<SEC-DOCUMENT>0000950170-22-000375-index.html : 20220118
<SEC-HEADER>0000950170-22-000375.hdr.sgml : 20220118
<ACCEPTANCE-DATETIME>20220118160801
ACCESSION NUMBER:		0000950170-22-000375
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		5
CONFORMED PERIOD OF REPORT:	20220302
FILED AS OF DATE:		20220118
DATE AS OF CHANGE:		20220118

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		22535258

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>asys_def_14a_2022.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: asys_def_14a_2022.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>img215434124_0.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: img215434124_0.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>img215434124_1.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: img215434124_1.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>img215434124_2.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: img215434124_2.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>img215434124_3.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: img215434124_3.jpg

</DOCUMENT>
</SEC-DOCUMENT>