# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-25-014465
Filing Date
2025-02-05
Accepted
2025-02-05 16:08:59
Documents
77
Period of Report
2024-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20241231.htm iXBRL | 10-Q | 1833957
2 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 19627
3 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 18704
4 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 12137
5 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 12118
6 | GRAPHIC | img251432736_0.jpg | GRAPHIC | 67180
| Complete submission text file | 0000950170-25-014465.txt |  | 8989441

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | asys-20241231.xsd | EX-101.SCH | 1300458
80 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20241231_htm.xml | XML | 1689768

Mailing Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288
Business Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 25593323
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)