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Basis of Presentation (Narrative) (Details) (USD $)	0 Months Ended	6 Months Ended
	Jul. 18, 2012 Y item	Jun. 30, 2012	Jun. 30, 2012 Rudolph Technologies, Inc [Member]	Dec. 31, 2011 Rudolph Technologies, Inc [Member]
Investments owned, shares			343,267	343,267
Dividends payable	$ 0.04
Dividends payable, date declared		Jul. 18, 2012
Dividends payable, date to be paid		Aug. 17, 2012
Dividends payable, date of record		Aug. 03, 2012
Number of non-employee directors	4
Deferred compensation term	10
Deferred compensation shares authorized for purchase	2,500
Deferred compensation exercise price	$ 4.15

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