EX-21.1 2 asys-ex211x093018.htm EXHIBIT 21.1
Exhibit 21.1
AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES
SUBSIDIARIES OF THE REGISTRANT

Name |  | Jurisdiction in which incorporated
Tempress Systems, Inc. |  | State of Texas
Tempress Group Holding BV |  | The Netherlands
Tempress Holdings BV |  | The Netherlands
Tempress Systems BV |  | The Netherlands
Tempress Manufacturing BV |  | The Netherlands
Tempress Engineering BV |  | The Netherlands
Tempress Onroerend Goed BV |  | The Netherlands
Tempress IP BV |  | The Netherlands
Tempress Asia Holding BV |  | The Netherlands
Tempress Hong Kong Limited |  | Hong Kong
P.R. Hoffman Machine Products, Inc |  | State of Arizona
Bruce Technologies, Inc |  | State of Massachusetts
Bruce Technologies Europe GmbH |  | Federal Republic of Germany
R2D Automation SAS |  | France
Amtech Tempress New Energy Technologies Limited |  | China
BTU International, Inc. |  | State of Delaware
BTU Overseas, Ltd. |  | State of Delaware
BTU Europe Ltd. |  | State of Delaware
BTU Overseas (Shanghai) Co., Ltd |  | State of Delaware
BTU Ltd. (Shanghai) |  | State of Delaware
SoLayTec B.V. |  | The Netherlands