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Board of Management and Supervisory Board Remuneration (Details 3) (EUR €) | 12 Months Ended
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Dec. 31, 2012 | Dec. 31, 2011
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | € 641,366 |  | € 567,125 |
Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 470,000 |  | 428,750 |
Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 35,000 |  | 35,000 |
Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 34,000 |  | 27,250 |
Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 28,000 |  | 27,250 |
Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 36,000 |  | 35,125 |
Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 38,366 | [1],[2] | 13,750 | [1],[2]
Arthur.P.M. van der Poel [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 94,750 |  | 88,250 |
Arthur.P.M. van der Poel [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 68,750 |  | 62,500 |
Arthur.P.M. van der Poel [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 10,000 |  | 10,000 |
Arthur.P.M. van der Poel [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Arthur.P.M. van der Poel [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 8,000 |  | 7,875 |
Arthur.P.M. van der Poel [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 8,000 |  | 7,875 |
Arthur.P.M. van der Poel [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  | [1],[2],[3] |  |
Jos W.B. Westerburgen [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 96,116 |  | 66,750 |
Jos W.B. Westerburgen [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 48,750 |  | 43,750 |
Jos W.B. Westerburgen [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Jos W.B. Westerburgen [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 12,000 |  | 11,500 |
Jos W.B. Westerburgen [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 12,000 |  | 11,500 |
Jos W.B. Westerburgen [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Jos W.B. Westerburgen [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 23,366 | [1],[2],[3] |  |
OB Bilous [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 104,750 |  | 99,500 |
OB Bilous [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 78,750 |  | 73,750 |
OB Bilous [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
OB Bilous [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
OB Bilous [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 8,000 |  | 7,875 |
OB Bilous [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 8,000 |  | 7,875 |
OB Bilous [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 10,000 | [1],[2] | 10,000 | [1],[2]
Frits W. Frohlich [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 68,750 |  | 62,500 |
Frits W. Frohlich [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 48,750 |  | 43,750 |
Frits W. Frohlich [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 15,000 |  | 15,000 |
Frits W. Frohlich [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Frits W. Frohlich [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Frits W. Frohlich [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Frits W. Frohlich [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 5,000 | [1],[2] | 3,750 | [1],[2]
Hendrika (Ieke) C.J. van den Burg [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 56,750 |  | 51,625 |
Hendrika (Ieke) C.J. van den Burg [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 48,750 |  | 43,750 |
Hendrika (Ieke) C.J. van den Burg [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Hendrika (Ieke) C.J. van den Burg [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 8,000 |  | 7,875 |
Hendrika (Ieke) C.J. van den Burg [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Hendrika (Ieke) C.J. van den Burg [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Hendrika (Ieke) C.J. van den Burg [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  | [1],[2],[3] |  |
William T. Siegle [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 90,750 |  | 85,250 |
William T. Siegle [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 78,750 |  | 73,750 |
William T. Siegle [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
William T. Siegle [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
William T. Siegle [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
William T. Siegle [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 12,000 |  | 11,500 |
William T. Siegle [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  | [3] |  |
Pauline F. M. van der Meer Mohr [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 56,750 |  | 51,625 |
Pauline F. M. van der Meer Mohr [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 48,750 |  | 43,750 |
Pauline F. M. van der Meer Mohr [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Pauline F. M. van der Meer Mohr [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 8,000 |  | 7,875 |
Pauline F. M. van der Meer Mohr [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Pauline F. M. van der Meer Mohr [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Pauline F. M. van der Meer Mohr [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  | [3] |  |
Wolfgang H. Ziebart [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 72,750 |  | 61,625 |
Wolfgang H. Ziebart [Member] | Supervisory Board [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 48,750 |  | 43,750 |
Wolfgang H. Ziebart [Member] | Audit Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 10,000 |  | 10,000 |
Wolfgang H. Ziebart [Member] | Remuneration Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 6,000 | [4] |  |
Wolfgang H. Ziebart [Member] | Selection and Nomination Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  |  |  |
Wolfgang H. Ziebart [Member] | Technology and Strategy Committee [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration | 8,000 |  | 7,875 |
Wolfgang H. Ziebart [Member] | Other [Member] |  |  |  |
Supervisory Board remuneration |  |  |  |
Supervisory Board remuneration |  | [3] |  |
[1] | In addition to the annual fixed fee, the Vice-Chairman of the Supervisory Board receives EUR 5,000 per year to fulfill this role. As the adjustment of the Supervisory Board's remuneration became effective as per April 1, 2011, the Vice-Chairman fee paid over the financial year 2011 amounted to EUR 3,750.
[2] | To compensate for certain obligations ASML has towards the U.S. government as a result of the acquisition of Silicon Valley Group in 2001, one U.S. member receives an additional EUR 10,000 to fulfill these obligations.
[3] | In 2012 Jos Westerburgen received a provisional payment related to the supervisory board remuneration for the period January to April 2013. As legislation regarding VAT registration for Supervisory Board members will change as from 2013 and Jos Westerburgen will resign in 2013 it was discussed and agreed with the Dutch tax authorities to pay the remuneration fee in advance.
[4] | During 2012 Wolfgang H. Ziebart was appointed as member of the Remuneration Committee and therefore received a partial fee.

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Period Type: | duration

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- Details
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