<SEC-DOCUMENT>0001193125-17-261152-index.html : 20170817
<SEC-HEADER>0001193125-17-261152.hdr.sgml : 20170817
<ACCEPTANCE-DATETIME>20170817172210
ACCESSION NUMBER:		0001193125-17-261152
CONFORMED SUBMISSION TYPE:	424B5
PUBLIC DOCUMENT COUNT:		2
FILED AS OF DATE:		20170817
DATE AS OF CHANGE:		20170817

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		424B5
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-215604
		FILM NUMBER:		171039403

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>424B5
<SEQUENCE>1
<FILENAME>d444298d424b5.htm
<DESCRIPTION>424B5
<TEXT>
Document 1 - file: d444298d424b5.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>g444298g76r24.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: g444298g76r24.jpg

</DOCUMENT>
</SEC-DOCUMENT>