<SEC-DOCUMENT>0000950170-25-025653-index.html : 20250224
<SEC-HEADER>0000950170-25-025653.hdr.sgml : 20250224
<ACCEPTANCE-DATETIME>20250224162302
ACCESSION NUMBER:		0000950170-25-025653
CONFORMED SUBMISSION TYPE:	DEFA14A
PUBLIC DOCUMENT COUNT:		2
FILED AS OF DATE:		20250224
DATE AS OF CHANGE:		20250224

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		DEFA14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		25657368

	BUSINESS ADDRESS:	
		STREET 1:		58 S RIVER DRIVE SUITE 370
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		58 S RIVER DRIVE SUITE 370
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEFA14A
<SEQUENCE>1
<FILENAME>asys_amendment_to_2025_p.htm
<DESCRIPTION>DEFA14A
<TEXT>
Document 1 - file: asys_amendment_to_2025_p.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>img40319569_0.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: img40319569_0.jpg

</DOCUMENT>
</SEC-DOCUMENT>