Form SC 13G - Statement of Beneficial Ownership by Certain Investors:
SEC Accession No. 0001104659-21-017437
Filing Date
2021-02-10
Accepted
2021-02-10 10:30:29
Documents
1

Document Format Files

Seq Description Document Type Size
1 SCHEDULE 13G tv0227-amtechsystemsinc.htm SC 13G 12270
  Complete submission text file 0001104659-21-017437.txt   13825
Mailing Address PO BOX 2600 V26 VALLEY FORGE PA 19482-2600
Business Address PO BOX 2600 V26 VALLEY FORGE PA 19482-2600 6106691000
VANGUARD GROUP INC (Filed by) CIK: 0000102909 (see all company filings)

EIN.: 231945930 | State of Incorp.: PA | Fiscal Year End: 1231
Type: SC 13G

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Subject) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: SC 13G | Act: 34 | File No.: 005-39482 | Film No.: 21610016
SIC: 3559 Special Industry Machinery, NEC