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Related Party Transactions (Details) - USD ($) $ in Thousands |  | 3 Months Ended | 12 Months Ended |  |  |
--- | --- | --- | --- | --- | --- | ---
Jun. 29, 2018 | Mar. 31, 2016 | Sep. 30, 2018 | Sep. 30, 2017 | Sep. 30, 2016 | Jun. 30, 2017 | Sep. 30, 2015 | Sep. 16, 2015
Related Party Transaction [Line Items] |  |  |  |  |  |  |  |
Gain on sale of other assets |  |  | $ 2,883 | $ 0 | $ 2,576 |  |  |
Kingstone Holding Company |  |  |  |  |  |  |  |
Related Party Transaction [Line Items] |  |  |  |  |  |  |  |
Ownership percentage |  |  |  |  |  |  | 15.00% |
Exclusive Sales and Service Rights in Solar Ion Implant Equipment |  |  |  |  |  |  |  |
Related Party Transaction [Line Items] |  |  |  |  |  |  |  |
Proceeds from license fees received |  | $ 4,900 |  |  |  |  |  |
Gain on sale of other assets |  |  |  |  | $ 2,600 |  |  |
SoLayTec, B.V. |  |  |  |  |  |  |  |
Related Party Transaction [Line Items] |  |  |  |  |  |  |  |
Due to related party |  |  |  |  |  | $ 2,400 |  |
Kingstone Hong Kong |  |  |  |  |  |  |  |
Related Party Transaction [Line Items] |  |  |  |  |  |  |  |
Remaining ownership percentage disposed of | 15.00% |  |  |  |  |  |  |
Proceeds from sale of business | $ 5,700 |  |  |  |  |  |  |
Kingstone Hong Kong | Kingstone Holding Company |  |  |  |  |  |  |  |
Related Party Transaction [Line Items] |  |  |  |  |  |  |  |
Ownership percentage |  |  |  |  |  |  |  | 15.00%

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