# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-020556
Filing Date
2023-05-10
Accepted
2023-05-10 16:18:59
Documents
76
Period of Report
2023-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20230331.htm iXBRL | 10-Q | 2871007
2 | EX-31.1 | asys-ex31_1.htm | EX-31 | 24105
3 | EX-31.2 | asys-ex31_2.htm | EX-31 | 22899
4 | EX-32.1 | asys-ex32_1.htm | EX-32 | 15069
5 | EX-32.2 | asys-ex32_2.htm | EX-32 | 15115
6 | GRAPHIC | img250480385_0.jpg | GRAPHIC | 45889
| Complete submission text file | 0000950170-23-020556.txt |  | 10927273

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20230331.xsd | EX-101.SCH | 59478
8 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20230331_pre.xml | EX-101.PRE | 388285
9 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20230331_cal.xml | EX-101.CAL | 76112
10 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20230331_def.xml | EX-101.DEF | 205919
11 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20230331_lab.xml | EX-101.LAB | 490193
70 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20230331_htm.xml | XML | 2341547

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 23906675
SIC: 3559 Special Industry Machinery, NEC