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Merger, Disposition and Acquisition Transactions, Acquisition (Details) - USD ($)
$ / shares in Units, $ in Thousands
 3 Months Ended 12 Months Ended
Jul. 16, 2021
Sep. 30, 2021
Dec. 31, 2022
Dec. 31, 2021
Acquisitions [Abstract]        
Acquisition agreement       $ 5,765
Cash paid, net     $ 0 22,854
In-process R&D acquired in Novellus asset acquisition     $ 0 $ 80,538
Novellus, Ltd. [Member]        
Acquisitions [Abstract]        
Acquisition of common stock (in shares) 351,000      
Acquisition agreement $ 102,000      
Share price (in dollars per share) $ 290.51      
Fair value of shares issued $ 58,700      
Escrow shares (in shares) 37,000      
Non-compete period     5 years  
Each lock-up agreement extend term     3 years  
Cash paid, net $ 22,900      
Lock-up period     3 years  
Unrestricted shares, issued (in shares) 182,000      
Unrestricted shares, fair value per share (in dollars per share) $ 201      
Restricted shares, issued (in shares) 169,000      
Restricted shares, fair value per share (in dollars per share) $ 130.6      
Percentage of discount on fair value restricted shares 35.00%      
Cash paid $ 22,882      
Cash acquired (28)      
Unrestricted shares, value 36,628      
Restricted shares, value 22,056      
Total fair value of consideration paid 81,538      
Less amount of cash paid for NoveCite investment (1,000)      
In-process R&D acquired in Novellus asset acquisition $ 80,538 $ 80,500    
Novellus, Ltd. [Member] | Chairman of the Board of Directors, Chief Executive Officer and President [Member]        
Acquisitions [Abstract]        
Lock-up agreements common shares received in acquisition (in shares) 169,000      
Novellus, Ltd. [Member] | Maximum [Member]        
Acquisitions [Abstract]        
Percentage of common stock subject to the lock-up agreement 75.00%      
NoveCite, INC. [Member]        
Acquisitions [Abstract]        
Percentage of total outstanding equity interests 25.00%