    <SEC-DOCUMENT>0000950170-24-007034-index.html : 20240124
    <SEC-HEADER>0000950170-24-007034.hdr.sgml : 20240124
    <ACCEPTANCE-DATETIME>20240124170221
    ACCESSION NUMBER:		0000950170-24-007034
    CONFORMED SUBMISSION TYPE:	ARS
    PUBLIC DOCUMENT COUNT:		1
    CONFORMED PERIOD OF REPORT:	20230930
    FILED AS OF DATE:		20240124
    DATE AS OF CHANGE:		20240124
    EFFECTIVENESS DATE:		20240124

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
    		CENTRAL INDEX KEY:			0000720500
    		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
    		ORGANIZATION NAME:           	06 Technology
    		IRS NUMBER:				860411215
    		STATE OF INCORPORATION:			AZ
    		FISCAL YEAR END:			0930

    	FILING VALUES:
    		FORM TYPE:		ARS
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-11412
    		FILM NUMBER:		24557344

    	BUSINESS ADDRESS:
    		STREET 1:		131 SOUTH CLARK DRIVE
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85288
    		BUSINESS PHONE:		4809675146

    	MAIL ADDRESS:
    		STREET 1:		131 SOUTH CLARK DRIVE
    		CITY:			TEMPE
    		STATE:			AZ
    		ZIP:			85288

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
    		DATE OF NAME CHANGE:	19870715
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>ARS
    <SEQUENCE>1
    <FILENAME>asys_ars_2024.pdf
    <DESCRIPTION>ARS
    <TEXT>
    Document 1 - file: asys_ars_2024.pdf

    </DOCUMENT>
    </SEC-DOCUMENT>