<SEC-DOCUMENT>0000950170-25-041938.txt : 20250319
<SEC-HEADER>0000950170-25-041938.hdr.sgml : 20250319
<ACCEPTANCE-DATETIME>20250319144834
ACCESSION NUMBER:		0000950170-25-041938
CONFORMED SUBMISSION TYPE:	S-8
PUBLIC DOCUMENT COUNT:		7
FILED AS OF DATE:		20250319
DATE AS OF CHANGE:		20250319
EFFECTIVENESS DATE:		20250319

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		S-8
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-285905
		FILM NUMBER:		25752187

	BUSINESS ADDRESS:	
		STREET 1:		58 S RIVER DRIVE SUITE 370
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		58 S RIVER DRIVE SUITE 370
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-8
<SEQUENCE>1
<FILENAME>s8_equity_plan_amendment.htm
<DESCRIPTION>S-8
<TEXT>
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  <title>S-8</title>
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  <div style="padding-top:0.5in;z-index:-3;min-height:0.75in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">As filed with the Securities and Exchange Commission on March 19, 2025</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Registration No. 333-</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="border-top:4.5pt double;padding-top:1pt;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">UNITED STATES</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">SECURITIES AND EXCHANGE COMMISSION</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Washington, D.C. 20549</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:14pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">FORM S-8</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:3pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">REGISTRATION STATEMENT</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">UNDER</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">THE SECURITIES ACT OF 1933</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:3pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:3pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:18pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">AMTECH SYSTEMS, INC.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(Exact name of registrant as specified in its charter)</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">       </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"><br> </font></p>
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    <td style="width:27.34%;box-sizing:content-box;"></td>
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   <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;border-bottom:0.5pt solid;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Arizona</font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;border-bottom:0.5pt solid #ffffff;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;border-bottom:0.5pt solid;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">86-0411215</font></p></td>
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   <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">(State or other jurisdiction of</font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">(I.R.S. Employer</font></p></td>
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   <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">incorporation or organization)</font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Identification No.)</font></p></td>
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    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
   </tr>
   <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;border-bottom:0.5pt solid;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">58 South River Drive Suite 370, Tempe, Arizona</font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;border-bottom:0.5pt solid #ffffff;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;border-bottom:0.5pt solid;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">85288</font></p></td>
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   <tr style="height:10pt;word-break:break-word;white-space:pre-wrap;text-align:left;">
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">(Address of principal executive offices)</font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;vertical-align:middle;padding-bottom:0in;padding-right:0.01in;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">(Zip Code)</font></p></td>
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  </table>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Amtech Systems, Inc. 2022 Equity Incentive Plan, as amended</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(Full title of the plan)</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:5pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:5pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Wade M. Jenke</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Chief Financial Officer</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">58 South River Drive, Suite 370</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Tempe, Arizona</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">85281</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(480) 967-5146</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(Name, address and telephone number, including area code, of agent for service)</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">With a copy to:</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:5pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Gregory R. Hall</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">DLA Piper LLP (US)</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">2525 E. Camelback Road, Suite 1000</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Phoenix, Arizona 85016-4232</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Tel: (480) 606-5116</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Fax: (480) 606-5516</font><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, a smaller reporting company, or an emerging growth company. See the definitions of &#x201c;large accelerated filer,&#x201d; &#x201c;accelerated filer,&#x201d; &#x201c;smaller reporting company,&#x201d; and &#x201c;emerging growth company&#x201d; in Rule 12b-2 of the Exchange Act.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <table style="margin-left:auto;border-spacing:0;table-layout:auto;width:80.0%;border-collapse:separate;margin-right:auto;">
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    <td style="width:47.5%;box-sizing:content-box;"></td>
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    <td style="padding-top:0in;vertical-align:middle;padding-bottom:0in;"><p style="font-size:9pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Large accelerated filer   </font><font style="color:#000000;white-space:pre-wrap;font-family:'Segoe UI Symbol',sans-serif;font-kerning:none;min-width:fit-content;">&#9744;</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">  </font></p></td>
    <td style="padding-top:0in;text-indent:67.3pt;vertical-align:middle;padding-bottom:0in;"><p style="margin-left:12.467%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-kerning:none;min-width:fit-content;">Accelerated filer   </font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">		</font><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:'Segoe UI Symbol',sans-serif;font-kerning:none;min-width:fit-content;">&#9746;</font><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-kerning:none;min-width:fit-content;"> </font></p></td>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;"><p style="font-size:9pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Non-accelerated filer     </font><font style="color:#000000;white-space:pre-wrap;font-family:'Segoe UI Symbol',sans-serif;font-kerning:none;min-width:fit-content;">&#9744;</font></p></td>
    <td style="padding-top:0in;text-indent:67.3pt;vertical-align:middle;padding-bottom:0in;"><p style="margin-left:12.467%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-kerning:none;min-width:fit-content;">Smaller reporting company  </font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">	</font><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:'Segoe UI Symbol',sans-serif;font-kerning:none;min-width:fit-content;">&#9746;</font></p><p style="margin-left:12.467%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-kerning:none;min-width:fit-content;">Emerging growth company  </font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">	</font><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:'Segoe UI Symbol',sans-serif;font-kerning:none;min-width:fit-content;">&#9744;</font></p><p style="margin-left:12.467%;text-indent:0;font-size:9pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">If an emerging growth company, indicate by check mark if the registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 7(a)(2)(B) of the Securities Act.</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">  </font><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:'Segoe UI Symbol',sans-serif;font-kerning:none;min-width:fit-content;">&#9744;</font></p>
  <div class="page-border-spacing"><div style="z-index:-3;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:0.75in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div></div>
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  <div style="padding-top:0.5in;z-index:-3;min-height:0.75in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">REGISTRATION OF ADDITIONAL SECURITIES PURSUANT TO</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">GENERAL INSTRUCTION E OF FORM S-8</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">EXPLANITORY NOTE</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pursuant to General Instruction E of Form S-8, Amtech Systems, Inc. (the &#x201c;Registrant&#x201d;) is filing this Registration Statement on Form S-8 with the Securities and Exchange Commission (the &#x201c;SEC&#x201d;) for the purpose of registering 1,000,000 additional shares of common stock, par value $0.01 per share (the &#x201c;Common Stock&#x201d;) under the Registrant&#x2019;s 2022 Equity Incentive Plan (the &#x201c;Incentive Plan&#x201d;), pursuant to an amendment of the Incentive Plan. First Amendment to the Incentive Plan (attached hereto as Exhibit 99.2), which increased the number of shares of common stock available for issuance under the Incentive Plan by 1,000,000 shares from 1,000,000 shares to 2,000,000 shares, was approved by the board of directors of the Registrant on January 13, 2025, and by the shareholders at the Registrant&#x2019;s Annual Meeting held on March 5, 2025. In accordance with the instructional note to Part I of S-8 as promulgated by the SEC, the information specified by Part I of the Form S-8 has been omitted from this Registration Statement.</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The Registrant previously registered shares of its Common Stock for issuance under the Incentive Plan on a Registration Statement on Form S-8 filed with the SEC on </font><a href="https://www.sec.gov/Archives/edgar/data/720500/000156459022011838/asys-s8.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">March 25, 2022</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> (File No. 333-263875) (the &#x201c;Prior Registration Statement&#x201d;). Pursuant to General Instruction E to Form S-8, this Registration Statement hereby incorporates by reference the contents of the Prior Registration Statement.</font></p>
  <p style="font-size:10pt;margin-top:12pt;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">PART II</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="text-transform:uppercase;color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Information Required in the Registration Statement</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Item 3.	Incorporation of Documents by Reference.</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:12pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Except to the extent that information is deemed furnished and not filed pursuant to securities laws and regulations, the Registrant hereby incorporates by reference into this Registration Statement the following documents:</font></p>
  <div class="item-list-element-wrapper" style="margin-left:3.333%;display:flex;margin-top:12pt;justify-content:flex-start;align-items:baseline;margin-bottom:0;min-width:3.333%;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:3.447919145106397%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">(a)</font><div style="width:100%;display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The Registrant&#x2019;s Annual Report on Form 10-K for the fiscal year ended September 30, 2024, filed with the SEC on </font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017024135825/asys-20240930.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">December 12, 2024</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">, which incorporates by reference certain portions of the Registrant&#x2019;s Definitive Proxy Statement for its 2025 Annual Meeting of Shareholders filed on </font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017025008792/asys_def_14a_2025_live.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">January 24, 2025</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">, as  supplemented by that certain Supplement No. 1 to Proxy Statement Relating to the 2025 Annual Meeting of Shareholders filed on </font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017025025653/asys_amendment_to_2025_p.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">February 24, 2025</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">;</font></div></div>
  <p style="margin-left:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <div class="item-list-element-wrapper" style="margin-left:3.333%;display:flex;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:0;min-width:3.333%;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:3.447919145106397%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">(b)</font><div style="width:100%;display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The Registrant&#x2019;s Quarterly Report on Form 10-Q for the quarter ended December 31, 2024, filed with the SEC on </font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017025014465/asys-20241231.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">February 5, 2025</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">;</font></div></div>
  <p style="margin-left:3.773%;text-indent:-3.1%;padding-left:2.893%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <div class="item-list-element-wrapper" style="margin-left:3.333%;display:flex;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:0;min-width:3.333%;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:3.447919145106397%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">(c)</font><div style="width:100%;display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The Registrant&#x2019;s Current Reports on Form 8-K filed with the SEC on</font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017024134499/asys-20241209.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> December 9, 2024</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">, </font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017025008328/asys-20250123.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">January 23, 2025</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">; </font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017025014472/asys-20250205.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">February 5, 2025</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">, and</font><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017025034957/asys-20250305.htm" style="-sec-extract:exhibit;"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> March 7, 2025</font></a><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">; and</font></div></div>
  <p style="margin-left:3.773%;text-indent:-3.1%;padding-left:2.893%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <div class="item-list-element-wrapper" style="margin-left:3.333%;display:flex;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:0;min-width:3.333%;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:3.447919145106397%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">(d)</font><div style="width:100%;display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The description of the Registrant&#x2019;s securities contained in the Registration Statement on Form 8&#x2011;A, filed with the SEC on December 15, 1994, including any amendments or reports filed for the purpose of updating such description (p).</font></div></div>
  <p style="margin-left:3.773%;text-indent:-3.1%;padding-left:2.893%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">All documents filed by the Registrant pursuant to Sections 13(a), 13(c), 14 or 15(d) of the Exchange Act of 1934, as amended, after the date of this Registration Statement and prior to the filing of a post-effective amendment that indicates that all securities offered hereby have been sold or which deregisters all securities then remaining unsold, are incorporated by reference in this Registration Statement and are a part hereof from the date of filing of such documents; except as to any portion of any future annual or quarterly report to shareholders or document or current report furnished under current Items 2.02 or 7.01 of Form 8-K that is not deemed filed under such provisions.</font></p>
  <div class="page-border-spacing"><div style="z-index:-3;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:0.75in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:6pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">1</font></p></div></div>
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  <div style="padding-top:0.5in;z-index:-3;min-height:0.75in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Any statement contained in a document incorporated or deemed to be incorporated by reference herein shall be deemed to be modified or superseded for purposes of this Registration Statement to the extent that a statement contained herein or in any other subsequently filed document which also is or is deemed to be incorporated by reference herein modifies or supersedes such statement. Any statement so modified or superseded shall not be deemed, except as so modified or superseded, to constitute a part of this Registration Statement.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Item 8.	Exhibits.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">The exhibits to this Registration Statement are listed below:</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
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    <td style="padding-top:0in;vertical-align:bottom;padding-bottom:0in;border-bottom:0.5pt solid;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Exhibit No.</font></p></td>
    <td style="padding-top:0in;vertical-align:bottom;padding-bottom:0in;border-bottom:0.5pt solid #ffffff03;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:bottom;padding-bottom:0in;border-bottom:0.5pt solid;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Exhibit Description</font></p></td>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
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   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;&#160;4.1</font></p></td>
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   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;&#160;4.2</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="https://www.sec.gov/ix?doc=/Archives/edgar/data/0000720500/000095017024135825/asys-20240930.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Amended and Restated Bylaws of Amtech Systems, Inc., dated as of September 23, 2020</font></a><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;(Incorporated herein by reference to Exhibit 3.1 to the Registrant&#x2019;s Current Report on Form 8-K, filed with the SEC on September 15, 2020).</font></p></td>
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   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
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   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;&#160;4.3</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="https://www.sec.gov/Archives/edgar/data/720500/000095017021004811/asys-ex3_1.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">First Amendment to Amended and Restated and Restated Bylaws</font></a><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;(Incorporated herein by reference to Exhibit 3.1 to the Registrant&#x2019;s Current Report on Form 8-K, filed with the SEC on November 19, 2021).</font></p></td>
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   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
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   <tr style="height:12pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:12pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">  </font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-kerning:none;min-width:fit-content;">5.1*</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="asys-ex5_1.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Legal Opinion of DLA Piper LLP (US).</font></a></p></td>
   </tr>
   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">23.1*</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="asys-ex23_1.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Consent of KPMG LLP</font></a></p></td>
   </tr>
   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">23.2*</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="asys-ex5_1.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Consent of DLA Piper LLP (US) (included in Exhibit 5.1).</font></a></p></td>
   </tr>
   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">24.1*</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="#power_attorney"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Power of Attorney (included in signature page to this Registration Statement).</font></a></p></td>
   </tr>
   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">99.1</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="https://www.sec.gov/ix?doc=/Archives/edgar/data/0000720500/000095017024135825/asys-20240930.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Amtech Systems, Inc. 2022 Equity Incentive Plan</font></a><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;(Incorporated herein by reference to Exhibit 10.3 to the Registrant&#x2019;s Current Report on Form S-8, filed with the SEC on March 25, 2022.)</font></p></td>
   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">99.2*</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">First Amendment to the Amtech Systems, Inc. 2022 Equity Incentive Plan</font><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
   </tr>
   <tr style="word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:4pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
   </tr>
   <tr style="height:11pt;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">107*</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:right;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><a href="asys-exfiling_fees.htm"><font style="color:#0000ff;white-space:pre-wrap;text-decoration:underline solid;font-kerning:none;min-width:fit-content;">Filing Fee Table</font></a></p></td>
   </tr>
  </table>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">* Filed herewith.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <div class="page-border-spacing"><div style="z-index:-3;flex-direction:column;display:flex;padding-bottom:0.5in;min-height:0.75in;justify-content:flex-end;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:6pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">2</font></p></div></div>
  <hr style="margin-inline-start:auto;margin-inline-end:auto;page-break-after:always;">
  <div style="padding-top:0.5in;z-index:-3;min-height:0.75in;position:relative;box-sizing:border-box;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:center;"><font style="text-transform:uppercase;color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Signatures</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pursuant to the requirements of the Securities Act, the Registrant certifies that it has reasonable grounds to believe that it meets all of the requirements for filing on Form S-8 and has duly caused this Registration Statement to be signed on its behalf by the undersigned, thereunto duly authorized, in the City of Tempe, State of Arizona, on March 19, 2025.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
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  <p style="font-size:10pt;margin-top:12pt;font-family:Times New Roman;margin-bottom:12pt;text-align:center;" id="power_attorney"><font style="text-transform:uppercase;color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Power of </font><font style="text-transform:uppercase;color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Attorney</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">KNOW ALL PERSONS BY THESE PRESENTS</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">, that each person whose signature appears below constitutes and appoints Wade M. Jenke, as his or her true and lawful attorney-in-fact and agent, with full power of substitution and resubstitution, for him or her and in their name, place and stead, in any and all capacities, to sign any and all amendments (including post-effective amendments) to this registration statement, and to sign any registration statement for the same offering covered by this registration statement that is to be effective on filing pursuant to Rule 462(b) under the Securities Act, and all post-effective amendments thereto, and to file the same, with all exhibits thereto and other documents in connection therewith, with the Securities and Exchange Commission, granting unto said attorney-in-fact and agent full power and authority to do and perform each and every act and thing requisite and necessary to be done in connection therewith, as fully to all intents and purposes as he might or could do in person, hereby ratifying and confirming all that said attorney-in-fact and agent, or his substitute or substitutes, may lawfully do or cause to be done by virtue hereof.</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:24pt;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pursuant to the requirements of the Securities Act, this Registration Statement has been signed by the following persons in the capacities and on the date indicated.</font></p>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="padding-bottom:1pt;font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;border-bottom:0.5pt solid;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">/s/ Wade M. Jenke</font></p><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Wade M. Jenke</font></p></td>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">March 19, 2025</font></p></td>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:left;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="padding-bottom:1pt;font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;border-bottom:0.5pt solid;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">/s/ Robert M. Averick</font></p><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Robert M. Averick</font></p></td>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">March 19, 2025</font></p></td>
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    <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;"><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="font-size:11pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">March 19, 2025</font></p></td>
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<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>2
<FILENAME>asys-ex5_1.htm
<DESCRIPTION>EX-5.1
<TEXT>
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     <td style="padding-top:0in;vertical-align:top;padding-bottom:0in;text-align:center;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Exhibit 5.1</font></p></td>
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   </table><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p></div>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">March 19, 2025</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Amtech Systems, Inc.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">58 South River Drive, Suite 370</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Tempe, AZ 85281</font></p>
  <p style="font-size:10pt;margin-top:10pt;font-family:Times New Roman;margin-bottom:0;margin-right:1.046%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Re:	Registration Statement on Form S-8</font></p>
  <p style="font-size:10pt;margin-top:10pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Dear Ladies and Gentlemen:</font></p>
  <p style="font-size:10pt;margin-top:10pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">We have acted as counsel for Amtech Systems, Inc., an Arizona corporation (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Company</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;), in connection with the preparation and filing of the Registration Statement on Form S-8 (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Registration Statement</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;) filed by the Company with the Securities and Exchange Commission (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Commission</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;) under the Securities Act of 1933, as amended (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Securities Act</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;), relating to the registration under the Securities Act of 1933, as amended, of 1,000,000 additional shares of the Company&#x2019;s Common Stock, par value $0.01 per share (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Shares</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;), reserved for issuance under the Amtech Systems, Inc. 2022 Equity Incentive Plan, as amended (the &#x201c;</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-style:italic;font-kerning:none;min-width:fit-content;">Plan</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#x201d;).</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">In connection herewith, we have examined and relied upon such records, documents, certificates and other instruments as in our judgment are necessary or appropriate to form the basis for the opinions hereinafter set forth. In all such examinations, we have assumed the genuineness of signatures on original documents and the conformity to such original documents of all copies submitted to us as certified, conformed or photographic copies, and as to certificates of public officials, we have assumed the same to have been properly given and to be accurate. As to matters of fact material to this opinion, we have relied, without independent verification, upon statements and representations of representatives of the Company and public officials.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">We do not express any opinion herein concerning any law other than the Arizona Business Corporation Act (including the statutory provisions, all applicable provisions of the Arizona Constitution and the reported judicial decisions interpreting the foregoing) and the federal law of the United States of America.</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">This opinion speaks only at and as of its date and is based solely on the facts and circumstances known to us at and as of such date. In addition, in rendering this opinion, we assume no obligation to revise, update or supplement this opinion (i) should the present aforementioned laws of the State of Arizona or federal laws of the United States of America be changed by legislative action, judicial decision or otherwise after the date hereof, or (ii) to reflect any facts or circumstances which may hereafter come to our attention after the date hereof.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Based upon, subject to and limited by the foregoing, we are of the opinion and so advise you that the Shares have been duly authorized and, when issued and delivered in accordance with the terms of the Plan and pursuant to the agreements which accompany the Plan, will be validly issued, fully paid, and nonassessable.</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
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     <td rowspan="2" style="padding-top:0in;text-indent:11.25pt;vertical-align:top;padding-bottom:0in;"><p style="margin-left:2.08%;text-indent:0;font-size:10pt;margin-top:6.75pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><img src="img161358662_0.jpg" alt="img161358662_0.jpg" style="width:120px;height:70px;"></p><p style="margin-left:2.08%;text-indent:0;font-size:10pt;margin-top:6.75pt;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p><p style="margin-left:2.133%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Amtech Systems, Inc.</font></p><p style="margin-left:2.133%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">March 19, 2025</font></p><p style="margin-left:2.133%;text-indent:0;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Page Two</font></p></td>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">*  *  *</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">We hereby consent to the filing of this opinion as Exhibit 5.1 to the Registration Statement. In giving this consent, we do not admit that we are within the category of persons whose consent is required under Section 7 of the Securities Act or the rules and regulations of the Commission promulgated thereunder.</font></p>
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<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>3
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<DESCRIPTION>EX-23.1
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:8pt;text-align:right;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;">Exhibit 23.1</font></p>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;">Consent of Independent Registered Public Accounting Firm</font></p>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;">We consent to the use of our report dated December 12, 2024, with respect to the consolidated financial statements of Amtech Systems, Inc. and subsidiaries, and the effectiveness of internal control over financial reporting, incorporated herein by reference.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;">/s/ KPMG LLP</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;">Phoenix, Arizona</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:'Aptos',sans-serif;font-kerning:none;min-width:fit-content;">March 19, 2025</font></p>
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<DOCUMENT>
<TYPE>EX-99.2
<SEQUENCE>4
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<DESCRIPTION>EX-99.2
<TEXT>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Exhibit 99.2</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="text-transform:uppercase;color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">FIRST Amendment</font><font style="text-transform:uppercase;color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="text-transform:uppercase;color:#000000;white-space:pre-wrap;font-weight:bold;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">to the <br>amtech systems, inc. 2022 equity INCENTIVE Plan</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">WHEREAS, Amtech Systems, Inc. (the &#x201c;Company&#x201d;) maintains the 2022 Equity Incentive Plan of Amtech Systems, Inc. (the &#x201c;Plan&#x201d;); and</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">WHEREAS, Section 15 of the Plan provides that the Plan may be amended from time to time; and</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">WHEREAS, the Company desires to amend the Plan in certain respects;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">NOW, THEREFORE, the Plan is hereby amended, effective as of the date the shareholders of the Company approve this amendment, in the following respects:</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="text-indent:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">1.	Section 4(a) of the Plan is amended to read in its entirety as follows:</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="margin-left:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="text-indent:7.56%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">	&#x201c;(a) </font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Maximum Shares Available</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">. Subject to Section 4(b) and to adjustment as provided in Section 12(a), the number of Shares that may be the subject of Awards and issued under the Plan shall be 2,000,000. No further awards may be made under the Prior Plans after the effective date of this Plan. Shares issued under the Plan may be Shares that either were reacquired by the Company, including Shares purchased on the open market, or authorized but unissued Shares. In determining the number of Shares to be counted against this share reserve in connection with any Award, the following rules shall apply:</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="text-indent:15.107%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(1) Shares shall be counted against the share reserve as one Share for every one Share granted.</font></p>
  <p style="text-indent:15.107%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:12pt;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(2) Where the number of Shares subject to an Award is variable on the Grant Date, the number of Shares to be counted against the share reserve shall be the maximum number of Shares that could be received under that particular Award, until such time as it can be determined that only a lesser number of shares could be received.</font></p>
  <p style="text-indent:15.107%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(3) Shares subject to Substitute Awards shall not be counted against the share reserve, nor shall they reduce the Shares authorized for grant to a Participant in any calendar year.</font></p>
  <p style="text-indent:15.107%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <p style="text-indent:15.107%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(4) Awards that may be settled solely in cash shall not be counted against the share reserve, nor shall they reduce the Shares authorized for grant to a Participant in any calendar year.&#x201d;</font></p>
  <p style="margin-left:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="margin-left:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">2.	Section 7(d)(1) of the Plan is amended to read in its entirety as follows:</font></p>
  <p style="margin-left:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="margin-left:6.667%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">	</font><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">1) An Option Award will constitute an Incentive Stock Option Award only if the Participant receiving the Option Award is an Employee, and only to the extent that (i) it is so designated in the applicable Agreement and (ii) the aggregate Fair Market Value (determined as of the Option Award&#x2019;s Grant Date) of the Shares with respect to which Incentive Stock Option Awards held by the Participant first become exercisable in any calendar year (under the Plan and all other plans of the Company and its Affiliates) does not exceed $100,000 or such other amount specified by the Code. To the extent an Option Award granted to a Participant exceeds this limit, the Option Award shall be treated as a Non-Qualified Stock Option Award. The maximum number of Shares that may be issued upon the exercise of Incentive Stock Option Awards under the Plan shall be 2,000,000, subject to adjustment as provided in Section 12(a).</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="text-indent:7.143%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">This Amendment, in conjunction with the Plan, constitutes the entire agreement with respect to the subject matter hereof and supersedes all oral and written agreements and understandings made and entered into prior to the date hereof.  In the event of any conflict between the terms and conditions of the Plan and the terms and conditions of this Amendment, the terms and conditions of this Amendment shall prevail and control.  If any term or provision of this Amendment or the application thereof to any persons or circumstances shall, to any extent, be invalid or unenforceable, the remainder of this Amendment or the application of such term or provision to persons or</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
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  <div style="z-index:-3;min-height:0.5in;position:relative;"></div>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;margin-right:6.667%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">circumstances other than those as to which it is held invalid or unenforceable shall not be affected thereby, and each term and provision of this Amendment shall be valid and enforced to the fullest extent permitted by law.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:12pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">	</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">IN WITNESS WHEREOF, the undersigned has executed this Amendment as of the date first written above on behalf of the Company.</font></p>
  <p style="margin-left:49.173%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="margin-left:45%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Amtech Systems, Inc.</font></p>
  <p style="margin-left:45%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="margin-left:45%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">By:  </font><font style="color:#000000;white-space:pre-wrap;text-decoration:underline solid;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">/s/ Robert C. Daigle</font><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">____________________</font></p>
  <p style="margin-left:45%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Name:  Robert C. Daigle</font></p>
  <p style="margin-left:45%;font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:11pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Title:  President and Chief Executive Officer</font></p>
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<DOCUMENT>
<TYPE>EX-FILING FEES
<SEQUENCE>5
<FILENAME>asys-exfiling_fees.htm
<DESCRIPTION>EX-FILING FEES
<TEXT>
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  <title>EX-FILING FEES</title>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:right;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Exhibit 107</font></p>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Calculation of Filing Fee Table</font></p>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Form S-8</font></p>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">&#160;</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Amtech Systems, Inc.</font></p>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">(Exact Name of Registrant as Specified in its Charter)</font></p>
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  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Table 1: Newly Registered Securities</font></p>
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    <td style="border-top:1pt solid #000000;padding-top:0.01in;border-right:1pt solid #000000;border-left:1pt solid #000000;vertical-align:bottom;padding-bottom:0in;border-bottom:1pt solid #000000;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Security</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Type</font></p></td>
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    <td style="border-top:1pt solid #000000;padding-top:0.01in;border-right:1pt solid #000000;vertical-align:bottom;padding-bottom:0in;border-bottom:1pt solid #000000;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Fee</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Calculation</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Rule</font></p></td>
    <td style="border-top:1pt solid #000000;padding-top:0.01in;border-right:1pt solid #000000;vertical-align:bottom;padding-bottom:0in;border-bottom:1pt solid #000000;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Amount</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Registered</font><font style="color:#000000;top:-4.6899999999999995pt;white-space:pre-wrap;font-size:6.7pt;position:relative;font-kerning:none;min-width:fit-content;">(2)</font></p></td>
    <td style="border-top:1pt solid #000000;padding-top:0.01in;border-right:1pt solid #000000;vertical-align:bottom;padding-bottom:0in;border-bottom:1pt solid #000000;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Proposed</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Maximum</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Offering Price</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Per Unit</font><font style="color:#000000;top:-4.6899999999999995pt;white-space:pre-wrap;font-size:6.7pt;position:relative;font-kerning:none;min-width:fit-content;">(3)</font></p></td>
    <td style="border-top:1pt solid #000000;padding-top:0.01in;border-right:1pt solid #000000;vertical-align:bottom;padding-bottom:0in;border-bottom:1pt solid #000000;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Maximum</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Aggregate</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Offering</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Price</font><font style="color:#000000;top:-4.6899999999999995pt;white-space:pre-wrap;font-size:6.7pt;position:relative;font-kerning:none;min-width:fit-content;">(3)</font></p></td>
    <td style="border-top:1pt solid #000000;padding-top:0.01in;border-right:1pt solid #000000;vertical-align:bottom;padding-bottom:0in;border-bottom:1pt solid #000000;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Fee Rate</font></p></td>
    <td style="border-top:1pt solid #000000;padding-top:0.01in;border-right:1pt solid #000000;vertical-align:bottom;padding-bottom:0in;border-bottom:1pt solid #000000;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Amount of</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Registration</font></p><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Fee</font><font style="color:#000000;top:-4.6899999999999995pt;white-space:pre-wrap;font-size:6.7pt;position:relative;font-kerning:none;min-width:fit-content;">(3)</font><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;"> </font></p></td>
   </tr>
   <tr style="height:11.5pt;background-color:#cceeff;word-break:break-word;white-space:pre-wrap;">
    <td style="padding-top:0.042in;border-right:1pt solid #000000;border-left:1pt solid #000000;padding-left:0.02in;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Equity</font></p></td>
    <td style="padding-top:0.042in;border-right:1pt solid #000000;padding-left:0.02in;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Common Stock, par value $0.01 per share</font></p></td>
    <td style="padding-top:0.042in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">Other</font></p></td>
    <td style="padding-top:0.042in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">1,000,000</font></p></td>
    <td style="padding-top:0.042in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">$4.875</font></p></td>
    <td style="padding-top:0.042in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">$4,875,000.00</font></p></td>
    <td style="padding-top:0.042in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">0.00015310</font></p></td>
    <td style="padding-top:0.042in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">$746.36</font></p></td>
   </tr>
   <tr style="height:11.5pt;word-break:break-word;white-space:pre-wrap;">
    <td colspan="4" style="padding-top:0in;border-right:1pt solid #000000;border-left:1pt solid #000000;padding-left:0.02in;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Total Offering Amounts</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">$4,875,000.00</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">$746.36</font></p></td>
   </tr>
   <tr style="height:12.25pt;background-color:#cceeff;word-break:break-word;white-space:pre-wrap;">
    <td colspan="4" style="padding-top:0in;border-right:1pt solid #000000;border-left:1pt solid #000000;padding-left:0.02in;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Total Fees Previously Paid</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#x2014;</font></p></td>
   </tr>
   <tr style="height:11.5pt;word-break:break-word;white-space:pre-wrap;">
    <td colspan="4" style="padding-top:0in;border-right:1pt solid #000000;border-left:1pt solid #000000;padding-left:0.02in;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Total Fee Offsets</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#x2014;</font></p></td>
   </tr>
   <tr style="height:12.25pt;background-color:#cceeff;word-break:break-word;white-space:pre-wrap;">
    <td colspan="4" style="padding-top:0in;border-right:1pt solid #000000;border-left:1pt solid #000000;padding-left:0.25in;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-weight:bold;font-kerning:none;min-width:fit-content;">Net Fee Due</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:right;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;"> </font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="white-space:pre-wrap;font-kerning:none;min-width:fit-content;">&#160;</font></p></td>
    <td style="padding-top:0.01in;border-right:1pt solid #000000;vertical-align:top;padding-bottom:0in;border-bottom:1pt solid #000000;text-align:left;"><p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:center;"><font style="color:#000000;white-space:pre-wrap;font-kerning:none;min-width:fit-content;">$746.36</font></p></td>
   </tr>
  </table>
  <p style="font-size:10pt;margin-top:0;font-family:Times New Roman;margin-bottom:0;text-align:left;"><font style="color:#000000;white-space:pre-wrap;font-size:10pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;"> </font></p>
  <div class="item-list-element-wrapper" style="display:flex;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:0;min-width:4.537%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:Times New Roman;font-kerning:none;min-width:4.537%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">1.</font><div style="width:100%;display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">In addition to the number of shares of common stock, par value $0.01 per share (the &#x201c;Common Stock&#x201d;), of Amtech Systems, Inc. (the &#x201c;Registrant&#x201d;) set forth in the above table, this Registration Statement on Form S-8 covers an indeterminate number of options and other rights to acquire Common Stock, to be granted pursuant to the Amtech Systems, Inc. 2022 Equity Incentive Plan, as amended (the &#x201c;Incentive Plan&#x201d;).</font></div></div>
  <div class="item-list-element-wrapper" style="display:flex;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:0;min-width:4.537%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:Times New Roman;font-kerning:none;min-width:4.537%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">2.</font><div style="width:100%;display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Pursuant to Rule 416(a) under the Securities Act of 1933, as amended (the &#x201c;Securities Act&#x201d;), this Registration Statement on Form S-8 also shall cover any additional shares of Common Stock in respect of the securities identified in the above table as a result of any stock dividend, stock split, recapitalization or other similar transaction, and any other securities with respect to which the outstanding shares are converted or exchanged. </font></div></div>
  <div class="item-list-element-wrapper" style="display:flex;margin-top:0;justify-content:flex-start;align-items:baseline;margin-bottom:0;min-width:4.537%;text-align:justify;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:Times New Roman;font-kerning:none;min-width:4.537%;word-break:keep-all;display:inline-flex;justify-content:flex-start;">3.</font><div style="width:100%;display:inline;"><font style="color:#000000;white-space:pre-wrap;font-size:9pt;font-family:Times New Roman;font-kerning:none;min-width:fit-content;">Estimated solely for the purpose of calculating the registration fee pursuant to Rule 457(c) and Rule 475(h) under the Securities Act.  The proposed maximum offering price per share, the proposed maximum aggregate offering price and the amount of registration fee have been computed based on the average high and low prices per share of the Common Stock reported on the Nasdaq Stock Market LLC on March 13, 2025.</font></div></div>
  <div class="page-border-spacing"><div style="z-index:-3;flex-direction:column;display:flex;min-height:0.5in;justify-content:flex-end;position:relative;"></div></div>
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end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
