EX-21.1 3 asys-ex211_8.htm EX-21.1

Exhibit 21.1

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

SUBSIDIARIES OF THE REGISTRANT

Name |  | Jurisdiction in which incorporated
Bruce Technologies, Inc |  | State of Massachusetts
BTU Europe Ltd. |  | State of Delaware
BTU International, Inc. |  | State of Delaware
BTU Ltd. (Shanghai) |  | State of Delaware
BTU Overseas, Ltd. |  | State of Delaware
BTU Overseas (Shanghai) Co., Ltd |  | State of Delaware
P.R. Hoffman Machine Products, Inc |  | State of Arizona
Tempress Systems, Inc. |  | State of Texas