# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-040599
Filing Date
2023-08-09
Accepted
2023-08-09 16:14:11
Documents
82
Period of Report
2023-06-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20230630.htm iXBRL | 10-Q | 3215732
2 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 24149
3 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 22905
4 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 15139
5 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 15120
6 | GRAPHIC | img250483267_0.jpg | GRAPHIC | 45889
| Complete submission text file | 0000950170-23-040599.txt |  | 11955141

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT | asys-20230630_lab.xml | EX-101.LAB | 482553
8 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT | asys-20230630_pre.xml | EX-101.PRE | 373700
9 | XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT | asys-20230630_cal.xml | EX-101.CAL | 75306
10 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT | asys-20230630_def.xml | EX-101.DEF | 200749
11 | XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT | asys-20230630.xsd | EX-101.SCH | 54084
76 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20230630_htm.xml | XML | 2639491

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 231155308
SIC: 3559 Special Industry Machinery, NEC