# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950170-22-000375
Filing Date
2022-01-18
Accepted
2022-01-18 16:08:01
Documents
5
Period of Report
2022-03-02

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | asys_def_14a_2022.htm | DEF 14A | 1140310
2 | GRAPHIC | img215434124_0.jpg | GRAPHIC | 45889
3 | GRAPHIC | img215434124_1.jpg | GRAPHIC | 6484
4 | GRAPHIC | img215434124_2.jpg | GRAPHIC | 470794
5 | GRAPHIC | img215434124_3.jpg | GRAPHIC | 270930
| Complete submission text file | 0000950170-22-000375.txt |  | 2229745

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85281 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: DEF 14A | Act: 34 | File No.: 000-11412 | Film No.: 22535258
SIC: 3559 Special Industry Machinery, NEC