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SUBSEQUENT EVENT (Details) - USD ($)		6 Months Ended
	Jul. 16, 2021	Jun. 30, 2021
Acquisitions [Abstract]
Acquisition agreement		$ 5,765,407
NoveCite, INC. [Member] | Subsequent Event [Member]
Acquisitions [Abstract]
Percentage of total outstanding equity interests	25.00%
Novellus, Ltd. [Member] | Subsequent Event [Member]
Acquisitions [Abstract]
Business consideration	$ 124,022,181
Cash paid for acquisition	$ 22,822,181
Acquisition of common stock (in shares)	7,022,230
Acquisition agreement	$ 102,000,000
Share price (in dollars per share)	$ 14.5253
Escrow shares (in shares)	740,766
Non-compete period	5 years
Each lock-up agreement extend term	3 years
Novellus, Ltd. [Member] | Subsequent Event [Member] | Chair of the Board of Directors, Chief Executive Officer and President [Member]
Acquisitions [Abstract]
Lock-up agreements shares received in acquisition (in shares)	3,377,690
Novellus, Ltd. [Member] | Maximum [Member] | Subsequent Event [Member]
Acquisitions [Abstract]
Period of escrow	12 months
Percentage of common stock subject to the lock-up agreement	75.00%

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- Definition

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