<SEC-DOCUMENT>0001564590-21-020546.txt : 20210426
<SEC-HEADER>0001564590-21-020546.hdr.sgml : 20210426
<ACCEPTANCE-DATETIME>20210426163009
ACCESSION NUMBER:		0001564590-21-020546
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		12
CONFORMED PERIOD OF REPORT:	20210426
ITEM INFORMATION:		Regulation FD Disclosure
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20210426
DATE AS OF CHANGE:		20210426

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		21854219

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>asys-8k_20210426.htm
<DESCRIPTION>8-K
<TEXT>
<XBRL>
<?xml  version="1.0" encoding="utf-8"?>
<!-- DFIN ActiveDisclosure(SM) Inline XBRL Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2021-04-26T20:13:03.4185767+00:00 -->
<!-- Version            : 5.0.1.615 -->
<!-- Package ID         : 0f5ae47754764912ac8247d586829581 -->
<!-- Copyright (c) 2021 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<html xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:asys="http://www.amtechsystems.com/20210426" xmlns:us-types="http://fasb.org/us-types/2020-01-31" xmlns:us-gaap="http://fasb.org/us-gaap/2020-01-31" xmlns:stpr="http://xbrl.sec.gov/stpr/2018-01-31" xmlns:srt-types="http://fasb.org/srt-types/2020-01-31" xmlns:srt="http://fasb.org/srt/2020-01-31" xmlns:sic="http://xbrl.sec.gov/sic/2020-01-31" xmlns:naics="http://xbrl.sec.gov/naics/2017-01-31" xmlns:exch="http://xbrl.sec.gov/exch/2020-01-31" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:dei-std="http://xbrl.sec.gov/dei-std/2020-01-31" xmlns:dei-ent-std="http://xbrl.sec.gov/dei-ent-std/2020-01-31" xmlns:dei="http://xbrl.sec.gov/dei/2020-01-31" xmlns:currency="http://xbrl.sec.gov/currency/2020-01-31" xmlns:country="http://xbrl.sec.gov/country/2020-01-31" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:utr="http://www.xbrl.org/2009/utr" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2015-02-26" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns="http://www.w3.org/1999/xhtml">
<head>
<meta http-equiv="Content-Type" content="text/html" />
<title>
asys-8k_20210426.htm
</title>
</head>
<!-- NG Converter v5.0.2.50 -->
<body><div style="display:none">
	<ix:header>
		<ix:hidden>
			<ix:nonNumeric id="F_000001" name="dei:AmendmentFlag" contextRef="C_0000720500_20210426_20210426">false</ix:nonNumeric>
			<ix:nonNumeric id="F_000004" name="dei:EntityCentralIndexKey" contextRef="C_0000720500_20210426_20210426">0000720500</ix:nonNumeric>
		</ix:hidden>
		<ix:references>
			<link:schemaRef xlink:type="simple" xlink:href="asys-20210426.xsd" xlink:arcrole="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:link="http://www.xbrl.org/2003/linkbase"></link:schemaRef>
		</ix:references>
		<ix:resources>
			<xbrli:context id="C_0000720500_20210426_20210426">
				<xbrli:entity>
					<xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier>
				</xbrli:entity>
				<xbrli:period>
					<xbrli:startDate>2021-04-26</xbrli:startDate>
					<xbrli:endDate>2021-04-26</xbrli:endDate>
				</xbrli:period>
			</xbrli:context>
		</ix:resources>
	</ix:header>
</div>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:1pt;">&#160;</p>
<p style="border-top:Double 2.25pt;padding-top:1pt;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:1pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:1pt;">&#160;</p>
<p style="text-align:center;margin-top:3pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-size:18pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">UNITED STATES</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-size:18pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">SECURITIES AND EXCHANGE COMMISSION</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Washington, D.C. 20549</p>
<p style="text-align:center;border-bottom:Solid 0.75pt;padding-bottom:1pt;margin-bottom:0pt;margin-top:0pt;margin-left:40%;margin-right:40%;text-indent:0%;font-size:8pt;">&#160;</p>
<p style="text-align:center;margin-top:10pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-size:18pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">FORM <ix:nonNumeric id="F_000000" name="dei:DocumentType" contextRef="C_0000720500_20210426_20210426">8-K</ix:nonNumeric></p>
<p style="text-align:center;border-bottom:Solid 0.75pt;padding-bottom:1pt;margin-bottom:0pt;margin-top:0pt;margin-left:40%;margin-right:40%;text-indent:0%;font-size:8pt;">&#160;</p>
<p style="text-align:center;margin-top:10pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">CURRENT REPORT</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Pursuant to Section&#160;13 or 15(d) of The Securities Exchange Act of 1934</p>
<p style="text-align:center;margin-top:10pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Date of Report (Date of earliest event reported): <ix:nonNumeric id="F_000002" name="dei:DocumentPeriodEndDate" contextRef="C_0000720500_20210426_20210426" format="ixt:datemonthdayyearen">April 26, 2021</ix:nonNumeric></p>
<p style="text-align:center;border-bottom:Solid 0.75pt;padding-bottom:1pt;margin-bottom:0pt;margin-top:0pt;margin-left:40%;margin-right:40%;text-indent:0%;font-size:8pt;">&#160;</p>
<p style="text-align:center;margin-top:10pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-size:24pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000003" name="dei:EntityRegistrantName" contextRef="C_0000720500_20210426_20210426">Amtech Systems, Inc.</ix:nonNumeric></p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">(Exact Name of Registrant as Specified in Charter)</p>
<p style="text-align:center;border-bottom:Solid 0.75pt;padding-bottom:1pt;margin-bottom:0pt;margin-top:0pt;margin-left:40%;margin-right:40%;text-indent:0%;font-size:8pt;">&#160;</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:8pt;">&#160;</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr>
<td style="width:33.91%;"></td>
<td style="width:1.06%;"></td>
<td style="width:31.98%;"></td>
<td style="width:1.06%;"></td>
<td style="width:31.98%;"></td>
</tr>
<tr style="height:1pt;">
<td valign="top" style="padding-left:0pt;padding-Right:3pt;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000006" name="dei:EntityIncorporationStateCountryCode" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:stateprovnameen">Arizona</ix:nonNumeric></p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="padding-left:0pt;padding-Right:3pt;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000007" name="dei:EntityFileNumber" contextRef="C_0000720500_20210426_20210426">000-11412</ix:nonNumeric></p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="padding-left:0pt;padding-Right:3pt;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000005" name="dei:EntityTaxIdentificationNumber" contextRef="C_0000720500_20210426_20210426">86-0411215</ix:nonNumeric></p></td>
</tr>
<tr style="height:1pt;">
<td valign="top" style="padding-left:0pt;padding-Right:3pt;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">(State or other jurisdiction</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">of incorporation)</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="padding-left:0pt;padding-Right:3pt;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">(Commission</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">File Number)</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="padding-left:0pt;padding-Right:3pt;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">(IRS Employer</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Identification No.)</p></td>
</tr>
</table></div>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr style="height:1pt;">
<td valign="top" style="padding-left:0pt;padding-Right:2pt;width:49.5%;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000008" name="dei:EntityAddressAddressLine1" contextRef="C_0000720500_20210426_20210426">131 S. Clark Drive</ix:nonNumeric>, <ix:nonNumeric id="F_000009" name="dei:EntityAddressCityOrTown" contextRef="C_0000720500_20210426_20210426">Tempe</ix:nonNumeric>, <ix:nonNumeric id="F_000010" name="dei:EntityAddressStateOrProvince" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:stateprovnameen">Arizona</ix:nonNumeric></p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:1.06%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="padding-left:0pt;padding-Right:3pt;width:49.5%;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000011" name="dei:EntityAddressPostalZipCode" contextRef="C_0000720500_20210426_20210426">85281</ix:nonNumeric></p></td>
</tr>
<tr style="height:1pt;">
<td valign="top" style="padding-left:0pt;padding-Right:2pt;width:49.5%;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">(Address of Principal Executive Offices)</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:1.06%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="padding-left:0pt;padding-Right:3pt;width:49.5%;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;color:#000000;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">(Zip Code)</p></td>
</tr>
</table></div>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;;font-size:8pt;">&#160;</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Registrant&#8217;s telephone number, including area code: (<ix:nonNumeric id="F_000012" name="dei:CityAreaCode" contextRef="C_0000720500_20210426_20210426">480</ix:nonNumeric>) <ix:nonNumeric id="F_000013" name="dei:LocalPhoneNumber" contextRef="C_0000720500_20210426_20210426">967-5146</ix:nonNumeric></p>
<p style="text-align:center;margin-top:10pt;margin-bottom:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Not Applicable</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">(Former name or former address, if changed since last report)</p>
<p style="text-align:center;border-bottom:Solid 0.75pt;padding-bottom:1pt;margin-bottom:0pt;margin-top:0pt;margin-left:40%;margin-right:40%;text-indent:0%;font-size:8pt;">&#160;</p>
<p style="text-align:justify;margin-top:10pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligations of the registrant under any of the following provisions (<span style="font-style:italic;">see</span> General Instruction A.2.):</p>
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr>
<td valign="top" style="width:5%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000015" name="dei:WrittenCommunications" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></p></td>
<td valign="top" style="width:95%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)</p></td>
</tr>
<tr>
<td valign="top" style="width:5%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000016" name="dei:SolicitingMaterial" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></p></td>
<td valign="top" style="width:95%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)</p></td>
</tr>
<tr>
<td valign="top" style="width:5%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000017" name="dei:PreCommencementTenderOffer" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></p></td>
<td valign="top" style="width:95%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))</p></td>
</tr>
<tr>
<td valign="top" style="width:5%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000018" name="dei:PreCommencementIssuerTenderOffer" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></p></td>
<td valign="top" style="width:95%;">
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))</p></td>
</tr>
</table></div>
<p style="text-align:center;border-bottom:Solid 0.75pt;padding-bottom:1pt;margin-bottom:0pt;margin-top:0pt;margin-left:40%;margin-right:40%;text-indent:0%;font-size:8pt;">&#160;</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:8pt;">&#160;</p>
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Securities registered pursuant to Section 12(b) of the Act:</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<div style="align:left;">
<table border="0" cellspacing="0" cellpadding="0" style="border-collapse:collapse; width:100%;">
<tr>
<td valign="bottom" style="width:37.62%; border-bottom:solid 0.75pt #000000;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Title of each class</p></td>
<td valign="bottom" style="width:1%; border-bottom:solid 0.75pt transparent;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;;font-size:8pt;">&#160;</p></td>
<td valign="bottom" style="width:14.86%; border-bottom:solid 0.75pt #000000;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Trading</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Symbol(s)</p></td>
<td valign="top" style="width:1%; border-bottom:solid 0.75pt transparent;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;;font-size:8pt;">&#160;</p></td>
<td valign="bottom" style="width:1%; border-bottom:solid 0.75pt transparent;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;;font-size:8pt;">&#160;</p></td>
<td valign="bottom" style="width:44.52%; border-bottom:solid 0.75pt #000000;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Name of each exchange on which registered</p></td>
</tr>
<tr>
<td valign="top" style="width:37.62%; border-top:solid 0.75pt #000000;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:9pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000019" name="dei:Security12bTitle" contextRef="C_0000720500_20210426_20210426">Common Stock, par value $0.01 per share</ix:nonNumeric></p></td>
<td valign="bottom" style="width:1%;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:9pt;">&#160;</p></td>
<td valign="bottom" style="width:14.86%; border-top:solid 0.75pt #000000;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:9pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000020" name="dei:TradingSymbol" contextRef="C_0000720500_20210426_20210426">ASYS</ix:nonNumeric></p></td>
<td valign="top" style="width:1%;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:9pt;">&#160;</p></td>
<td valign="bottom" style="width:1%;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:9pt;">&#160;</p></td>
<td valign="bottom" style="width:44.52%; border-top:solid 0.75pt #000000;">
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:9pt;font-family:Times New Roman;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000021" name="dei:SecurityExchangeName" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:exchnameen">NASDAQ Global Select Market</ix:nonNumeric></p></td>
</tr>
</table></div>
<p style="text-align:justify;margin-top:10pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (&#167; 230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (&#167; 240.12b-2 of this chapter).</p>
<div style="align:left;">
<table border="0" cellspacing="0" cellpadding="0" style="border-collapse:collapse; width:100%;">
<tr>
<td valign="top" style="width:4.54%;white-space:nowrap">
<p style="text-align:right;margin-top:6pt;margin-bottom:0pt;font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><span style="font-family:Segoe UI Symbol;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;"><ix:nonNumeric id="F_000014" name="dei:EntityEmergingGrowthCompany" contextRef="C_0000720500_20210426_20210426" format="ixt-sec:boolballotbox">&#9744;</ix:nonNumeric></span></p></td>
<td valign="top">
<p style="text-align:right;margin-top:6pt;margin-bottom:0pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;font-family:Segoe UI Symbol;font-size:10pt;"><span style="color:#000000;font-family:Times New Roman;">Emerging growth company</span></p></td></tr></table></div>
<p style="text-align:justify;margin-top:6pt;margin-bottom:0pt;text-indent:0%;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.<span style="font-family:Segoe UI Symbol;color:#000000;"> &#9744;</span><span style="font-family:Segoe UI Symbol;margin-left:36pt;color:#000000;"></span></p>
<p style="border-bottom:Double 2.25pt;padding-bottom:1pt;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-size:3pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<hr style="page-break-after:always" />
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;">Item 7.01 Regulation FD.</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">On April 12, 2021, Amtech Systems, Inc. (together, the &#8220;Company,&#8221; &#8220;we,&#8221; &#8220;us,&#8221; or &#8220;our&#8221;) detected a data incident in which attackers acquired data and disabled some of the technology systems used by one of its subsidiaries.&#160;&#160;Upon learning of the incident, we immediately engaged external counsel and retained a team of third-party forensic, incident response, and security professionals to investigate and determine the full scope of this incident.&#160;&#160;Our investigation of the data incident is ongoing with the assistance from our outside professionals, and we are in the process of determining what data was affected and what customers or individuals require notice.&#160;&#160;We have notified law enforcement officials and confirmed that the incident is covered by our insurance.&#160;&#160;</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Despite this disruption, production continued in our facilities.&#160;&#160;Our previously disabled subsidiary network is now back up and running securely. Working alongside our security professionals, we have been safely bringing our subsidiary&#8217;s systems online with enhanced security controls. We have deployed an advanced next generation anti-virus and endpoint detection and response tool, as well as Managed Detection &#38; Response services.&#160;&#160;We remain committed to protecting the security of the personal information entrusted to us and providing high-quality products and service to our customers. </p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">The information in this Current Report on Form 8-K shall not be deemed &#8220;filed&#8221; for purposes of Section 18 of the Securities Exchange Act of 1934 (the &#8220;Exchange Act&#8221;), or otherwise subject to the liabilities of that section, nor shall it be deemed incorporated by reference in any filing under the Securities Act of 1933 or the Exchange Act, except as expressly set forth by specific reference in such a filing.</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-style:italic;font-family:Times New Roman;font-size:10pt;font-weight:normal;text-transform:none;font-variant: normal;">Forward-Looking Statements </p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Statements in this Current Report on Form 8-K that are not statements of historical fact are forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended (the &#8220;Securities Act&#8221;), and Section 21E of the Securities Exchange Act of 1934, as amended (the &#8220;Exchange Act&#8221;), which are subject to the &#8220;safe harbor&#8221; created by those sections. Such forward-looking statements include, without limitation, statements concerning the Company&#8217;s beliefs and expectations, including the Company&#8217;s expectation that it will not experience significant delays in the delivery of its products or its believe that the incident will not have a material impact on its business, operations or financial results.&#160;&#160;Forward looking statements generally can be identified by the use of forward-looking terminology such as &#8220;may,&#8221; &#8220;will,&#8221; &#8220;should,&#8221; &#8220;expect,&#8221; &#8220;plan,&#8221; &#8220;anticipate,&#8221; &#8220;could,&#8221; &#8220;intend,&#8221; &#8220;target,&#8221; &#8220;project&#8221; &#8220;contemplate,&#8221; &#8220;believe,&#8221; &#8220;estimate,&#8221; &#8220;predict,&#8221; &#8220;potential&#8221; or &#8220;continue&#8221; or the negatives of these terms or variations of them or similar terminology.&#160;&#160;Among the factors that could cause actual results to differ materially from those indicated in the forward-looking statements are risks and uncertainties associated with the Company&#8217;s business and financial condition in general, including the risks and uncertainties described under &#8220;Risk Factors&#8221; in the Company&#8217;s Annual Report on Form 10-K filed with the Securities and Exchange Commission (&#8220;SEC&#8221;) on November 19, 2020, as such risk factors may be updated from time to time in the Company&#8217;s periodic filings with the SEC. Such Annual Report and the Company&#8217;s other periodic filings are accessible on the SEC&#8217;s website at www.sec.gov. You are cautioned not to place undue reliance on these forward-looking statements, which speak only as of the date of this report. All forward-looking statements are qualified in their entirety by this cautionary statement, and the Company undertakes no obligation to revise or update any forward-looking statements to reflect events or circumstances after the date of this report.</p>
<p style="Background-color:#FFFFFF;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;" id="ITEM_901__FINANCIAL_STATEMENTS_EXHIBITS">Item 9.01 Financial Statements and Exhibits.</p>
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">d)&#160;&#160;Exhibits.</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr style="height:1pt;">
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:10%; border-bottom:solid 0.75pt #000000;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Exhibit No.</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%; border-bottom:solid 0.75pt transparent;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:8pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:89%; border-bottom:solid 0.75pt #000000;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-weight:bold;font-size:8pt;font-family:Times New Roman;font-style:normal;text-transform:none;font-variant: normal;">Description</p></td>
</tr>
<tr style="height:1pt;">
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:10%; border-top:solid 0.75pt #000000;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:4pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:4pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:89%; border-top:solid 0.75pt #000000;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-size:4pt;">&#160;</p></td>
</tr>
<tr style="height:1pt;">
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:10%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">&#160;&#160;&#160;104</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:89%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Cover Page Interactive Data File (embedded within the Inline XBRL document)</p></td>
</tr>
</table></div>
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<hr style="page-break-after:always" />
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="text-align:center;margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-weight:bold;font-family:Times New Roman Bold;font-size:10pt;font-style:normal;text-transform:none;font-variant: normal;" id="SIGNATURES">SIGNATURES</p>
<p style="text-align:justify;margin-top:12pt;margin-bottom:0pt;text-indent:4.54%;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.</p>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<div>
<table border="0" cellspacing="0" cellpadding="0" style="margin:auto;border-collapse:collapse; width:100%;">
<tr style="height:1pt;">
<td valign="top" style="width:59%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td colspan="2" valign="top" style="width:37%;">
<p style="text-align:justify;margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">AMTECH SYSTEMS, INC.</p></td>
</tr>
<tr style="height:1pt;">
<td valign="top" style="width:59%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td colspan="2" valign="top" style="width:37%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
</tr>
<tr style="height:1pt;">
<td valign="top" style="width:59%; border-bottom:solid 1pt transparent;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Date: April 26, 2021</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%; border-bottom:solid 1pt transparent;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="width:3%; border-bottom:solid 1pt transparent;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">By:</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:37%; border-bottom:solid 1pt #000000;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">/s/ Lisa D. Gibbs</p></td>
</tr>
<tr style="height:1pt;">
<td valign="top" style="width:59%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="width:3%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:21pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:0pt;padding-Right:0pt;width:37%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Name:&#160;&#160;Lisa D. Gibbs</p></td>
</tr>
<tr style="height:1pt;">
<td valign="top" style="width:59%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="bottom" style="padding-left:3pt;padding-Right:0pt;width:1%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="width:3%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:21pt;;text-indent:0pt;;font-family:Times New Roman;font-size:10pt;">&#160;</p></td>
<td valign="top" style="padding-left:0pt;padding-Right:0pt;width:37%;">
<p style="margin-bottom:0pt;margin-top:0pt;margin-left:0pt;;text-indent:0pt;;color:#000000;font-family:Times New Roman;font-size:10pt;font-weight:normal;font-style:normal;text-transform:none;font-variant: normal;">Title: Vice President and Chief Financial Officer</p></td>
</tr>
</table></div>
<p style="margin-bottom:0pt;margin-top:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p>
<p style="margin-top:12pt;margin-bottom:0pt;text-indent:0%;font-family:Times New Roman;font-size:10pt;">&#160;</p></body>
</html>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>2
<FILENAME>asys-20210426.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!-- DFIN ActiveDisclosure(SM) XBRL Schema Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2021-04-26T08:37:09.0812726+00:00 -->
<!-- Version            : 5.0.1.615 -->
<!-- Package ID         : 0f5ae47754764912ac8247d586829581 -->
<!-- Copyright (c) 2021 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<xsd:schema xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:dei="http://xbrl.sec.gov/dei/2020-01-31" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:us-types="http://fasb.org/us-types/2020-01-31" xmlns:stpr="http://xbrl.sec.gov/stpr/2018-01-31" xmlns:srt-types="http://fasb.org/srt-types/2020-01-31" xmlns:sic="http://xbrl.sec.gov/sic/2020-01-31" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:srt="http://fasb.org/srt/2020-01-31" xmlns:us-gaap="http://fasb.org/us-gaap/2020-01-31" xmlns:naics="http://xbrl.sec.gov/naics/2017-01-31" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:country="http://xbrl.sec.gov/country/2020-01-31" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:currency="http://xbrl.sec.gov/currency/2020-01-31" xmlns:exch="http://xbrl.sec.gov/exch/2020-01-31" xmlns:asys="http://www.amtechsystems.com/20210426" attributeFormDefault="unqualified" elementFormDefault="qualified" targetNamespace="http://www.amtechsystems.com/20210426" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/instance" />
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/linkbase" />
  <xsd:import schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" namespace="http://xbrl.org/2005/xbrldt" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/country/2020/country-2020-01-31.xsd" namespace="http://xbrl.sec.gov/country/2020-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/currency/2020/currency-2020-01-31.xsd" namespace="http://xbrl.sec.gov/currency/2020-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd" namespace="http://xbrl.sec.gov/dei/2020-01-31" />
  <xsd:import schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" namespace="http://www.xbrl.org/dtr/type/non-numeric" />
  <xsd:import schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" namespace="http://www.xbrl.org/dtr/type/numeric" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/exch/2020/exch-2020-01-31.xsd" namespace="http://xbrl.sec.gov/exch/2020-01-31" />
  <xsd:import schemaLocation="http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/arcrole/fact-explanatoryFact" />
  <xsd:import schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/role/negated" />
  <xsd:import schemaLocation="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd" namespace="http://www.xbrl.org/2009/role/net" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/naics/2017/naics-2017-01-31.xsd" namespace="http://xbrl.sec.gov/naics/2017-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/sic/2020/sic-2020-01-31.xsd" namespace="http://xbrl.sec.gov/sic/2020-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd" namespace="http://fasb.org/srt/2020-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/srt/2020/elts/srt-roles-2020-01-31.xsd" namespace="http://fasb.org/srt-roles/2020-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/srt/2020/elts/srt-types-2020-01-31.xsd" namespace="http://fasb.org/srt-types/2020-01-31" />
  <xsd:import schemaLocation="https://xbrl.sec.gov/stpr/2018/stpr-2018-01-31.xsd" namespace="http://xbrl.sec.gov/stpr/2018-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd" namespace="http://fasb.org/us-gaap/2020-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/us-gaap/2020/elts/us-roles-2020-01-31.xsd" namespace="http://fasb.org/us-roles/2020-01-31" />
  <xsd:import schemaLocation="http://xbrl.fasb.org/us-gaap/2020/elts/us-types-2020-01-31.xsd" namespace="http://fasb.org/us-types/2020-01-31" />
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType id="TemplateLink" roleURI="http://www.amtechsystems.com/20210426/role/TemplateLink" xmlns:link="http://www.xbrl.org/2003/linkbase">
        <link:definition>00000 - Document - Template Link</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20210426_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:title="Label Links, all" xlink:type="simple" />
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20210426_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:title="Presentation Links, all" xlink:type="simple" />
      <link:roleType roleURI="http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation" id="Role_DocumentDocumentAndEntityInformation">
        <link:definition>100000 - Document - Document And Entity Information</link:definition>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
    </xsd:appinfo>
  </xsd:annotation>
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>3
<FILENAME>asys-20210426_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii" standalone="yes"?>
<!-- DFIN ActiveDisclosure(SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2021-04-26T08:37:09.0822755+00:00 -->
<!-- Version            : 5.0.1.615 -->
<!-- Package ID         : 0f5ae47754764912ac8247d586829581 -->
<!-- Copyright (c) 2021 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<link:linkbase xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://www.xbrl.org/2009/role/netLabel" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" xlink:type="simple" />
  <link:roleRef roleURI="http://fasb.org/us-gaap/role/label/axisDefault" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-roles-2020-01-31.xsd#axisDefault" xlink:type="simple" />
  <link:labelLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:type="extended">
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCentralIndexKey" xlink:type="locator" xlink:label="dei_EntityCentralIndexKey" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Central Index Key</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CoverAbstract" xlink:type="locator" xlink:label="dei_CoverAbstract" />
    <link:label xml:lang="en-US" xlink:label="dei_CoverAbstract_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Cover [Abstract]</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentType" xlink:type="locator" xlink:label="dei_DocumentType" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentType_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Document Type</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentType_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Document Type</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_AmendmentFlag" xlink:type="locator" xlink:label="dei_AmendmentFlag" />
    <link:label xml:lang="en-US" xlink:label="dei_AmendmentFlag_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Amendment Flag</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_AmendmentFlag_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Amendment Flag</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentPeriodEndDate" xlink:type="locator" xlink:label="dei_DocumentPeriodEndDate" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel">Document Period End Date</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Document Period End Date</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityRegistrantName" xlink:type="locator" xlink:label="dei_EntityRegistrantName" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityRegistrantName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Registrant Name</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityRegistrantName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Registrant Name</link:label>
    <link:label xml:lang="en-US" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Central Index Key</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityTaxIdentificationNumber" xlink:type="locator" xlink:label="dei_EntityTaxIdentificationNumber" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Tax Identification Number</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Tax Identification Number</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityIncorporationStateCountryCode" xlink:type="locator" xlink:label="dei_EntityIncorporationStateCountryCode" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Incorporation, State or Country Code</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Incorporation State Country Code</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityFileNumber" xlink:type="locator" xlink:label="dei_EntityFileNumber" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityFileNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity File Number</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityFileNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity File Number</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressAddressLine1" xlink:type="locator" xlink:label="dei_EntityAddressAddressLine1" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Address Line One</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address Address Line1</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressCityOrTown" xlink:type="locator" xlink:label="dei_EntityAddressCityOrTown" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, City or Town</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address City Or Town</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressStateOrProvince" xlink:type="locator" xlink:label="dei_EntityAddressStateOrProvince" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, State or Province</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address State Or Province</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressPostalZipCode" xlink:type="locator" xlink:label="dei_EntityAddressPostalZipCode" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Address, Postal Zip Code</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address Postal Zip Code</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CityAreaCode" xlink:type="locator" xlink:label="dei_CityAreaCode" />
    <link:label xml:lang="en-US" xlink:label="dei_CityAreaCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">City Area Code</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_CityAreaCode_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">City Area Code</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_LocalPhoneNumber" xlink:type="locator" xlink:label="dei_LocalPhoneNumber" />
    <link:label xml:lang="en-US" xlink:label="dei_LocalPhoneNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Local Phone Number</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_LocalPhoneNumber_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Local Phone Number</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityEmergingGrowthCompany" xlink:type="locator" xlink:label="dei_EntityEmergingGrowthCompany" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Entity Emerging Growth Company</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Entity Emerging Growth Company</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_WrittenCommunications" xlink:type="locator" xlink:label="dei_WrittenCommunications" />
    <link:label xml:lang="en-US" xlink:label="dei_WrittenCommunications_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Written Communications</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_WrittenCommunications" xlink:to="dei_WrittenCommunications_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_WrittenCommunications_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Written Communications</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_SolicitingMaterial" xlink:type="locator" xlink:label="dei_SolicitingMaterial" />
    <link:label xml:lang="en-US" xlink:label="dei_SolicitingMaterial_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Soliciting Material</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SolicitingMaterial" xlink:to="dei_SolicitingMaterial_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_SolicitingMaterial_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Soliciting Material</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_PreCommencementTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementTenderOffer" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Pre-commencement Tender Offer</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementTenderOffer" xlink:to="dei_PreCommencementTenderOffer_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Pre Commencement Tender Offer</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_PreCommencementIssuerTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementIssuerTenderOffer" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementIssuerTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Pre-commencement Issuer Tender Offer</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementIssuerTenderOffer" xlink:to="dei_PreCommencementIssuerTenderOffer_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_PreCommencementIssuerTenderOffer_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Pre Commencement Issuer Tender Offer</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_Security12bTitle" xlink:type="locator" xlink:label="dei_Security12bTitle" />
    <link:label xml:lang="en-US" xlink:label="dei_Security12bTitle_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Title of 12(b) Security</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_Security12bTitle_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Security12b Title</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_TradingSymbol" xlink:type="locator" xlink:label="dei_TradingSymbol" />
    <link:label xml:lang="en-US" xlink:label="dei_TradingSymbol_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Trading Symbol</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_TradingSymbol_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Trading Symbol</link:label>
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_SecurityExchangeName" xlink:type="locator" xlink:label="dei_SecurityExchangeName" />
    <link:label xml:lang="en-US" xlink:label="dei_SecurityExchangeName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel">Security Exchange Name</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl" />
    <link:label xml:lang="en-US" xlink:label="dei_SecurityExchangeName_lbl" xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label">Security Exchange Name</link:label>
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>4
<FILENAME>asys-20210426_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii" standalone="yes"?>
<!-- DFIN ActiveDisclosure(SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date      : 2021-04-26T08:37:09.0822755+00:00 -->
<!-- Version            : 5.0.1.615 -->
<!-- Package ID         : 0f5ae47754764912ac8247d586829581 -->
<!-- Copyright (c) 2021 Donnelley Financial Solutions, Inc. All Rights Reserved. -->
<link:linkbase xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
  <link:roleRef roleURI="http://www.amtechsystems.com/20210426/role/TemplateLink" xlink:href="asys-20210426.xsd#TemplateLink" xlink:type="simple" />
  <link:roleRef roleURI="http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation" xlink:href="asys-20210426.xsd#Role_DocumentDocumentAndEntityInformation" xlink:type="simple" />
  <link:presentationLink xlink:type="extended" xlink:role="http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation">
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_SecurityExchangeName" xlink:type="locator" xlink:label="dei_SecurityExchangeName" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_TradingSymbol" xlink:type="locator" xlink:label="dei_TradingSymbol" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_Security12bTitle" xlink:type="locator" xlink:label="dei_Security12bTitle" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_PreCommencementIssuerTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementIssuerTenderOffer" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_PreCommencementTenderOffer" xlink:type="locator" xlink:label="dei_PreCommencementTenderOffer" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_SolicitingMaterial" xlink:type="locator" xlink:label="dei_SolicitingMaterial" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_WrittenCommunications" xlink:type="locator" xlink:label="dei_WrittenCommunications" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityEmergingGrowthCompany" xlink:type="locator" xlink:label="dei_EntityEmergingGrowthCompany" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_LocalPhoneNumber" xlink:type="locator" xlink:label="dei_LocalPhoneNumber" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CityAreaCode" xlink:type="locator" xlink:label="dei_CityAreaCode" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressPostalZipCode" xlink:type="locator" xlink:label="dei_EntityAddressPostalZipCode" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressStateOrProvince" xlink:type="locator" xlink:label="dei_EntityAddressStateOrProvince" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressCityOrTown" xlink:type="locator" xlink:label="dei_EntityAddressCityOrTown" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressAddressLine1" xlink:type="locator" xlink:label="dei_EntityAddressAddressLine1" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityFileNumber" xlink:type="locator" xlink:label="dei_EntityFileNumber" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityIncorporationStateCountryCode" xlink:type="locator" xlink:label="dei_EntityIncorporationStateCountryCode" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityTaxIdentificationNumber" xlink:type="locator" xlink:label="dei_EntityTaxIdentificationNumber" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCentralIndexKey" xlink:type="locator" xlink:label="dei_EntityCentralIndexKey" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityRegistrantName" xlink:type="locator" xlink:label="dei_EntityRegistrantName" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentPeriodEndDate" xlink:type="locator" xlink:label="dei_DocumentPeriodEndDate" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_AmendmentFlag" xlink:type="locator" xlink:label="dei_AmendmentFlag" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentType" xlink:type="locator" xlink:label="dei_DocumentType" />
    <link:loc xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CoverAbstract" xlink:type="locator" xlink:label="dei_CoverAbstract" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType" order="10010.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag" order="10030.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate" order="10050.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName" order="10070.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey" order="10090.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber" order="10110.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode" order="10130.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber" order="10150.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1" order="10170.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown" order="10190.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince" order="10210.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode" order="10230.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode" order="10250.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber" order="10270.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany" order="10290.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_WrittenCommunications" order="10310.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SolicitingMaterial" order="10330.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementTenderOffer" order="10350.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementIssuerTenderOffer" order="10370.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle" order="10390.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol" order="10430.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName" order="10470.00" priority="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </link:presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>5
<FILENAME>asys-8k_20210426_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:dei="http://xbrl.sec.gov/dei/2020-01-31"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:xlink="http://www.w3.org/1999/xlink">
    <link:schemaRef xlink:href="asys-20210426.xsd" xlink:type="simple"/>
    <context id="C_0000720500_20210426_20210426">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000720500</identifier>
        </entity>
        <period>
            <startDate>2021-04-26</startDate>
            <endDate>2021-04-26</endDate>
        </period>
    </context>
    <dei:AmendmentFlag contextRef="C_0000720500_20210426_20210426" id="F_000001">false</dei:AmendmentFlag>
    <dei:EntityCentralIndexKey contextRef="C_0000720500_20210426_20210426" id="F_000004">0000720500</dei:EntityCentralIndexKey>
    <dei:DocumentType contextRef="C_0000720500_20210426_20210426" id="F_000000">8-K</dei:DocumentType>
    <dei:DocumentPeriodEndDate contextRef="C_0000720500_20210426_20210426" id="F_000002">2021-04-26</dei:DocumentPeriodEndDate>
    <dei:EntityRegistrantName contextRef="C_0000720500_20210426_20210426" id="F_000003">Amtech Systems, Inc.</dei:EntityRegistrantName>
    <dei:EntityIncorporationStateCountryCode contextRef="C_0000720500_20210426_20210426" id="F_000006">AZ</dei:EntityIncorporationStateCountryCode>
    <dei:EntityFileNumber contextRef="C_0000720500_20210426_20210426" id="F_000007">000-11412</dei:EntityFileNumber>
    <dei:EntityTaxIdentificationNumber contextRef="C_0000720500_20210426_20210426" id="F_000005">86-0411215</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1 contextRef="C_0000720500_20210426_20210426" id="F_000008">131 S. Clark Drive</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown contextRef="C_0000720500_20210426_20210426" id="F_000009">Tempe</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince contextRef="C_0000720500_20210426_20210426" id="F_000010">AZ</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode contextRef="C_0000720500_20210426_20210426" id="F_000011">85281</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode contextRef="C_0000720500_20210426_20210426" id="F_000012">480</dei:CityAreaCode>
    <dei:LocalPhoneNumber contextRef="C_0000720500_20210426_20210426" id="F_000013">967-5146</dei:LocalPhoneNumber>
    <dei:WrittenCommunications contextRef="C_0000720500_20210426_20210426" id="F_000015">false</dei:WrittenCommunications>
    <dei:SolicitingMaterial contextRef="C_0000720500_20210426_20210426" id="F_000016">false</dei:SolicitingMaterial>
    <dei:PreCommencementTenderOffer contextRef="C_0000720500_20210426_20210426" id="F_000017">false</dei:PreCommencementTenderOffer>
    <dei:PreCommencementIssuerTenderOffer contextRef="C_0000720500_20210426_20210426" id="F_000018">false</dei:PreCommencementIssuerTenderOffer>
    <dei:Security12bTitle contextRef="C_0000720500_20210426_20210426" id="F_000019">Common Stock, par value $0.01 per share</dei:Security12bTitle>
    <dei:TradingSymbol contextRef="C_0000720500_20210426_20210426" id="F_000020">ASYS</dei:TradingSymbol>
    <dei:SecurityExchangeName contextRef="C_0000720500_20210426_20210426" id="F_000021">NASDAQ</dei:SecurityExchangeName>
    <dei:EntityEmergingGrowthCompany contextRef="C_0000720500_20210426_20210426" id="F_000014">false</dei:EntityEmergingGrowthCompany>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>6
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.1</span><table class="report" border="0" cellspacing="2" id="idm140079949745448">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Document And Entity Information<br></strong></div></th>
<th class="th"><div>Apr. 26, 2021</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Cover [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">8-K<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Apr. 26,  2021<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">Amtech Systems, Inc.<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0000720500<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">86-0411215<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">AZ<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Entity File Number</a></td>
<td class="text">000-11412<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">131 S. Clark Drive<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Tempe<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">AZ<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">85281<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">480<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">967-5146<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_WrittenCommunications', window );">Written Communications</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_SolicitingMaterial', window );">Soliciting Material</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_PreCommencementTenderOffer', window );">Pre-commencement Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_PreCommencementIssuerTenderOffer', window );">Pre-commencement Issuer Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common Stock, par value $0.01 per share<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">ASYS<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NASDAQ<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementIssuerTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 13e<br> -Subsection 4c<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementIssuerTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 14d<br> -Subsection 2b<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SolicitingMaterial">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Section 14a<br> -Number 240<br> -Subsection 12<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SolicitingMaterial</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_WrittenCommunications">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 425<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_WrittenCommunications</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>7
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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M<6A4"H[<8R6,<6*T_C6"R0_L?@!02P,$%     @ PX.:4CJJHN=  0  / (
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M7>EYIM<WDUM)Z.#<@V#OX96,'<V/'W?W U!+ P04    " ##@YI2)!Z;HJT
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M2P$"% ,4    " ##@YI2!T%-8H$   "Q    $               @ $
M9&]C4')O<',O87!P+GAM;%!+ 0(4 Q0    ( ,.#FE+_C<Z)[@   "L"   1
M              "  :\   !D;V-0<F]P<R]C;W)E+GAM;%!+ 0(4 Q0    (
M ,.#FE*97)PC$ 8  )PG   3              "  <P!  !X;"]T:&5M92]T
M:&5M93$N>&UL4$L! A0#%     @ PX.:4CNEFE0X!   11   !@
M     ("!#0@  'AL+W=O<FMS:&5E=',O<VAE970Q+GAM;%!+ 0(4 Q0    (
M ,.#FE*?H!OPL0(  .(,   -              "  7L,  !X;"]S='EL97,N
M>&UL4$L! A0#%     @ PX.:4I>*NQS     $P(   L              ( !
M5P\  %]R96QS+RYR96QS4$L! A0#%     @ PX.:4CJJHN=  0  / (   \
M             ( !0!   'AL+W=O<FMB;V]K+GAM;%!+ 0(4 Q0    ( ,.#
MFE(D'INBK0   /@!   :              "  :T1  !X;"]?<F5L<R]W;W)K
M8F]O:RYX;6PN<F5L<U!+ 0(4 Q0    ( ,.#FE)ED'F2&0$  ,\#   3
M          "  9(2  !;0V]N=&5N=%]4>7!E<UTN>&UL4$L%!@     )  D
*/@(  -P3      $!

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>8
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>9
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>10
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.21.1</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>1</ContextCount>
  <ElementCount>96</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>0</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>0</UnitCount>
  <MyReports>
    <Report instance="asys-8k_20210426.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>100000 - Document - Document And Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation</Role>
      <ShortName>Document And Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File doctype="8-K" original="asys-8k_20210426.htm">asys-8k_20210426.htm</File>
    <File>asys-20210426.xsd</File>
    <File>asys-20210426_lab.xml</File>
    <File>asys-20210426_pre.xml</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies>
    <BaseTaxonomy>http://xbrl.sec.gov/dei/2020-01-31</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>false</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>12
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "instance": {
  "asys-8k_20210426.htm": {
   "axisCustom": 0,
   "axisStandard": 0,
   "contextCount": 1,
   "dts": {
    "definitionLink": {
     "remote": [
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-eedm-def-2020-01-31.xml",
      "http://xbrl.fasb.org/srt/2020/elts/srt-eedm1-def-2020-01-31.xml"
     ]
    },
    "inline": {
     "local": [
      "asys-8k_20210426.htm"
     ]
    },
    "labelLink": {
     "local": [
      "asys-20210426_lab.xml"
     ],
     "remote": [
      "https://xbrl.sec.gov/dei/2020/dei-doc-2020-01-31.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "asys-20210426_pre.xml"
     ]
    },
    "referenceLink": {
     "remote": [
      "https://xbrl.sec.gov/dei/2020/dei-ref-2020-01-31.xml"
     ]
    },
    "schema": {
     "local": [
      "asys-20210426.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "https://xbrl.sec.gov/country/2020/country-2020-01-31.xsd",
      "http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd",
      "https://xbrl.sec.gov/currency/2020/currency-2020-01-31.xsd",
      "https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd",
      "http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd",
      "https://xbrl.sec.gov/exch/2020/exch-2020-01-31.xsd",
      "http://www.xbrl.org/lrr/arcrole/factExplanatory-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/net-2009-12-16.xsd",
      "https://xbrl.sec.gov/naics/2017/naics-2017-01-31.xsd",
      "https://xbrl.sec.gov/sic/2020/sic-2020-01-31.xsd",
      "http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "http://xbrl.fasb.org/srt/2020/elts/srt-types-2020-01-31.xsd",
      "http://xbrl.fasb.org/srt/2020/elts/srt-roles-2020-01-31.xsd",
      "https://xbrl.sec.gov/stpr/2018/stpr-2018-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-roles-2020-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-types-2020-01-31.xsd",
      "http://www.xbrl.org/lrr/role/deprecated-2009-12-16.xsd"
     ]
    }
   },
   "elementCount": 23,
   "entityCount": 1,
   "hidden": {
    "http://xbrl.sec.gov/dei/2020-01-31": 2,
    "total": 2
   },
   "keyCustom": 0,
   "keyStandard": 96,
   "memberCustom": 0,
   "memberStandard": 0,
   "nsprefix": "asys",
   "nsuri": "http://www.amtechsystems.com/20210426",
   "report": {
    "R1": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "body",
       "html"
      ],
      "baseRef": "asys-8k_20210426.htm",
      "contextRef": "C_0000720500_20210426_20210426",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "document",
     "isDefault": "true",
     "longName": "100000 - Document - Document And Entity Information",
     "role": "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation",
     "shortName": "Document And Entity Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "body",
       "html"
      ],
      "baseRef": "asys-8k_20210426.htm",
      "contextRef": "C_0000720500_20210426_20210426",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    }
   },
   "segmentCount": 0,
   "tag": {
    "dei_AmendmentFlag": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.",
        "label": "Amendment Flag",
        "verboseLabel": "Amendment Flag"
       }
      }
     },
     "localname": "AmendmentFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_CityAreaCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Area code of city",
        "label": "City Area Code",
        "terseLabel": "City Area Code"
       }
      }
     },
     "localname": "CityAreaCode",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CoverAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cover page.",
        "label": "Cover [Abstract]"
       }
      }
     },
     "localname": "CoverAbstract",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "dei_DocumentPeriodEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is YYYY-MM-DD.",
        "label": "Document Period End Date",
        "verboseLabel": "Document Period End Date"
       }
      }
     },
     "localname": "DocumentPeriodEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentType": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.",
        "label": "Document Type",
        "terseLabel": "Document Type"
       }
      }
     },
     "localname": "DocumentType",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "submissionTypeItemType"
    },
    "dei_EntityAddressAddressLine1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name",
        "label": "Entity Address Address Line1",
        "terseLabel": "Entity Address, Address Line One"
       }
      }
     },
     "localname": "EntityAddressAddressLine1",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCityOrTown": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the City or Town",
        "label": "Entity Address City Or Town",
        "terseLabel": "Entity Address, City or Town"
       }
      }
     },
     "localname": "EntityAddressCityOrTown",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressPostalZipCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Code for the postal or zip code",
        "label": "Entity Address Postal Zip Code",
        "terseLabel": "Entity Address, Postal Zip Code"
       }
      }
     },
     "localname": "EntityAddressPostalZipCode",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressStateOrProvince": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the state or province.",
        "label": "Entity Address State Or Province",
        "terseLabel": "Entity Address, State or Province"
       }
      }
     },
     "localname": "EntityAddressStateOrProvince",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "stateOrProvinceItemType"
    },
    "dei_EntityCentralIndexKey": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.",
        "label": "Entity Central Index Key",
        "terseLabel": "Entity Central Index Key"
       }
      }
     },
     "localname": "EntityCentralIndexKey",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "centralIndexKeyItemType"
    },
    "dei_EntityEmergingGrowthCompany": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate if registrant meets the emerging growth company criteria.",
        "label": "Entity Emerging Growth Company",
        "terseLabel": "Entity Emerging Growth Company"
       }
      }
     },
     "localname": "EntityEmergingGrowthCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityFileNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.",
        "label": "Entity File Number",
        "terseLabel": "Entity File Number"
       }
      }
     },
     "localname": "EntityFileNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "fileNumberItemType"
    },
    "dei_EntityIncorporationStateCountryCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Two-character EDGAR code representing the state or country of incorporation.",
        "label": "Entity Incorporation State Country Code",
        "terseLabel": "Entity Incorporation, State or Country Code"
       }
      }
     },
     "localname": "EntityIncorporationStateCountryCode",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarStateCountryItemType"
    },
    "dei_EntityRegistrantName": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.",
        "label": "Entity Registrant Name",
        "terseLabel": "Entity Registrant Name"
       }
      }
     },
     "localname": "EntityRegistrantName",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityTaxIdentificationNumber": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.",
        "label": "Entity Tax Identification Number",
        "terseLabel": "Entity Tax Identification Number"
       }
      }
     },
     "localname": "EntityTaxIdentificationNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "employerIdItemType"
    },
    "dei_LocalPhoneNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Local phone number for entity.",
        "label": "Local Phone Number",
        "terseLabel": "Local Phone Number"
       }
      }
     },
     "localname": "LocalPhoneNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_PreCommencementIssuerTenderOffer": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.",
        "label": "Pre Commencement Issuer Tender Offer",
        "terseLabel": "Pre-commencement Issuer Tender Offer"
       }
      }
     },
     "localname": "PreCommencementIssuerTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_PreCommencementTenderOffer": {
     "auth_ref": [
      "r3"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.",
        "label": "Pre Commencement Tender Offer",
        "terseLabel": "Pre-commencement Tender Offer"
       }
      }
     },
     "localname": "PreCommencementTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_Security12bTitle": {
     "auth_ref": [
      "r0"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Title of a 12(b) registered security.",
        "label": "Security12b Title",
        "terseLabel": "Title of 12(b) Security"
       }
      }
     },
     "localname": "Security12bTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_SecurityExchangeName": {
     "auth_ref": [
      "r1"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the Exchange on which a security is registered.",
        "label": "Security Exchange Name",
        "terseLabel": "Security Exchange Name"
       }
      }
     },
     "localname": "SecurityExchangeName",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarExchangeCodeItemType"
    },
    "dei_SolicitingMaterial": {
     "auth_ref": [
      "r4"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.",
        "label": "Soliciting Material",
        "terseLabel": "Soliciting Material"
       }
      }
     },
     "localname": "SolicitingMaterial",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_TradingSymbol": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Trading symbol of an instrument as listed on an exchange.",
        "label": "Trading Symbol",
        "terseLabel": "Trading Symbol"
       }
      }
     },
     "localname": "TradingSymbol",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "tradingSymbolItemType"
    },
    "dei_WrittenCommunications": {
     "auth_ref": [
      "r6"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.",
        "label": "Written Communications",
        "terseLabel": "Written Communications"
       }
      }
     },
     "localname": "WrittenCommunications",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.amtechsystems.com/20210426/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    }
   },
   "unitCount": 0
  }
 },
 "std_ref": {
  "r0": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b"
  },
  "r1": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "d1-1"
  },
  "r2": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13e",
   "Subsection": "4c"
  },
  "r3": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14d",
   "Subsection": "2b"
  },
  "r4": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14a",
   "Subsection": "12"
  },
  "r5": {
   "Name": "Regulation 12B",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-2"
  },
  "r6": {
   "Name": "Securities Act",
   "Number": "230",
   "Publisher": "SEC",
   "Section": "425"
  }
 },
 "version": "2.1"
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>13
<FILENAME>0001564590-21-020546-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0001564590-21-020546-xbrl.zip
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M8=P /(#^"!+JH_/&$O'&YXN??_KTBV6!JYO^';CT OR"KC#W".5SAMX/OGP
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MRY4#;Z^Z7RT?[E6=]$C#:"AXMZ?(EKNMAPCS#0+F^VQ(SGE  Y=3G[22F>X
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G<RTX:U\R,#(Q,#0R-BYH=&U02P4&      0 !  ' 0  +"@

end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
