Corporate | 26 April 2013 08:19
PVA TePla AG / Key word(s): Acquisition
26.04.2013 / 08:19
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(Wettenberg, April 26, 2013) - Following the acquisition of Munich
Metrology GmbH last year, PVA TePla AG from Wettenberg, producer of
industrial crystal growing systems as well as plasma, vacuum, and heat
treatment systems, is taking a further step to strengthen its know-how in
the field of metrology for the semiconductor industry. The acquisition of
JenaWave GmbH, Jena, will bring fundamental technology for the design of
analysis systems in-house.
JenaWave develops and designs optical measuring heads, which are considered
core components, including the complex evaluation and control software for
the SIRD (=Scanning Infrared Depolarization) and TWIN (Thermal Wave
Inspection) analysis systems from the metrology business unit, which is
based in Kirchheim near Munich. The SIRD systems enable the detection of
unwanted shear stresses (stresses caused by shifts in the atomic lattice
structure) in silicon wafers that can be caused by high-temperature
processes during the manufacturing of semiconductor products. The TWIN
systems monitor the uniformity of ion implantation processes. These types
of metrology systems are supplied to all renowned silicon wafer
manufacturers and many of their customers worldwide, where they are used to
monitor complex production steps in wafer and semiconductor manufacturing.
In addition, JenaWave develops and manufactures the optical polarizing
measuring microscope SIREX (= Scanning Infrared Reflection EXamination),
which is used to visualize shear stresses, in particular for the
development of 3D-ICs and MEMS.
With the acquisition of JenaWave, PVA TePla is increasing its production
depth and bringing on board valuable know-how relating to the laser optics
used in the measuring heads. In addition, the integration of the company at
the in-house site in Jena will allow significant synergy effects to be
exploited in the system design and manufacturing.
The corresponding inspection systems in which the measuring cores are
installed can be seen at the following website
http://www.pvateplaamerica.com/semi_stressimaging.php among others.
Further information can be obtained from:
Dr. Gert Fisahn
Investor Relations
PVA TePla AG
Tel.: +49(0)641/68690-400
gert.fisahn@pvatepla.com
www.pvatepla.com
End of Corporate News
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Language: English
Company: PVA TePla AG
Im Westpark 10-12
35435 Wettenberg
Germany
Phone: 0641/686900
Fax: 0641/68690800
E-mail: info@pvatepla.com
Internet: www.pvatepla.com
ISIN: DE0007461006
WKN: 746100
Listed: Regulierter Markt in Frankfurt (Prime Standard);
Freiverkehr in Berlin, Düsseldorf, Hamburg, München,
Stuttgart
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208660 26.04.2013