<SEC-DOCUMENT>0001564590-21-029325-index.html : 20210521
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<ACCEPTANCE-DATETIME>20210521164014
ACCESSION NUMBER:		0001564590-21-029325
CONFORMED SUBMISSION TYPE:	SD
PUBLIC DOCUMENT COUNT:		3
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<ITEM-NUMBER>1.01
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FILED AS OF DATE:		20210521
DATE AS OF CHANGE:		20210521

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		SD
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		21949669

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
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<DOCUMENT>
<TYPE>SD
<SEQUENCE>1
<FILENAME>asys-sd.htm
<DESCRIPTION>SD
<TEXT>
Document 1 - file: asys-sd.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-1.01
<SEQUENCE>2
<FILENAME>asys-ex101_6.htm
<DESCRIPTION>EX-1.01
<TEXT>
Document 2 - file: asys-ex101_6.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>gy3r3qmd2cq0000001.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: gy3r3qmd2cq0000001.jpg

</DOCUMENT>
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