# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-22-025872
Filing Date
2022-11-30
Accepted
2022-11-30 16:21:34
Documents
132
Period of Report
2022-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | asys-20220930.htm iXBRL | 10-K | 5124745
2 | EX-4.1 | asys-ex4_1.htm | EX-4.1 | 64956
3 | EX-10.9 | asys-ex10_9.htm | EX-10.9 | 115620
4 | EX-21.1 | asys-ex21_1.htm | EX-21.1 | 27347
5 | EX-23.1 | asys-ex23_1.htm | EX-23.1 | 6365
6 | EX-23.2 | asys-ex23_2.htm | EX-23.2 | 6153
7 | EX-24 | asys-ex24.htm | EX-24 | 53605
8 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 19432
9 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 19453
10 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 11763
11 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 13136
12 | GRAPHIC | img249562629_0.jpg | GRAPHIC | 45889
13 | GRAPHIC | img249562629_1.jpg | GRAPHIC | 39042
| Complete submission text file | 0000950170-22-025872.txt |  | 19405691

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
14 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20220930_lab.xml | EX-101.LAB | 716439
15 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20220930_pre.xml | EX-101.PRE | 584844
16 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20220930.xsd | EX-101.SCH | 92138
17 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20220930_def.xml | EX-101.DEF | 292437
18 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20220930_cal.xml | EX-101.CAL | 105629
126 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20220930_htm.xml | XML | 4440450

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 221435848
SIC: 3559 Special Industry Machinery, NEC