<SEC-DOCUMENT>0001564590-20-001918-index.html : 20200124
<SEC-HEADER>0001564590-20-001918.hdr.sgml : 20200124
<ACCEPTANCE-DATETIME>20200124172449
ACCESSION NUMBER:		0001564590-20-001918
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		3
CONFORMED PERIOD OF REPORT:	20200304
FILED AS OF DATE:		20200124
DATE AS OF CHANGE:		20200124
EFFECTIVENESS DATE:		20200124

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		20546510

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>asys-def14a_20200304.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: asys-def14a_20200304.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>gba2u5mieq0u000002.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: gba2u5mieq0u000002.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>gba2u5mieq0u000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: gba2u5mieq0u000001.jpg

</DOCUMENT>
</SEC-DOCUMENT>