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Reportable Segments - Schedule of Reportable Segments Information (Parenthetical) (Details) - USD ($) $ in Thousands	3 Months Ended		9 Months Ended
	Jun. 30, 2026	Jun. 30, 2025	Jun. 30, 2026	Jun. 30, 2025
Segment Reporting [Line Items]
Income tax provision	$ 616	$ 799	$ 1,699	$ 1,516
Thermal Processing Solutions
Segment Reporting [Line Items]
Income tax provision	500	300	1,600	800
Semiconductor Fabrication Solutions
Segment Reporting [Line Items]
Income tax provision	$ 1	$ 2	$ 2	$ 10

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