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    CONFORMED SUBMISSION TYPE:	8-K
    PUBLIC DOCUMENT COUNT:		14
    CONFORMED PERIOD OF REPORT:	20210505
    ITEM INFORMATION:		Results of Operations and Financial Condition
    ITEM INFORMATION:		Financial Statements and Exhibits
    FILED AS OF DATE:		20210505
    DATE AS OF CHANGE:		20210505

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    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
    		CENTRAL INDEX KEY:			0000720500
    		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
    		IRS NUMBER:				860411215
    		STATE OF INCORPORATION:			AZ
    		FISCAL YEAR END:			0930

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    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-11412
    		FILM NUMBER:		21893677

    	BUSINESS ADDRESS:
    		STREET 1:		131 SOUTH CLARK DRIVE
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85281
    		BUSINESS PHONE:		4809675146

    	MAIL ADDRESS:
    		STREET 1:		131 SOUTH CLARK DRIVE
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85281

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    		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
    		DATE OF NAME CHANGE:	19870715
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