# Filing Detail

Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-24-135825
Filing Date
2024-12-12
Accepted
2024-12-12 16:33:07
Documents
131
Period of Report
2024-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K | asys-20240930.htm iXBRL | 10-K | 4173437
2 | EX-4.1 | asys-ex4_1.htm | EX-4.1 | 55342
3 | EX-10.5 | asys-ex10_5.htm | EX-10.5 | 30324
4 | EX-10.6 | asys-ex10_6.htm | EX-10.6 | 31445
5 | EX-21.1 | asys-ex21_1.htm | EX-21.1 | 25654
6 | EX-23.1 | asys-ex23_1.htm | EX-23.1 | 5680
7 | EX-23.2 | asys-ex23_2.htm | EX-23.2 | 5079
8 | EX-24 | asys-ex24.htm | EX-24 | 28860
9 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 15616
10 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 15603
11 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 9169
12 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 10025
13 | GRAPHIC | img251409671_0.jpg | GRAPHIC | 67180
| Complete submission text file | 0000950170-24-135825.txt |  | 17687575

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
14 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | asys-20240930.xsd | EX-101.SCH | 1953856
134 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20240930_htm.xml | XML | 3789516

Mailing Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288
Business Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-K | Act: 34 | File No.: 000-11412 | Film No.: 241545333
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)