TR&R1996D'5
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M@P-X]&3T"S[5KWU]@]EI$3V4U+XXX>Y*_K@@@O/)\HQQ/<W7_HB#*-O?;E.
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M58 C:4?6 SI2CL^?C*T+@BM?AXM#[8'B@4$9K\00=Y!(T;4$%)%&H)/=Q<U
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M (+=^F%>@0>S-\H]2#N3G!%E7+"#3^;Q,2KGE^!>9FK?(6?G"AQ V4>O.&Z
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MO]ZQ?;_DLLJ$+%?Z+<X3Z<</J,/XVDT87P-/ N+)L2LEP(US;-[ G>(':^Y
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M;EKZMZR#H[GO@C 4GWS$#);,@A1GZ&(Y(?M7#FB0Q;RZ"ZL65W[R)\OJQ8N
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M)3_%"L8%YH)#![=8Q%368G2+#(T0<>>(V'Z,B'?"%Z$L^"PK1!=/O7#6$DM
M3CQ[S(@]SQYS8<;"F*[O>,E8R&%!*HU!_J.4QMJ_/)HR=!.HY2@9E^'Q<H1&
M68M<=3PL_8]TJD<Z%:A(#!0=60(]K2.\K*P\#SS76:!*(,^F>*SS!(9^F +2
M8)'C$"8,?/AI >P'F8>3G;[TN^$(H$_ P?U75=1.CSKQ5X\)&@C@**P3"ZDO
M%:9985L-]@<^R.\Y( .\7M;.9'WOE?P45Z*&*2DW'R>/GLLY87F"U:M9,G+
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M))<4C4HB2$D7A"(L*G/D$$543Q%/1/!G[".%&HMNHBBUAYIR9.MQ:F&KKD.
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M^V(Q=\D_BK_B4:\<IB1$"@M0I!7EV..&<EQ9LUS6><?2XO_%TG&I8@#K][
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MO_(%LHK.BX9HY[0Y!,*X R)$-!A=GZ=-)7K-7HG#?4F)1U(2:F7HQLDT0M@
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M'Y,.<*RD5EVI4;-)IVIUFRB**(HHBBB**(K40>/4P4.[JM<)Q-IG&3]W3+5
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M36O4L5!X/!9CII7 S"C55(FO8CAX>VNG#<%SV)JE>:170XEVL 2G)P:$".Z
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M-/O[QQ^2Z/2.\_G[:V<JQHDG/DVNE7?@BY@'(;:%^>A/,)$L=@/_;)'^> /
M./,"Y^O/?_W+CRN&F/)0G/%(C,^#V5SXD7S[.H87/LWQSVCDQ.Z]&R]N<+7Y
M:' $/L+YBYC\].[JHM6T^_^T_WUS\8ZY8_B"._&I;9\/FJ.S7ON\=]:].F\-
M^KWS5G\TZI^U+MN]_MF[GQ^=6_$,7LE;6W7L+^7M59%J*H'$ @DE%H<<8.=(
MB,E<3TR:5+]%+$CB*(8O,<\3P,VB9#;C(8PV9CQBD\ # ?)*(/!+^]R#S-EF
M.;5+CJP@\]'N:4E][ SWF_VWY\Q+VCQM_O W7Q,/4*7:UIM\JW9W#ZF%AB42
MWDQ#(=BO\-LT8I<^%KO(TEY9V[8.S!MI+BX^FS1X/*A("=2$6M6AUMJQ>C5A
M9>;BFZZ$_?J@5^H)(>9E+C(=5/6'/^07KX3[[&]Y(S@J?B<,7=WE-Q$Z;F3J
M\CZ'KO/RVHB3D%@BL708R$1BB<32X8DEBMI^GN]\*M[UQ>Q6W+F^CQ^""9O#
M6T$U0=R'$R9J#3JVU>WU=8FU@X\4K1'A&2?PM2M$QF,;M78OOC=HK.\X)$9#
MC.;MEL4Q2?)>JV]U^B3)B<!(DI,DKY;;#!NV38RF2@/^L.STOX?<KRBCNGZ2
MNMFTFDUMD?ZF'''5XIBD[@'31*<QI&H=1!!$$-E[[4[':O:U>4N()H@F:D\3
MW4:+"$*';6&09Z-*V&:7P'0'N+N6X5K;V9J"2-3TVR2Y=3B4UV[L@/),(:*J
M53^B+:*M)W :M.Q6]1A&)$8D1B1&)$9W0>N \"H()\*EVZ#4^NIVK4Y'>ZKN
M<=M9)(\.F&+L=H.ZW1%%$$4L94B[;?4ZVEJ_D0PABCEPBK$[C2%%X.BP30SR
M">PPT4SXXXI3S%ZMWZH3[NL7@]TYH5J#0=<:=O1%FVX-V*.HF%LC<C=.7&H7
MD<9[PR@HOOA>OS&@CBO$: S2RTF+R+2(8;MO#>T=EM<G+8*(F[0(TB*V2)+7
MY]TV_NCWXK+8/Y-)>RVTL+'"WAG.VF6X*H!;W6!%>$5X17A%>%476!%>$5YI
MAQ7=$[V:<R1[9-$]T2X]/.U^U[+[^DPG\O"0AZ<F0MEX,Y\\/&4/3TM;O*_Q
M1T^,Q@"-EK2(=;4(>S"T!EU]54I)BR#B)BV"M(@J2C"VJ 1CI2Z+W3,9G2#+
M^H<PKCIUL EW0W;/O42@2R+KEOXB!"M:VIVJ!LG&28CQM-B\?6,/2;7QZ(?
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M4]MUF2E'3 :@.:*FAA0QL+5%<1X*19 MM%$.;"4ZVROWZX>CTV&7M:IR43:
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ML-GDH;C'J6&E$^8+1T01+  ^^2Q*;B/Q9P(TD0:E1_@,=^*$>[C7?-ZQ.YG
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MO>L[7H)01+U$>$BG%KL3O@@E P8]9PQ"%9@\\$G4!3*4V9R=K,,/2AP$FV$
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M)V/__-<??\!QW/?X[\__'U!+ P04    "  ]@4E** :9'^$,  "LA   $0
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M!CF'!3**T.SM!Z2<,5&G"):W.?7MD(&),QYTI>BS=,-O8U%O(F\[:)DMM:H
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M)GJ18R2L2C&E QN^]L(1K(/$'!'&->)1"L0T48@:SIUBW,L^5D%)[Z'7B/?
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MA#,A/&4.$Z*9P)@*!BM>$33MG:'D]1@F?2(835ON2*S=4!X]EV!AA#- 4^<
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M2X\G!EH@RO40:4 I51(HH4KV@':"P_;61[3$G8&MC]98G4H+CM@_'@Y(A*?
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M(+H(Q^;;#S?9PN?%XT?W9K-U?6]""9826.((,E8Q9P,@NX6<VYB5LT^B0Z=
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MVEF"5G3(,I3C%U]K&$ZWUG_^(Q]XK=]](9%:2**%H3Q@"C"DFNXP4<!TN-D
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MW (;5D.SY14CY.DX=^%>I=A,,SKA];IU9%1;_'A5HR<[X/,O'\+&=K7(EZM
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MK@Q&A]<F4#B'%0<(ZH"5LXHQ72$EH&]?%NWX5+ 1VR$1(8X68KR'Y-I]Z?#
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MEHYYX2K.C.51%:%A@$MOPGKJY!P*M5@+1I_%DDL+78&P/5O)K?/.4Z-W4TG
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MQ@/L/U6W/X1'Z=<X8XT]D7?L^F:>WV;9YMCPX:;DL_X&9M^8Q%J+O? ^'.J
M5PP*0T'%(^J2(3;8,?BTHG[J/.L)V/C^E@W%]5E(+SV?& D<AP1IA4 X_2L,
M.-D:TM@Y-,*HYE$I31^@CC/?%*A@V%*E$-8( DL01Z+B04)Z!OFFIS+OVV(X
MWJ3%32^"\#)L,)34BT ]KT[;4ED^;D.ZA3P.9"^VP^)\93M*2S.N2$\CRG8)
MC-!I#Y61DC,,!:(05!N9)(#1F%Z9%@F,C25Q,('Q. S&G6",L/=.4TD\"X<I
M@3STK.)%BP[1=5$24EO+LP,&T;+)YANT@^7WHIVQO9XZY$YM]()$*8)]6.0
M<%B$TP;SQ%7<.QDU_KXO"WTX__X@F$9W!V3%M]DD>YF%S^EWG2V"/%<^ '^<
MQO7S@41KYZ@'RDOML/4",0LJ]!AU[8-N3G=F'$XC3X+YN-; 7[+5AZ^!Q<YK
M8?6B! 5!$*N,"QN"*"-I%=T)HXRE::V!@V7'CGY-;(EM5*?^EWK\OCS%+[ W
MNPN__I@5LWQ:Y\GOXQN)Y1(8 1Q##%(BF<=Z-ULY)B-J$#("_3P5[*.YCSKH
MK_PU6VXBC#8<PCKM[>DS"6.8<L)UV7>0"X84$GYG(&G6WBLP6)7!4ROP:9 ?
MO0[?7:0L/ZQ7RU6Z*.LS?LKG<Y\7Y2^'T.:#'TR,ETQB$-!$5CIO+#2[ VDX
M4[;O'<'^J=?#R. ,-?R7=8V+I_=O)08X0I  **P7ADC$C=ZY2+#D4?,@!M;K
MGI1K.%UO)9)S4?._A@=7RW=;BZNNI-8 7TO*?!B#(().:1",/(/1#E?F_#G>
M6)^7JG<72C1E+^_DWRV7ZVQJU\7.R-IPMWP0Y[%TW[-B,EMF!RV2HU^6>$>5
M+%M&<R 5I]X 2G:V'.C0^WA\;HJ!5'5HS,]EV0U ?LTVU?!W$V_ 9?>%KR70
M$,$LLCZ<0@@7HHR-N,<5MM?E\;DTQKGL=A?*N2C[=C*703B#F]+/OI5([220
M3'. F; \+!D,;3&E5J#VOCL^.D4__1&Q*_SGHM*/;:;?LMGE5=E\_5M6I)?9
MYI<V764^G15UR;&1*4FD$0ICI<,?2'$>=E10+7<42=6^D*3XYW2(+)QSF2P/
M-MXG$%1FWL=B-LG*3?EK3$=B0V(2KI1U GDCI%;0,<]I%5U A;;M^SC)?TZ9
M^/)Y9;/F]%,ET1921ZBS!AC$B3 4[_"7>(R%]L>LI*>93T<*<323:&_,?Y,=
MN+>)U!\5B092E.7II%44J;(^D-B9 )#3UQ2,-<+)=#)!GLV$JI@\^9PZBI"R
M/J,)X'/**-. 0$"\JJ3AK6J?@'L.KMO13ZLA97DV,^L%A^"IYM:1I"3" X,U
MU!R;LK4CDEC*G>*8#A;@.3B31S^[AI7F:.97<]?DB<Y3#2E(/ %6 >*H)XPB
MYHGBNL*?&J_:GZ? Z*;3Z1T.PTAE]+-BYW14R^7Z^@X*M9C^G*VN\FD^SR]O
MU9?EJD@GAUH61?AZPAU#2@&D$ -0,$<4J#)"*?.XPVP8GWOAA+-A,(F<Y4SX
M-%O^[HLL>[=896';7'U*5X/L#$V_G1"/M#(""N&X0]0R>[\G(P[.L1A,3$T<
M<I;T(*_19]V\Q'>9:%162OF<%=>UB0R#?#3A0%D$F:!A4PY_%0ZH*KB>*B%B
M]B!X+;-B#((ZRRVC8MC.OLVFV6(:<\MXZ=L) 0AAH:D1FAFFA8!XASE"ZC5%
M*Y[;EM&#O,YZCOR:S\-KYK/5[2EFR>.O)XQ[* C&%AEOJ:"2TZJ\"+40ZU?D
MO#K7>=))8J.?*659_]7MNT5 ?KWQYVW:"7R^2A=;%\4O^>);,"RSZ<"Y=JT(
M2;34BGE*N'52.&*"K5M==#&@8(?K__%982<\H,<0SBN:*L-%&A]+0\( !< (
MCXQT0"M15I/<R0#)]O%CXSN[#ZRD\>=2*Q&>_S3Z=</\D*DI1Y*0*!\L$NX4
M+_TIUGO$494:P3QRKRE-\+5,HDX2//\YM)-2;=SW:,RZ8RA-@)#$*>,!)()Y
MJ<-I%6[EJ9F4'2J-CL_!<!9VWX#2^S/-QI%/P00R4W8Q]EBP8(8(Q@BO%GH=
M?A.UE\1H=L)A='^$<_A(\9__Q'UL18QS]AY)8T*9]!HQ8J OBXA8@G;!]EH1
MVSX)[YR-V3.?PL/JP/T\/GW'SDT[A9%TZ/PM+46WNFW?DW-?Q^-=WXF/13Y=
M3U;5E]X?:*+9<&3"!4:&2@P<4<&,E )6%<V50MHU*EMV-!];,BH!UI/_9$""
ML9/06X$EP0!RX8'%6ZHEX;3]A6)/_2A[1S\? )9TS)TC/QW74@92PC%%0$/B
M(3!.0%LQ'FR1F$7*&K64Z4N.^_O#' 5(+-/LT_$]1)#!W$HEE(:("0<TWR'A
M- )GTQ^FJ3P.-1-IA<7YRO8T,FW>'R:"2$\CRG;]1+APDB$"*;?0.4FE5;KB
MQ;L.Y3SB](=I*HF#_42.PR":/%OU^V$.,.X9(5Z'_4=YIGVEW\I8WOZN,$Y_
MF+;R[(!!O3SW6<9E_E8XV3VQ$_=>>=4/2@@K0U&L%^%_W%!$,005Y5R#$;GF
MAK65>P0IVG3-OVT,[G>+/=2'LV>Q3N?-[FI:O"TQ4@!D :-.4^HEUA[S"A>(
M.\31]#[UAU*>>.C%JUAZB/Y#OLJ# Q-!P[ZF!8(2"@8TQJAJH:44L'*$V_Z@
M,GU69K1'\,:A*O>'U;ORJ:U5Y^F+$J^8#(!@8AU%2FMA%*W0\$#%; Q[=JK4
M$<QQJ-;6RWVP[G>C%R3.><08A]@S&,Q )A78K?<Z;/+CRS@8CRJU!'$D*E1D
M63B=EX[Y=XM)D:7+S&9W_VVO5?O?F1".#=*>*8N-<-0@9G8B0+)#D]O!0O9'
MI&B]X3H.W3/KHL@6D]O/X8?+^>8ZKS<=;/#N1(9SI5?!RG4".R ID=KOYBNU
M[0,3!VNM-!Y=[!_?VGO2[8_+/\H\QG__E_\/4$L#!!0    ( #V!24K2W=NI
M'*@  &*?"  5    87-Y<RTR,#$V,3(S,5]L86(N>&UL[+UKD]LZEB7Z?7X%
M;\V'6Q61KD.   ET=,\$GC6^UW7LL%U5TU%Q0R&GF&EU*<4L4>GC[%]_04I4
M*A]2 B! TNZ)CC[ED\[#O?;:P-H;[W_]G]]O5LFW<E,OJ_6__0[\,?U=4JXO
MJ\5R??UOO_O+IS?LDWC[]G?_\W_\MW_]O]Z\^=_\X[M$5I=W-^5ZFXA-.=^6
MB^2WY?9K\K=%6?\CN=I4-\G?JLT_EM_F;][L_J.D_<-JN?['OS3_^#*OR^1[
MO?R7^O)K>3-_5UW.MZWMK]OM[;_\\LMOO_WVQ^]?-JL_5IOK7V":9K\<_JN3
MO]'\VYONU]XT/WH#X)L,_/%[O?A=8CQ<UZUM"R/=KW]_]ON_9>UO TKI+^W?
M'GZU7K[TB^:SX)?__>=WGUH_WRS7]7:^OBQ_]S_^6Y+LZ-A4J_)C>94T__N7
MCV]/HJ._-+_QR[J\;OC^4&Z6U>+3=K[9OIM_*5<&1ONUKYORZN5/K#:;1U]H
M&*(-0R!O&/KOKWQX>W];_MOOZN7-[<K0\TL/_!Z M\_!QD+7DO"K#\ASK#[]
M8&"\GTW7+<,B?O[)P)AW#4VM%S':[]//!L8>%G+4EE%MYZO +>/9)T]B7C6_
M]<[\:?^+S=?/R&]K?"^J1Q\NOV_+]:)<M*+YZ-/)<O%OOS-_FMW5;Z[G\]O9
M6Y.U;LK/\^]R65^NJOIN4[(O]78SO]S.&!:%5H1PJ8I,$D !*E*-E-:BX)G6
ML_:3LW+]YB^?.@#MC\*9^)T+#\\9WI1U=;>YW*4G@ZW)SCNX_V.'*C&PD@=<
MR=\[9/_?O_[RX,\C&JO+E]I%B^=J7G]I0>U=-^  _J5<;>ON)V^:G[Q)P3[+
M_G<+CIXR6UT&979'U*JI)ZK-OBT^:C)L<YE4FT6Y,75.]Q_--Y>O1&3_&[]<
M5B9YWV[?/ I.4^]$\*0*W^YV[!AG7F+F=&<2U7IK2D%3$MY_GG]9E3,F<,&!
M9H!DB!-D_DE)9X\(*6?;0_:P[T_.5EQZT_9$.K/K4D?0DK^WX$YWJ-!4.JI2
M5!:]-<F%P+B*])0?&SWRYG1B:N3OQRDMZLF,K1)]-,VJ9-^7]8P6&0,B!WF*
MD4XE($#3[OL*YMI%>>R_&EEI6B F61LHCKKB0(R=CL3AQ$TWK.B(HA('[\^H
M@CM#TU !#]Q5W[;AT<O_7-Y\*3<SQK("9QDFG.>:,52(-.TL8,&X<S^W_.XP
M/5U6-_/EVJ>OV]+CT-LC,./5WU\C)5Z/WS'P6I]WY&E"O=X5^4O]WLM[VY[_
MY^5Z>7-WL[<!9 9)FA>TR"7A,)-,YH?1C/F12]]W^W+DWK\'X];M';FQZ_CQ
M:''K^GL<R=]W2 ;N_(]8.-/]_=B:A@!X8J]"M!='$9A_/[*AF21IEJ=9H5#*
M%<@8ZH2&P$QD3B+@].78(K #XR@";MQ8BD T6AQ%8(=C+!$X9N&<"'BQ-1$1
M\,/^5 1Z,-!GSO'=<EV^W98W]8RE-,<I0AHH0%2ABR(7G4W"*.T[[VAO::2Y
MQP9@TB(,, 'IP*O_)&0<2L-,1-JP.=ALY($HQQE)=X*GH4F!?+&8F?1ER%:S
M_K+>E)?5]7KYG^7"6.;ENKQ:;NO/7^?;OU5WJ\7;F]OYY59=7967V^6W!MS'
M^;:<,9JK7.1Y41"E9"Z40K@#DV, 7<0L$H3(*G>,.MF:WOEECSO9&N#);PWR
M9-E"3\H.>_N+&X/>30!C!<E.&2<0'S?)?!2:1CCYH]"TH),=ZN0 N_W%C^="
M$T5-_<@]([.1HS4-_8WM9#5H#PBBV(?D\:%<SU?;95FS]>+MVBA;66_9Y>7F
MKES,@)80RT*D %)=Y$C)%'2(D"A4 -D.@F,L[;Y(EKMRJ_GA;>= ,E\;*=^[
MD,QW/@11\#!!ZR7C@\<KD)9?)$>5\8='H>K0)^R54 VIZ#8\N\MZT.A-6MO#
M>FHG\!'8?4WEY_5]_3 04-_G-\MUN[W\U[MFYJ*Z^O=ROJG_9 !NYJO5_7LC
M4KK://[5>H911FDJD4)02)8K:4 >YC<*B6QT?A@DD95^AS6IKI+[!FU2&93)
M5;5I!;X\ FHGYP-%Y[R@3R\PWC,:1X@NDH=8M0XD!P^2QH7$^/#TOYE6U!;[
M8R7M[_] T7N$>U)1?)*?&^J:K)L#N,^Y0<A\(>L.&Z1Q\^[ OE9C= .W$=;[
MS?7<E *M#6',5*OEHOT7D_T_F"[1]97W5]H@65\NYZM/YB=ETXGJP[YF7/"4
M4)1SG2(,L<B80*E20*6,TP(RR[)]&##QU/X8_T7RR(.V6#_VH5&-@Q?)@QNC
MG04(0OZ9JG[8X$ZCOA_8YVK,[N2F.[*\*C>;<O&Q_%:N[TI^SS:;9OM28_OA
MX,3G\ON6&T+_,=,8%9 +K@!*(>.I9"3K4' $"Y?9G-"V(]?UHKJYK=:M-AC-
MZ, ;,:G,N,UM:B8XZW:Z/B;A;@I^8'</]2+Y<I\<H;UX=&JKW4J?-+B3%OC
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MJUU#C@N4];OENGR[+6]J X8JABBES7XEI)B0.-^#T4Q+;KU)*!Z$R,+EM9/
M]-7&@:3UP&6?2,1(G5?$"07)32Q_FO@X;-N91IS\=NG$C)?=AAQO]D[MOXD?
MC@ELMQG R6K0)AYL&?A/FZJN9P1DN?EZ2@NA-0= 8)5V9E/*0^V@L3,6.2>V
M(!(QWVSNE^OKA-U4=ZYO)_7GL_>J;7@JPR[3MO@FLR3;HO%;@W4C>AI5?SAW
M[%=9?7@*H%_LTN3QN]5\6RY,3]YL]^\ESQC/! $@XQ3D$DC$J3@(:2I2/EN7
MU_-VIC6$L/FBL.J?=-<_GP%VJ%H.Z))C>,%$SSL(O64P*O%1A-$Y&$-KY0E*
M_=2S;WPFKZ>]';17V#!<!M#<7\OMK( 2 (@(%%FA<V.S *(S"E( 9MMJ.U_U
M%E8;4T[UX@&5=8<V$*)5BU9,]A;)T"2&%42#;C+:9[#XZ9P+Q9/7-"=G[/7+
MG:/^6O67NKRZ6[U;7I4SB:E,4<91!E%J1M,LS[NI:8W-<#O,&-?!8.1Q[@Y)
MTD )I5<N;/95K4A$!M2NB\2&XH$E[($V+R'S8'WJ<N;CDK6H>?-EO?J^N9ZO
M]Y6>J-9UM5HNVG_A\WI9-X\HE74WC<WOZN6ZK&M9UI>;97N_*5LO3-G8U"RF
M>OE@_N/+95D?7;)#.,6YYBD!A!5*JY20(N-2F8*R<<%I_3XJ4DHXAH6I9U4A
M,="4YYDN.&-4**H0C?[RP<-[<Y^6U^OEU?*R>2W\ 7'207;<)C!N>"TW&OPP
MD77<JG#DUT7RR+.+I/5M][S=@W?FQWO_DB,'=Y?'/F\*(]Z*$C5DYW9.3**I
M3",E382+I[LWIH'*?O^'W*_4&LO*6-W>OUU?59N;W47>W258.=$IS0LJ.)24
M%BREA=K=LD2E3(G5!@(K0ZFF.5&B*+)"X510FLD\SR0%60XDR2-.+';P6K79
M 4R.$-K<[1:+7(?5_\%)]EOH#T"VW7J^#1^GENZ#<CF!5?JP_E2Q6IV==BW*
MY6QGZV-YO6Q,K+?-9MU92C($"EA@Q9M'30L&]*$WL0);O0%Z\N,P+9JM=SG(
M,X %*!CCJ4B+S+0[G'+B]!Z[S_.<NY[R *K=4VZG1_Z$G=?V0;ARDW)'FLY4
MB'5Y^<?KZMLOQLFF.$3-'QJ504<UX2D"7I"5WER-JR+]X5>!VHRK1@@C3IOY
MJMDG]/W_+>]GB!:B.9PL(=5I"D7* .[:/,58N8G$TZ]#(W1,YD;B,,228ZI$
M1C 33/ BA7(@E=BC:C?0?4\,+E>=<";-5BAB\N6E%/94!=.*)QR<%0M?OJ:B
M%M[XG\E%/R9L]$+<;3;&B%[6E_/5OY?SC5HOY'Q;SC(-"=?-"4$H"JJ,0I&\
M:_UY"JSN&3AK &%A;#")(3=BISDE0N6R()SI7!CW(JO&'E>R Y8TR$QEOD@:
M;/;*X4_?Z^(Q"'-N^N%%6@ -.47%"1GIS=SX2M+?A2I@2W*M/_1R56Z$L7!=
M;>YG7"*1466&^[GF4&4:'Q*I @6VEI*7OJT )"+50%"685/(,X(ITY!G F=,
M4J?+\/UKCQ93TH%R+3P<V;(M.^(1Y55T6'(4K.)XY/[9>L./J/$UHA?Z9[5&
M'Q9LE*&;-/EL_@M3R BI*<U3Q52*<D81R;I&GN>%U>TCSSX*$,.F*LJ8*9!P
MED-"3.9-<\H@T3D$L4\"'";Y&C#V&N#&R^N=/QHEGO/+9]D(T-N/_3W1S;TH
M&;]_^\&N>C8%]Q[]H=PLJT574W!!S-<P$@RF!<0BUX?Y-868MMH$</KK0J <
MF[Z12@BP(HQJ;#J(L95AR3(DANKC.U0>(P9/TNS[?3R^/ 7 EJJ 6O"(@U=$
MP8^OZ:B#)_X79*(/$RYZ\3 .T>8G]<QH4 93FDD@J<H8S:467>-7"A6NBO'T
M^USG3*?-0\S&A\+(7BH %H3D(F<,\=BGY@\=X7C4W")S5PUGZNQU(R9KGLIA
M3UA [7C"PROJX<O:=/3#VX,7%*0?&^X:LE.LG2TB<T4T--DS:Y[;2Y4^;"M0
MC"#LIR+'%@QVB0B"J* ",R9)3E*9LBQ#' &$8V\:?-HM]GFUEY(X$>BJ);&X
MZZ<F5K0%UY,C+JP4Q8>[J6F*EP\G5<6?$1M=8<;0HC6VFE_/D 9IEC*$BX)
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M<2%UG@I 1-;-0(!<:*?ZR-M(9#$Y@F*DY)4YL<#TV>K) ,RYJLH.4M)B2HY
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MF:"U#L4TU#6&8]X3LH[<]=1.O5S/UY<OSP@32 H#P)C'J1*(0\;SPSX%J%"
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M#F_TSU_"ZL&"]6ZH^:992&E6OSY]G6_*PY )&0,P8T3+ G&=&I,\!1H:^[!
MA-D^='SR^ZS(.2B(9@A* Y\3KA@I2(Z!J<V4B'@DKH/4S)<F+:C1Y@U.L7-N
M TU?0J?12_J[\71C3!A>?/O-Y_+[EJ^:4W44F9&%T)0#D'$M,L!0T74<201Q
MVC)XTHI,BR(K5/N$)S;C&))G9FR39SFEDDGB](JMS_[ 9WW(<2N@/WU^NA.'
MN?["T^!*6F C2\^!( ?M<2=UFN+CX<<KZN/+C/U"S)>Z_.>=J7+5MW;YYY"V
MJ4RI1AJ#+$\+A' J)"!*03.B* "PW?/E_?V8T_\=I&2':<39_I?).3N]WY//
M:72<_FX\F\ /PHMOMWGHICH'!2H4X!KJ%&08X3QK[!&6F8Y+G+*VOY7H:Y2/
MNY#K@J0W>7ZB$X>WWJHS6LH^R8^#\+AS.DWE\?#C%>GQ9<9ZD: T+6R]G5^7
M[Z_^5BZOOV[+!?M6;LP/1-5<E=F@J#;WLV9]@N(L501FB#&1ISI#!"-M!OI9
M*KC3@H&M49%J*'.><4D@5E!2D4OSQTR*E' NG#8X^5P"=,#9;&2:[Q FEU5[
M1>T>H^-J0C"Z+5<6QF#:<97A$<D=R&2/,FE@)F]?93O.DH,E>^>6'T('8!K"
M%]ZMI\L2<7BS7Z+8?__7<GNH_GB!<P6T*0%E9@K +!<%[?JD4,KI2O47#9CA
M%Y,":DQ-:<EAP2G-"14<\53B5,>>/CE@NDB:@T(6 YF W-FN6T2FS77QPI6Q
M2(L8SUDYNY+1@\1IZ$\_%YZM:?3FPUE7/LY_^_/<]-'E?-6\H=YN&5N6M4'P
M_NIC69>;;V4]@RH#PO25'!9" (Q8)F37:?*".=VXZ&B9<5;D2B@ 4LP1X*K0
M5.9$%Q(!AE3LPFO_G-BB?;&A;C>8;^:_)3<=<$]%"L.ZHU0-3KBWAAFDR0%J
M2WH'=J=OIC[K (\D<#9<VBA?T)A,3!+#^G9**R,PZ"RB?ZLV_WB[;G>PU$\L
M$V,24<!A4P02 1F2L.O$9K#L=(6:C;U<YPHC!07,(!::,=QD# J+G!(F4>Q+
MOQMD;Y;K-[<[;)[RV(=/1U$<B$IO*6SP-2?D]PBGHG^G:;-1O0"D3TSK0GAT
M2N&"L>6L:WJY7M9?R\6?JFKQU#(B$.99)E"N())F\(0._1 KM[<2;>QAIF!1
M$ ()X1A"1C7-C(N$($(*.<1C!BVRY+J!YBEK?>ATE+6!F/26M0.?+<"IJ-II
MUFQ4+0#G$U.U$!Z=4K5@;/E,I<T( 1FEPGP.@IQ2HC@\]#?%E-/S5H\^#+%F
M!K8BBE(L4D$)*K34.<Z@*O+<[9RE^\4ZKT]0!^#&?8HL*"U]IL;&FP^SG >S
M9FIB4N$$_<R\EZ/_]M?NKYI;ZC_,-]O[SYOYNFYN-JW6#SLJ0(Z!*9\0T%F:
MB91#D!)*5<:$XH6T7N=ZU8XH@,Q3JG)""!9Y3M-,Z@)S7  -5,P=0GMH28LM
M.08WVGSQ:VR=Z3/!B)Y&/PKGSK-+Y8/RU+>_R65]N:KJN^,]@(P+A(C@6AD<
M!$"3[8NFZPF(1,:TTXJ^BUVB<L $!J#((3;=G:=IKG2A"I$71FUB/[M^NC^Z
M/G\1D.I^*A>;Y6""]P!TQ U+#BQZ"&&?6$Q;$WMY9BF/_=FS5<KF'ORW:R/&
M=\VIO,_S+ZMR9BIOCH1&6!920PBP3%.@,,^*E)OJO'!11)_OQ]YH>6G&?7>K
M%UZ"2!Z0-EL)&[".B_Y>=-JI7FPFW=0M$(E1E.T%ILXH6!]>IZ%4O3RHPK4R
M.^59E,O9N_)ZOE+K[7)[S[XOZQEBTI1^0D!)A,X%SW*A=A9 BG-FM<';Y[N1
ME::%D^SPF%&.060I)UX<G9>1V/2XR8<+,V<THBXO_WA=??O%.-?( VK^T*@"
M.E*%%QQ_00WZT#.N"O1"7O5O'/:]?O=Q6=W,E^L91 !*A 2'.0*%%"@M\N[S
MN<JLN[S31R/W]ZX][] X]'4W9E[OZ-%(<>OEMGP$Z.'''I_HWEZDC-^W_6!7
M/1N#7:^>U_?U[%/U;G[_N;SD?_SK'_]<WGPI-S-%!6*"4TD+:D;\1!1:=E9@
M*JV>GO?]=NS1PQ[11=)@LNOBWC2=[^E#,.0X*GA$3O+W'2!+(?1F:5%=MM5J
M>ZW@J&P]0A*Z23U1R<:?1@ES /<Z>,+#%^2P+Q?CJF)O]%68%N$VT_+7^6;9
M#*>:1V': HM ($U913FC1%'<'-G G1F:94Y[\YP_'EDE.SR[AY)<AC[^=-E-
MHT1ERDTMG4B*,E/RE(PSTR3>O$UCCL0??A6H_?BKQ;YT(Q2@7.40() KJB!C
MJN@,:22=+K'U^/RPBN$TA.I#FKMJ1."KEV[T&%V%48Z3HZX [$U//5P=.*,?
M7EQ8C<ET:1B9K_Y7=5.^J^9K7LTW"[W\5OY[.=^(U;RNEY=L\:UY$KG!L:][
M=(%!5L"\* @#6:9DH?2A[LD LQZU1;$>67_VF),&=-*@3EK828,[:8 G>^3)
M'GK;^QQ&-G%"8C%"'#T:;NKF%PB?L6:<B#B,1D>/C-]X-7!7L1O7^G!U:N0;
ME?<)C(WC^E<-U8+=*N9F%;I9A&Y6,#^;_W*WB & S+346G$&\RSGA=HO70(
MA=OY-R\#L5<8'RV]7R0-+J_AMA][=L5S=.(<UQX].(M20[_$RYDJNA>-TZBC
M^[E0!6Q6_;1E7[B;D3[D!0488$IR)0J3LSIC@##51UTL38RB+UZ#<U\._30F
M GTA5&:4L?K+W#@HC2.9T]0:5R=>41LO3JS&[G^N-MOK^77Y:W6HF&3!,D5
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MRP$%T([@*"IHP=H9 0S)^32T+ZA'5;P6&DCQ&KO[P_=IAJ!D--4DUQ0"7*0
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M:],-N+8K[N$E'?S$X$]:!WSO"0@<##OQFT(<W'3Q^-Z&Y^1?),]#M+M9(&G
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M5-N/R&GH34\?SM0]OHPX+);=5.O6U(?YYOVF';XM_CI?W97=?9 S"K'(!(+
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M:!W 9+Y#F%P99,FW!EJ3V:J=4\GU?K%YT<X<)MNOY2'IW=6+YL^[S#?J$G2
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M/^KVWHP@@)82*9-CR+7F2IC>/BZAUVMN\:PF5L<>C9\01B3530G/PZ>?%/9
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MEJIORVTEEKOJJGFAO=KLVE/K][?M,U%-$-L<95O];/91^Y"U$4G",$4Y(L:
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M,I90-U6:D$L_:7J9QC/)TS!3 QH5B>)Y"%4L9^HD7\/PI^\Z ,V&=V=3,22
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MHI/NO9(*6,,OR^1UH>Z714%S,>Z-.:.GU0M4KH/ G=?8[F-4XTX"84!(AIE
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MDBHJ<R+B(;JO[2P9MXAH7]RQ:T7$27(%0ASJ+^5L?-#$[&\8" 71\0*,2XJ
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M<V* 9PX'1<46]7(^IW$#S-KC;; ,V;R3@"&-(1JSQ!ACB5=0@ T*%/H<]W&
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MUWDQ_NMM^?FGZV*27FZ2_I+D),_>Z?A16(WP?7&[3&&9+7X9W6_;3=OU:$"
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M8B0 XY(S*S3"5EFVL9<LZ]:/H?+@6"V6[>'7&Q=&?S3CPO/G@E=6 ,P YHX
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M-%JD)3VVL6M$7LAZ9I86]]=0.0J_8==0,4HS*B4 P JBD1,*;'PDKT%.YML
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MNH3Z..A.3T3)N82:4XT-LQX:[PB/D95C<#5&#0 E%^( G*Z: Y=0'P=?;_'
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M.2\S\!FQ53*U 6Y?Q'E7E>.BN)Z_&/"3+3[M.YJVKUF *?.7*ZL((1!9#C"
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M>H0(N)R9Z%L(L$[7?RMX#BT5PZ[5]:XJ;R9G/VWU;:1?>.6(,HY S F-K[L
MV%OA%4K7N5+3Z*33D>_YA\G]9#JJID]QU#>3V[0/\F&E\.7(RW$QGV^]K^"$
M7H+"5')N.=<44.^<B((Y3!SUT?&G*"?E>8 S1,^<V&9,.M%+]MRR951+P[FZ
M%?0AR7\"X5YV$0P5T$L$+7:62B12 2D?8TU)$(F_N+ [,X;)MDRE].4.UY/5
M^^)S,7O<EU;VXLD@%&<TSO268$VAAPHR)Q2B%@I-.<S9J1C@:N!Y2-8.]GUS
MR93SQ=P\5M5V<[;O\> =<\XCC:2WU$FM#5%4*RA2;C 5.4>>!QB,#X-5&0KH
MBUI7B[NBVHQWF=O<@&%[6@4M(,#* :\\I0!P 6444 ',C!*0Y&0M'E\AJ5R,
MIA=,M/;T,+18[^]E>?W[9#K],\IKPA^A(<3.*Z4T(AIP*3@!'B-!+"3Q5^=+
MLO]2/KC6://;);YJ$:S%DA#E*,<NOB0B%9BN962:7UC-CIYYL?,"BAP=]':$
MNA:\/IOTH;A=X=#P HIM[8)UW""FL(A!A90Q9M5.UK)R("]L3S5;X[LNH&@!
MV]YXM!KBX6(?SY\+DC*#3'RMI/#2Q2@4I/NP5[(@#R^M6$,[>GUUE<#IB)Z\
M=O2AG(ZJS3+"_ES#;<\&!8QCPE!A"*<6Z72O=CU.B7VC>YV^J2/UIVFI;!?'
MT_5=W$_&Y>SZ<1S5T%3O>]H$IR42WN,X< T54D@;7(];"Y83Z0QP-; -[;>'
MYLDL2 '&_"Y&&A\>'QZFZ0*3V75#,C1H&KS5@CH2HS=C&,$82[W!Q3*8LV,Y
MP,6[%CC1/JA]N0NUH_2V09;,JV>#CO.C!! *9['Q#FN::JNO9'(NJ[[!$(U'
MR^YE+IY]<^1].9WZLOI]5&TK9+_GZ4 !MX!XS1&VVANIB:E=*I3J)UR6>YFA
MUQT,.1W+OCGR]ZJ<-[$AR^<"$,0IQ:1"",GH<',L?"V+B':X3UX\+&\!B*%!
MM>B%'2?I= <_3D&S;V:\N7\83:(RU'C\>/^XO-Q[]5&:(]\V8\W!/H)6"!M$
M)2<"<>$\$K!VPY&BJE&9[NP92:X8-2MNEU>8?\/$:AOPODG7@%,!,PD(=3:&
M^P19I@'"M7%&S)B<#-_CO=W.]WJZ8,F1$/9-@H_5:#:?KG1S_5^/J]/S3<S-
M]H;!,L,PU810ZXA#SNLO<,4P+\>;&> N=!>$:0788;LVF"HD!/("26HIC^^&
MV;P2!-*<=;6C=Y!7KHV;77]S1#D%R\MT;"2P&C("D:=8,F4\3V?"UA@8F>/8
M-+]:9YMC\RW2JFVXA^C60$4)P0)+[>,/;(V2SQRSK*UF_OT8H"-A'%H&RIOX
M!;/;R:=I.GCP9Q)*@R0FY+ VR%G".=4@:IYY*!RS#EB(;:-IN^E6SF8Y48W_
M]9C,41S89%'$\;Z).KE9_N/MY'.T31LMJOF\6.BGGT?_559?[K#>N?'3VC<$
MZIR$VDD:K:*VS!K$]1H7AZ3(N;=T@"MX/7.I'(+.^IK#_$X)YL]%.)#V<D0O
M05N@B;)0 ,"TH0X:@&H<X@<Y ?Z N'LV]I1]:68 #/TR_E]&]X?+71S94^",
MJ(@X!)Y*+H3P1-,:#T/9A5G93IC2G(TM:*#O,AEO)_,X[J:E,9X]':R"BEC@
M* >"82H10!NY($ 7E@C8F=9WE,@X'>F^&/0N>B>S&.9^C+'$K)R6MT\':;2K
M20 Q(++"8*Y$?"51_ E5+2&W^,)2AOKB4DMP]T6HC]7HNDAB'[9'+Q\-D!C
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M*?;4T+*0D?.:[=8IH*$75B5O2%#U1^71%%8V6V??BL6)FNKE4<%"P+Q14 A
M(>!1<!2M:>>LO+ 4^$%55&]4'NW&=;M:YIOMJJRR[/,?Y6_'P?3RH" Q4$A#
M[HU4T53US%)7RXREI$M'K 0#I8;$4F]$'@M*]=ZL'K;IDU14H_&!$.@$YB:N
M75A@)?1[/X@8AKJD'B48^S0DP(:@]VCW2B>U>=0N;M]"$\\9L7$U&M"'C=R+
M"VM6//B10EO"C@J.D_HX HV8]4Q@5ZI3816R>K^.N+S+<M):\.] '\?3:#>:
MS]6JCZ.40!L%%',0.Z:B-A7U\8>(OW7*-DP4!Z=R\6 ?Q]/H-Y[_W::/HV."
M(V\-Y"C^JH&-]M;>R(*=^JTDN&GT@H4.])O\4/G=@?Z.S0<';XSPA& C+89.
M<\7WJY9<DRYW_0GZTM/=7K2E^.0X:]00JL'H("1Q!D>>D>C\\3(/V]87D!*2
M;E',Z2&M3R TQ5AK8D\.LF.]/P\/#$Y1 !Q'FDJ(O-=.2%NOUFA\86T)IH!6
M&SJ/A:I'31YM%IDUSV?WE>N^+[)=F,3CYH\OKO$ _OIZ17!&&@*U])93;@6W
M906 '04!Z%1.L_EV.U8_T!$ .Q%C)E>8AWLF'!H6)(TNM .2:"[*;H#$4[DG
MM;%=S@X2[*$PA;(\G<JI16D>C)M^B]1L$F\'C/.( "DI<U1ZKZ044GIE.!3"
M-+-))LAQ:)O=$!ATU@(9)8<P*B23SEMII;%,&!]MALLR[T?&R"EI#2=R8MK,
M&E5FIW^MR/)7OOGFL\CPV>*WXC9;+<L_FNUZ4]QD*[]=EO<]GXOW7[ZLLTV9
M4+2^6LZW)21.AFP?+PU2*VO*L@V4$ZJMTX9IJY0P3"J*X&5U=D\9]A-P\[C,
ME&VA2TE@$.WDH&H4_?P*JFY=OY5E&M9NMEH^B^A3A@=/$7.."T>XIPQ@H0"C
M%$>G+5HDW>H6)=3P?5I0#LB0!*W!1Y6+W\R_)G B!'D/!5**X,AJ[1#9)5S'
M'=DVJP,Z$/W*C'%3W-SDFVK*Q[)RGOU^P)B7]R3 R?@::[4R6M;K X!W"6NY
M6'.O,2:*_CDPEIGW=*Y'8EZ>^WJ(2\&>&RZY(!1Z)0AW]<H\X!?6QK@C=X]@
MI05!IX+*T129YP<$S9!@2GFMF=(61GO-DWIUE/@+NUCJQN C:&E%T;'PXI:W
M^:JH;/K9HK1)BM5.(:\;1&LV&!VBATPU=H:BTAMP B.S)Z/FMDN:PAD@Z53F
M%T,3>")@W637][<(G_+-L9C-8T.#84(AAZE72F&,J5/$U"OF0EY:%\A>][*>
MB9L"G([N<<<'!P4A!5I%0E+-";$D"LY>0+GM5&DK/4CU!X(3T-6*TJU/A3YM
MOV>K+]OE=?GJ%S>RE[X:;'D+CY''%CE .*>&[@K8""4-N+!J"'VRK>B5LE/9
MS>\:1 *^."88#R6+6S)6#!G+M>?:UFLT!'<I7Y!@ ."PSE9;JHYX!W.P!9G:
MF-EJ=9<OOU85, ]?K)SRI. Q,X(+#0@63GHGM=I+DH@6X67IJ!YP\>O5QX#T
M3NW N2XA^!9P<,+I(HQ*S ED 870$<6-MAAXXKPWWEO5R"P<AGXU.^MRD'%9
MGU>SY?I[L=H\N(@'"-3L 8$9@)@@T&@CO+.6"^)J"D")N^3RIJADQD7-"U4^
M>V5)<GIH4\S_^:50^9LZ:@(L(9@UW"&FD, *&8,U !XC083#FC4ZE1U('>V3
M0)XO1/\HH&"M[QZ^\V%V5\4;_'NVNFY>RJ[C.P+B&!#")>=<V;A[:XEH34?C
MZ%M<51?LO5CK;ERNC18I7TWP>-F[G[X7J2G+&B"*2"N EHX;:.JU<$LN[*IW
M @P\C6GO0/VQD-2>-@^KBQ*]F"W_F-T</Q4=XG4A^OE0**RAX\Y9KVSTRVK*
M>J,O3+.V1%6CUBVC,F*T8_R;[XOB+LLJ(_"^.<WQ2\:7Q@1K+?;">U'N1&7+
M.D/W6Q+J5M(C0;!-"Y.G!_T],67\4[IJQL<+@SSW_6 D<!P2I!4"#CJ% 2?W
M:Y/8.71A.9%) :X/AJ19F BH:,Y0I1#6" )+$$>B7H.$]&(+$TUE"K:E?+J5
MBS#14,>'88.AI%[$V?/=.HA4EQ9BTX)_!RH7G4:[M*O50*<]5$9*SC 4B$)0
MZU9) *,7YE2VXN+!:C6GT2_M*E8(>^\TE<2SZ),(Y*%G]5JTZ!3 F>"NT@L6
M.M OF2."E[;,=PWB&;H_/" (%?66P$@C13Q%6LB::D:Y<9.D7H$M,SK+1CM5
M753@B-;^LRL\GEC=[ &A3!OQD>X ."RB=\I\>9=VOWHG1TJY&3OC=$S4/#V'
M'8(MHY]>9:O;?)X]OX3/LQ\Z6V9?\HV/A#\-M/V\(&CM'/5 >:D=MEX@9D%-
M/49=EV#6!/?^"=$\";_24L%57FY<8F=57#\HH,@(8I5QT? 296Z#HGMFE*&F
MH]@03U3RX/G6R:ODENP9U3#^^SC]_GY*O[B\_#ZGYD.VRHM#A2]Z>T>P7 (C
M@&.(04HD\_N[=$DX)EV<LP0;)$R([:E8EKP_6/WX,UM7D5G5"N$0GN$SKPFL
M*@C"M>$6<,&00L+O;3O-NIQ6)MB\86KP3\.UY/%_?V6Y?K_=K#>SJH;-QV*Q
M\,6J_' (23CXPF"\9!*#2$UDI?/&0K,_LV+ =TD886\RD1K_SE Z_M@>.7WN
M_5W! $<($@!%76.(1-SH_0DLEGS4E,SOE1;\M)FM-FE*1D_P'$Y:6C'U7 3E
MOB[5U<Y6/%9X>X"WA3)'UR"(H%,:1//48+2G*W/^M46FG)>8=&?H:()2QMY<
MK=?;[-IN5WOSL%K=^E$LV-K]R%;S?'VPD.3I#PO>426AAI #J3CU!E"RMT*!
M'J>SQMD<UP^$]J'9=BY:/Q+R2U9U9]S+[H!:_YFW!6B(8!99'UTPPH4H+Q$?
MZ J[B$/S<Z37+@Z3\_5<Y&5:=\(22JQ!41$QKBPCB+#:8Z1E-><QCYWNW0FW
MO'X3E/%8>BYBLMLVR[B0P<7DEW<%J9T$DFD.,!.6Q\V9H9JF5J N5Q/\@AR)
MZ4^BNK+N7,3A9^?HKRS_^BV:&>HV6\V^9M6'-MH=?I:OCM57&7DF01JA,%8Z
M_D"*\VCW@EI14B15EV X\29*9\/8<Q&T1_OK$Q+4CMR'53[/2E/@RYCW) TG
M$[A2U@GDC9!:0<<\IW7,&!7:=JE4(M_$[9QX>V$2-[V8!6TA=80Z:X!!G A#
M\9[^$H_;9_0,[V)ZA_DT$GDB#)(1PQ>#[YOL_[V)8G^S"!I(41:2EE91I,J2
MK&)O@$!.WP)\DQ7$R4!P-L)8+W)R>3QI(J%J!(<1IXPR#0@$Q*N:&]ZJ+H5/
M4LQ\>D4B.20.SD8JG[FEF$HN3YQ*$!X8K*'FV&#,"9)8[D^)2POF+=CZ7"5S
M6"0D(YL7XT5:1+V16$M'C/+*46?$WF(A9M3([[.[@IM<&B<!P;D(X:/;F(F$
ML.$,@B? *D <+3L9(^:)XKJF/S5>=3G* 1>T'TY_3CH,1Y.7J/T]BUJOMS?W
MI%#+Z]^SS;?BNE@47^\:U%L>X>V!.X:4 D@A!J!@CBBPUV3,XTZ2E&"]G7.4
MI,&X>992]#%?_^-767:UC&C)UIN/L\T@.U+3=P?BD59&0"$<=XA:9A\,<L3!
M:RO@.2:*AY2P'GB=?-[X<^LN4^7G]S&P-T?3:0=Y:>! 6029H-$8B+\*!U2=
MIDF5$!?6&C%YB4J!R6>Y5=4+MOEM?ITMK\?<JIY[=R  (2PT-4(SP[00$.]I
MCI :)_/D3; 2Y/59R]>?Q2(^9I%O[J:0L)_?'ACW4!",+3+>4D$EIW7]36HA
MUF\G]6<M8YVXG;R4E8T#-W=7RTCY;75Y434L_/QMMMP=Y_Q1+&^C,9Q=#UQI
MHM5$@I9:,4\)MTX*1TRTS^MH @84[!3A=4F6XX2'&6,P]H+$;+CDF5/G$!B@
M !CAD9$.:"7*K@5['B Y:A/%Y,,G!X;Y^-+8"@3G+XA_5HL?,C/ZQ"D$Y:,]
MQ)WBY0F4]1YQ5*?5,H_<.$4RSB9=^E+DL!,(SE\,4]P//9?62VVUP1Y[+XF0
M=7$3AERG^.63#U,2#P2Y%"GL!H$+$L.CZ87)N(>GS#0 (8E3Q@-(!(N,Q?&W
M'3\UD[)3#Z)+.B ]"_]Q0,Z_)DE.7'P#9(8IY3T6+#HC@C'"ZUU"QT]&;=9Z
M06[I,-*3H!8X$4#G+_H_NQ)IRO^)<PR42:\1(P;ZLA2G)6B?TZD5L5VJ5%S2
MN>^K$?]A\7/^.N!RMG\ RE*BD '!C $"(^KJ>D%:($/?O/#7)_V#P>=!\/_G
MOW]!3G2*_JD^>O:3W7-^0<+L9I/-OZWOUJ4[]5_SXN8>2I^V-S>SU=W[+Y_R
MK\O\2SZ/,U?S>;%=5OT,BD4^S[-UU7=O_?,<LQ^;;'F=7?_G\/KI_>KK;)G_
M7[5&$^D>9W5]S\3E]8='ZW__Q>?+V7*>SQ;1-M[<I\4UB'_OY?F!<EU"E&D/
M"$748&4(< XZH+3DJ%&$^S#TLSOE\C&[S9;;3-\] K_-U_-%L=ZNLL^1HSI.
MX)\#E#KQ2:$\54/:: <)0$H#JP2N::()NK!FRR/CJ!B3-Z/9(OLVH5=1N2XC
M'.[,=E52OU)"34#:]!%!QD53+:A5ULBR8Y& H*: <?K"XG^G1>= 3!D+EA]6
M1;2Z-G<?%N4&N:QL@^\E99H \OC@H)WTRC )"<$( \:$E;M5&XQDEYXV"1X(
M3PO%WMDQOF[\K2BN_YTO%J>IPU]&!:PY]B1:I(X;;LOBP$#5ZQ1<=<G*2S"(
M-!4-V)4/X^,MTB/?9._RV_*P8Q.MBCSJ;+5>9YMUBVVY\=."0D8!JBS#3E,$
M+">RIK4QAKDQBR"\'GP.Q9_Q<1M5_?5VOOEK5IK"F[MW^>SO*J:Z!6B;/2I0
M)*62#E,-(='0Z)(NM20;W24T.,'F=*D@=A#FC _7QP=4IEAO?+'Z]6CJ4<F?
M73?BBL#/'W.53UGKRM1I@?D1YQ.,,C[R!C%,@8%>(L7V)A=BK$O8;X*U]%,1
MG'0Y/+[T/;^>QTV:U'R3W[;;/MH^/!#FD 6VK$8D)*!">\/W6RP17>)P$RR,
MGXI<C,2N*4'^^*KC\<+*"XM[DC]DI74"?/L7!>Z0T8I&UPA#(I!DDM:'08;J
M3O?M"9:I3P_\H[%N(D'XI>3 QRQ2,2\3,*OE1L(_^<N_HFO4>1_H];6!0^"9
M,-8!C:E$TO%(Y!VE.7>=>O\F6*0L*2F9DI/'96:VOEN7DL @VLE!^9<09Y3%
MP=_BY&QVFRV*ZO2SS#Q>KK.CF#[U$4%3S8RQLLPB(99C#9&N5R5M-WR^W0(6
MHW EM8B$VM.WV6:6+]Y"$PZ#"57=S13WS! EN!(&[JH'*(D];'0-WU"W/.C'
M'8OJ\)&7-,F+ P+&3D)O!98$ \B%!Q;7LR:<=JDB<[%JHS&GBP%8,)81][$\
MCE _\D-]X_??"?$9A&.*@(;$0V"<@+9>@]2FT_:3#HSZ8F31#QE'A<+OV9%D
MS4??"A@9S..V)U3<\9B(IA;?4\)I=&%:I07_GD- *]J-A8'?\V5^L[TYBH*?
MOA>X<)(A BFWT#E)I56Z7HMWG1I.IHJ#4[E8]$>_T; P^]$,"X^_%Y@#+&Z9
MA/AH;EOEH]5=RX8REG>Y>T@P$*P7+'2@7VN_]<!]WRY/]+B1^=+(B.=("RHQ
M<$1IH:2 KK:<%-*N2P160ACHV4P8AKCM 5+V5)BMKI_,X\6B*L<'!<+*4FO6
MB_B/F^B)8PCJF4<7?=2TS]%@T9V/Q4 $'FT?*6XKS^IJ^<+LU7R^VLX6S>H/
MM'A:,%( 9 &C3E/J)=8>\YHN$'>J,9>N/NH->.-1?K2;BX/S/W3W<'!@$#0:
M:UH@**%@0&.,/*M7"ZP<U0X>*Z]]4%0\O3#HD_QI@.W!:KA:K[?9P<HK)STH
M>,5D) @FUE&DM!9&T9H:'J@N/0X24GKIP; C(]* Y>ZR^M"I8+,'!.<\8HQ#
M[!F,WA&3"NQW&QW-DU&R,7ZN??=*@-B2!8D <)5E/_)U>4]UM9ROLMDZL]G]
M_^TQ^?(S ^'8(.V9LM@(1PUB9L\")&V7[,H$LS<2 FEO/$D#M_>)>/.[S_&/
MZT4%A=[PV^#9048_WJMHW3N!'9"42.WWLDYMEQ#'!+,\TL%Q_[Q) \_MG:'R
MX%I8KZ$B$EB&C:>[,G/*>T>ZY!N=G+TQ3I6/=-!X(O$;1*3L/BA_E'%:__L?
M_P]02P$"% ,4    "  ]@4E*28!X'"D@ 0 ;W@\ $0              @ $
M    87-Y<RTR,#$V,3(S,2YX;6Q02P$"% ,4    "  ]@4E** :9'^$,  "L
MA   $0              @ %8( $ 87-Y<RTR,#$V,3(S,2YX<V102P$"% ,4
M    "  ]@4E*1;=GH2L:  #&$ $ %0              @ %H+0$ 87-Y<RTR
M,#$V,3(S,5]C86PN>&UL4$L! A0#%     @ /8%)2JH2"$QA.P  ^^," !4
M             ( !QD<! &%S>7,M,C Q-C$R,S%?9&5F+GAM;%!+ 0(4 Q0
M   ( #V!24K2W=NI'*@  &*?"  5              "  5J# 0!A<WES+3(P
M,38Q,C,Q7VQA8BYX;6Q02P$"% ,4    "  ]@4E*K^%>EOUC   J] 0 %0
M            @ &I*P( 87-Y<RTR,#$V,3(S,5]P<F4N>&UL4$L%!@     &
-  8 B@$  -F/ @    $!

end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
