# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-24-013277
Filing Date
2024-02-09
Accepted
2024-02-09 16:18:46
Documents
83
Period of Report
2023-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20231231.htm iXBRL | 10-Q | 1691330
2 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 17020
3 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 16256
4 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 10441
5 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 10422
6 | GRAPHIC | img250509215_0.jpg | GRAPHIC | 45889
| Complete submission text file | 0000950170-24-013277.txt |  | 8917590

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | asys-20231231.xsd | EX-101.SCH | 1307843
85 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20231231_htm.xml | XML | 1711761

Mailing Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288
Business Address 131 SOUTH CLARK DRIVE TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 24615243
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)