<SEC-DOCUMENT>0000950170-25-041938-index.html : 20250319
<SEC-HEADER>0000950170-25-041938.hdr.sgml : 20250319
<ACCEPTANCE-DATETIME>20250319144834
ACCESSION NUMBER:		0000950170-25-041938
CONFORMED SUBMISSION TYPE:	S-8
PUBLIC DOCUMENT COUNT:		7
FILED AS OF DATE:		20250319
DATE AS OF CHANGE:		20250319
EFFECTIVENESS DATE:		20250319

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		S-8
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-285905
		FILM NUMBER:		25752187

	BUSINESS ADDRESS:	
		STREET 1:		58 S RIVER DRIVE SUITE 370
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		58 S RIVER DRIVE SUITE 370
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8
<SEQUENCE>1
<FILENAME>s8_equity_plan_amendment.htm
<DESCRIPTION>S-8
<TEXT>
Document 1 - file: s8_equity_plan_amendment.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>2
<FILENAME>asys-ex5_1.htm
<DESCRIPTION>EX-5.1
<TEXT>
Document 2 - file: asys-ex5_1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>3
<FILENAME>asys-ex23_1.htm
<DESCRIPTION>EX-23.1
<TEXT>
Document 3 - file: asys-ex23_1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.2
<SEQUENCE>4
<FILENAME>asys-ex99_2.htm
<DESCRIPTION>EX-99.2
<TEXT>
Document 4 - file: asys-ex99_2.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-FILING FEES
<SEQUENCE>5
<FILENAME>asys-exfiling_fees.htm
<DESCRIPTION>EX-FILING FEES
<TEXT>
Document 5 - file: asys-exfiling_fees.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>img159332730_0.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: img159332730_0.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>img161358662_0.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: img161358662_0.jpg

</DOCUMENT>
</SEC-DOCUMENT>