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Supplementary Financial Information - Summary of Activity in Allowance for Doubtful Accounts (Details) - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2019	Sep. 30, 2018	Sep. 30, 2017
Allowance for Doubtful Accounts Receivable [Roll Forward]
Balance at beginning of year	$ 454	$ 356	$ 1,431
Provision	200	102	117
Write offs	(402)	(9)	(1,171)
Adjustment	(80)	5	(21)
Balance at end of year	$ 172	$ 454	$ 356

X

- Definition

Accounts receivable allowance for credit loss adjustment.

+ References

No definition available.

+ Details

Name:	asys_AccountsReceivableAllowanceForCreditLossAdjustment
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Provision for doubtful accounts net of foreign exchange currency adjustment.

+ References

No definition available.

+ Details

Name:	asys_ProvisionForDoubtfulAccountsNetOfForeignExchangeCurrencyAdjustment
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

X

- Definition

Amount of allowance for credit loss on accounts receivable, classified as current.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02(4)
-URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 310
-SubTopic 10
-Section 50
-Paragraph 4
-URI http://asc.fasb.org/extlink&oid=118936363&loc=d3e5074-111524

Reference 3: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 326
-SubTopic 20
-Section 45
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=118955202&loc=SL82895884-210446

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

X

- Definition

A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.

+ References

No definition available.

+ Details

Name:	us-gaap_AllowanceForDoubtfulAccountsReceivableRollforward
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Amount of direct write-downs of accounts receivable charged against the allowance.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 326
-SubTopic 20
-Section 50
-Paragraph 13
-Subparagraph (d)
-URI http://asc.fasb.org/extlink&oid=119407570&loc=SL82919249-210447

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration