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Segment Disclosure (Details 1) (EUR €)
 12 Months Ended
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2010
Net sales and identifiable assets by geographic region      
Identifiable assets € 7,251,367,000 € 7,106,405,000 € 6,025,421,000
Total net sales 4,731,555,000 5,651,035,000 [1] 4,507,938,000
Segment Disclosure (Textual) [Abstract]      
Net system sales 3,801,632,000 4,883,913,000 [1] 3,894,742,000
Percentage of decrease in net system sales 22.20%    
Decrease of net system sales 1,082,300,000    
Sales to the largest customer 1,236,100,000 1,311,700,000 1,270,800,000
Net sales revenue from largest customer based on net sales as percentage 26.10% 23.20% 28.20%
Accounts receivables and finance receivables of three largest customers based on net sales 58.90% 35.50% 36.90%
Japan [Member]
      
Net sales and identifiable assets by geographic region      
Net sales from foreign countries 292,309,000 405,595,000 396,748,000
Identifiable assets 128,750,000 414,264,000 345,160,000
Korea [Member]
      
Net sales and identifiable assets by geographic region      
Net sales from foreign countries 1,276,304,000 1,318,777,000 1,396,028,000
Identifiable assets 85,022,000 56,765,000 31,859,000
Singapore [Member]
      
Net sales and identifiable assets by geographic region      
Net sales from foreign countries 98,554,000 436,308,000 215,357,000
Identifiable assets 15,696,000 14,179,000 17,189,000
Taiwan [Member]
      
Net sales and identifiable assets by geographic region      
Net sales from foreign countries 1,479,768,000 1,146,601,000 1,380,400,000
Identifiable assets 138,010,000 87,833,000 77,125,000
Rest of Asia [Member]
      
Net sales and identifiable assets by geographic region      
Net sales from foreign countries 197,262,000 450,796,000 239,914,000
Identifiable assets 999,392,000 817,496,000 1,749,879,000
Europe [Member]
      
Net sales and identifiable assets by geographic region      
Net sales from foreign countries 256,192,000 505,129,000 203,548,000
Identifiable assets 5,412,758,000 5,207,509,000 3,382,117,000
United States [Member]
      
Net sales and identifiable assets by geographic region      
Net sales from foreign countries 1,131,166,000 1,387,829,000 675,943,000
Identifiable assets € 471,739,000 € 508,359,000 € 422,092,000
[1] As of January 1, 2011, we adopted Accounting Standards Update ("ASU") 2009-13, "Revenue Arrangements with Multiple Deliverables" which amended ASC 605-25. The ASU was adopted prospectively and had an insignificant impact on timing and allocation of revenues. See Note 1 to the consolidated financial statements.