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Commitments and Contingencies (Details) $ in Thousands |  | 9 Months Ended | 12 Months Ended |
--- | --- | --- | --- | ---
Apr. 01, 2016 USD ($) | Jun. 30, 2017 USD ($) claims | Jun. 30, 2016 USD ($) | Sep. 30, 2014 USD ($) | Sep. 30, 2016 USD ($)
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Purchase obligation |  | $ 44,500 |  |  | $ 11,300
Price of an ion implanter |  | 355 | $ 442 |  |
Tempress Systems and Energy Research Centre Agreement |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Price of an ion implanter |  |  |  | $ 1,400 |
Ownership rights to results of projects developed separately by individual parties |  |  |  | 100.00% |
Required contribution in form of labor and assets |  |  |  | $ 1,400 |
Period from agreement start for contribution for project support |  |  |  | 2 years |
Environmental Clean-up | BTU International, Inc (BTU) Merger |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Loss contingency accrual, less than |  | 100 |  |  | $ 100
Letter of credit |  | $ 200 |  |  |
Stockholder Actions (Putative Stockholder Class Action Complaints) | Settled Litigation |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Number of settled claims | claims |  | 2 |  |  |
Legal settlement, payment of fees and expenses | $ 325 |  |  |  |

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