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Goodwill - Additional Information (Details) - USD ($) | 12 Months Ended |  |
--- | --- | --- | ---
Sep. 30, 2021 | Mar. 03, 2021 | Sep. 30, 2020
Goodwill [Line Items] |  |  |
Goodwill | $ 11,168,000 |  | $ 6,633,000
Intersurface Dynamics, Inc. |  |  |
Goodwill [Line Items] |  |  |
Goodwill |  | $ 4,500,000 |
Semiconductor |  |  |
Goodwill [Line Items] |  |  |
Impairment of goodwill | 0 |  |
Goodwill | 5,905,000 |  | 5,905,000
Material and Substrate |  |  |
Goodwill [Line Items] |  |  |
Impairment of goodwill | 0 |  |
Goodwill | $ 5,263,000 |  | $ 728,000
Material and Substrate | Intersurface Dynamics, Inc. |  |  |
Goodwill [Line Items] |  |  |
Goodwill |  | $ 4,500,000 |

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- Definition Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 942 -SubTopic 210 -Section S99 -Paragraph 1 -Subparagraph (SX 210.9-03(10)(1)) -URI http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 45 -Paragraph 5 -URI http://asc.fasb.org/extlink&oid=120320667&loc=SL49117168-202975 Reference 3: http://www.xbrl.org/2003/role/exampleRef -Publisher FASB -Name Accounting Standards Codification -Topic 852 -SubTopic 10 -Section 55 -Paragraph 10 -URI http://asc.fasb.org/extlink&oid=84165509&loc=d3e56426-112766 Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 350 -SubTopic 20 -Section 45 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=99380562&loc=d3e13770-109266 + Details
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