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Employee benefits (Details Textual) (EUR €) | 12 Months Ended
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Dec. 31, 2012 Person Company SharePlan OptionPlan Y | Dec. 31, 2011 | Dec. 31, 2010
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Vesting period of granted shares options | 3 years |  |  |  |  |
Employee Benefits Bonus Plan (Textual) [Abstract] |  |  |  |  |  |
Profit sharing amount | € 64,500,000 |  | € 64,000,000 |  | € 52,200,000 |
Individual variable pay and sales reward | 24,400,000 |  | 23,200,000 |  | 23,100,000 |
Sales reward | 2,600,000 |  |  |  |  |
Recognized expense associated with share-based payments | 18,714,000 |  | 12,430,000 |  | 12,109,000 |
Tax benefit recognized related to Recognized expenses | 900,000 |  | 500,000 |  | 1,000,000 |
Total compensation expenses related to non-vested awards to be recognized in future periods | 30,400,000 |  | 23,300,000 |  | 16,700,000 |
Number of stock option plans | 5 |  |  |  |  |
Number of share plans | 6 |  |  |  |  |
Weighted average period for non-vested awards to be recognized in future in years | 2 years |  | 1 year 10 months 24 days |  | 2 years |
Company's liability under deferred compensation plans | 11,800,000 |  | 10,200,000 |  |  |
Number of Dutch payroll employees in multi-employer union plan | 4,778 |  |  |  |  |
Number of companies which are covered by Multi Employer Plan | 1,220 |  |  |  |  |
Number of Contributing Members in Multi-Employer Plan | 150,000 |  |  |  |  |
Contribution to the multi-employer union plan | less than 5.0% of the total contribution to the plan |  |  |  |  |
Multi employer plan coverage ratio | 93.90% |  | 90.00% |  |  |
Pension premium percentage | 24.00% |  |  |  |  |
Multi employer plan, asset to obligation coverage ratio minimum | 104.25% |  |  |  |  |
Impact in % for ASML pension premium | 24.00% |  |  |  |  |
Forfeiture rate |  | [1] |  | [1] |  | [1]
The number of years after deferral that participants elect to receive funds in future periods after earlier of the employment termination or their withdrawal election | 3 |  |  |  |  |
Maximum [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Service condition, period | 4 years |  |  |  |  |
Minimum [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Service condition, period | 3 years |  |  |  |  |
Management [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
STI (Cash) | 1,800,000 |  | 1,700,000 |  | 1,600,000 |
Bonus expenses in relation to the Brion retention bonus plan | 100,000 |  | 700,000 |  | 1,200,000 |
Seniority Level One [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Senior management (excluding Board of Management) bonus, higher range | 40.00% |  |  |  |  |
Senior management (excluding Board of Management) bonus, lower range | 0.00% |  |  |  |  |
Seniority Level Two [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Senior management (excluding Board of Management) bonus, higher range | 70.00% |  |  |  |  |
Senior management (excluding Board of Management) bonus, lower range | 0.00% |  |  |  |  |
Employee plan [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Profit sharing bonus, higher range | 20.00% |  |  |  |  |
Profit sharing bonus, lower range | 0.00% |  |  |  |  |
Profit sharing percentage | 18.00% |  | 20.00% |  | 18.00% |
Other Plans [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Compensation expenses | € 0 |  | € 0 |  | € 0 |
Employee Stock Option Plan [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Vesting period of granted shares options | 3 years |  |  |  |  |
Expiration period of unexercised stock options | 10 years |  |  |  |  |
Employee Purchase Plan [Member] |  |  |  |  |  |
Share Based Compensation Arrangement by Share Based Payment Award Equity Instruments Other Than Options Nonvested [Line Items] |  |  |  |  |  |
Maximum percentage of gross base salary for which an employee can participate in stock option and share plan | 10.00% |  |  |  |  |
Minimum period for retaining the shares or stock options to qualify for cash bonus (months) | 12 months |  |  |  |  |
Percentage of bonus on net invested amount after minimum period for retaining the shares or stock options | 20.00% |  |  |  |  |
[1] | As of year end for each of the three years ended December 31, forfeitures are estimated to be nil.

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- Definition The carrying amount of the liability as of the balance sheet date to an individual under a deferred compensation arrangement. This amount may be the result of periodic accruals made over the period of active employment, or reflect termination benefits resulting contractual terms or a death benefit. + References Reference 1: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Statement of Financial Accounting Standard (FAS) -Number 123R -Paragraph 64, 65 -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. Reference 2: http://www.xbrl.org/2003/role/presentationRef -Publisher FASB -Name Accounting Standards Codification -Topic 710 -SubTopic 10 -Section 30 -Paragraph 1 -URI http://asc.fasb.org/extlink&oid=6409875&loc=d3e20015-108363 Reference 3: http://www.xbrl.org/2003/role/presentationRef -Publisher AICPA -Name Accounting Principles Board Opinion (APB) -Number 12 -Paragraph 6, 7 -LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy. + Details
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