<SEC-DOCUMENT>0001104659-21-017437-index.html : 20210210
<SEC-HEADER>0001104659-21-017437.hdr.sgml : 20210210
<ACCEPTANCE-DATETIME>20210210103029
ACCESSION NUMBER:		0001104659-21-017437
CONFORMED SUBMISSION TYPE:	SC 13G
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20210210
DATE AS OF CHANGE:		20210210

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		SC 13G
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-39482
		FILM NUMBER:		21610016

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			VANGUARD GROUP INC
		CENTRAL INDEX KEY:			0000102909
		IRS NUMBER:				231945930
		STATE OF INCORPORATION:			PA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 2600
		STREET 2:		V26
		CITY:			VALLEY FORGE
		STATE:			PA
		ZIP:			19482-2600
		BUSINESS PHONE:		6106691000

	MAIL ADDRESS:	
		STREET 1:		PO BOX 2600
		STREET 2:		V26
		CITY:			VALLEY FORGE
		STATE:			PA
		ZIP:			19482-2600
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G
<SEQUENCE>1
<FILENAME>tv0227-amtechsystemsinc.htm
<DESCRIPTION>SCHEDULE 13G
<TEXT>
Document 1 - file: tv0227-amtechsystemsinc.htm

</DOCUMENT>
</SEC-DOCUMENT>