# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-005560
Filing Date
2021-02-11
Accepted
2021-02-11 16:23:22
Documents
69
Period of Report
2020-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-10q_20201231.htm iXBRL | 10-Q | 1722338
2 | EX-31.1 | asys-ex311_6.htm | EX-31.1 | 22919
3 | EX-31.2 | asys-ex312_9.htm | EX-31.2 | 22374
4 | EX-32.1 | asys-ex321_8.htm | EX-32.1 | 10783
5 | EX-32.2 | asys-ex322_7.htm | EX-32.2 | 10809
6 | GRAPHIC | gi1xsk2gobxx000001.jpg | GRAPHIC | 12928
| Complete submission text file | 0001564590-21-005560.txt |  | 6873487

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION SCHEMA | asys-20201231.xsd | EX-101.SCH | 46430
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | asys-20201231_cal.xml | EX-101.CAL | 73996
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | asys-20201231_def.xml | EX-101.DEF | 112475
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | asys-20201231_lab.xml | EX-101.LAB | 366252
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | asys-20201231_pre.xml | EX-101.PRE | 285866
12 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-10q_20201231_htm.xml | XML | 1273698

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 21619993
SIC: 3559 Special Industry Machinery, NEC