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Goodwill and Intangible Assets - Additional Information (Details) - USD ($)
$ in Thousands
 3 Months Ended 9 Months Ended 12 Months Ended
Jun. 30, 2026
Jun. 30, 2025
Mar. 31, 2025
Jun. 30, 2026
Jun. 30, 2025
Sep. 30, 2025
Sep. 30, 2024
Finite-Lived Intangible Assets [Line Items]              
Amortization of Intangible Assets $ 44 $ 100   $ 100 $ 300    
Total impairment charge       0 2,569    
Impairment of goodwill     $ 20,400 0 $ 20,353 $ 20,353  
Goodwill 908     908   908 $ 21,261
Semiconductor Fabrication Solutions Segment              
Finite-Lived Intangible Assets [Line Items]              
Total impairment charge     2,600        
Impairment of goodwill     15,400 0   (15,356)  
Goodwill 0     0   0 15,356
Semiconductor Fabrication Solutions Segment | Customer Relationships              
Finite-Lived Intangible Assets [Line Items]              
Total impairment charge     1,800        
Semiconductor Fabrication Solutions Segment | Trade names              
Finite-Lived Intangible Assets [Line Items]              
Total impairment charge     800        
Thermal Processing Solutions Segment              
Finite-Lived Intangible Assets [Line Items]              
Impairment of goodwill     $ 5,000 0   (4,997)  
Goodwill $ 908     $ 908   $ 908 $ 5,905