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Leases - Additional Information (Details) $ in Millions | 9 Months Ended
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Jun. 30, 2022 USD ($)
Lessee Lease Description [Line Items] |
Operating lease, existence of option to extend | true
Operating lease, optional lease extension periods for multiple leases, description | Operating lease payments include $6.3 million related to optional lease extension periods for multiple leases that are not yet exercisable but are reasonably certain of being exercised.
Payments related to optional lease extension periods for multiple leases | $ 6.3

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- Definition Lessee Payments for optional lease extension periods that have not yet been exercised but are reasonably likely to be exercised. + References No definition available. + Details
Name: | asys_LesseePaymentsInOptionalExtensionPeriods
Namespace Prefix: | asys_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_LesseeLeaseDescriptionLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition Indicates (true false) whether lessee has option to extend operating lease. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 842 -SubTopic 20 -Section 50 -Paragraph 3 -Subparagraph (a)(3) -URI https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980 + Details
Name: | us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend
Namespace Prefix: | us-gaap_
Data Type: | xbrli:booleanItemType
Balance Type: | na
Period Type: | duration

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- Definition Description of terms and conditions of option to extend lessee's operating lease. Includes, but is not limited to, information about option recognized as part of right-of-use asset and lease liability. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 842 -SubTopic 20 -Section 50 -Paragraph 3 -Subparagraph (a)(3) -URI https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980 + Details
Name: | us-gaap_LesseeOperatingLeaseOptionToExtend
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration