# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-22-001222
Filing Date
2022-02-14
Accepted
2022-02-14 16:41:29
Documents
68
Period of Report
2021-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20211231.htm iXBRL | 10-Q | 1776461
2 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 21856
3 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 20783
4 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 13754
5 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 13794
6 | GRAPHIC | img248662173_0.jpg | GRAPHIC | 45889
| Complete submission text file | 0000950170-22-001222.txt |  | 6650445

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20211231_def.xml | EX-101.DEF | 115485
8 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20211231_cal.xml | EX-101.CAL | 58796
9 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20211231_pre.xml | EX-101.PRE | 268206
10 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20211231_lab.xml | EX-101.LAB | 369259
11 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20211231.xsd | EX-101.SCH | 43068
62 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20211231_htm.xml | XML | 1132553

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 22633465
SIC: 3559 Special Industry Machinery, NEC