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Merger, Disposition and Acquisition Transactions, Acquisition (Details) - USD ($) $ / shares in Units, $ in Thousands |  | 3 Months Ended | 12 Months Ended
--- | --- | --- | ---
Jul. 16, 2021 | Sep. 30, 2021 | Dec. 31, 2022 | Dec. 31, 2021
Acquisitions [Abstract] |  |  |  |
Acquisition agreement |  |  |  | $ 5,765
Cash paid, net |  |  | $ 0 | 22,854
In-process R&D acquired in Novellus asset acquisition |  |  | $ 0 | $ 80,538
Novellus, Ltd. [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Acquisition of common stock (in shares) | 351,000 |  |  |
Acquisition agreement | $ 102,000 |  |  |
Share price (in dollars per share) | $ 290.51 |  |  |
Fair value of shares issued | $ 58,700 |  |  |
Escrow shares (in shares) | 37,000 |  |  |
Non-compete period |  |  | 5 years |
Each lock-up agreement extend term |  |  | 3 years |
Cash paid, net | $ 22,900 |  |  |
Lock-up period |  |  | 3 years |
Unrestricted shares, issued (in shares) | 182,000 |  |  |
Unrestricted shares, fair value per share (in dollars per share) | $ 201 |  |  |
Restricted shares, issued (in shares) | 169,000 |  |  |
Restricted shares, fair value per share (in dollars per share) | $ 130.6 |  |  |
Percentage of discount on fair value restricted shares | 35.00% |  |  |
Cash paid | $ 22,882 |  |  |
Cash acquired | (28) |  |  |
Unrestricted shares, value | 36,628 |  |  |
Restricted shares, value | 22,056 |  |  |
Total fair value of consideration paid | 81,538 |  |  |
Less amount of cash paid for NoveCite investment | (1,000) |  |  |
In-process R&D acquired in Novellus asset acquisition | $ 80,538 | $ 80,500 |  |
Novellus, Ltd. [Member] | Chairman of the Board of Directors, Chief Executive Officer and President [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Lock-up agreements common shares received in acquisition (in shares) | 169,000 |  |  |
Novellus, Ltd. [Member] | Maximum [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Percentage of common stock subject to the lock-up agreement | 75.00% |  |  |
NoveCite, INC. [Member] |  |  |  |
Acquisitions [Abstract] |  |  |  |
Percentage of total outstanding equity interests | 25.00% |  |  |

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