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Property, plant and equipment (Details) (EUR €) | 12 Months Ended |  |  | 12 Months Ended
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Dec. 31, 2012 | Dec. 31, 2011 | Dec. 31, 2010 | Dec. 31, 2012 Variable Interest Entity [Member] | Dec. 31, 2011 Variable Interest Entity [Member] | Dec. 31, 2003 Variable Interest Entity [Member] Shareholder | Dec. 31, 2012 Research and Development Expense [Member] | Dec. 31, 2011 Research and Development Expense [Member] | Dec. 31, 2010 Research and Development Expense [Member] | Dec. 31, 2012 Selling General and Administrative Expenses [Member] | Dec. 31, 2011 Selling General and Administrative Expenses [Member] | Dec. 31, 2010 Selling General and Administrative Expenses [Member] | Dec. 31, 2012 Cost of Sales [Member] | Dec. 31, 2011 Cost of Sales [Member] | Dec. 31, 2010 Cost of Sales [Member] | Dec. 31, 2011 Machinery and Equipment Furniture Fixtures and Other Equipment [Member] | Dec. 31, 2012 Land, buildings and constructions [Member] | Dec. 31, 2011 Land, buildings and constructions [Member] | Dec. 31, 2010 Land, buildings and constructions [Member] | Dec. 31, 2012 Machinery and equipment [Member] | Dec. 31, 2011 Machinery and equipment [Member] | Dec. 31, 2012 Machinery and equipment [Member] Property Subject to Evaluation and Operating Lease [Member] | Dec. 31, 2011 Machinery and equipment [Member] Property Subject to Evaluation and Operating Lease [Member] | Dec. 31, 2012 Leasehold improvements [Member] | Dec. 31, 2011 Leasehold improvements [Member] | Dec. 31, 2012 Furniture fixtures and other equipment [Member] | Dec. 31, 2011 Furniture fixtures and other equipment [Member]
Cost |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Beginning Balance | € 2,057,803,000 | € 1,637,987,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | € 742,141,000 | € 526,855,000 |  | € 764,023,000 | € 609,253,000 |  |  | € 206,660,000 | € 185,635,000 | € 344,979,000 | € 316,244,000
Additions | 386,295,000 | 619,103,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 106,234,000 | 213,513,000 |  | 248,429,000 | 355,358,000 |  |  | 8,883,000 | 20,918,000 | 22,749,000 | 29,314,000
Disposals | (348,563,000) | (214,121,000) |  |  |  |  |  |  |  |  |  |  |  |  |  |  | (347,000) |  |  | (317,022,000) | (212,286,000) |  |  | (300,000) | (216,000) | (30,894,000) | (1,619,000)
Effect of changes in exchange rates | (6,116,000) | 14,834,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | (995,000) | 1,773,000 |  | (4,671,000) | 11,698,000 |  |  | (391,000) | 323,000 | (59,000) | 1,040,000
Ending Balance | 2,089,419,000 | 2,057,803,000 | 1,637,987,000 |  |  |  |  |  |  |  |  |  |  |  |  |  | 847,033,000 | 742,141,000 | 526,855,000 | 690,759,000 | 764,023,000 |  |  | 214,852,000 | 206,660,000 | 336,775,000 | 344,979,000
Accumulated depreciation and impairment |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Beginning Balance | 1,004,193,000 | 892,656,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 155,877,000 | 127,509,000 |  | 401,800,000 | 358,026,000 |  |  | 145,775,000 | 129,741,000 | 300,741,000 | 277,380,000
Depreciation | 179,253,000 | 158,033,000 | 144,600,000 |  |  |  | 15,300,000 | 24,900,000 | 16,700,000 | 16,300,000 | 15,400,000 | 19,200,000 | 147,700,000 | 117,700,000 | 108,700,000 |  | 31,598,000 | 27,362,000 |  | 110,571,000 | 99,968,000 |  |  | 13,416,000 | 13,128,000 | 23,668,000 | 17,575,000
Impairment charges | 3,234,000 | 12,272,000 | 8,600,000 |  |  |  | 500,000 | 3,500,000 | 700,000 | 1,700,000 | 2,600,000 | 600,000 | 1,000,000 | 6,200,000 | 7,300,000 | 9,500,000 | 649,000 |  | 6,700,000 | 906,000 | 3,508,000 |  |  |  | 2,789,000 | 1,679,000 | 5,975,000
Disposals | (123,375,000) | (65,446,000) |  |  |  |  |  |  |  |  |  |  |  |  |  |  | (347,000) |  |  | (92,205,000) | (64,417,000) |  |  | (248,000) | (41,000) | (30,575,000) | (988,000)
Effect of changes in exchange rates | (3,809,000) | 6,678,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | (505,000) | 1,006,000 |  | (3,090,000) | 4,715,000 |  |  | (165,000) | 158,000 | (49,000) | 799,000
Ending Balance | 1,059,496,000 | 1,004,193,000 | 892,656,000 |  |  |  |  |  |  |  |  |  |  |  |  |  | 187,272,000 | 155,877,000 | 127,509,000 | 417,982,000 | 401,800,000 |  |  | 158,778,000 | 145,775,000 | 295,464,000 | 300,741,000
Carrying amount |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Carrying amount | 1,029,923,000 | 1,053,610,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 659,761,000 | 586,264,000 |  | 272,777,000 | 362,223,000 | 82,200,000 | 201,400,000 | 56,074,000 | 60,885,000 | 41,311,000 | 44,238,000
Property, plant and equipment (Textual) [Abstract] |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Assets under construction in carrying amount |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 5,500,000 | 165,000,000 |  | 21,800,000 | 16,600,000 |  |  | 1,000,000 | 1,300,000 | 9,300,000 | 8,000,000
Land | 60,700,000 | 51,100,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Additions related to non-cash transfers from inventory | 204,800,000 | 300,500,000 | 214,100,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Other non cash movements | 9,600,000 | 17,700,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Disposal related to non-cash transfers to inventory | 222,900,000 | 145,300,000 | 110,400,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Impairment charges | 3,234,000 | 12,272,000 | 8,600,000 |  |  |  | 500,000 | 3,500,000 | 700,000 | 1,700,000 | 2,600,000 | 600,000 | 1,000,000 | 6,200,000 | 7,300,000 | 9,500,000 | 649,000 |  | 6,700,000 | 906,000 | 3,508,000 |  |  |  | 2,789,000 | 1,679,000 | 5,975,000
Depreciation | 179,253,000 | 158,033,000 | 144,600,000 |  |  |  | 15,300,000 | 24,900,000 | 16,700,000 | 16,300,000 | 15,400,000 | 19,200,000 | 147,700,000 | 117,700,000 | 108,700,000 |  | 31,598,000 | 27,362,000 |  | 110,571,000 | 99,968,000 |  |  | 13,416,000 | 13,128,000 | 23,668,000 | 17,575,000
Estimated fair value of assets, value used to determine amount of impairment charge | 100,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 1,900,000 |  |  | 400,000 |  |  |  |  |  |  | 100,000 |
Carrying amount | 1,029,923,000 | 1,053,610,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 659,761,000 | 586,264,000 |  | 272,777,000 | 362,223,000 | 82,200,000 | 201,400,000 | 56,074,000 | 60,885,000 | 41,311,000 | 44,238,000
Lease period of property relating to the variable interest entity |  |  |  |  |  | 15 years |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Lessor's shareholders equity relating to the variable interest entity |  |  |  |  |  | 1,900,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Loans per shareholder relating to the variable interest entity |  |  |  |  |  | 11,600,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Loan from bank relating to the variable interest entity |  |  |  |  |  | 12,300,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Subordinated loan by ASML to parent of the lessor relating to the variable interest entity |  |  |  |  |  | 5,400,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Exercise price of purchase option relating to the variable interest entity at end of lease |  |  |  |  |  | 24,500,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Expiration date of purchase option relating to the variable interest entity |  |  |  |  |  | 2018 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Total assets of the lessor relating to the variable interest entity at inception of the lease |  |  |  |  |  | 54.5 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Use of buildings relating to the variable interest entity |  |  |  |  |  | 15 years |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
VIE carrying amount |  |  |  | 32.4 | 33.8 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Number of shareholders that have granted a loan relating to the variable interest entity |  |  |  |  |  | 3 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Total amount of granted loan relating to the variable interest entity |  |  |  |  |  | € 47,100,000 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |

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