# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-23-070422
Filing Date
2023-12-14
Accepted
2023-12-14 16:38:13
Documents
138
Period of Report
2023-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | asys-20230930.htm iXBRL | 10-K | 3773932
2 | EX-4.1 | asys-ex4_1.htm | EX-4.1 | 53276
3 | EX-10.4 | asys-ex10_4.htm | EX-10.4 | 137970
4 | EX-10.7 | asys-ex10_7.htm | EX-10.7 | 92592
5 | EX-10.8 | asys-ex10_8.htm | EX-10.8 | 526726
6 | EX-21.1 | asys-ex21_1.htm | EX-21.1 | 24337
7 | EX-23.1 | asys-ex23_1.htm | EX-23.1 | 4789
8 | EX-23.2 | asys-ex23_2.htm | EX-23.2 | 4510
9 | EX-24 | asys-ex24.htm | EX-24 | 25587
10 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 14256
11 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 14242
12 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 8201
13 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 8952
14 | EX-97 | asys-ex97.htm | EX-97 | 33151
15 | GRAPHIC | img250486150_0.jpg | GRAPHIC | 45889
| Complete submission text file | 0000950170-23-070422.txt |  | 17551490

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
16 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20230930_def.xml | EX-101.DEF | 361602
17 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20230930_cal.xml | EX-101.CAL | 111917
18 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20230930_lab.xml | EX-101.LAB | 782303
19 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20230930.xsd | EX-101.SCH | 98183
20 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20230930_pre.xml | EX-101.PRE | 652880
132 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20230930_htm.xml | XML | 3531611

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 231487562
SIC: 3559 Special Industry Machinery, NEC