# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-024118
Filing Date
2021-05-05
Accepted
2021-05-05 16:30:16
Documents
73
Period of Report
2021-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-10q_20210331.htm iXBRL | 10-Q | 2417145
2 | EX-31.1 | asys-ex311_8.htm | EX-31.1 | 22913
3 | EX-31.2 | asys-ex312_7.htm | EX-31.2 | 22368
4 | EX-32.1 | asys-ex321_6.htm | EX-32.1 | 10774
5 | EX-32.2 | asys-ex322_9.htm | EX-32.2 | 10800
6 | GRAPHIC | gz0qx2rhsjpx000001.jpg | GRAPHIC | 28985
| Complete submission text file | 0001564590-21-024118.txt |  | 8530171

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION SCHEMA | asys-20210331.xsd | EX-101.SCH | 48641
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE | asys-20210331_cal.xml | EX-101.CAL | 76933
9 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | asys-20210331_def.xml | EX-101.DEF | 123269
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | asys-20210331_lab.xml | EX-101.LAB | 385178
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | asys-20210331_pre.xml | EX-101.PRE | 300129
12 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-10q_20210331_htm.xml | XML | 1684092

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 21893845
SIC: 3559 Special Industry Machinery, NEC