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Investments (Narrative) (Details) (Rudolph Technologies, Inc [Member], USD $)	Jun. 30, 2012	Dec. 31, 2011
Rudolph Technologies, Inc [Member]
Investments owned, shares	343,267	343,267
Aggregate value of shares	$ 2,993,000	$ 3,134,000
Approximate cost	$ 45,000

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- Definition

Cost of the investment.

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- Definition

Balance held at close of period in number of shares.

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This element represents the portion of the balance sheet assertion valued at fair value by the entity whether such amount is presented as a separate caption or as a parenthetical disclosure. Additionally, this element may be used in connection with the fair value disclosures required in the footnote disclosures to the financial statements. The element may be used in both the balance sheet and disclosure in the same submission. This item represents investment securities as of the balance sheet date which may include marketable securities, derivative financial instruments, and investments accounted for under the equity method.

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Reference 1: http://www.xbrl.org/2003/role/presentationRef

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