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Shareholders' equity (Details) (EUR €) | 0 Months Ended | 1 Months Ended | 12 Months Ended |  |  |  | 12 Months Ended |  | 12 Months Ended |
--- | --- | --- | --- | --- | --- | --- | --- | --- | --- | ---
Jan. 31, 2012 | Dec. 31, 2012 | Nov. 30, 2012 | Oct. 31, 2012 | Sep. 30, 2012 | Aug. 31, 2012 | Jul. 29, 2012 | Jun. 30, 2012 | May 31, 2012 | Apr. 30, 2012 | Mar. 31, 2012 | Feb. 28, 2012 | Dec. 31, 2012 | Dec. 31, 2011 | Dec. 31, 2010 | Sep. 07, 2012 | Jul. 06, 2012 | Apr. 25, 2012 | Dec. 31, 2012 Synthetic Share Buyback [Member] | Dec. 31, 2012 Foundation Administration Office MAKTSJAB [Member] | Jul. 09, 2012 Foundation Administration Office MAKTSJAB [Member] | Dec. 31, 2012 Foundation Administration Office Samsung [Member] | Dec. 31, 2012 Foundation Administration Office TSMC [Member] | Dec. 31, 2012 Ordinary Stock [Member] | Dec. 31, 2012 Common Class B [Member]
Stockholders' Equity [Line Items] |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Ordinary Shares, authorized (actual number of shares) |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 699,999,000 | 9,000
Ordinary Shares, issued (actual number of shares) |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 419,852,467 |
Ordinary shares issued |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 62,977,877 |  | 12,595,575 | 20,992,625 |  |
Ordinary Shares, nominal value |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | € 0.09 | € 0.01
Equity, Class of Treasury Stock [Line Items] |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Total number of shares purchased | 2,132,366 | 1,542,149 | 3,240,099 | 1,153,112 |  |  | 428,000 | 1,133,550 | 1,219,480 | 654,169 | 949,726 | 1,025,407 | 13,478,058 |  |  |  |  |  |  | 93,411,216 |  |  |  |  |  |
Shareholders' equity (Textual) [Abstract] |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Maximum Shares Authorized for issuance as percentage of Issued Share capital |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 5.00% |  |  |  |  |  |  |  |  |
Additional maximum Shares Authorized for issuance on business acquisitions and mergers percentage of Issued Share capital |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 5.00% |  |  |  |  |  |  |  |  |
Percentage of issued share capital right to restrict or exclude preemptive rights by board of management |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 10.00% |  |  |  |  |  |  |  |  |
Maximum Market Price for repurchase by the Board of Management of ordinary shares as a percentage based on market price per April 25, 2012 |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | 110.00% |  |  |  |  |  |  |
Treasury shares |  | 12,687,246 |  |  |  |  |  |  |  |  |  |  | 12,687,246 |  | 17,625,533 |  |  |  |  |  |  |  |  |  |  |
Cumulative Preference Shares, nominal value |  | € 0.09 |  |  |  |  |  |  |  |  |  |  | € 0.09 |  | € 0.09 |  |  |  |  |  |  |  |  |  |  |
Period in which the company to repurchase or cancel cumulative preference shares |  | 20 months |  |  |  |  |  |  |  |  |  |  | 20 months |  |  |  |  |  |  |  |  |  |  |  |  |
Period for granting authority to Board of management to issue shares and options |  | 18 months |  |  |  |  |  |  |  |  |  |  | 18 months |  |  |  |  |  |  |  |  |  |  |  |  |
Dividend declared per ordinary shares of EUR |  | € 0.53 |  |  |  |  |  |  |  |  |  |  | € 0.53 |  |  |  |  |  |  |  |  |  |  |  |  |
Cumulative Preference Shares, authorized (actual number of shares) |  | 700,000,000 |  |  |  |  |  |  |  |  |  |  | 700,000,000 |  | 700,000,000 |  |  |  |  |  |  |  |  |  |  |
Cumulative Preference Shares, issued (actual number of shares) |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |
Depositary receipts for ordinary shares |  | 96,566,077 |  |  |  |  |  |  |  |  |  |  | 96,566,077 |  |  |  |  |  |  |  |  |  |  |  |  |
Fractional shares |  | 900 |  |  |  |  |  |  |  |  |  |  | 900 |  |  |  |  |  |  |  |  |  |  |  |  |
Number of fractional shares |  | 100 |  |  |  |  |  |  |  |  |  |  | 100 |  |  |  |  |  |  |  |  |  |  |  |  |
Common stock value authorized |  | 126,000,000 |  |  |  |  |  |  |  |  |  |  | 126,000,000 |  |  |  |  |  |  |  |  |  |  |  |  |
Repurchase program agreement |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  | Up to a maximum of two times 10.0 percent of our issued share capital as of the date of authorization |  |  |  |  |  |  |
Selling price of shares included in the customer co-investment program |  | € 39.91 |  |  |  |  |  |  |  |  |  |  | € 39.91 |  |  |  |  | € 39.91 |  |  |  | € 39.91 |  |  |  |
Difference between capital repayment and net proceeds from issuance of shares |  |  |  |  |  |  |  |  |  |  |  |  | € 125,600,000 |  |  |  |  |  |  |  |  |  |  |  |  |
Shares issued under customer co-investment program |  |  |  |  |  |  |  |  |  |  |  |  | 3,853,900,000 |  |  |  |  |  |  |  |  |  |  |  |  |
Capital repayment |  |  |  |  |  |  |  |  |  |  |  |  | € (3,728,324,000) | [1],[2] |  |  |  |  |  |  |  |  |  |  |  |
Nominal value upon second amendment |  |  |  |  |  |  |  |  |  |  |  |  | € 9.24 |  |  |  |  |  |  |  |  |  |  |  |  |
Nominal value per ordinary share upon third amendment |  |  |  |  |  |  |  |  |  |  |  |  | € 0.06 |  |  |  |  |  |  |  |  |  |  |  |  |
Amount of decrease in nominal value per ordinary share upon third amendment |  |  |  |  |  |  |  |  |  |  |  |  | € 9.18 |  |  |  |  |  |  |  |  |  |  |  |  |
Conversion of stock shares |  |  |  |  |  |  |  |  |  |  |  |  | 100 ordinary shares for 77 ordinary shares |  |  |  |  |  |  |  |  |  |  |  |  |
Nominal value |  |  |  |  |  |  |  |  |  |  |  |  | € 0.09 |  |  |  |  |  |  |  |  |  |  |  |  |
Nominal value before second amendment |  |  |  |  |  |  |  |  |  |  |  |  | € 0.09 |  |  |  |  |  |  |  |  |  |  |  |  |
[1] | In 2012, as part of the capital repayment, EUR 3,728.3 million of shareholders' equity was returned to our shareholders (excluding Intel Corporation ("Intel"), Taiwan Semiconductor Manufacturing Company Ltd. ("TSMC") and Samsung Electronics Corporation ("Samsung") (collectively referred to as "participating customers" in the Customer Co-investment Program)) and the number of shares was reduced by 23 Percent. See Note 26.
[2] | The difference of EUR 125.6 million between the capital repayment EUR 3,728.3 million and the net proceeds from issuance of shares EUR 3,853.9 million relates to the capital repayment on ASML's treasury shares which was also part of the Synthetic Share Buyback in November 2012.

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