# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-24-055725
Filing Date
2024-05-08
Accepted
2024-05-08 16:21:34
Documents
82
Period of Report
2024-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20240331.htm iXBRL | 10-Q | 2034809
2 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 17146
3 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 16382
4 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 10568
5 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 10549
6 | GRAPHIC | img251403906_0.jpg | GRAPHIC | 67180
| Complete submission text file | 0000950170-24-055725.txt |  | 9724178

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | asys-20240331.xsd | EX-101.SCH | 1316497
86 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20240331_htm.xml | XML | 1905208

Mailing Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288
Business Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 24926524
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)