# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-21-004729
Filing Date
2021-11-17
Accepted
2021-11-17 16:16:02
Documents
130
Period of Report
2021-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | asys-20210930.htm iXBRL | 10-K | 4814465
2 | EX-4.1 | asys-ex4_1.htm | EX-4.1 | 59954
3 | EX-21.1 | asys-ex21_1.htm | EX-21.1 | 24700
4 | EX-23.1 | asys-ex23_1.htm | EX-23.1 | 5927
5 | EX-24 | asys-ex24.htm | EX-24 | 48445
6 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 17935
7 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 17956
8 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 10779
9 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 12014
10 | GRAPHIC | img248639108_0.jpg | GRAPHIC | 45889
11 | GRAPHIC | img248639108_1.jpg | GRAPHIC | 52434
| Complete submission text file | 0000950170-21-004729.txt |  | 19360403

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
12 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20210930_pre.xml | EX-101.PRE | 591741
13 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20210930_cal.xml | EX-101.CAL | 114743
14 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20210930.xsd | EX-101.SCH | 92896
15 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20210930_lab.xml | EX-101.LAB | 710881
16 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20210930_def.xml | EX-101.DEF | 285368
17 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20210930_htm.xml | XML | 4616172

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 211420801
SIC: 3559 Special Industry Machinery, NEC