# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-002163
Filing Date
2023-02-08
Accepted
2023-02-08 16:22:13
Documents
68
Period of Report
2022-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20221231.htm iXBRL | 10-Q | 2058110
2 | EX-10.1 | asys-ex10_1.htm | EX-10.1 | 1056973
3 | EX-10.2 | asys-ex10_2.htm | EX-10.2 | 681342
4 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 24115
5 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 22907
6 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 15086
7 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 15126
8 | GRAPHIC | img249585694_0.jpg | GRAPHIC | 45889
| Complete submission text file | 0000950170-23-002163.txt |  | 9985160

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
9 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20221231_lab.xml | EX-101.LAB | 401099
10 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20221231_cal.xml | EX-101.CAL | 58141
11 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20221231_pre.xml | EX-101.PRE | 292726
12 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20221231_def.xml | EX-101.DEF | 139627
13 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20221231.xsd | EX-101.SCH | 48311
62 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20221231_htm.xml | XML | 1594772

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 23599363
SIC: 3559 Special Industry Machinery, NEC