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MERGER, DISPOSITION AND ACQUISITION TRANSACTIONS, Acquisition (Details) - USD ($) |  | 3 Months Ended | 6 Months Ended
--- | --- | --- | ---
Jul. 16, 2021 | Sep. 30, 2021 | Jun. 30, 2022 | Jun. 30, 2021
Acquisitions [Abstract] |  |  |  |
Acquisition agreement |  |  |  | $ 5,765,000
Novellus, Ltd. [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Cash | $ 22,900,000 |  |  |
Acquisition of common stock (in shares) | 7,022,000 |  |  |
Acquisition agreement | $ 102,000,000.0 |  |  |
Share price (in dollars per share) | $ 14.5253 |  |  |
Fair value of shares issued | $ 58,600,000 |  |  |
Escrow shares (in shares) | 741,000 |  |  |
Non-compete period |  |  | 5 years |
Cash paid, net | $ 22,900,000 |  |  |
Unrestricted shares, issued (in shares) | 3,644,000 |  |  |
Restricted shares, issued (in shares) | 3,378,000 |  |  |
Lock-up period |  |  | 3 years |
Unrestricted shares, fair value per share (in dollars per share) | $ 10.05 |  |  |
Percentage of discount on fair value restricted shares | 35.00% |  |  |
Restricted shares, fair value per share (in dollars per share) | $ 6.53 |  |  |
Cash paid | $ 22,882,000 |  |  |
Cash acquired | (28,000) |  |  |
Unrestricted shares, value | 36,628,000 |  |  |
Restricted shares, value | 22,056,000 |  |  |
Total fair value of consideration paid | 81,538,000 |  |  |
Less amount of cash paid for NoveCite investment | (1,000,000) |  |  |
Acquired in-process research and development | $ 80,538,000 | $ 80.5 |  |
Novellus, Ltd. [Member] | Maximum [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Period of escrow |  |  | 12 months |
Novellus, Inc. [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Each lock-up agreement extend term |  |  | 3 years |
Novellus, Inc. [Member] | Chair of the Board of Directors, Former Chief Executive Officer and President [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Lock-up agreements shares received in acquisition (in shares) | 3,378,000 |  |  |
Novellus, Inc. [Member] | Maximum [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Percentage of common stock subject to the lock-up agreement | 75.00% |  |  |
NoveCite, INC. [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Percentage of total outstanding equity interests | 25.00% |  |  |

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- Definition The Acquisition Agreement contains non-competition and non-solicitation provisions pursuant to which the Seller has agreed not to engage in certain competitive activities for a period in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days. + References No definition available. + Details
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