# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001564590-19-044022
Filing Date
2019-11-21
Accepted
2019-11-21 07:31:47
Documents
131
Period of Report
2019-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | asys-10k_20190930.htm | 10-K | 4369585
2 | EX-21.1 | asys-ex211_12.htm | EX-21.1 | 34878
3 | EX-23.1 | asys-ex231_11.htm | EX-23.1 | 4561
4 | EX-24 | asys-ex24_10.htm | EX-24 | 25718
5 | EX-31.1 | asys-ex311_9.htm | EX-31.1 | 18108
6 | EX-31.2 | asys-ex312_8.htm | EX-31.2 | 18134
7 | EX-32.1 | asys-ex321_6.htm | EX-32.1 | 9014
8 | EX-32.2 | asys-ex322_7.htm | EX-32.2 | 9001
9 | EX-4.2 | asys-ex42_608.htm | EX-4.2 | 49420
10 | GRAPHIC | g501k3u4fhov000002.jpg | GRAPHIC | 33551
11 | GRAPHIC | g501k3u4fhov000001.jpg | GRAPHIC | 3465
| Complete submission text file | 0001564590-19-044022.txt |  | 17854305

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
12 | XBRL INSTANCE DOCUMENT | asys-20190930.xml | EX-101.INS | 4832896
13 | XBRL TAXONOMY EXTENSION SCHEMA | asys-20190930.xsd | EX-101.SCH | 93247
14 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | asys-20190930_cal.xml | EX-101.CAL | 106164
15 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | asys-20190930_def.xml | EX-101.DEF | 308701
16 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | asys-20190930_lab.xml | EX-101.LAB | 682867
17 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | asys-20190930_pre.xml | EX-101.PRE | 606058

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 191235711
SIC: 3559 Special Industry Machinery, NEC