EX-21.1 5 asys-ex21_1.htm EX-21.1

Exhibit 21.1

AMTECH SYSTEMS, INC. AND ITS SUBSIDIARIES

SUBSIDIARIES OF THE REGISTRANT

Name |  | Jurisdiction in which incorporated
Advanced Compound Materials, Inc. |  | State of Delaware
Bruce Technologies, Inc. |  | State of Massachusetts
BTU Europe Ltd. |  | United Kingdom
BTU International, Inc. |  | State of Delaware
BTU Ltd. (Shanghai) |  | China
BTU Overseas, Ltd. |  | State of Delaware
BTU Overseas (Shanghai) Co., Ltd. |  | China
Entrepix, Inc. |  | State of Arizona
Entrepix Asia Ptd., Ltd. |  | Singapore
Entrepix International, Inc. |  | State of Arizona
Intersurface Dynamics, Inc. |  | State of Connecticut
P.R. Hoffman Machine Products, Inc. |  | State of Arizona