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Shareholders' equity (Details) (EUR €)
 0 Months Ended 1 Months Ended 12 Months Ended 12 Months Ended 12 Months Ended
Jan. 31, 2012
Dec. 31, 2012
Nov. 30, 2012
Oct. 31, 2012
Sep. 30, 2012
Aug. 31, 2012
Jul. 29, 2012
Jun. 30, 2012
May 31, 2012
Apr. 30, 2012
Mar. 31, 2012
Feb. 28, 2012
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2010
Sep. 07, 2012
Jul. 06, 2012
Apr. 25, 2012
Dec. 31, 2012
Synthetic Share Buyback [Member]
Dec. 31, 2012
Foundation Administration Office MAKTSJAB [Member]
Jul. 09, 2012
Foundation Administration Office MAKTSJAB [Member]
Dec. 31, 2012
Foundation Administration Office Samsung [Member]
Dec. 31, 2012
Foundation Administration Office TSMC [Member]
Dec. 31, 2012
Ordinary Stock [Member]
Dec. 31, 2012
Common Class B [Member]
Stockholders' Equity [Line Items]                                                  
Ordinary Shares, authorized (actual number of shares)                                               699,999,000 9,000
Ordinary Shares, issued (actual number of shares)                                               419,852,467   
Ordinary shares issued                                       62,977,877   12,595,575 20,992,625    
Ordinary Shares, nominal value                                               € 0.09 € 0.01
Equity, Class of Treasury Stock [Line Items]                                                  
Total number of shares purchased 2,132,366 1,542,149 3,240,099 1,153,112       428,000 1,133,550 1,219,480 654,169 949,726 1,025,407 13,478,058           93,411,216            
Shareholders' equity (Textual) [Abstract]                                                  
Maximum Shares Authorized for issuance as percentage of Issued Share capital                               5.00%                  
Additional maximum Shares Authorized for issuance on business acquisitions and mergers percentage of Issued Share capital                               5.00%                  
Percentage of issued share capital right to restrict or exclude preemptive rights by board of management                               10.00%                  
Maximum Market Price for repurchase by the Board of Management of ordinary shares as a percentage based on market price per April 25, 2012                                   110.00%              
Treasury shares   12,687,246                     12,687,246 17,625,533                      
Cumulative Preference Shares, nominal value   € 0.09                     € 0.09 € 0.09                      
Period in which the company to repurchase or cancel cumulative preference shares   20 months                     20 months                        
Period for granting authority to Board of management to issue shares and options   18 months                     18 months                        
Dividend declared per ordinary shares of EUR   € 0.53                     € 0.53                        
Cumulative Preference Shares, authorized (actual number of shares)   700,000,000                     700,000,000 700,000,000                      
Cumulative Preference Shares, issued (actual number of shares)                                                    
Depositary receipts for ordinary shares   96,566,077                     96,566,077                        
Fractional shares   900                     900                        
Number of fractional shares   100                     100                        
Common stock value authorized   126,000,000                     126,000,000                        
Repurchase program agreement                                   Up to a maximum of two times 10.0 percent of our issued share capital as of the date of authorization              
Selling price of shares included in the customer co-investment program   € 39.91                     € 39.91       € 39.91       € 39.91        
Difference between capital repayment and net proceeds from issuance of shares                         € 125,600,000                        
Shares issued under customer co-investment program                         3,853,900,000                        
Capital repayment                         € (3,728,324,000) [1],[2]                          
Nominal value upon second amendment                         € 9.24                        
Nominal value per ordinary share upon third amendment                         € 0.06                        
Amount of decrease in nominal value per ordinary share upon third amendment                         € 9.18                        
Conversion of stock shares                         100 ordinary shares for 77 ordinary shares                        
Nominal value                         € 0.09                        
Nominal value before second amendment                         € 0.09                        
[1] In 2012, as part of the capital repayment, EUR 3,728.3 million of shareholders' equity was returned to our shareholders (excluding Intel Corporation ("Intel"), Taiwan Semiconductor Manufacturing Company Ltd. ("TSMC") and Samsung Electronics Corporation ("Samsung") (collectively referred to as "participating customers" in the Customer Co-investment Program)) and the number of shares was reduced by 23 Percent. See Note 26.
[2] The difference of EUR 125.6 million between the capital repayment EUR 3,728.3 million and the net proceeds from issuance of shares EUR 3,853.9 million relates to the capital repayment on ASML's treasury shares which was also part of the Synthetic Share Buyback in November 2012.