# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-17-000017
Filing Date
2017-02-09
Accepted
2017-02-09 16:09:04
Documents
59
Period of Report
2016-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys123116-10q.htm | 10-Q | 713919
2 | EXHIBIT 31.1 | asys123116-ex311.htm | EX-31.1 | 14192
3 | EXHIBIT 31.2 | asys123116-ex312.htm | EX-31.2 | 14207
4 | EXHIBIT 32.1 | asys123116-ex321.htm | EX-32.1 | 7164
5 | EXHIBIT 32.2 | asys123116-ex322.htm | EX-32.2 | 7192
| Complete submission text file | 0000720500-17-000017.txt |  | 4965214

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | XBRL INSTANCE DOCUMENT | asys-20161231.xml | EX-101.INS | 1039900
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20161231.xsd | EX-101.SCH | 33964
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20161231_cal.xml | EX-101.CAL | 69830
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20161231_def.xml | EX-101.DEF | 189435
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20161231_lab.xml | EX-101.LAB | 565090
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20161231_pre.xml | EX-101.PRE | 324650

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 S CLARK DR TEMPE AZ 85281 6029675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 17587648
SIC: 3559 Special Industry Machinery, NEC