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Subsequent Events (Details) (USD $)
In Thousands, except Share data, unless otherwise specified
12 Months Ended 1 Months Ended 12 Months Ended 3 Months Ended
Dec. 31, 2013
Dec. 31, 2012
Feb. 18, 2014
Subsequent Event [Member]
Feb. 18, 2014
Paid At Closing [Member]
Subsequent Event [Member]
Feb. 18, 2014
Paid On First Anniversary [Member]
Subsequent Event [Member]
Feb. 18, 2014
Paid On Second Anniversary [Member]
Subsequent Event [Member]
Dec. 31, 2013
Rudolph Technologies, Inc [Member]
Dec. 31, 2012
Rudolph Technologies, Inc [Member]
Mar. 14, 2014
Rudolph Technologies, Inc [Member]
Subsequent Event [Member]
Subsequent Event [Line Items]                  
Available-for-sale shares sold             41,931 70,000 39,179
Proceeds from Sale and Maturity of Available-for-sale Securities $ 536 $ 874             $ 439
Gain on sale of available-for-sale securities 530 794         529 794 434
Payments for acquisition     1,200 400 400 400      
Potential contingent consideration     $ 550