    <SEC-DOCUMENT>0000950170-22-000375-index.html : 20220118
    <SEC-HEADER>0000950170-22-000375.hdr.sgml : 20220118
    <ACCEPTANCE-DATETIME>20220118160801
    ACCESSION NUMBER:		0000950170-22-000375
    CONFORMED SUBMISSION TYPE:	DEF 14A
    PUBLIC DOCUMENT COUNT:		5
    CONFORMED PERIOD OF REPORT:	20220302
    FILED AS OF DATE:		20220118
    DATE AS OF CHANGE:		20220118

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
    		CENTRAL INDEX KEY:			0000720500
    		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
    		IRS NUMBER:				860411215
    		STATE OF INCORPORATION:			AZ
    		FISCAL YEAR END:			0930

    	FILING VALUES:
    		FORM TYPE:		DEF 14A
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-11412
    		FILM NUMBER:		22535258

    	BUSINESS ADDRESS:
    		STREET 1:		131 SOUTH CLARK DRIVE
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85281
    		BUSINESS PHONE:		4809675146

    	MAIL ADDRESS:
    		STREET 1:		131 SOUTH CLARK DRIVE
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85281

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
    		DATE OF NAME CHANGE:	19870715
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>DEF 14A
    <SEQUENCE>1
    <FILENAME>asys_def_14a_2022.htm
    <DESCRIPTION>DEF 14A
    <TEXT>
    Document 1 - file: asys_def_14a_2022.htm

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>2
    <FILENAME>img215434124_0.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 2 - file: img215434124_0.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>3
    <FILENAME>img215434124_1.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 3 - file: img215434124_1.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>4
    <FILENAME>img215434124_2.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 4 - file: img215434124_2.jpg

    </DOCUMENT>
    <DOCUMENT>
    <TYPE>GRAPHIC
    <SEQUENCE>5
    <FILENAME>img215434124_3.jpg
    <DESCRIPTION>GRAPHIC
    <TEXT>
    Document 5 - file: img215434124_3.jpg

    </DOCUMENT>
    </SEC-DOCUMENT>