Investments (Narrative) (Details) (USD $) In Thousands, except Share data, unless otherwise specified	12 Months Ended
Dec. 31, 2013	Dec. 31, 2012
Investment In Organization [Line Items]
Gain on sale of available-for-sale securities	$ 530	$ 794
Rudolph Technologies, Inc [Member]
Investment In Organization [Line Items]
Investments owned, shares	231,336	273,267
Aggregate value of shares	2,716	3,673
Approximate cost	30	36
Available-for-sale shares sold	41,931	70,000
Gain on sale of available-for-sale securities	$ 529	$ 794

This item represents the net total realized and unrealized gain (loss) included in earnings for the period as a result of selling or holding marketable securities categorized as trading, available-for-sale, or held-to-maturity, including the unrealized holding gain (loss) of held-to-maturity securities transferred to the trading security category and the cumulative unrealized gain (loss) which was included in other comprehensive income (a separate component of shareholders' equity) for available-for-sale securities transferred to trading securities during the period. Additionally, this item would include any gains (losses) realized during the period from the sale of investments accounted for under the cost method of accounting and losses recognized for other than temporary impairments (OTTI) of the subject investments.

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Balance held at close of period in number of shares.

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