# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000720500-26-000010
Filing Date
2026-08-05
Accepted
2026-08-05 16:06:56
Documents
82
Period of Report
2026-06-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | asys-20260630.htm iXBRL | 10-Q | 2942559
2 | EX-10.2 | asys-ex10_2.htm | EX-10.2 | 49821
3 | EX-10.3 | asys-ex10_3.htm | EX-10.3 | 37746
4 | EX-31.1 | asys-ex31_1.htm | EX-31.1 | 20604
5 | EX-31.2 | asys-ex31_2.htm | EX-31.2 | 19549
6 | EX-32.1 | asys-ex32_1.htm | EX-32.1 | 13117
7 | EX-32.2 | asys-ex32_2.htm | EX-32.2 | 13055
8 | GRAPHIC | img49902169_0.jpg | GRAPHIC | 14185
9 | GRAPHIC | img50825690_0.jpg | GRAPHIC | 16398
10 | GRAPHIC | img103351225_0.jpg | GRAPHIC | 67180
| Complete submission text file | 0000720500-26-000010.txt |  | 12583723

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
11 | XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT | asys-20260630.xsd | EX-101.SCH | 1140312
86 | EXTRACTED XBRL INSTANCE DOCUMENT | asys-20260630_htm.xml | XML | 2860589

Mailing Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288
Business Address 58 S RIVER DRIVE SUITE 370 TEMPE AZ 85288 4809675146
AMTECH SYSTEMS INC (Filer) CIK: 0000720500 (see all company filings)

EIN.: 860411215 | State of Incorp.: AZ | Fiscal Year End: 0930
Type: 10-Q | Act: 34 | File No.: 000-11412 | Film No.: 261243428
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)