<SEC-DOCUMENT>0000950170-23-043246.txt : 20230817
<SEC-HEADER>0000950170-23-043246.hdr.sgml : 20230817
<ACCEPTANCE-DATETIME>20230817163728
ACCESSION NUMBER:		0000950170-23-043246
CONFORMED SUBMISSION TYPE:	8-K/A
PUBLIC DOCUMENT COUNT:		12
CONFORMED PERIOD OF REPORT:	20230808
ITEM INFORMATION:		Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20230817
DATE AS OF CHANGE:		20230817

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		8-K/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		231182430

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K/A
<SEQUENCE>1
<FILENAME>asys-20230808.htm
<DESCRIPTION>8-K/A
<TEXT>
<XBRL>
<?xml version="1.0" encoding="ASCII"?><!-- DFIN New ActiveDisclosure (SM) Inline XBRL Document - http://www.dfinsolutions.com/ --><!-- Creation Date :2023-08-17T16:35:40.6644+00:00 --><!-- Copyright (c) 2023 Donnelly Financial Solutions, Inc. All Rights Reserved. -->
<html xmlns="http://www.w3.org/1999/xhtml" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:nonNumeric="http://www.xbrl.org/dtr/type/non-numeric" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:dei="http://xbrl.sec.gov/dei/2023" xmlns:asys="http://amtechsystems.com/20230808" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2022-02-16">
 <head>
  <title>8-K/A</title>
  <meta http-equiv="Content-Type" content="text/html" />
 </head>
 <body style="margin: auto!important;padding: 8px;">
  <div style="display:none;"><ix:header><ix:hidden><ix:nonNumeric id="F_9fd73ad9-011a-4a90-99ff-13f52d5baa40" name="dei:EntityCentralIndexKey" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13">0000720500</ix:nonNumeric><ix:nonNumeric id="F_42609d20-bb3e-4c0a-a347-4d4d259519b3" name="dei:AmendmentFlag" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13">true</ix:nonNumeric><ix:nonNumeric id="F_c350a3bb-c74b-418e-8b25-d1240bbe77f7" name="dei:EntityRegistrantName" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13">AMTECH SYSTEMS INC</ix:nonNumeric></ix:hidden><ix:references><link:schemaRef xlink:type="simple" xlink:href="asys-20230808.xsd"></link:schemaRef></ix:references><ix:resources><xbrli:context id="C_01e69024-6909-4bca-b0df-45207b056b13"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0000720500</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2023-08-08</xbrli:startDate><xbrli:endDate>2023-08-08</xbrli:endDate></xbrli:period></xbrli:context></ix:resources></ix:header></div>
  <p style="border-top:2.25pt double rgba(0,0,0,1);text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:5.75pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:18.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">UNITED STATES<br />SECURITIES AND EXCHANGE COMMISSION<br /></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:12.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">WASHINGTON, D.C. 20549</span></p>
  <p style="margin-left:40.0%;text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;border-bottom:0.75pt solid rgba(0,0,0,1);margin-right:40.0%;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:10.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:18.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">FORM </span><span style="font-size:18.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_6631f300-6cfb-4ece-a9b2-c6a4456d34c4" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:DocumentType"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:18.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">8-K/A</span></ix:nonNumeric></span></p>
  <p style="margin-left:40.0%;text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;border-bottom:0.75pt solid rgba(0,0,0,1);margin-right:40.0%;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:9.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:12.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">CURRENT REPORT</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:9.0pt;font-family:Times New Roman;margin-bottom:6.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:12.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934</span></p>
  <table style="border-spacing:0;table-layout:fixed;width:100.0%;border-collapse:separate;">
   <tr style="visibility:collapse;">
    <td style="width:100.0%;"></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;margin-right:0.02986111111111111in;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Date of Report (Date of earliest event reported): </span><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_18459e74-e3e7-409a-8c8b-0c8d0d57b2a4" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:DocumentPeriodEndDate" format="ixt:date-monthname-day-year-en"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">August 08, 2023</span></ix:nonNumeric></span></p></td>
   </tr>
  </table>
  <p style="margin-left:40.0%;text-indent:0.0%;font-size:10.0pt;margin-top:5.0pt;font-family:Times New Roman;margin-bottom:0.0pt;border-bottom:0.75pt solid rgba(0,0,0,1);margin-right:40.0%;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:5.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:24.0pt;font-family:&quot;Times New Roman&quot;, serif;"><span style="-sec-ix-hidden:F_c350a3bb-c74b-418e-8b25-d1240bbe77f7;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:24.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Amtech Systems, Inc.</span></span></span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:3.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(Exact name of Registrant as Specified in Its Charter)</span></p>
  <p style="margin-left:40.0%;text-indent:0.0%;font-size:10.0pt;margin-top:9.0pt;font-family:Times New Roman;margin-bottom:0.0pt;border-bottom:0.75pt solid rgba(0,0,0,1);margin-right:40.0%;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <table style="border-spacing:0;table-layout:fixed;width:100.0%;border-collapse:separate;">
   <tr style="visibility:collapse;">
    <td style="width:20.0%;"></td>
    <td style="width:1.0%;"></td>
    <td style="width:20.0%;"></td>
    <td style="width:18.0%;"></td>
    <td style="width:41.0%;"></td>
   </tr>
   <tr style="height:10.0pt;">
    <td colspan="3" style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_38d6c798-3368-43da-ba39-f4d71706e5a5" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityIncorporationStateCountryCode" format="ixt-sec:stateprovnameen"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Arizona</span></ix:nonNumeric></span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_5ba86122-75aa-4954-bcb9-b20a4b4c1b7c" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityFileNumber"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">000-11412</span></ix:nonNumeric></span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_09c0a7d0-f7f2-45b9-a132-4dc162578fd1" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityTaxIdentificationNumber"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">86-0411215</span></ix:nonNumeric></span></p></td>
   </tr>
   <tr style="height:7.0pt;">
    <td colspan="3" style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:7.5pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(State or Other Jurisdiction<br />of Incorporation)</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:7.5pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(Commission File Number)</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:7.5pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(IRS Employer<br />Identification No.)</span></p></td>
   </tr>
   <tr>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
   </tr>
   <tr style="height:10.0pt;">
    <td colspan="3" style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_cbad895a-8335-4c16-ab55-656b8f4d1b03" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityAddressAddressLine1"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">131 S. Clark Drive</span></ix:nonNumeric></span></p></td>
    <td colspan="2" style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
   </tr>
   <tr style="height:10.0pt;">
    <td colspan="3" style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_4074ff05-9745-494d-b169-4bdc7db52439" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityAddressCityOrTown"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Tempe</span></ix:nonNumeric></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">, </span><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_d4152edb-24fe-44db-a3be-ca232666935f" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityAddressStateOrProvince" format="ixt-sec:stateprovnameen"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Arizona</span></ix:nonNumeric></span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:bottom;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_4d7d0045-56c9-4e0c-8365-c6dc8d800afc" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityAddressPostalZipCode"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">85288</span></ix:nonNumeric></span></p></td>
   </tr>
   <tr style="height:7.0pt;">
    <td colspan="3" style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:7.5pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(Address of Principal Executive Offices)</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:7.5pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(Zip Code)</span></p></td>
   </tr>
  </table>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <table style="border-spacing:0;table-layout:fixed;width:100.0%;border-collapse:separate;">
   <tr style="visibility:collapse;">
    <td style="width:100.0%;"></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.125in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;margin-right:0.02986111111111111in;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Registrant&#x2019;s Telephone Number, Including Area Code:</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_48cb321f-9b94-4734-8da9-f8d28e490c7a" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:CityAreaCode"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(480)</span></ix:nonNumeric></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_d4c86130-aa3c-46da-9b4e-010fe47ed7ce" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:LocalPhoneNumber"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">967-5146</span></ix:nonNumeric></span></p></td>
   </tr>
  </table>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <table style="border-spacing:0;table-layout:fixed;width:100.0%;border-collapse:separate;">
   <tr style="visibility:collapse;">
    <td style="width:100.0%;"></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.125in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_04d88414-36a7-4597-9332-cdbb97ab332f" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityInformationFormerLegalOrRegisteredName"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Not Applicable</span></ix:nonNumeric></span></p></td>
   </tr>
  </table>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:7.5pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">(Former Name or Former Address, if Changed Since Last Report)</span></p>
  <p style="margin-left:40.0%;text-indent:0.0%;font-size:10.0pt;margin-top:9.35pt;font-family:Times New Roman;margin-bottom:0.0pt;border-bottom:0.75pt solid rgba(0,0,0,1);margin-right:40.0%;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:9.35pt;font-family:Times New Roman;margin-bottom:6.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:</span><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span></p>
  <div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:9.0pt;margin-bottom:0.0pt;text-align:justify;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10.0pt;font-family:Times New Roman;"><ix:nonNumeric id="F_8dedc321-32b5-4045-ab7b-788b632ca7fb" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:WrittenCommunications" format="ixt-sec:boolballotbox"><span style="font-size:10.0pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)</span></div>
  <div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:6.0pt;margin-bottom:0.0pt;text-align:justify;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10.0pt;font-family:Times New Roman;"><ix:nonNumeric id="F_b3950b40-f1a7-43db-a0c3-cf6f4be83269" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:SolicitingMaterial" format="ixt-sec:boolballotbox"><span style="font-size:10.0pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)</span></div>
  <div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:6.0pt;margin-bottom:0.0pt;text-align:justify;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10.0pt;font-family:Times New Roman;"><ix:nonNumeric id="F_855e5a6e-6737-4d93-97e0-0ef41a89ab62" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:PreCommencementTenderOffer" format="ixt-sec:boolballotbox"><span style="font-size:10.0pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))</span></div>
  <div style="text-indent:-24.5pt;padding-left:24.5pt;margin-top:6.0pt;margin-bottom:0.0pt;text-align:justify;"><span style="margin-right:1em;margin-right:1em;"><span style="font-size:10.0pt;font-family:Times New Roman;"><ix:nonNumeric id="F_a0c67df3-43cd-4f06-bf4e-4ed8dc07833f" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:PreCommencementIssuerTenderOffer" format="ixt-sec:boolballotbox"><span style="font-size:10.0pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))</span></div>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:9.0pt;font-family:Times New Roman;margin-bottom:9.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Securities registered pursuant to Section 12(b) of the Act:</span></p>
  <table style="border-spacing:0;table-layout:fixed;width:100.0%;border-collapse:separate;">
   <tr style="visibility:collapse;">
    <td style="width:38.0%;"></td>
    <td style="width:1.0%;"></td>
    <td style="width:15.0%;"></td>
    <td style="width:1.0%;"></td>
    <td style="width:45.0%;"></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:0.25pt solid;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"><br />Title of each class</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:0.25pt solid rgba(255,255,255,0.01);"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:0.25pt solid;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Trading<br />Symbol(s)</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:0.25pt solid rgba(255,255,255,0.01);"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:0.25pt solid;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"><br />Name of each exchange on which registered</span></p></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_410666be-cbd1-442a-b843-20d47e38ee4e" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:Security12bTitle"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Common Stock, par value $0.01 per share</span></ix:nonNumeric></span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_d7b773b2-6be2-491b-bc4d-5f611884b67b" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:TradingSymbol"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">ASYS</span></ix:nonNumeric></span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;text-align:left;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_1cb4a13d-5b94-46b2-a5f1-1abaf61ed589" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:SecurityExchangeName" format="ixt-sec:exchnameen"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Nasdaq Global Select Market</span></ix:nonNumeric></span></p></td>
   </tr>
  </table>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:12.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933 (&#167;&#x202f;230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (&#167;&#x202f;240.12b-2 of this chapter).</span><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:9.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Emerging growth company </span><span style="font-size:10.0pt;"><ix:nonNumeric id="F_fcc42846-e551-4684-927f-a61a0d86550d" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:EntityEmergingGrowthCompany" format="ixt-sec:boolballotbox"><span style="font-size:10.0pt;font-family:Times New Roman;">&#9744;</span></ix:nonNumeric></span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:9.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. </span><span style="font-size:10.0pt;font-family:Times New Roman;">&#9744;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;border-bottom:2.25pt double rgba(0,0,0,1);text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <hr style="page-break-after:always;" />
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:9.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Explanatory Note</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:3.6pt;font-family:Times New Roman;margin-bottom:3.6pt;text-align:justify;"><span style="font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;"><ix:nonNumeric id="F_e6f5443d-d9d2-41b2-ab46-1d2315d0dd69" contextRef="C_01e69024-6909-4bca-b0df-45207b056b13" name="dei:AmendmentDescription"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">This Current Report on Form 8-K/A (this &#x201c;Amendment&#x201d;) is being filed by Amtech Systems, Inc. (the &#x201c;Company&#x201d;) to amend the Current Report on Form 8-K filed by the Company on August 9, 2023 (the &#x201c;Original 8-K&#x201d;), solely to supplement the Company&#x2019;s disclosure under Item 5.02 of the Original 8-K to provide a description of the terms and conditions of the employment agreement of Robert C. Daigle, dated August 14, 2023 (the &#x201c;Employment Agreement&#x201d;), who succeeded Michael Whang as President and Chief Executive Officer, effective August 8, 2023. At the time of the filing of the Original 8-K, the terms of the Employment Agreement had yet to be definitively determined. This Amendment does not otherwise modify or update any other disclosures in the Original 8-K.<br /><br /></span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Item 5.02 Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.</span></ix:nonNumeric></span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">Appointment of New President and Chief Executive Officer</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">As previously disclosed in the Original 8-K, on August 8, 2023, the Board of Directors (the &#x201c;</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">Board</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#x201d;) of the Company approved the appointment of Robert C. Daigle to succeed Michael Whang as President and Chief Executive Officer of the Company effective August 8, 2023.</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Mr. Daigle, age 59, was originally appointed to the Board on August 12, 2021, and has served as the Company&#x2019;s Chairman of the Board since May 11, 2022. From March 2013 to December 2022, Mr. Daigle served as the Chief Technology Officer of Rogers Corporation (&#x201c;</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">Rogers</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#x201d;), a publicly traded global leader in engineered materials, including advanced electronic and elastomeric materials that are used in applications for EV/HEV, automotive safety and radar systems, mobile devices, renewable energy, wireless infrastructure, energy-efficient motor drives, and industrial equipment. Mr. Daigle previously served in a number of other senior executive roles during his 30-year tenure at Rogers. Mr. Daigle holds a B.S in Chemical Engineering and Materials Engineering from the University Connecticut and an M.B.A. from Rensselaer Polytechnic Institute. During his tenure at Rogers, Mr. Daigle built and led two major divisions of Rogers, including its global Power Electronic Solutions business with annual revenue in excess of $150 million and over 700 employees on three continents, and its global circuit materials business with annual revenue in excess of $100 million and 450 employees worldwide.</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Pursuant to his Employment Agreement, Mr. Daigle shall serve as President and Chief Executive Officer of the Company for a period of three (3) years (the &#x201c;</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">Term</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#x201d;).  Mr. Daigle will (i) receive an annual base salary of $450,000, (ii)  be eligible to participate in the Company&#x2019;s annual executive bonus program, (iii)  be granted an option to purchase 150,000 shares of common stock of the Company (the &#x201c;</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">Option Grant</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#x201d;) issued under the Company&#x2019;s 2022 Equity Incentive Plan (the &#x201c;</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">Equity Incentive Plan</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#x201d;), and (iv) on the Effective Date (as defined in the Employment Agreement) and each one-year anniversary thereafter, be granted restricted stock units with an aggregate fair market value equal to $500,000 as of the grant date (the &#x201c;</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">RSU Grant</span><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#x201d;). The Option Grant will vest ratably on each of the annual anniversaries over the Term, subject to Mr. Daigle&#x2019;s continued service with the Company; provided, however, that 50,000 shares of such Option Grant will vest immediately.  The RSU Grant will vest in full on the one-year anniversary of the grant date, subject to Mr. Daigle&#x2019;s continued service with the Company. Mr. Daigle will also receive medical and other benefits consistent with the Company&#x2019;s standard policies and be eligible to participate in other Company plans. Depending on the circumstances of termination, Mr. Daigle may be entitled to receive post-termination compensation from the Company.</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">During his employment with the Company, Mr. Daigle will no longer be compensated for his service as the Company&#x2019;s Chairman of the Board; provided, however, that any unvested equity awards previously issued to Mr. Daigle during his service as a Board member shall continue to vest based on Mr. Daigle&#x2019;s continued service as an employee or a member of the Board.</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">The foregoing is a summary of the material terms of Mr. Daigle&#x2019;s Employment Agreement and is qualified in its entirety by reference to the Employment Agreement, which will be filed as an exhibit to the Company&#x2019;s annual report on Form 10-K for the year ending September 30, 2023.</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">There are no family relationships, as defined in Item 401 of Regulation S-K, between Mr. Daigle and any director, executive officer or person nominated or chosen by the Company to become a director or executive officer. Additionally, there have been no transactions involving Mr. Daigle that would require disclosure under Item 404(a) of Regulation S-K.</span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;">Departure of Director</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;font-style:italic;min-width:fit-content;"> </span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">On August 16, 2023, Michael Whang notified the Company of his decision to resign as a member of the Board, effective immediately. Mr. Whang&#x2019;s resignation is not the result of any disagreement with the Company or the Board on any matter relating to the operations, policies or practices of the Company.</span><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">               </span></p>
  <p style="text-indent:4.533%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <hr style="page-break-after:always;" />
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Item 9.01 Financial Statements and Exhibits.</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">d)  Exhibits.</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span></p>
  <table style="margin-left:auto;border-spacing:0;table-layout:fixed;width:100.0%;border-collapse:separate;margin-right:auto;">
   <tr style="visibility:collapse;">
    <td style="width:10.0%;"></td>
    <td style="width:1.0%;"></td>
    <td style="width:89.0%;"></td>
   </tr>
   <tr style="height:1.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:1pt solid rgba(0,0,0,1);padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:8.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:8.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Exhibit No.</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:1pt solid rgba(255,255,255,0.01);padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:8.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:8.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:1pt solid rgba(0,0,0,1);padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:8.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:8.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Description</span></p></td>
   </tr>
   <tr>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:4.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:4.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:4.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:4.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:4.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:4.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
   </tr>
   <tr style="height:1.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;&#160;&#160;104</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;padding-right:0.01in;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Cover Page Interactive Data File (embedded within the Inline XBRL document)</span></p></td>
   </tr>
  </table>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <hr style="page-break-after:always;" />
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:9.35pt;text-align:center;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:bold;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">SIGNATURES</span></p>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:9.35pt;text-align:justify;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Pursuant to the requirements of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned thereunto duly authorized.</span></p>
  <table style="border-spacing:0;table-layout:fixed;width:100.0%;border-collapse:separate;">
   <tr style="visibility:collapse;">
    <td style="width:6.0%;"></td>
    <td style="width:44.0%;"></td>
    <td style="width:4.0%;"></td>
    <td style="width:46.0%;"></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:4.3pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">AMTECH SYSTEMS, INC.</span></p></td>
   </tr>
   <tr>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Date:</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">August 17, 2023</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">By:</span><span style="color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;"> </span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;border-bottom:0.25pt solid;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:4.3pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">/s/ Lisa D. Gibbs</span></p></td>
   </tr>
   <tr style="height:10.0pt;">
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p></td>
    <td style="background-color:rgba(0,0,0,0);padding-top:0.01in;word-break:break-word;white-space:pre-wrap;vertical-align:top;"><p style="text-indent:0.0pt;font-size:10.0pt;margin-top:0.7pt;font-family:Times New Roman;margin-bottom:9.35pt;text-align:left;"><span style="background-color:rgba(0,0,0,0);color:rgba(0,0,0,1);white-space:pre-wrap;font-weight:normal;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">Name:  Lisa D. Gibbs<br /><br />Title: Vice President and Chief Financial Officer</span></p></td>
   </tr>
  </table>
  <p style="text-indent:0.0%;font-size:10.0pt;margin-top:0.0pt;font-family:Times New Roman;margin-bottom:0.0pt;text-align:left;"><span style="white-space:pre-wrap;font-size:10.0pt;font-family:&quot;Times New Roman&quot;, serif;min-width:fit-content;">&#160;</span></p>
  <hr style="page-break-after:always;" />
 </body>
</html>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>2
<FILENAME>asys-20230808.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!-- DFIN New ActiveDisclosure (SM) XBRL Schema Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2023-08-17T16:35:40.7699+00:00 -->
<!-- Copyright (c) 2023 Donnelly Financial Solutions, Inc. All Rights Reserved. -->
<xsd:schema targetNamespace="http://amtechsystems.com/20230808" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:asys="http://amtechsystems.com/20230808" xmlns:enum2="http://xbrl.org/2020/extensible-enumerations-2.0" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:us-gaap="http://fasb.org/us-gaap/2023" xmlns:dei="http://xbrl.sec.gov/dei/2023" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xlink="http://www.w3.org/1999/xlink">
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/instance"/>
  <xsd:import schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" namespace="http://www.xbrl.org/2003/linkbase"/>
  <xsd:import schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" namespace="http://xbrl.org/2005/xbrldt"/>
  <xsd:import schemaLocation="https://xbrl.sec.gov/dei/2023/dei-2023.xsd" namespace="http://xbrl.sec.gov/dei/2023"/>
  <xsd:import schemaLocation="https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd" namespace="http://fasb.org/us-gaap/2023"/>
  <xsd:annotation>
    <xsd:appinfo>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20230808_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:title="Labels link" xlink:type="simple"/>
      <link:linkbaseRef xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:href="asys-20230808_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:title="Presentation link" xlink:type="simple"/>
      <link:roleType roleURI="http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation" id="Role_DocumentDocumentAndEntityInformation">
        <link:definition>100000 - Document - Document And Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
    </xsd:appinfo>
  </xsd:annotation>
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>3
<FILENAME>asys-20230808_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!-- DFIN New ActiveDisclosure (SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2023-08-17T16:35:40.7662+00:00 -->
<!-- Copyright (c) 2023 Donnelly Financial Solutions, Inc. All Rights Reserved. -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <link:labelLink xlink:role="http://www.xbrl.org/2003/role/link" xlink:title="labelLink" xlink:type="extended">
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AmendmentDescription" xlink:label="dei_AmendmentDescription"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentType" xlink:label="dei_DocumentType"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityInformationFormerLegalOrRegisteredName" xlink:label="dei_EntityInformationFormerLegalOrRegisteredName"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_PreCommencementIssuerTenderOffer" xlink:label="dei_PreCommencementIssuerTenderOffer"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_PreCommencementTenderOffer" xlink:label="dei_PreCommencementTenderOffer"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_SolicitingMaterial" xlink:label="dei_SolicitingMaterial"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_WrittenCommunications" xlink:label="dei_WrittenCommunications"/>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CoverAbstract_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Cover [Abstract]</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AmendmentDescription_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amendment Description</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_AmendmentFlag_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Amendment Flag</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_CityAreaCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">City Area Code</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentPeriodEndDate_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Period End Date</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_DocumentType_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Document Type</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressAddressLine1_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Address Line One</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressCityOrTown_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, City or Town</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressPostalZipCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, Postal Zip Code</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityAddressStateOrProvince_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Address, State or Province</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityCentralIndexKey_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Central Index Key</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Emerging Growth Company</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityFileNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Securities Act File Number</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Incorporation, State or Country Code</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityInformationFormerLegalOrRegisteredName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Information, Former Legal or Registered Name</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityRegistrantName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Registrant Name</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Entity Tax Identification Number</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_LocalPhoneNumber_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Local Phone Number</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_PreCommencementIssuerTenderOffer_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Pre-commencement Issuer Tender Offer</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_PreCommencementTenderOffer_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Pre-commencement Tender Offer</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_Security12bTitle_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Title of 12(b) Security</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SecurityExchangeName_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Security Exchange Name</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_SolicitingMaterial_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Soliciting Material</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_TradingSymbol_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Trading Symbol</link:label>
    <link:label xml:lang="en-US" xlink:type="resource" xlink:label="dei_WrittenCommunications_lbl" xlink:role="http://www.xbrl.org/2003/role/label">Written Communications</link:label>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentDescription" xlink:to="dei_AmendmentDescription_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInformationFormerLegalOrRegisteredName" xlink:to="dei_EntityInformationFormerLegalOrRegisteredName_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementIssuerTenderOffer" xlink:to="dei_PreCommencementIssuerTenderOffer_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementTenderOffer" xlink:to="dei_PreCommencementTenderOffer_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SolicitingMaterial" xlink:to="dei_SolicitingMaterial_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl"/>
    <link:labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_WrittenCommunications" xlink:to="dei_WrittenCommunications_lbl"/>
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>4
<FILENAME>asys-20230808_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII"?>
<!-- DFIN New ActiveDisclosure (SM) XBRL Linkbase Document - http://www.dfinsolutions.com/ -->
<!-- Creation Date :2023-08-17T16:35:40.7884+00:00 -->
<!-- Copyright (c) 2023 Donnelly Financial Solutions, Inc. All Rights Reserved. -->
<link:linkbase xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <link:roleRef roleURI="http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation" xlink:href="asys-20230808.xsd#Role_DocumentDocumentAndEntityInformation" xlink:type="simple"/>
  <link:presentationLink xlink:role="http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation" xlink:title="presentationLink" xlink:type="extended">
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AmendmentDescription" xlink:label="dei_AmendmentDescription"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_DocumentType" xlink:label="dei_DocumentType"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityInformationFormerLegalOrRegisteredName" xlink:label="dei_EntityInformationFormerLegalOrRegisteredName"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_PreCommencementIssuerTenderOffer" xlink:label="dei_PreCommencementIssuerTenderOffer"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_PreCommencementTenderOffer" xlink:label="dei_PreCommencementTenderOffer"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_SolicitingMaterial" xlink:label="dei_SolicitingMaterial"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol"/>
    <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2023/dei-2023.xsd#dei_WrittenCommunications" xlink:label="dei_WrittenCommunications"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentDescription" order="10450.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag" order="10010.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode" order="10130.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate" order="10020.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType" order="10000.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1" order="10090.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown" order="10100.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode" order="10120.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince" order="10110.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey" order="10040.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany" order="10050.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber" order="10060.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode" order="10070.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityInformationFormerLegalOrRegisteredName" order="10150.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName" order="10030.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber" order="10080.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber" order="10140.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementIssuerTenderOffer" order="10190.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_PreCommencementTenderOffer" order="10180.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle" order="10210.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName" order="10340.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SolicitingMaterial" order="10170.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol" order="10220.0" priority="2" use="optional"/>
    <link:presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_WrittenCommunications" order="10160.0" priority="2" use="optional"/>
  </link:presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>5
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.23.2</span><table class="report" border="0" cellspacing="2" id="idm139807900883904">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Document And Entity Information<br></strong></div></th>
<th class="th"><div>Aug. 08, 2023</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Cover [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">8-K/A<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">true<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Aug.  08,  2023<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">AMTECH SYSTEMS INC<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0000720500<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Securities Act File Number</a></td>
<td class="text">000-11412<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">AZ<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">86-0411215<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">131 S. Clark Drive<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Tempe<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">AZ<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">85288<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">(480)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">967-5146<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityInformationFormerLegalOrRegisteredName', window );">Entity Information, Former Legal or Registered Name</a></td>
<td class="text">Not Applicable<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_WrittenCommunications', window );">Written Communications</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SolicitingMaterial', window );">Soliciting Material</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_PreCommencementTenderOffer', window );">Pre-commencement Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_PreCommencementIssuerTenderOffer', window );">Pre-commencement Issuer Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common Stock, par value $0.01 per share<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">ASYS<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NASDAQ<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AmendmentDescription', window );">Amendment Description</a></td>
<td class="text">This Current Report on Form 8-K/A (this &#8220;Amendment&#8221;) is being filed by Amtech Systems, Inc. (the &#8220;Company&#8221;) to amend the Current Report on Form 8-K filed by the Company on August 9, 2023 (the &#8220;Original 8-K&#8221;), solely to supplement the Company&#8217;s disclosure under Item 5.02 of the Original 8-K to provide a description of the terms and conditions of the employment agreement of Robert C. Daigle, dated August 14, 2023 (the &#8220;Employment Agreement&#8221;), who succeeded Michael Whang as President and Chief Executive Officer, effective August 8, 2023. At the time of the filing of the Original 8-K, the terms of the Employment Agreement had yet to be definitively determined. This Amendment does not otherwise modify or update any other disclosures in the Original 8-K.Item 5.02 Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentDescription">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Description of changes contained within amended document.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentDescription</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityInformationFormerLegalOrRegisteredName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Former Legal or Registered Name of an entity</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityInformationFormerLegalOrRegisteredName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementIssuerTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 13e<br> -Subsection 4c<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementIssuerTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 14d<br> -Subsection 2b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SolicitingMaterial">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Section 14a<br> -Number 240<br> -Subsection 12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SolicitingMaterial</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_WrittenCommunications">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 425<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_WrittenCommunications</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>6
<FILENAME>asys-20230808_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:dei="http://xbrl.sec.gov/dei/2023"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:xlink="http://www.w3.org/1999/xlink">
    <link:schemaRef xlink:href="asys-20230808.xsd" xlink:type="simple"/>
    <context id="C_01e69024-6909-4bca-b0df-45207b056b13">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0000720500</identifier>
        </entity>
        <period>
            <startDate>2023-08-08</startDate>
            <endDate>2023-08-08</endDate>
        </period>
    </context>
    <dei:EntityCentralIndexKey
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_9fd73ad9-011a-4a90-99ff-13f52d5baa40">0000720500</dei:EntityCentralIndexKey>
    <dei:AmendmentFlag
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_42609d20-bb3e-4c0a-a347-4d4d259519b3">true</dei:AmendmentFlag>
    <dei:EntityRegistrantName
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_c350a3bb-c74b-418e-8b25-d1240bbe77f7">AMTECH SYSTEMS INC</dei:EntityRegistrantName>
    <dei:DocumentType
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_6631f300-6cfb-4ece-a9b2-c6a4456d34c4">8-K/A</dei:DocumentType>
    <dei:DocumentPeriodEndDate
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_18459e74-e3e7-409a-8c8b-0c8d0d57b2a4">2023-08-08</dei:DocumentPeriodEndDate>
    <dei:EntityIncorporationStateCountryCode
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_38d6c798-3368-43da-ba39-f4d71706e5a5">AZ</dei:EntityIncorporationStateCountryCode>
    <dei:EntityFileNumber
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_5ba86122-75aa-4954-bcb9-b20a4b4c1b7c">000-11412</dei:EntityFileNumber>
    <dei:EntityTaxIdentificationNumber
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_09c0a7d0-f7f2-45b9-a132-4dc162578fd1">86-0411215</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_cbad895a-8335-4c16-ab55-656b8f4d1b03">131 S. Clark Drive</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_4074ff05-9745-494d-b169-4bdc7db52439">Tempe</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_d4152edb-24fe-44db-a3be-ca232666935f">AZ</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_4d7d0045-56c9-4e0c-8365-c6dc8d800afc">85288</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_48cb321f-9b94-4734-8da9-f8d28e490c7a">(480)</dei:CityAreaCode>
    <dei:LocalPhoneNumber
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_d4c86130-aa3c-46da-9b4e-010fe47ed7ce">967-5146</dei:LocalPhoneNumber>
    <dei:EntityInformationFormerLegalOrRegisteredName
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_04d88414-36a7-4597-9332-cdbb97ab332f">Not Applicable</dei:EntityInformationFormerLegalOrRegisteredName>
    <dei:WrittenCommunications
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_8dedc321-32b5-4045-ab7b-788b632ca7fb">false</dei:WrittenCommunications>
    <dei:SolicitingMaterial
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_b3950b40-f1a7-43db-a0c3-cf6f4be83269">false</dei:SolicitingMaterial>
    <dei:PreCommencementTenderOffer
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_855e5a6e-6737-4d93-97e0-0ef41a89ab62">false</dei:PreCommencementTenderOffer>
    <dei:PreCommencementIssuerTenderOffer
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_a0c67df3-43cd-4f06-bf4e-4ed8dc07833f">false</dei:PreCommencementIssuerTenderOffer>
    <dei:Security12bTitle
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_410666be-cbd1-442a-b843-20d47e38ee4e">Common Stock, par value $0.01 per share</dei:Security12bTitle>
    <dei:TradingSymbol
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_d7b773b2-6be2-491b-bc4d-5f611884b67b">ASYS</dei:TradingSymbol>
    <dei:SecurityExchangeName
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_1cb4a13d-5b94-46b2-a5f1-1abaf61ed589">NASDAQ</dei:SecurityExchangeName>
    <dei:EntityEmergingGrowthCompany
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_fcc42846-e551-4684-927f-a61a0d86550d">false</dei:EntityEmergingGrowthCompany>
    <dei:AmendmentDescription
      contextRef="C_01e69024-6909-4bca-b0df-45207b056b13"
      id="F_e6f5443d-d9d2-41b2-ab46-1d2315d0dd69">This Current Report on Form 8-K/A (this &#x201c;Amendment&#x201d;) is being filed by Amtech Systems, Inc. (the &#x201c;Company&#x201d;) to amend the Current Report on Form 8-K filed by the Company on August 9, 2023 (the &#x201c;Original 8-K&#x201d;), solely to supplement the Company&#x2019;s disclosure under Item 5.02 of the Original 8-K to provide a description of the terms and conditions of the employment agreement of Robert C. Daigle, dated August 14, 2023 (the &#x201c;Employment Agreement&#x201d;), who succeeded Michael Whang as President and Chief Executive Officer, effective August 8, 2023. At the time of the filing of the Original 8-K, the terms of the Employment Agreement had yet to be definitively determined. This Amendment does not otherwise modify or update any other disclosures in the Original 8-K.Item 5.02 Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.</dei:AmendmentDescription>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>7
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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M=]W3CHG&K=!X#;[Q3X?#KHG&J]!TZVDF)_VN:Z3I%FA"1N/K>A(5M>5 TR
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M!Z.:60F]A%9JGZJ'-#ZH'C(*!?&Y'C[E>G@*-Y;&O%"N@GL!_]':-\*K^(+
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MU4#E/]O4#6CV#30<D05>,9FV-J/D3@H\W/[O#;#"Q([A[8N_ 5!+ P04
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M"H[<8R6,<6*T_C6"R0_L?@!02P,$%     @ KH015SJJHN=  0  / (   \
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M 0  &@   'AL+U]R96QS+W=O<FMB;V]K+GAM;"YR96QSM9$]#H,P#(6O$N4
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M4')O<',O87!P+GAM;%!+ 0(4 Q0    ( *Z$$5>C*QW^[P   "L"   1
M          "  :\   !D;V-0<F]P<R]C;W)E+GAM;%!+ 0(4 Q0    ( *Z$
M$5>97)PC$ 8  )PG   3              "  <T!  !X;"]T:&5M92]T:&5M
M93$N>&UL4$L! A0#%     @ KH015XI2-GQ0!@  J14  !@
M ("!#@@  'AL+W=O<FMS:&5E=',O<VAE970Q+GAM;%!+ 0(4 Q0    ( *Z$
M$5>?H!OPL0(  .(,   -              "  90.  !X;"]S='EL97,N>&UL
M4$L! A0#%     @ KH015Y>*NQS     $P(   L              ( !<!$
M %]R96QS+RYR96QS4$L! A0#%     @ KH015SJJHN=  0  / (   \
M         ( !61(  'AL+W=O<FMB;V]K+GAM;%!+ 0(4 Q0    ( *Z$$5<D
M'INBK0   /@!   :              "  <83  !X;"]?<F5L<R]W;W)K8F]O
M:RYX;6PN<F5L<U!+ 0(4 Q0    ( *Z$$5=ED'F2&0$  ,\#   3
M      "  :L4  !;0V]N=&5N=%]4>7!E<UTN>&UL4$L%!@     )  D /@(
' /45      $!

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>8
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>9
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>10
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.23.2</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>1</ContextCount>
  <ElementCount>24</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>0</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>0</UnitCount>
  <MyReports>
    <Report instance="asys-20230808.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>100000 - Document - Document And Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation</Role>
      <ShortName>Document And Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File doctype="8-K/A" original="asys-20230808.htm">asys-20230808.htm</File>
    <File>asys-20230808.xsd</File>
    <File>asys-20230808_lab.xml</File>
    <File>asys-20230808_pre.xml</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies>
    <BaseTaxonomy items="24">http://xbrl.sec.gov/dei/2023</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>false</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>13
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "instance": {
  "asys-20230808.htm": {
   "axisCustom": 0,
   "axisStandard": 0,
   "baseTaxonomies": {
    "http://xbrl.sec.gov/dei/2023": 24
   },
   "contextCount": 1,
   "dts": {
    "inline": {
     "local": [
      "asys-20230808.htm"
     ]
    },
    "labelLink": {
     "local": [
      "asys-20230808_lab.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "asys-20230808_pre.xml"
     ]
    },
    "schema": {
     "local": [
      "asys-20230808.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd",
      "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd",
      "https://www.xbrl.org/dtr/type/2022-03-31/types.xsd",
      "https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd",
      "https://xbrl.fasb.org/srt/2023/elts/srt-roles-2023.xsd",
      "https://xbrl.fasb.org/srt/2023/elts/srt-types-2023.xsd",
      "https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd",
      "https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd",
      "https://xbrl.fasb.org/us-gaap/2023/elts/us-types-2023.xsd",
      "https://xbrl.sec.gov/country/2023/country-2023.xsd",
      "https://xbrl.sec.gov/dei/2023/dei-2023.xsd"
     ]
    }
   },
   "elementCount": 25,
   "entityCount": 1,
   "hidden": {
    "http://xbrl.sec.gov/dei/2023": 3,
    "total": 3
   },
   "keyCustom": 0,
   "keyStandard": 24,
   "memberCustom": 0,
   "memberStandard": 0,
   "nsprefix": "asys",
   "nsuri": "http://amtechsystems.com/20230808",
   "report": {
    "R1": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "p",
       "body",
       "html"
      ],
      "baseRef": "asys-20230808.htm",
      "contextRef": "C_01e69024-6909-4bca-b0df-45207b056b13",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "document",
     "isDefault": "true",
     "longName": "100000 - Document - Document And Entity Information",
     "menuCat": "Cover",
     "order": "1",
     "role": "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation",
     "shortName": "Document And Entity Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "p",
       "body",
       "html"
      ],
      "baseRef": "asys-20230808.htm",
      "contextRef": "C_01e69024-6909-4bca-b0df-45207b056b13",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    }
   },
   "segmentCount": 0,
   "tag": {
    "dei_AmendmentDescription": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Description of changes contained within amended document.",
        "label": "Amendment Description"
       }
      }
     },
     "localname": "AmendmentDescription",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "stringItemType"
    },
    "dei_AmendmentFlag": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.",
        "label": "Amendment Flag"
       }
      }
     },
     "localname": "AmendmentFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_CityAreaCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Area code of city",
        "label": "City Area Code"
       }
      }
     },
     "localname": "CityAreaCode",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CoverAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cover page.",
        "label": "Cover [Abstract]"
       }
      }
     },
     "localname": "CoverAbstract",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "xbrltype": "stringItemType"
    },
    "dei_DocumentPeriodEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.",
        "label": "Document Period End Date"
       }
      }
     },
     "localname": "DocumentPeriodEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentType": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.",
        "label": "Document Type"
       }
      }
     },
     "localname": "DocumentType",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "submissionTypeItemType"
    },
    "dei_EntityAddressAddressLine1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name",
        "label": "Entity Address, Address Line One"
       }
      }
     },
     "localname": "EntityAddressAddressLine1",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCityOrTown": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the City or Town",
        "label": "Entity Address, City or Town"
       }
      }
     },
     "localname": "EntityAddressCityOrTown",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressPostalZipCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Code for the postal or zip code",
        "label": "Entity Address, Postal Zip Code"
       }
      }
     },
     "localname": "EntityAddressPostalZipCode",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressStateOrProvince": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the state or province.",
        "label": "Entity Address, State or Province"
       }
      }
     },
     "localname": "EntityAddressStateOrProvince",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "stateOrProvinceItemType"
    },
    "dei_EntityCentralIndexKey": {
     "auth_ref": [
      "r1"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.",
        "label": "Entity Central Index Key"
       }
      }
     },
     "localname": "EntityCentralIndexKey",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "centralIndexKeyItemType"
    },
    "dei_EntityEmergingGrowthCompany": {
     "auth_ref": [
      "r1"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate if registrant meets the emerging growth company criteria.",
        "label": "Entity Emerging Growth Company"
       }
      }
     },
     "localname": "EntityEmergingGrowthCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityFileNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.",
        "label": "Securities Act File Number"
       }
      }
     },
     "localname": "EntityFileNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "fileNumberItemType"
    },
    "dei_EntityIncorporationStateCountryCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Two-character EDGAR code representing the state or country of incorporation.",
        "label": "Entity Incorporation, State or Country Code"
       }
      }
     },
     "localname": "EntityIncorporationStateCountryCode",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarStateCountryItemType"
    },
    "dei_EntityInformationFormerLegalOrRegisteredName": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Former Legal or Registered Name of an entity",
        "label": "Entity Information, Former Legal or Registered Name"
       }
      }
     },
     "localname": "EntityInformationFormerLegalOrRegisteredName",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityRegistrantName": {
     "auth_ref": [
      "r1"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.",
        "label": "Entity Registrant Name"
       }
      }
     },
     "localname": "EntityRegistrantName",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityTaxIdentificationNumber": {
     "auth_ref": [
      "r1"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.",
        "label": "Entity Tax Identification Number"
       }
      }
     },
     "localname": "EntityTaxIdentificationNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "employerIdItemType"
    },
    "dei_LocalPhoneNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Local phone number for entity.",
        "label": "Local Phone Number"
       }
      }
     },
     "localname": "LocalPhoneNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_PreCommencementIssuerTenderOffer": {
     "auth_ref": [
      "r3"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.",
        "label": "Pre-commencement Issuer Tender Offer"
       }
      }
     },
     "localname": "PreCommencementIssuerTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_PreCommencementTenderOffer": {
     "auth_ref": [
      "r4"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.",
        "label": "Pre-commencement Tender Offer"
       }
      }
     },
     "localname": "PreCommencementTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_Security12bTitle": {
     "auth_ref": [
      "r0"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Title of a 12(b) registered security.",
        "label": "Title of 12(b) Security"
       }
      }
     },
     "localname": "Security12bTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_SecurityExchangeName": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the Exchange on which a security is registered.",
        "label": "Security Exchange Name"
       }
      }
     },
     "localname": "SecurityExchangeName",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarExchangeCodeItemType"
    },
    "dei_SolicitingMaterial": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.",
        "label": "Soliciting Material"
       }
      }
     },
     "localname": "SolicitingMaterial",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_TradingSymbol": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Trading symbol of an instrument as listed on an exchange.",
        "label": "Trading Symbol"
       }
      }
     },
     "localname": "TradingSymbol",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "tradingSymbolItemType"
    },
    "dei_WrittenCommunications": {
     "auth_ref": [
      "r6"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.",
        "label": "Written Communications"
       }
      }
     },
     "localname": "WrittenCommunications",
     "nsuri": "http://xbrl.sec.gov/dei/2023",
     "presentation": [
      "http://amtechsystems.com/20230808/taxonomy/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    }
   },
   "unitCount": 0
  }
 },
 "std_ref": {
  "r0": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r1": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-2",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r2": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "d1-1",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r3": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13e",
   "Subsection": "4c",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r4": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14d",
   "Subsection": "2b",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r5": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14a",
   "Subsection": "12",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r6": {
   "Name": "Securities Act",
   "Number": "230",
   "Publisher": "SEC",
   "Section": "425",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  }
 },
 "version": "2.2"
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>14
<FILENAME>0000950170-23-043246-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0000950170-23-043246-xbrl.zip
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MX"K+A"+2O$U4#V1I\5 $6^P52>BDT<.W3]^OCZ(S./A'I^O_ 5!+ P04
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M2P$"% ,4    " "NA!%7,MWS,!<;  !S"@$ $0              @ $
M87-Y<RTR,#(S,#@P."YH=&U02P$"% ,4    " "NA!%7N:3?C!(#  "G"0
M$0              @ %&&P  87-Y<RTR,#(S,#@P."YX<V102P$"% ,4
M" "NA!%7H[M+X_L%  "G-@  %0              @ &''@  87-Y<RTR,#(S
M,#@P.%]L86(N>&UL4$L! A0#%     @ KH015_VL!W/ !   )"@  !4
M         ( !M20  &%S>7,M,C R,S X,#A?<')E+GAM;%!+!08     !  $
+  0!  "H*0     !

end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
