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MERGER, DISPOSITION AND ACQUISITION TRANSACTIONS, Acquisition (Details) - USD ($)		3 Months Ended	9 Months Ended
	Jul. 16, 2021	Sep. 30, 2021	Sep. 30, 2022	Sep. 30, 2021
Acquisitions [Abstract]
Acquisition agreement				$ 5,765,000
Cash paid, net			$ 0	22,854,000
Acquired in-process research and development			$ 0	$ 80,538,000
Novellus, Ltd. [Member]
Acquisitions [Abstract]
Acquisition of common stock (in shares)	351,000
Acquisition agreement	$ 102,000,000
Share price (in dollars per share)	$ 290.506
Fair value of shares issued	$ 58,700,000
Escrow shares (in shares)	37,000
Non-compete period			5 years
Cash paid, net	$ 22,900,000
Unrestricted shares, issued (in shares)	182,000
Restricted shares, issued (in shares)	169,000
Lock-up period			3 years
Unrestricted shares, fair value per share (in dollars per share)	$ 201
Percentage of discount on fair value restricted shares	35.00%
Restricted shares, fair value per share (in dollars per share)	$ 130.6
Cash paid	$ 22,882,000
Cash acquired	(28,000)
Unrestricted shares, value	36,628,000
Restricted shares, value	22,056,000
Total fair value of consideration paid	81,538,000
Less amount of cash paid for NoveCite investment	(1,000,000)
Acquired in-process research and development	$ 80,538,000	$ 80.5
Novellus, Inc. [Member]
Acquisitions [Abstract]
Each lock-up agreement extend term			3 years
Novellus, Inc. [Member] | Chair of the Board of Directors, Former Chief Executive Officer and President [Member]
Acquisitions [Abstract]
Lock-up agreements shares received in acquisition (in shares)	169,000
Novellus, Inc. [Member] | Maximum [Member]
Acquisitions [Abstract]
Percentage of common stock subject to the lock-up agreement	75.00%
NoveCite, INC. [Member]
Acquisitions [Abstract]
Percentage of total outstanding equity interests	25.00%

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