# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001564590-20-054663
Filing Date
2020-11-19
Accepted
2020-11-19 16:41:16
Documents
131
Period of Report
2020-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | asys-10k_20200930.htm iXBRL | 10-K | 4829444
2 | EX-4.2 | asys-ex42_13.htm | EX-4.2 | 50319
3 | EX-21.1 | asys-ex211_8.htm | EX-21.1 | 13531
4 | EX-23.1 | asys-ex231_11.htm | EX-23.1 | 4240
5 | EX-24 | asys-ex24_9.htm | EX-24 | 28836
6 | EX-31.1 | asys-ex311_7.htm | EX-31.1 | 18057
7 | EX-31.2 | asys-ex312_6.htm | EX-31.2 | 18129
8 | EX-32.1 | asys-ex321_12.htm | EX-32.1 | 8275
9 | EX-32.2 | asys-ex322_10.htm | EX-32.2 | 9009
10 | GRAPHIC | gar2vndauqpe000002.jpg | GRAPHIC | 30909
11 | GRAPHIC | gar2vndauqpe000001.jpg | GRAPHIC | 3465
| Complete submission text file | 0001564590-20-054663.txt |  | 19606551

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
12 | XBRL TAXONOMY EXTENSION SCHEMA | asys-20200930.xsd | EX-101.SCH | 94902
13 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | asys-20200930_cal.xml | EX-101.CAL | 117045
14 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | asys-20200930_def.xml | EX-101.DEF | 270517
15 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | asys-20200930_lab.xml | EX-101.LAB | 687451
16 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | asys-20200930_pre.xml | EX-101.PRE | 593965
17 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-10k_20200930_htm.xml | XML | 4845375

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 201329302
SIC: 3559 Special Industry Machinery, NEC